| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/03/2007 | US7239487 Micro-electro-mechanical actuator for positioning a device such as a read/write head in a disk drive |
| 07/03/2007 | US7239219 Miniature RF and microwave components and methods for fabricating such components |
| 07/03/2007 | US7238429 Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system |
| 06/28/2007 | US20070146376 Systems and methods of controlling micro-electromechanical devices |
| 06/28/2007 | US20070145501 Semiconductor device having a suspended micro-system |
| 06/28/2007 | US20070144841 Miniaturized Contact Spring |
| 06/28/2007 | DE102006002114A1 Mikromechanisches Sensorelement The micromechanical sensor element |
| 06/28/2007 | DE102005061142A1 Mikromechanisches Bauelement zur Druckerfassung Micro-mechanical device for sensing pressure |
| 06/28/2007 | DE102005060855A1 Mikromechanischer kapazitiver Druckwandler und Herstellungsverfahren The micromechanical capacitive pressure transducer and manufacturing method |
| 06/27/2007 | EP1800158A1 Mirror and mirror layer for optical modulator and method |
| 06/27/2007 | EP1799613A1 Amorphous flexures in micro-electro mechanical systems |
| 06/27/2007 | EP1799612A2 Microsystem and method for positioning a second element with respect to a first element in a microsystem |
| 06/27/2007 | CN1986386A Multiple stage mems release for isolation of similar materials |
| 06/27/2007 | CN1986384A Device with beam structure, and semiconductor device |
| 06/27/2007 | CN1323313C Optical scanning apparatus and image forming apparatus |
| 06/27/2007 | CN1322978C Micro electro-mechanical device with flange actuator |
| 06/26/2007 | US7236284 Photonic MEMS and structures |
| 06/26/2007 | US7236279 Digital optical switch apparatus and process for manufacturing same |
| 06/26/2007 | US7235914 Piezoelectric micro-transducers, methods of use and manufacturing methods for same |
| 06/26/2007 | US7235184 Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples |
| 06/21/2007 | US20070141746 Methods of nanotube films and articles |
| 06/21/2007 | US20070138581 Micromechanical sensor |
| 06/21/2007 | US20070137989 Optical components and production therof |
| 06/21/2007 | DE102006001386A1 Verfahren zum Herstellen einer Membran auf einem Halbleitersubstrat und mikromechanisches Bauelement mit einer solchen Membran A method of manufacturing a diaphragm on a semiconductor substrate and micromechanical component with such a membrane |
| 06/20/2007 | EP1798195A2 Comb-type electrode structure capable of large linear-displacement motion |
| 06/20/2007 | EP1254249B1 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 06/20/2007 | CN1982201A Micro-optic reflecting component |
| 06/20/2007 | CN1322352C Micro-oscillation element |
| 06/19/2007 | US7233218 Air-gap type FBAR, and duplexer using the FBAR |
| 06/19/2007 | US7233000 Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology |
| 06/14/2007 | WO2007066777A1 Fluid actuator, heat generating device using the same, and analysis device |
| 06/14/2007 | WO2007024911A3 Pressure sensors and methods of making the same |
| 06/14/2007 | WO2007007206A3 Mems actuators and switches |
| 06/14/2007 | DE102005058870A1 Differential pressure sensor for use in air conditioning system, has electrical resistor that is connected with resistance measuring device over feed lines, where resistor and feed lines are coated with plastic layer in area of diaphragm |
| 06/13/2007 | EP1794580A2 Self-assembled monolayers on the surface of gold coated microcantilevers for application to chemical sensing and method of preparation |
| 06/13/2007 | EP1502282A4 Micro electro-mechanical system method |
| 06/12/2007 | US7230743 Optical deflector array |
| 06/12/2007 | US7230307 Vertical offset structure and method for fabricating the same |
| 06/12/2007 | US7229694 Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component |
| 06/12/2007 | US7229542 Flowing molding materials to surfaces, then solidifying and separating to form three-dimensional structures |
| 06/07/2007 | WO2007063859A1 Display device and transparent magnetic film |
| 06/07/2007 | US20070128831 Process for fabricating a micro-electro-mechanical system with movable components |
| 06/07/2007 | US20070127186 Micro-Electromechanical Switch Performance Enhancement |
| 06/06/2007 | EP1793260A1 Fast-response micro-mechanical tilt mirror |
| 06/06/2007 | EP1410429A4 Electromechanical memory array using nanotube ribbons and method for making same |
| 06/06/2007 | CN1977454A Electromechanical filter |
| 06/06/2007 | CN1977453A Filter device and transmitter-receiver |
| 06/06/2007 | CN1977452A Tortional resonator and filter using this |
| 06/06/2007 | CN1975929A A memory array and a display apparatus using mechanical switch, method for controlling the same |
