| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/17/2007 | US20070109656 MEMS device annealing |
| 05/17/2007 | US20070108548 Optical scanner and method of fabricating the same |
| 05/16/2007 | EP1785391A2 Multi-stable electromechanical switches and methods of fabricating same |
| 05/16/2007 | CN1965476A A mu-flap type nano/micro mechanical device and fabrication method thereof |
| 05/16/2007 | CN1316525C Variable capacitance capacitor device |
| 05/16/2007 | CN1316281C Micro-mirror element |
| 05/16/2007 | CN1316271C Optical switch with 3D waveguides |
| 05/16/2007 | CN1315623C Nanotweezers and nanomanipulator |
| 05/15/2007 | US7218188 Microelectromechanical apparatus and methods for surface acoustic wave switching |
| 05/15/2007 | US7217048 Pagewidth printer and computer keyboard combination |
| 05/15/2007 | US7216671 Microfabricated elastomeric valve and pump systems |
| 05/10/2007 | WO2007053308A2 Diffusion barrier layer for mems devices |
| 05/10/2007 | WO2007052039A1 Non-volatile memory device |
| 05/10/2007 | US20070105213 Fluid manipulation assembly |
| 05/10/2007 | DE10003282B4 Kontaktstruktur Contact structure |
| 05/09/2007 | EP1783095A1 Excitation in micromechanical devices |
| 05/09/2007 | EP1783094A1 Excitation in micromechanical devices |
| 05/09/2007 | EP1781566A1 Method for depositing a nonstick coating |
| 05/09/2007 | EP1362005B1 Method for forming electrically conductive contact structures |
| 05/09/2007 | EP1203748B1 Microdevice and its production method |
| 05/09/2007 | EP1041036B1 Method of manufacturing of a micromachine |
| 05/09/2007 | CN1961393A Arrangement and method for controlling a micromechanical element |
| 05/09/2007 | CN1960937A Actuator based on geometrically anisotropic nanoparticles |
| 05/09/2007 | CN1315169C Parallel, individually addressable probes for nanolithography |
| 05/09/2007 | CN1315152C Floating entry protective apparatus and method for preventing circuit from short-circuiting |
| 05/09/2007 | CN1314693C Fluorochemical treatment for silicon articles |
| 05/09/2007 | CN1314576C Miniature plate electrostatic driver and mfg. method thereof |
| 05/09/2007 | CN1314541C Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| 05/09/2007 | CN1314539C Wide format pagewidth inkjet printer |
| 05/09/2007 | CN1314538C A print assembly for a wide format pagewidth printer |
| 05/08/2007 | US7215630 Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit |
| 05/08/2007 | US7215527 MEMS digital-to-acoustic transducer with error cancellation |
| 05/08/2007 | US7215429 Vertical displacement device |
| 05/08/2007 | US7215061 Micromechanical electrostatic resonator |
| 05/08/2007 | US7214559 Method for fabricating vertical offset structure |
| 05/03/2007 | US20070097194 Printer with serially arranged printhead modules for wide format printing |
| 05/03/2007 | US20070095161 Micro-machined vibrating structure and associated micro-gyroscope |
| 05/02/2007 | EP1780522A1 Infrared detecting device with a circular membrane |
| 05/02/2007 | EP1780174A1 Nano data writing and reading apparatus using cantilever structure and fabrication method thereof |
| 05/02/2007 | EP1780173A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 05/02/2007 | EP1437325B1 Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 05/02/2007 | EP1425622A4 Enhance thermal stability through optical segmentation |
| 05/02/2007 | EP1203749B1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 05/02/2007 | CN1314086C Chip with static friction resistant character, micro-electromechanical assembly and method for manufacturing same |
| 05/02/2007 | CN1314063C Electrostatic RF micro-electro-mechanical system switches |
| 05/01/2007 | US7212081 Micromachine and method of producing the same |
| 05/01/2007 | US7211909 Monolithic integrated circuit arrangement |
| 05/01/2007 | US7211873 Sensor device having thin membrane and method of manufacturing the same |
| 05/01/2007 | US7210348 Semiconductor dynamic quantity sensor |
| 04/26/2007 | WO2004002878A3 Microfluidic devices and methods with electrochemically actuated sample processing |
| 04/26/2007 | US20070092180 Mems switch |
| 04/26/2007 | US20070091415 Micromirror unit and method of making the same |
| 04/26/2007 | US20070090085 Piezoelectric device and method of manufacturing the device |
| 04/26/2007 | DE4345552B4 Halbleiterbeschleunigungssensor Semiconductor acceleration sensor |
