| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/04/2007 | CN1942986A 机电开关 Electromechanical switches |
| 04/04/2007 | CN1309095C Micro electromechanical system device |
| 04/04/2007 | CN1309019C Method of fabricating micro-electromechanical switches on CMOS compatible substrates |
| 04/04/2007 | CN1308665C Pressure sensor and method for fabricating the same |
| 04/03/2007 | US7198982 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 04/03/2007 | US7198759 Includes a blade for manipulating deformable material and a movable support that is capable of moving the blade into contact with a microfluidic device including such that it deforms a deformable feature |
| 04/03/2007 | US7197815 Method of manufacturing the electromagnetic actuator |
| 04/03/2007 | US7197798 Method of fabricating a composite apparatus |
| 03/29/2007 | WO2007034777A1 Actuator |
| 03/29/2007 | WO2006130400A3 Method and apparatus for reducing dielectric charging in mems structures |
| 03/29/2007 | US20070070481 Resonant optical scanner using vibrating body with optimized resonant frequency characteristics and image forming apparatus having the same |
| 03/28/2007 | EP1767490A2 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 03/28/2007 | EP1766663A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/28/2007 | EP1697254A4 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 03/28/2007 | CN1307001C High-performance system for parallel and selective dispensing of micro-droplets |
| 03/27/2007 | US7196830 Optical deflector having neutral surface of bending in movable member in different plane from neutral surface of bending in elastic support member |
| 03/27/2007 | US7196740 Projection TV with improved micromirror array |
| 03/27/2007 | US7196599 Electrostatic device |
| 03/27/2007 | US7196451 Electromechanical resonator and method for fabricating such a resonator |
| 03/27/2007 | US7196385 Microstructure comprising a surface which is functionalized through the localized deposit of a thin layer and production method thereof |
| 03/27/2007 | US7195946 Process for fabricating a semiconductor device having a suspended micro-system and resultant device |
| 03/27/2007 | US7195872 Comprises substrate containing coatings such as silica and titania and dopants such as lithium oxide and sodium oxide for use on surface of bioreactor; analysis/sequencing biopolymers; microfluidics |
| 03/27/2007 | US7195670 High throughput screening of crystallization of materials |
| 03/27/2007 | US7195441 Manipulator having arm mechanism for hand |
| 03/22/2007 | US20070065963 Method of manufacturing a micro-mechanical element |
| 03/22/2007 | US20070063614 Micro-oscillation element and method for driving the same |
| 03/22/2007 | US20070062283 A method for fabricating a tuning fork gyroscope |
| 03/22/2007 | DE19817311B4 Herstellungsverfahren für mikromechanisches Bauelement A method for producing a micro mechanical component |
| 03/22/2007 | DE19509160B4 Halbleiterbeschleunigungssensoren Semiconductor acceleration sensors |
| 03/21/2007 | EP1764917A1 Suspended device and method of making |
| 03/21/2007 | EP1670898A4 Microfluidic rotary flow reactor matrix |
| 03/21/2007 | EP1352408B1 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 03/21/2007 | EP1049921B1 Micromachined gas-filled chambers and method of microfabrication |
| 03/21/2007 | CN1306300C Optical switch device |
| 03/21/2007 | CN1305751C Micromachine and method of fabricating the same |
| 03/20/2007 | US7192879 Method for manufacturing micro-structural unit |
| 03/20/2007 | US7192800 Method to change the profiles of released membranes |
| 03/20/2007 | US7191661 Capacitive pressure sensor |
| 03/15/2007 | US20070059857 Three-axis accelerometer |
| 03/15/2007 | US20070059494 Microfabricated elastomeric valve and pump systems |
| 03/15/2007 | US20070058238 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
| 03/15/2007 | US20070056362 Oscillating probe with a virtual probe tip |
| 03/15/2007 | DE102006040235A1 Verfahren zur Herstellung einer optischen Vorrichtung, sowie hiermit hergestellte optische Vorrichtung A process for producing an optical device and optical device produced therewith |
| 03/15/2007 | DE102006005517B3 Micro valve for use in micro fluid system, has membrane attached on body and including layer made of electro active polymer and is positioned in closed or opened position depending on voltage applied between membrane and counter electrode |
| 03/15/2007 | DE102005043690A1 Micro-mechanical microphone, has opening of ventilation duct and exhaust duct which is formed above rear side of substrate |
| 03/15/2007 | DE102005042664A1 Mikromechanisches Sensorelement und Verfahren zu dessen Herstellung The micromechanical sensor element and method for its production |
| 03/14/2007 | EP1762542A2 Micromechanical sensor element and its manufacturing method |
| 03/14/2007 | EP1601821A4 Electroplating pcb components |