| 06/06/2007 | CN1320576C Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 06/06/2007 | CN1319847C Electrothermal-driven flexile micro-gripper |
| 06/06/2007 | CN1319743C Translation to rotation conversion in an inkjet print head |
| 06/06/2007 | CN1319617C Active mode mixer for microflow and mixing method |
| 06/05/2007 | US7227677 Micro light modulator arrangement |
| 06/05/2007 | US7225524 Method for fabricating a gyroscope |
| 06/05/2007 | CA2543556C Flexural plate wave sensor array |
| 05/31/2007 | WO2007061406A1 Mems switch with set and latch electrodes |
| 05/31/2007 | WO2007060838A1 Micro-electromechanical device |
| 05/31/2007 | WO2007060793A1 Microelectromechanical element, and electromechanical switch using the same |
| 05/31/2007 | WO2007060523A1 Microfluidic structures |
| 05/31/2007 | WO2007060415A1 A micro-electromechanical system memory device and method of making the same |
| 05/31/2007 | WO2007059718A1 Micromechanical element which can be deflected |
| 05/31/2007 | US20070121229 Apparatus, method and system for providing enhanced mechanical protection for thin beams |
| 05/31/2007 | US20070121188 Micro mirror and method for fabricating the same |
| 05/31/2007 | US20070120205 Physical quantity sensor having multiple through holes |
| 05/31/2007 | DE102005056759A1 Micromechanical structure for use as e.g. microphone, has counter units forming respective sides of structure, where counter units have respective electrodes, and closed diaphragm is arranged between counter units |
| 05/31/2007 | DE102005046156B3 Vorrichtung mit Funktionselement und Verfahren zum Herstellen der Vorrichtung Device having a functional element and method for manufacturing the device |
| 05/31/2007 | CA2637885A1 Microfluidic structures |
| 05/30/2007 | EP1790963A2 Mechanical deformation amount sensor |
| 05/30/2007 | EP1540405A4 A method and device for modulating a light beam and having an improved gamma response |
| 05/30/2007 | EP1410552A4 Hybrid circuit having nanotube electromechanical memory |
| 05/30/2007 | CN1319156C Negative thermal dilation system device and conductive elastomer in mlcroelectronics seal connection |
| 05/30/2007 | CN1318878C Micro rocking device having torsion bar |
| 05/30/2007 | CN1318821C Micromachined silicon gyro using tuned accelerometer |
| 05/30/2007 | CN1318215C Liquid injector with micro-mechanoelectric device |
| 05/29/2007 | US7224507 Optical deflector |
| 05/29/2007 | US7224245 Duplexer fabricated with monolithic FBAR and isolation part and a method thereof |
| 05/29/2007 | US7223696 Methods for maskless lithography |
| 05/29/2007 | US7223624 Micromechanical device with thinned cantilever structure and related methods |
| 05/29/2007 | US7223329 Exterior sketon; coil spring; shape memory alloy; elastic deformation |
| 05/24/2007 | WO2007058280A1 Electronic part sealing board, electronic part sealing board in multiple part form, electronic device using electronic part sealing board, and electronic device fabricating method |
| 05/24/2007 | US20070117234 Sputtered Spring Films With Low Stress Anisotropy |
| 05/24/2007 | DE102006052693A1 Verfahren zur Fertigung eines Halbleitersensors A method for manufacturing a semiconductor sensor |
| 05/24/2007 | DE102005055478A1 Micromechanical structure e.g. microphone, has counter unit provided between diaphragm and substrate, where cavity is formed between diaphragm and unit, and another cavity is formed between unit and substrate |
| 05/24/2007 | DE102005055473A1 Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung Micromechanical device and method of manufacturing a micromechanical device |
| 05/24/2007 | DE102005053876A1 Drucksensor-Bauteil Pressure sensor component |
| 05/23/2007 | EP1788361A2 Integrated opto-electronic thin-film sensor for linear displacement sensor |
| 05/23/2007 | EP1459334A4 Electromechanical three-trace junction devices |
| 05/23/2007 | CN1969217A Mirror device, mirror array, optical switch, and manufacturing method thereof |
| 05/23/2007 | CN1968754A A valve for a microfluidic device |
| 05/23/2007 | CN1966393A Multi-scale cantilever structures having fine holes of nano size and the preparation method thereof |
| 05/23/2007 | CN1966392A Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof |
| 05/23/2007 | CN1317727C Diaphragm activated micro electromechanical switch |
| 05/22/2007 | US7221498 Methods and apparatus for selectively updating memory cell arrays |
| 05/22/2007 | US7221493 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
| 05/22/2007 | US7221247 Magnetically actuated microelectromechanical systems actuator |
| 05/22/2007 | US7220614 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 05/22/2007 | US7220009 Optical deflector |
| 05/18/2007 | WO2007024204A3 Nanometer-scale electrostatic and electromagnetic motors and generators |
| 05/17/2007 | US20070111360 Method for producing micromechanical structures and a micromechanical structure |