| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 08/14/2007 | US7255768 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same |
| 08/09/2007 | WO2007088746A1 Actuator element |
| 08/09/2007 | US20070182419 Oscillating device, electric potential measuring device, light deflecting device, and image forming apparatus |
| 08/09/2007 | US20070180912 Inertial sensor |
| 08/09/2007 | DE112005002345T5 Hochfrequenz-Schaltungsvorrichtung High-frequency circuit device |
| 08/09/2007 | DE112005002150T5 Bimorphes Element, bimorpher Schalter, Spiegelelement und Verfahren zu deren Herstellung Bimorph element, bimorph switches, mirror element and process for their preparation |
| 08/09/2007 | DE102006004922A1 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung Miniaturized spring element and process for its preparation |
| 08/08/2007 | EP1816100A1 Nano tweezers and scanning probe microscope having the same |
| 08/08/2007 | EP1461286B1 Differential stress reduction in thin films |
| 08/08/2007 | EP1417151B9 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 08/08/2007 | EP1207378B1 Semiconductor pressure sensor and pressure sensing device |
| 08/08/2007 | EP1200262B1 Seal in micro electro-mechanical ink ejection nozzle |
| 08/08/2007 | EP1178888B1 Actuator control in a micro electro-mechanical liquid ejection device |
| 08/08/2007 | CN1330557C Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same |
| 08/08/2007 | CN101015120A Thermal-mechanical signal processing |
| 08/08/2007 | CN101012051A Method of driving microchannel fluid utilizing magnetic droplet |
| 08/07/2007 | US7252861 Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids |
| 08/07/2007 | US7252395 MEMS device deflection stop |
| 08/07/2007 | US7252008 Micromechanical piezoresistive pressure sensor device |
| 08/07/2007 | CA2411012C Monolithic reconfigurable optical multiplexer systems and methods |
| 08/02/2007 | WO2007086302A1 Process for producing semiconductor nanoparticle |
| 08/02/2007 | US20070178703 Method for release of surface micromachined structures in an epitaxial reactor |
| 08/02/2007 | US20070177287 Method of manufacturing a mirror and a mirror device |
| 08/02/2007 | US20070176719 Magnetically Actuated Microelectromechanical Systems Actuator |
| 08/02/2007 | US20070176211 Sensor elements with cantilevered bar structures made of semiconductors based on group III-nitride |
| 08/02/2007 | US20070175865 Process for the fabrication of an inertial sensor with failure threshold |
| 08/02/2007 | DE102006004287A1 Micro mechanical structure used in microphones has rings of flexible electrode segments |
| 08/02/2007 | DE102006003129A1 Verfahren zur mechanischen Vereinzelung von Bauelementen mit Membranen sowie die entsprechend hergestellten Bauelemente Methods for mechanical separation of components with membranes as well as the components produced accordingly |
| 08/02/2007 | CA2637930A1 Self-exciting, self-sensing piezoelectric cantilever sensor |
| 08/01/2007 | EP1714265B1 Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such |
| 08/01/2007 | EP1336206B1 Strain/electrical potential transducer |
| 08/01/2007 | EP1173893A4 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 08/01/2007 | CN1329284C Fabrication of a reflective spatial light modulator |
| 07/31/2007 | US7250315 Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 07/31/2007 | US7250128 Method of forming a via in a microfabricated elastomer structure |
| 07/31/2007 | US7249856 Electrostatic bimorph actuator |
| 07/26/2007 | WO2007084070A1 Miniaturized high conductivity thermal/electrical switch |
| 07/26/2007 | WO2007082662A1 Mems sensor comprising a deformation-free back electrode |
| 07/26/2007 | WO2007053308A3 Diffusion barrier layer for mems devices |
| 07/26/2007 | US20070171255 Nozzle arrangement with thermally operated ink ejection piston |
| 07/26/2007 | US20070171001 Filter device and transmitter-receiver |
| 07/26/2007 | US20070169686 Systems and methods for mixing reactants |
| 07/26/2007 | DE19906067B4 Halbleitersensor für physikalische Größen und Verfahren zu dessen Herstellung A semiconductor sensor of physical quantities and methods for its preparation |
| 07/26/2007 | DE102006059091A1 Mikrooptisches reflektierendes Bauelement Microoptical reflective component |
| 07/26/2007 | DE10036437B4 Mikromechanischer Beschleunigungssensor, Verfahren zu dessen Herstellung und Verfahren zu dessen Betrieb A micromechanical acceleration sensor, processes for its preparation and process for its operation |
| 07/26/2007 | CA2637414A1 Miniaturized high conductivity thermal/electrical switch |
| 07/25/2007 | EP1810947A2 Semiconductor device and its process of fabrication |
| 07/25/2007 | EP1809997A1 A capacitive sensor and a method for manufacturing the capacitive sensor |
| 07/25/2007 | EP1809568A2 Mems switches with deforming membranes |