| 04/26/2007 | DE4345551B4 Elastomeric e.g. silicone encapsulation for optical connected to support - has two thin beam pairs for connection, with beams in each pair symmetric w.r.t. each other, and with two differing response characteristic strain gauges formed on each beam upper surface |
| 04/25/2007 | EP1777194A2 Method for forming microelectronic spring structures on a substrate |
| 04/25/2007 | EP1776312A1 Device comprising an encapsulated microsystem and production method thereof |
| 04/25/2007 | EP1476393B1 Microfluidic valve and system therefor |
| 04/25/2007 | CN1953323A Device including piezoelectric thin film and method for producing the same |
| 04/25/2007 | CN1951798A Mems sensor driving device, mems sensor driving method, and active sensor using mems |
| 04/24/2007 | US7209019 Switch |
| 04/24/2007 | US7208806 Micromachined electromechanical device |
| 04/19/2007 | WO2007012028A3 Heat activated nanometer-scale pump |
| 04/18/2007 | EP1775258A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 04/18/2007 | EP1775130A2 Piezoelectric actuator, liquid jetting head incorporating the same, piezoelectric element, and method of manufacturing the same |
| 04/18/2007 | EP1774651A1 High-deformation composite microresonator |
| 04/18/2007 | EP1774572A2 Method for etching a layer on a substrate |
| 04/18/2007 | EP1774259A1 Mems gyroscope with horizontally oriented drive electrodes |
| 04/18/2007 | CN1951007A Shell type actuator |
| 04/18/2007 | CN1950291A Reduction of etching charge damage in manufacture of microelectromechanical devices |
| 04/18/2007 | CN1950290A Beam for MEMS switch |
| 04/18/2007 | CN1948143A Method of symmetrically growing spiral carbon tube |
| 04/18/2007 | CN1311586C Micromachine vibration filter |
| 04/18/2007 | CN1310825C Thermal bend actuator with corrugate profile |
| 04/12/2007 | WO2007040761A1 Light modulator with concentric control electrode structure |
| 04/12/2007 | US20070082228 Thermoelastic device comprising an expansive element formed from a preselected material |
| 04/11/2007 | EP1771763A1 Fibrous-composite-material-based mems optical scanner |
| 04/11/2007 | EP1641709B1 Method for separating a mobile device layer and component obtained by said method |
| 04/11/2007 | CN1944235A Electromagnetic-magnetoelectric type micro mechanical resonant beam structure |
| 04/11/2007 | CN1310057C Heat-driven micro reflecting-mirror and electronic apparatus |
| 04/10/2007 | US7203394 Micro mirror arrays and microstructures with solderable connection sites |
| 04/10/2007 | US7202101 Multi-metal layer MEMS structure and process for making the same |
| 04/10/2007 | US7201937 Methods for forming composite coatings on MEMS devices |
| 04/10/2007 | US7201471 MEMS device with movement amplifying actuator |
| 04/05/2007 | WO2007038558A2 Shape memory device |
| 04/05/2007 | WO2007037150A1 Resonator and filter using same |
| 04/05/2007 | WO2007015747A3 Electrically controlled tiltable microstructures |
| 04/05/2007 | US20070075806 Electromechanical filter |
| 04/05/2007 | DE19540174B4 Halbleitersensor für eine physikalische Größe und Verfahren zu dessen Herstellung A semiconductor sensor for a physical quantity, and process for its preparation |
| 04/05/2007 | DE102005043974A1 Micromechanical scanning sensor, especially for raster force microscope, has sensor unit with base consisting of first material connected to sensor arm and functional part consisting of second material joined to base |
| 04/05/2007 | DE10035344B4 Verfahren zur Herstellung einer Schattenmaske A method of manufacturing a shadow mask |
| 04/04/2007 | EP1771036A2 Capacitor microphone and diaphragm therefor |
| 04/04/2007 | EP1770859A1 High-frequency element, power supply element, and communication device |
| 04/04/2007 | EP1770057A2 Method for manufacturing a micro-electro-mechanical device having a diaphragm |
| 04/04/2007 | EP1770056A2 Method for manufacturing a micro-electro-mechanical structure |
| 04/04/2007 | EP1770055A1 Process for manufacturing thick suspended structures of semiconductor material |
| 04/04/2007 | EP1769544A1 Production of a thin piezoelectric and pyroelectric layer on a substrate |
| 04/04/2007 | EP1560787B1 Micro electro-mechanical system device with piezoelectric thin film actuator |
| 04/04/2007 | CN1943110A Torsion resonator and filter using this |
| 04/04/2007 | CN1942987A 开关阵列 Switch Array |