| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 02/20/2007 | US7178378 Resonant sensor and sensing system |
| 02/15/2007 | DE112005000510T5 MEMS-basierte Aktorvorrichtungen, die Elektrets verwenden MEMS-based Aktorvorrichtungen using electrets |
| 02/15/2007 | DE102006018675A1 Dünnschichtstruktur und Herstellungsverfahren derselben Thin film structure and production method thereof |
| 02/15/2007 | DE102005060641A1 Halbleiterdrucksensor Semiconductor pressure sensor |
| 02/15/2007 | DE102005037741A1 Mikromechanisches Bauelement mit Anschlag Micromechanical component with stop |
| 02/14/2007 | EP1588382B1 Probe for an optical near field microscope with improved scattered light suppression and method for producing the same |
| 02/14/2007 | EP1212532B1 Dual diaphragm pump |
| 02/14/2007 | CN1914659A Mechanical shutter with polymerised liquid crystal layer |
| 02/14/2007 | CN1914658A Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such |
| 02/14/2007 | CN1914296A Flexible foil moveable by means of light |
| 02/14/2007 | CN1914295A Flexible foil moveable by non-mechanical means |
| 02/13/2007 | US7177505 MEMS-based actuator devices using electrets |
| 02/13/2007 | US7177068 Apparatus, method and system for providing enhanced mechanical protection for thin beams |
| 02/13/2007 | US7176604 Piezoelectric device and method of manufacturing the device |
| 02/13/2007 | US7176545 Apparatus and methods for maskless pattern generation |
| 02/13/2007 | US7176540 Method for producing micromechanical structures and a micromechanical structure |
| 02/13/2007 | US7176505 Electromechanical three-trace junction devices |
| 02/13/2007 | US7176111 Method for depositing polycrystalline SiGe suitable for micromachining and devices obtained thereof |
| 02/13/2007 | US7176047 Method for manufacturing MEMS structures |
| 02/08/2007 | WO2007015747A2 Electrically controlled tiltable microstructures |
| 02/08/2007 | WO2007015650A1 A microfabricated device |
| 02/08/2007 | WO2006052472A3 Microelectromechanical (mem) device including a spring release bridge and method of making the same |
| 02/08/2007 | US20070030721 Device selection circuitry constructed with nanotube technology |
| 02/08/2007 | DE10235441B4 Durch Mikrobearbeitung hergestelltes Hochtemperaturventil Produced by micro-machining high temperature valve |
| 02/07/2007 | EP1748952A1 Actuator based on geometrically anisotropic nanoparticles |
| 02/07/2007 | EP1494868A4 Pusher actuation in a printhead chip for an inkjet printhead |
| 02/07/2007 | CN1910110A Micro actuator and device having micro actuator |
| 02/07/2007 | CN1910109A Film actuator based mems device and method |
| 02/06/2007 | US7173751 Open hole-based diffractive light modulator |
| 02/06/2007 | US7173748 Micro-mirror and a method for fabricating the same |
| 02/06/2007 | US7173747 Tiltable-body apparatus, and method of fabricating the same |
| 02/06/2007 | US7173363 System and method for moving an object employing piezo actuators |
| 02/06/2007 | US7172919 Method for fabricating a tuning fork gyroscope |
| 02/06/2007 | US7172911 Deflectable microstructure and method of manufacturing the same through bonding of wafers |
| 02/06/2007 | US7172707 Sputtered spring films with low stress anisotropy |
| 02/06/2007 | US7172296 Projection display |
| 02/01/2007 | WO2007014022A1 Mems devices having support structures and methods of fabricating the same |
| 02/01/2007 | WO2007013992A1 Support structure for mems device and methods therefor |
| 02/01/2007 | WO2007013939A1 Support structure for mems device and methods therefor |
| 02/01/2007 | WO2007013287A1 Valveless micropump |
| 02/01/2007 | US20070024670 Pusher actuation in a printhead chip for an inkjet printhead |
| 02/01/2007 | US20070024159 Micro-resonator and communication apparatus |
| 02/01/2007 | US20070024158 Integrated resonators and time base incorporating said resonators |
| 02/01/2007 | DE19648475B4 Kontaktstruktur, Prüfkarten und Herstellungsverfahren Contact structure, test cards and manufacturing processes |
| 02/01/2007 | DE102005035058A1 Micromechanical device for e.g. air mass sensor, has reinforcement layer arranged in membrane to provide reinforcement in area of membrane edge, where membrane is made from dielectric layer, and layer is made from metal e.g. aluminum |
| 02/01/2007 | DE102005033800A1 Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung The micromechanical optical element having a reflective surface and the use thereof |
| 02/01/2007 | CA2616268A1 Mems devices having support structures and methods of fabricating the same |
| 01/31/2007 | EP1747168A1 Beam for mems switch |
| 01/31/2007 | CN1906735A Method for depositing silicon carbide and ceramic films |
| 01/31/2007 | CN1906119A 执行器 Actuator |
| 01/30/2007 | US7170216 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 01/30/2007 | US7170141 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
