| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/04/2007 | US20070227592 Valve for a Microfluidic Device |
| 10/04/2007 | DE10140322B4 Mikrostrukturierter dreidimensionaler Sensor oder Aktor, sowie Verfahren zu seiner Herstellung Microstructured three-dimensional sensor or actuator, as well as methods for its preparation |
| 10/03/2007 | EP1840080A2 Polymer linear actuator for MEMS and and for a micro manipulator for measurement device of cranial nerve signal |
| 10/03/2007 | CN101048838A Electric mechanical switch |
| 10/03/2007 | CN100340893C Open hole-based diffractive light modulator |
| 10/02/2007 | US7277214 Tiltable-body apparatus, and method of fabricating the same |
| 09/27/2007 | US20070223267 Arrangement and Method for Controlling a Micromechanical Element |
| 09/27/2007 | US20070223118 Mirror with local deformation by thickness variation of an electro-active material controlled by electrical effect |
| 09/27/2007 | US20070222541 Electromechanical Filter |
| 09/27/2007 | US20070222007 Method of Manufacturing an Electronic Device and Electronic Device |
| 09/27/2007 | DE102006012856A1 Micromechanical structure e.g. micromechanical capacitive transducer, for e.g. receiving acoustic signal, has electrodes and contact point for adjusting rigidity of attachment and exerting electrostatic force directly/indirectly on arm |
| 09/26/2007 | EP1836474A1 Detecting, measuring and controlling particles and electromagnetic radiation |
| 09/26/2007 | EP1345841B1 Valve integrally associated with microfluidic liquid transport assembly |
| 09/25/2007 | US7274078 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 09/25/2007 | US7273764 Sensor with at least one micromechanical structure, and method for producing it |
| 09/25/2007 | CA2288885C Actuators and apparatus |
| 09/20/2007 | WO2007076732A3 Electromechanical transducer |
| 09/20/2007 | US20070215447 Low Consumption and Low Actuation Voltage Microswitch |
| 09/20/2007 | US20070214890 MEMS resonator using frequency tuning |
| 09/20/2007 | DE102006011545A1 Micromechanical combination unit for use in mobile telephone position-dependent display control, has inertia type and diaphragm type sensor devices formed on front side of substrate, where diaphragm type sensor device has diaphragm |
| 09/19/2007 | EP1835324A1 Mirror device, mirror array, optical switch, mirror device manufacturing method and mirror substrate manufacturing method |
| 09/19/2007 | CN101037184A Acceleration sensor with protrusions facing stoppers |
| 09/18/2007 | US7271943 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 09/18/2007 | US7270868 Micromechanical component |
| 09/18/2007 | US7270492 Computer system having integrated printer and keyboard |
| 09/18/2007 | US7270475 Thermoelastic device comprising an expansive element formed from a preselected material |
| 09/18/2007 | CA2357049C Polymer microactuator array with macroscopic force and displacement |
| 09/13/2007 | WO2007101916A1 Device and method for measuring electrical power |
| 09/13/2007 | WO2007043006A3 Mems tunable device |
| 09/13/2007 | US20070211612 Flexible Membrane Comprising Notches |
| 09/13/2007 | US20070210431 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 09/13/2007 | US20070209572 High throughput screening of crystallization materials |
| 09/12/2007 | EP1832550A1 Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems |
| 09/12/2007 | EP1831702A1 Pendulous in-plane mems accelerometer device |
| 09/12/2007 | EP1831643A1 Oscillating micro-mechanical sensor of angular velocity |
| 09/12/2007 | EP1454333B1 Mems device having a trilayered beam and related methods |
| 09/12/2007 | CN101035739A Microsystem and method for positioning a second element with respect to a first element in a microsystem |
| 09/12/2007 | CN101035738A Amorphous flexures in micro-electro mechanical systems |
| 09/11/2007 | US7269052 Device selection circuitry constructed with nanotube technology |
| 09/11/2007 | US7268653 Microelectromechanical system able to switch between two stable positions |
| 09/11/2007 | US7267755 Multilater; dielectric and electroconductive layers |
| 09/11/2007 | US7267424 Wide format pagewidth printer |
| 09/11/2007 | US7266998 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 09/07/2007 | WO2007100478A2 Mems device having a layer movable at asymmetric rates |
| 09/07/2007 | WO2007098863A1 Manufacturing process for integrated piezoelectric components |
| 09/06/2007 | US20070204692 Force detector and acceleration detector and method of manufacturing the same |
| 09/05/2007 | EP1829126A2 Micro-electro-mechanical system (mems) capacitors, inductors, and related systems and methods |
| 09/05/2007 | EP1226090B1 Gas sensor and fabrication method thereof |
| 09/05/2007 | CN101029966A Micro mechanical-electric device and array, optical modulating device and array and image forming equipment |
| 09/05/2007 | CN100336148C Method for enlarging stoke of piezoelectric sensor and MENS switch using said method |
