| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/10/2007 | CN1294075C Micro-machined ultrasonic transducer (MUT) array |
| 01/10/2007 | CN1294074C Producing method and mechanical property testing method for metal film microbridge |
| 01/09/2007 | US7161279 Curved electro-active actuators |
| 01/09/2007 | US7161274 Micro-oscillation element having two rotational axes that are non-orthogonal to each other |
| 01/09/2007 | US7161273 Antistatic mechanism of an electrostatic actuator |
| 01/09/2007 | US7160815 Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
| 01/09/2007 | US7160752 Fabrication of advanced silicon-based MEMS devices |
| 01/09/2007 | US7160750 Method of producing a semiconductor sensor component |
| 01/09/2007 | US7160429 Depositing portion of a layer onto the substrate; forming a plurality of layers such that each successive layer is formed adjacent to and adhered to a previously deposited layer |
| 01/09/2007 | US7159965 Wide format printer with a plurality of printhead integrated circuits |
| 01/04/2007 | WO2007000905A1 Micropump and micropump system |
| 01/04/2007 | WO2006098403A9 Light reflecting element, light reflecting device, wave front curvature modulator, and optical scanning type display device |
| 01/04/2007 | WO2006091904A9 Methods and apparatus for spatial light modulation |
| 01/04/2007 | US20070004096 Method for containing a device and a corresponding device |
| 01/04/2007 | US20070001250 Micromachine and method of fabricating the same |
| 01/04/2007 | US20070001248 Mems device having compact actuator |
| 01/04/2007 | US20070001247 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 01/04/2007 | DE102005029802A1 Micromechanical sensor fabricating method, involves providing connecting bars between two diaphragm layers by structuring reactive layer and covering structures in reactive layer, and forming cavern under one diaphragm layer |
| 01/03/2007 | EP1738214A1 A micro-electro-mechanical two dimensional mirror with articulated suspension structures for hight fill factor arrays |
| 01/03/2007 | EP1738181A1 Out-of-plane compensation suspension for an accelerometer |
| 01/03/2007 | EP1562207B1 Bistable microelectromechanical system |
| 01/03/2007 | EP1417151B1 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 01/03/2007 | CN1292978C MEMS encapsulated structure and method of making same |
| 01/02/2007 | US7157781 Enhancement of membrane characteristics in semiconductor device with membrane |
| 01/02/2007 | US7155911 Thermal bend actuator with corrugate profile |
| 12/28/2006 | WO2006137455A1 Electro-mechanical memory, electric circuit using the same, and electro-mechanical memory drive method |
| 12/28/2006 | WO2003102540A3 Micro machined polymer beam structure method and resulting device for spring applications |
| 12/28/2006 | US20060289764 Infrared radiation detector |
| 12/27/2006 | EP1736804A1 Cantilever-based detector device and method of manufacturing such a device |
| 12/27/2006 | EP1736435A1 Electrostatic actuator with a conducting and suspended pivot member |
| 12/27/2006 | EP1736434A2 Verfahren zur Herstellung von schwebenden submikrometrischen Bauelemente und mechanische Charakterisierung der Bauelemente |
| 12/27/2006 | EP1611581A4 Methods and apparatus for selectively updating memory cell arrays |
| 12/27/2006 | EP1499500A4 Translation to rotation conversion in an inkjet printhead |
| 12/27/2006 | EP1494864A4 Wide format pagewidth inkjet printer |
| 12/27/2006 | EP1494863A4 A print assembly for a wide format pagewidth printer |
| 12/27/2006 | EP1494862A4 Processing of images for high volume pagewidth printing |
| 12/27/2006 | CN1885469A Ultra-low voltage capable zipper switch |
| 12/27/2006 | CN1884038A Semiconductor composite device and method of manufacturing the same |
| 12/27/2006 | CN1292535C Time base comprising integrated micromechanical tuning fork resonator |
| 12/27/2006 | CN1292447C MEMS device having a trilayered beam |
| 12/26/2006 | US7155125 Control apparatus and control method for optical switch using MEMS mirrors |
| 12/26/2006 | US7155081 Two-dimensional optical deflector |
| 12/26/2006 | US7154654 Transmissive spatial light modulator and method of manufacturing the same |
| 12/26/2006 | US7154372 Micromechanical flow sensor with tensile coating |
| 12/26/2006 | US7153718 Micromechanical component as well as a method for producing a micromechanical component |
| 12/26/2006 | US7153717 Encapsulation of MEMS devices using pillar-supported caps |
| 12/26/2006 | US7153716 Method of manufacturing a micro-electrical-mechanical system |
| 12/26/2006 | US7153440 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 12/26/2006 | US7152485 Acceleration detector |
| 12/26/2006 | US7152300 Method of manufacturing a micromechanical structure |
| 12/21/2006 | WO2006094038A3 Carbon nanotube resonator transistor and method of making the same |