| 01/30/2007 | US7169314 Microfabricated elastomeric valve and pump systems |
| 01/30/2007 | US7168294 Embedded piezoelectric microcantilever sensors |
| 01/27/2007 | CA2616213A1 Bi-direction rapid action electrostatically actuated microvalve |
| 01/25/2007 | WO2007012028A2 Heat activated nanometer-scale pump |
| 01/25/2007 | WO2007010981A1 Optical scan device, image display device, optical scanner resonance frequency modification method, and reflection mirror position correction method |
| 01/25/2007 | US20070020948 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| 01/25/2007 | US20070018262 Micromachine and production method thereof |
| 01/25/2007 | US20070018260 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 01/25/2007 | CA2580599A1 Gold thiolate and photochemically functionalized microcantilevers using molecular recognition agents |
| 01/24/2007 | EP1746723A1 Tortional resonator and filter using this |
| 01/24/2007 | EP1746452A1 Electrostatic drive type mems mirror scanner |
| 01/24/2007 | EP1746071A1 Microactuator having beams with curved segments |
| 01/24/2007 | EP1745516A1 Electromechanical nanotube tunneling device comprising source, drain and gate |
| 01/24/2007 | EP1461816B1 Mems device having contact and standoff bumps and related methods |
| 01/24/2007 | EP1421429B1 Resonance scanner |
| 01/24/2007 | CN1902818A Electromechanical filter |
| 01/24/2007 | CN1902297A Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
| 01/24/2007 | CN1899950A Sensing contact probe |
| 01/24/2007 | CN1296715C Semiconductor device |
| 01/24/2007 | CN1296270C Etching method |
| 01/23/2007 | US7167613 Interlaced array of piano MEMs micromirrors |
| 01/23/2007 | US7167297 Micromirror array |
| 01/23/2007 | US7167290 Optical deflection device |
| 01/18/2007 | WO2007007545A1 Variable resonance frequency resonator and method for varying its resonance frequency |
| 01/18/2007 | WO2006130665A3 Microelectromechanical systems (mems) device including a superlattice and associated methods |
| 01/18/2007 | WO2006127813A3 Methods for signal to noise improvement in bulk mems accelerometer chips and other mems devices |
| 01/18/2007 | US20070012109 Force detector and acceleration detector and method of manufacturing the same |
| 01/18/2007 | DE102005032927A1 Mechanical moving component used in e.g. toys, robots, has moving sheet formed with hollow space for removal of liquid or gas medium to change spatial arrangement of moving sheet and article to which moving sheet is integrated |
| 01/18/2007 | DE102005032863A1 Mikroaktuator Microactuator |
| 01/18/2007 | CA2600081A1 Mems actuators and switches |
| 01/17/2007 | EP1743349A2 Low consumption and low actuation voltage microswitch |
| 01/17/2007 | EP1540355B1 Reducing offset in accelerometers |
| 01/17/2007 | CN1898862A Micro-resonator and communication apparatus |
| 01/17/2007 | CN1898150A Method for containing a device and a corresponding device |
| 01/17/2007 | CN1295541C Micro light modulator arrangement |
| 01/16/2007 | US7164522 Spatial light modulator, spatial light modulator array, and exposure apparatus |
| 01/16/2007 | CA2430451C Mechanical deformation amount sensor |
| 01/11/2007 | WO2007004710A1 Microactuator, optical apparatus, and optical switch |
| 01/11/2007 | WO2007003637A1 Resonator-detector for the acoustic identification of particles in a gaseous atmosphere and method for the design thereof |
| 01/11/2007 | US20070009203 Multi-stable micro electromechanical switches and methods of fabricating same |
| 01/11/2007 | DE19537285B4 Verfahren zur Herstellung eines Halbleiterelements mit einer flexiblen Anordnung, Halbleiterelement, Feldeffektsensor mit beweglichem Gate, Verfahren zur Verwendung eines Transistors mit beweglichem Gate als Sensor, sowie kapazitiver Sensor A process for producing a semiconductor element with a flexible arrangement, the semiconductor element, field effect sensor with a movable gate, method of using a transistor as a sensor with a movable gate, and a capacitive sensor |
| 01/11/2007 | DE102005031601A1 Capacitive, micromechanical microphone, has balancing volume whose section is laterally arranged to height of diaphragm volume, and damping channel designed in curved, bent and unrolled manner in flow direction of air column |
| 01/11/2007 | DE102004006156B4 Verfahren zum Herstellen eines mikrokapazitiven Ultraschall-Wandlers A method for producing a mikrokapazitiven ultrasonic transducer |
| 01/10/2007 | EP1742356A1 Electromechanical filter |
| 01/10/2007 | EP1741669A2 Hidden hinge mems device |
| 01/10/2007 | EP1552610B1 Microelectromechanical apparatus and methods for surface acoustic wave switching |
| 01/10/2007 | CN1893142A Minute structure, micromachine, organic transistor, electric appliance, and manufacturing method thereof |
| 01/10/2007 | CN1294441C Optical device |