| 07/25/2007 | CN1328058C Pagewidth printing assembly |
| 07/25/2007 | CN1328051C Pusher actuation in a printhead chip for an inkjet printhead |
| 07/25/2007 | CN1328049C Processing of images for high volume pagewidth printing |
| 07/25/2007 | CN101004478A Micro-optic device manufacturing method |
| 07/24/2007 | US7247248 Method of forming atomic force microscope tips |
| 07/24/2007 | US7247247 Selective etching method |
| 07/24/2007 | US7246883 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| 07/19/2007 | WO2007080850A1 Passive one-way valve and micro fluid device |
| 07/19/2007 | WO2007080789A1 Mirror element and method for manufacturing mirror element |
| 07/19/2007 | WO2007080259A1 Micro-electromechanical system comprising a deformable portion and a stress sensor |
| 07/19/2007 | US20070164839 Electric machine signal selecting element |
| 07/19/2007 | DE102006002106A1 Micromechanical sensor, has diaphragm and counter unit, where hollow space is arranged between diaphragm and unit, where unit has perforation openings that comprise inhomogeneous surface distribution |
| 07/18/2007 | EP1535297A4 Diaphragm activated micro-electromechanical switch |
| 07/18/2007 | EP1517794A4 Ink jet printhead chip with predetermined micro-electromechanical systems height |
| 07/18/2007 | CN101002314A Micromachine device |
| 07/18/2007 | CN101002131A MEMS scanner adapted to a laser printer |
| 07/17/2007 | US7245057 Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition |
| 07/17/2007 | US7244935 Thermal electromagnetic radiation detector with alveolate structure |
| 07/17/2007 | US7244402 Microfluidic protein crystallography |
| 07/17/2007 | US7244367 Metal alloy elements in micromachined devices |
| 07/17/2007 | US7243551 Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture |
| 07/17/2007 | CA2173637C Active yoke hidden hinge digital micromirror device |
| 07/12/2007 | WO2007078495A2 Method of creating mems device cavities by a non-etching process |
| 07/12/2007 | WO2007038558A3 Shape memory device |
| 07/12/2007 | US20070159025 Micro actuator and device having micro actuator |
| 07/12/2007 | US20070158775 Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
| 07/11/2007 | EP1805869A2 Nanometer-scale electrostatic and electromagnetic motors and generators |
| 07/11/2007 | EP1805100A1 Microsystem comprising a deformable bridge |
| 07/11/2007 | EP1805099A1 Interferometric optical modulator using filler material and method |
| 07/11/2007 | EP1509939B1 Microelectromechanical rf switch |
| 07/11/2007 | EP1115649B1 Micromechanical component with sealed membrane openings |
| 07/11/2007 | CN1994860A Silicon micromachine cantilever beam sensor driving structure, production method and uses under torsion mode |
| 07/11/2007 | CN1994859A Manufacture method of ripple structure film and mould possessing the structure |
| 07/11/2007 | CN1326200C Micro electro-mechanical system method |
| 07/11/2007 | CN1325264C Ink jet printhead chip and method of producing the same, ink jet printhead |
| 07/10/2007 | US7242511 Frequency tunable resonant scanner |
| 07/10/2007 | US7242273 RF-MEMS switch and its fabrication method |
| 07/10/2007 | US7242012 Lithography device for semiconductor circuit pattern generator |
| 07/10/2007 | US7241638 Micromechanical device and method of manufacture thereof |
| 07/10/2007 | US7241420 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems |
| 07/10/2007 | US7240992 Ink jet printhead incorporating a plurality of nozzle arrangement having backflow prevention mechanisms |
| 07/10/2007 | CA2414735C Seal in micro electro-mechanical ink ejection nozzle |
| 07/05/2007 | WO2007074821A1 Spring, mirror element, mirror array and optical switch |
| 07/05/2007 | DE19830476B4 Halbleitervorrichtung insbesondere Sensor Semiconductor device, in particular sensor |
| 07/05/2007 | DE102006061763A1 Micro mirror for use in micro-mirror device, has reflection mirror and torsion bars protruding from reflection mirror where carrier frame holds reflection mirror such that reflection mirror rotates over torsion bars around axis of rotation |
| 07/05/2007 | DE102006061762A1 Micro mirrors for e.g. used as scanner for bar code reader, has retaining unit in which mirror is retained in such way that it tilts about mirror pivotal axis and mirror has two fixed electrode groups with multiple electrodes |
| 07/04/2007 | EP1803160A2 Post-release capacitance enhancement in micromachined devices and a method of performing the same |
| 07/04/2007 | EP1803022A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 07/04/2007 | EP1494866A4 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
| 07/04/2007 | CN1993887A High-frequency element, power supply element, and communication device |
| 07/04/2007 | CN1324238C Micromachined fluidic device and method for making same |