| 03/14/2007 | EP1465832B1 Micro-electromechanical device |
| 03/14/2007 | CN1930777A Electric machine signal selecting element |
| 03/14/2007 | CN1929067A 开关 Switch |
| 03/14/2007 | CN1929066A 开关 Switch |
| 03/14/2007 | CN1304272C Sacrificial layer technique to make gaps in mems applications |
| 03/13/2007 | US7190523 Wavelength-tunable optical filter |
| 03/13/2007 | US7190507 Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus |
| 03/13/2007 | US7190502 Oscillating micromirror with bimorph actuation |
| 03/13/2007 | US7190245 Multi-stable micro electromechanical switches and methods of fabricating same |
| 03/13/2007 | US7190092 Micro-electromechanical switch performance enhancement |
| 03/13/2007 | US7190038 Micromechanical sensors and methods of manufacturing same |
| 03/13/2007 | US7189625 Micromachine and manufacturing method |
| 03/13/2007 | US7189358 Integrated analysis chambers communicated to the micropumps; and integrated analysis devices to test said fluid in said analysis chambers for an analyte. |
| 03/08/2007 | US20070053051 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 03/08/2007 | US20070053044 Electrostatic drive type MEMS mirror scanner |
| 03/08/2007 | US20070052322 Micromachined polymer beam structure method and resulting device for spring applications |
| 03/07/2007 | EP1760882A1 Electromechanical filter |
| 03/07/2007 | EP1760746A2 MEMS device having standoff bumps and folded component |
| 03/07/2007 | EP1760036A1 MEMS device having contact and standoff bumps and related methods |
| 03/07/2007 | EP1760035A2 Micromechanical structure |
| 03/07/2007 | EP1269506B1 Microactuator arrangement |
| 03/07/2007 | CN1926055A MEMS-based actuator devices using electrets |
| 03/07/2007 | CN1923670A Modified SU8 electric heating micro-performer with multi-arc structure for straight line propulsion |
| 03/07/2007 | CN1303448C Wavelength-tunable optical filter |
| 03/06/2007 | US7187489 Photonic MEMS and structures |
| 03/06/2007 | US7186019 Thermal movement sensor |
| 03/06/2007 | US7185994 Micro mirror and method for fabricating the same |
| 03/01/2007 | WO2007024204A2 Nanometer-scale electrostatic and electromagnetic motors and generators |
| 03/01/2007 | WO2006132941A3 Interferometric modulator with internal polarization and drive method |
| 03/01/2007 | US20070045122 Building up a three-dimensional structure from a number of adhered layers by depositing a first material onto a substrate; selectively etching to a desired depth; depositing a second material at least into the voids created; at least one of the deposition processes is an electrodeposition process |
| 03/01/2007 | DE19920066B4 Sensor aus einem mehrschichtigen Substrat mit einem aus einer Halbleiterschicht herausstrukturierten Federelement Sensor of a multilayer substrate having a structured out from a semiconductor layer of spring element |
| 03/01/2007 | DE10013261B4 Mikromechanisch hergestellter optischer Strahlteiler Micromechanically produced optical beam splitter |
| 02/28/2007 | EP1756844A1 Arrangement and method for controlling a micromechanical element |
| 02/28/2007 | EP1756591A1 Multi-axis capacitive transducer and manufacturing method for producing it |
| 02/28/2007 | EP1532658A4 Conductive etch stop for etching a sacrificial layer |
| 02/28/2007 | EP1410047B1 Micromechanical component |
| 02/28/2007 | EP1175600B1 Integrated optoelectronic thin-film sensor |
| 02/28/2007 | CN1302259C Sensor using electro active curved helix and double helix |
| 02/27/2007 | US7183637 Microelectronic mechanical system and methods |
| 02/22/2007 | WO2007022528A1 Mems devices having support structures with substantially vertical sidewalls and methods for fabricating the same |
| 02/22/2007 | WO2007022476A1 Mems device having support structures configured to minimize stress-related deformation and methods for fabricating same |
| 02/22/2007 | WO2006091904B1 Methods and apparatus for spatial light modulation |
| 02/22/2007 | US20070041878 Microfluidic devices, methods, and systems |
| 02/22/2007 | US20070041682 Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein |
| 02/22/2007 | US20070041080 Micro mirror unit and method of making the same |
| 02/22/2007 | DE102005001439B4 Elektromechanisches Steuerelement mit einem elastisch verformbaren Polymerkörper und Bauelement damit Electromechanical control with an elastically deformable polymer component body and thus |
| 02/21/2007 | EP1754683A1 Micromechanical element |
| 02/21/2007 | EP1753534A1 A valve for a microfluidic device |
| 02/20/2007 | US7180647 Optical scanner and method of fabricating the same |
| 02/20/2007 | US7180163 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 02/20/2007 | US7180104 Micromechanical structure, device including the structure, and methods of forming and using same |
| 02/20/2007 | US7178400 Physical quantity sensor having multiple through holes |