| 12/21/2006 | US20060284877 Photonic mems and structures |
| 12/21/2006 | US20060283272 Micro-mechanical device comprising suspended element which is connected to a support by means of a pier and production method thereof |
| 12/21/2006 | CA2608164A1 Micro-electro-mechanical transducer having an insulation extension |
| 12/20/2006 | EP1733999A1 Microelectromechanical device with stress and stress gradient compensation |
| 12/20/2006 | EP1733468A1 Method for producing comb drive devices using etch buffers |
| 12/20/2006 | EP1494869A4 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| 12/20/2006 | CN1880211A Electromagnet excitated high order mode silicon micromechanical cantilever driving structure, its production method and uses |
| 12/20/2006 | CN1291249C Stress tuned blazed grating light valve |
| 12/19/2006 | US7151057 Flexible MEMS transducer manufacturing method |
| 12/19/2006 | US7150195 Sealed capacitive sensor for physical measurements |
| 12/19/2006 | US7150191 Pyramid socket suspension |
| 12/19/2006 | CA2370840C Thermal actuator shaped for more uniform temperature profile |
| 12/14/2006 | WO2006132941A2 Interferometric modulator with internal polarization and drive method |
| 12/14/2006 | DE102005038483B3 Micro pump e.g. fluid micro pump, for bidirectional delivery of fluid, has diaphragm areas whose geometric dimensions and elastic properties are designed so that displaced volume and changes of dimensions completely comply with requirements |
| 12/13/2006 | EP1730738A1 Flexible indented membrane |
| 12/13/2006 | EP1307750B1 Micromechanical component |
| 12/13/2006 | EP1221179A4 Strongly textured atomic ridges and dots |
| 12/13/2006 | CN1289927C Optical tunable filter and method of manufacturing the same |
| 12/12/2006 | US7149022 Optical scanner with curved mirror and method of manufacturing the same |
| 12/12/2006 | US7148549 Data storage module suspension system |
| 12/12/2006 | US7148077 Micromechanical structural element having a diaphragm and method for producing such a structural element |
| 12/12/2006 | CA2417352C Ceramic microelectromechanical structure |
| 12/07/2006 | WO2006130665A2 Microelectromechanical systems (mems) device including a superlattice and associated methods |
| 12/07/2006 | WO2006128472A1 Sensor system with actuated structure releasing a coloured indicator |
| 12/07/2006 | US20060274074 Display device having a movable structure for modulating light and method thereof |
| 12/07/2006 | US20060273692 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 12/07/2006 | US20060273449 Hermetically sealed package for optical, electronic, opto-electronic and other devices |
| 12/07/2006 | US20060273256 Thermal electromagnetic radiation detector with alveolate structure |
| 12/07/2006 | CA2609614A1 Microelectromechanical systems (mems) device including a superlattice and associated methods |
| 12/06/2006 | EP1116003A4 Apparatus and method for controlling fluid in a micromachined boiler |
| 12/06/2006 | CN1875447A Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| 12/06/2006 | CN1874957A MEMS devices with unreleased thin film components |
| 12/06/2006 | CN1874955A A method of manufacturing an electronic device and electronic device |
| 12/06/2006 | CN1872657A Microstructure and manufacturing method of the same |
| 12/06/2006 | CN1288493C Variable light attenuator for miniature electromechanical system (MEMS) |
| 12/06/2006 | CN1288068C Micro device |
| 12/05/2006 | US7146067 Microsystem switches |
| 12/05/2006 | US7145712 Micro mirror unit and method of making the same |
| 12/05/2006 | US7144750 Method of fabricating silicon-based MEMS devices |
| 12/05/2006 | US7144616 Microfabricated elastomeric valve and pump systems |
| 11/30/2006 | WO2006127813A2 Methods for signal to noise improvement in bulk mems accelerometer chips and other mems devices |
| 11/30/2006 | WO2006126443A1 Optical deflection element |
| 11/30/2006 | WO2006125691A1 Micromechanical component comprising a membrane and method for the production of said type of component |
| 11/30/2006 | US20060270088 Micromechanical component and method for production thereof |
| 11/30/2006 | US20060268384 Fibrous micro-composite material |
| 11/30/2006 | US20060267558 Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors |
| 11/30/2006 | US20060266981 Electrode coated with a first gel of carbon nanotubes, ionic liquid and polymer (hexafluoropropylene-vinylidene fluoride polymer; second ion-conductive gel layer of ionic liquid and polymer; top layer of first gel composition; flexed or deformed by creating a potential difference between layers. |
| 11/30/2006 | DE102005023699A1 Mikromechanisches Bauelement mit einer Membran und Verfahren zur Herstellung eines solchen Bauelements Micromechanical component with a membrane and method for producing such a component |
| 11/29/2006 | EP1726049A1 Wide frequency range electromechanical actuator |