| 09/05/2007 | CN100335938C Bipolar operation of light-modulating array |
| 09/05/2007 | CN100335934C Folded longitudinal torsional hinge for gimbaled MEMS mirror hinge |
| 09/05/2007 | CN100335905C Microstructure with movable mass |
| 09/05/2007 | CN100335278C Buckle resistant thermal bend actuators |
| 09/04/2007 | US7264990 Methods of nanotubes films and articles |
| 09/04/2007 | US7263883 Gyro-sensor comprising a plurality of component units, and fabricating method thereof |
| 08/30/2007 | US20070202693 Electrochemical deposition of one or more materials according to desired cross-sectional configurations so as to build up three dimensional structures from a plurality of at least partially adhered layers of deposited material; simplification |
| 08/30/2007 | US20070199822 Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns |
| 08/29/2007 | EP1826174A2 Method for forming thin film structure having small tensile stress |
| 08/29/2007 | EP1713882B1 Flexible foil moveable by non-mechanical means |
| 08/29/2007 | EP1410397A4 Nanotube films and articles |
| 08/29/2007 | EP1409156A4 Methods of nanotube films and articles |
| 08/29/2007 | CN101027741A Bimorph element, bimorph switch, mirror element, and method for manufacturing these |
| 08/29/2007 | CN101027707A Methods for visually inspecting interferometric modulators for defects |
| 08/29/2007 | CN101027597A Process control monitors for interferometric modulators |
| 08/29/2007 | CN101027593A Method of fabricating interferometric modulator devices using lift-off processing techniques |
| 08/29/2007 | CN101027542A A capacitive sensor and a method for manufacturing the capacitive sensor |
| 08/29/2007 | CN101024480A Method for forming microelectronic spring structures on a substrate |
| 08/29/2007 | CN100334453C Acceleration transducer |
| 08/28/2007 | US7262817 Rear projection TV with improved micromirror array |
| 08/28/2007 | US7262522 Microelectromechanical isolating power converter |
| 08/28/2007 | US7262070 Method to make a weight compensating/tuning layer on a substrate |
| 08/28/2007 | US7261919 Controlling stress in the deposited silicon carbide film by controlling pressure in the reaction chamber during chemical vapor deposition; microelectromechanical systems (MEMS); nanomechanical devices |
| 08/28/2007 | US7261825 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device |
| 08/28/2007 | US7261392 Printhead chip that incorporates pivotal micro-mechanical ink ejecting mechanisms |
| 08/23/2007 | US20070196945 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 08/23/2007 | US20070193380 Z offset MEMS device |
| 08/22/2007 | EP1459398A4 Methods of making electromechanical three-trace junctions devices |
| 08/22/2007 | CN101023553A 高频电路装置 High-frequency circuit device |
| 08/22/2007 | CN101023508A Improved method and apparatus for the etching of microstructures |
| 08/22/2007 | CN101023021A Method of making a reflective display device using thin film transistor production techniques |
| 08/21/2007 | US7259640 Miniature RF and microwave components and methods for fabricating such components |
| 08/21/2007 | US7259436 Micromechanical component and corresponding production method |
| 08/21/2007 | US7259410 Devices having horizontally-disposed nanofabric articles and methods of making the same |
| 08/21/2007 | US7259099 Strongly textured atomic ridge nanowindows |
| 08/21/2007 | US7258774 Microfluidic devices and methods of use |
| 08/21/2007 | US7258012 Integrated monolithic tri-axial micromachined accelerometer |
| 08/16/2007 | US20070188268 Electromechanical filter and electrial circuit and electrical equipment employing electromechanical filter |
| 08/16/2007 | US20070186665 Force sensor |
| 08/16/2007 | DE102006006890A1 Verfahren zur Herstellung einer Prüfstruktur zur Prüfung der Durchbiegung einer Membran eines mikromechanischen Bauelements und entsprechende Prüfstruktur A method for producing a test structure for testing the deflection of a membrane of a micromechanical component and corresponding test structure |
| 08/16/2007 | DE102006004218B3 Elektromechanische Speicher-Einrichtung und Verfahren zum Herstellen einer elektromechanischen Speicher-Einrichtung Electromechanical memory device and method for manufacturing an electromechanical memory device |
| 08/15/2007 | EP1301346B1 Buckle resistant thermal bend actuators |
| 08/15/2007 | CN1332233C Micromirror device including dielectrophoresis liquid |
| 08/15/2007 | CN1331727C Micromachine production method |
| 08/15/2007 | CN101018735A Method of fabricating a free- standing microstructure |
| 08/15/2007 | CN101018734A A method for making MEMS switch, and MEM device and its making method |
| 08/14/2007 | US7256927 Double-electret mems actuator |
| 08/14/2007 | US7256926 Optical deflector |
| 08/14/2007 | US7256467 Materials and methods for forming hybrid organic-inorganic anti-stiction materials for micro-electromechanical systems |
| 08/14/2007 | US7255799 Method for selectively covering a micro machined surface |