B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2007
12/04/2007	US7304357 Devices having horizontally-disposed nanofabric articles and methods of making the same
12/04/2007	US7303934 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith
12/04/2007	US7303815 Multilayer ribbon; epitaxial deposits; laser ablation
12/04/2007	US7303663 Multistep release method for electrochemically fabricated structures
12/04/2007	US7303262 Ink jet printhead chip with predetermined micro-electromechanical systems height
12/04/2007	US7302970 Liquid delivery device
11/2007
11/29/2007	WO2007135878A1 Microstructure, micromachine, and manufacturing method of microstructure and micromachine
11/29/2007	WO2007135214A1 Flexible micro/nanofluidic devices
11/29/2007	WO2007134660A1 Production of a microgripper by means of a material deposition method
11/29/2007	DE102006024671A1 Micromechanical unit for e.g. monitoring e.g. tire pressure, has diaphragm and seismic mass arranged at distance from each other and arranged one above other, where seismic mass is movable parallel to layer levels
11/29/2007	DE102006024668A1 Micromechanical component e.g. sensor, for e.g. hearing aid`s microphone, has counter unit with passage hole in rear volume formed by hollow space below unit, where hollow space contacts upper side of membrane below counter unit via opening
11/28/2007	EP1150318B1 Micromachine switch and its production method
11/28/2007	CN101079607A Small mechanical filter of static comb driving folding beam
11/27/2007	US7301692 Micro mirror and method for fabricating the same
11/27/2007	US7301177 Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
11/27/2007	US7300854 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method
11/27/2007	US7300162 Projection display
11/27/2007	US7299818 Integrated microvalve and method for manufacturing a microvalve
11/27/2007	US7299815 Micropump check valve device and method of manufacturing the same
11/27/2007	CA2343261C Measurements using tunnelling current between elongate conductors
11/22/2007	US20070269585 Actuating member and method for producing the same
11/22/2007	DE102006022805A1 Micromechanical component, has contacting structures for electrically contacting part of micromechanical structure, where sealing layer and partly contacting structures comprise material of separation layer forming sealing layer
11/22/2007	DE102006022379A1 Micromechanical pressure transducer for capacitive microelectromechanical system microphone, has substrate-sided cavity forming back volume for movable membrane, and resting at application-specific integrated circuit chip
11/22/2007	DE102006022378A1 Verfahren zur Herstellung eines mikromechanischen Bauelements und mikromechanisches Bauelement A process for producing a micromechanical component and micromechanical component
11/22/2007	DE102006022377A1 Micro-mechanical device for use as e.g. micro-mechanical actuator, has membrane with membrane plane, and electrodes that run perpendicular to membrane plane and are provided in suspension area
11/21/2007	EP1855986A2 Methods and apparatus for spatial light modulation
11/21/2007	EP1529300B1 Electrode configuration in a mems switch
11/21/2007	CN101076718A Detecting, measuring and controlling particles and electromagnetic radiation
11/21/2007	CN100350565C Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus
11/21/2007	CN100350294C Micro moving element comprising torsion bar
11/21/2007	CN100350293C Optical device
11/20/2007	US7298016 Electromechanical memory array using nanotube ribbons and method for making same
11/20/2007	US7298015 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device
11/15/2007	WO2007128096A1 System and method for measuring magnetic field strength using a mechanical resonator
11/14/2007	EP1853514A1 Micromechanical membrane sensor comprising a double membrane
11/14/2007	EP1774651B1 High-deformation composite microresonator
11/14/2007	EP1425764B1 Bistable magnetic actuator
11/08/2007	WO2007126962A1 Cantilever light detectors
11/07/2007	EP1852936A1 Reconfigurable cavity resonator with movable micro-electromechanical elements as tuning means
11/07/2007	EP1852935A1 Reconfigurable cavity resonator with movable micro-electromechanical elements as tuning means
11/07/2007	EP1665278A4 Nanotube-based switching elements with multiple controls and circuits made from same
11/07/2007	CN101069099A Integrated monolithic tri-axial micromachined accelerometer
11/07/2007	CN101066749A Cantilever structure and its making process and application
11/07/2007	CN100347863C 加速度传感器 Acceleration sensor
11/06/2007	US7292385 Mirror with local deformation by thickness variation of an electro-active material controlled by electrical effect
11/06/2007	US7290856 Inkjet print assembly for high volume pagewidth printing
11/06/2007	CA2418270C Methods for liquid metering in microchannels
11/01/2007	WO2007121693A1 Torsion resilient element for hanging micromechanical elements which can be deflected
11/01/2007	WO2007121692A1 Oscillating, deflectable micromechanical element and method for use thereof
10/2007
10/31/2007	EP1295389B1 Nano-electromechanical filter
10/31/2007	DE19758847B4 Semiconductor sensor for detecting physical parameter with mobile section of support structure - has substrate, with displaceable spaced-apart structure of monocrystalline semiconductor material
10/31/2007	DE19625605B4 Herstellungsverfahren eines Halbleitersensors für eine physikalische Grösse Manufacturing method of a semiconductor sensor for a physical quantity
10/30/2007	US7289262 Optical attenuator element, and variable optical equalizer and optical amplifier that use this optical attenuator element
10/25/2007	WO2007118527A1 Method for producing implant structures for contacting or electrically stimulating living tissue cells or nerves
10/25/2007	WO2007087328A3 Self-exciting, self-sensing piezoelectric cantilever sensor
10/25/2007	WO2007072404A3 Tuneable electronic devices and electronic arrangements comprising such tuneable devices
10/25/2007	US20070247761 Micro-actuator for hard-disk drive, and manufacturing process thereof
10/25/2007	DE10135569B4 Mikromechanisches Bauteil Micromechanical element
10/24/2007	EP1846320A1 Micromechanical device comprising a mobile beam
10/24/2007	EP1846319A1 Micromechanical component and corresponding production method
10/24/2007	EP1606635B1 Bending beam accelerometer with differential capacitive pickoff
10/24/2007	CN101061411A Fibrous-composite-material-based MEMS optical scanner
10/24/2007	CN101061059A Nano tweezers and scanning probe microscope having the same
10/23/2007	US7286278 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
10/23/2007	US7285897 Curved micromachined ultrasonic transducer arrays and related methods of manufacture
10/18/2007	WO2007115945A1 Microsystem for switching a power electric circuit
10/18/2007	US20070243413 Thermoelastic Device With Preselected Resistivity, Inertness And Deposition Characteristics
10/18/2007	US20070242328 Tiltable-body apparatus, and method of fabricating the same
10/18/2007	DE19906046B4 Halbleitersensoren für eine physikalische Größe mit einem Stoppabschnitt Semiconductor sensors for a physical quantity with a stop portion
10/18/2007	DE19903380B4 Halbleitersensoren für eine physikalische Grösse und ihre Herstellungsverfahren Semiconductor sensors for a physical quantity and its manufacturing method
10/18/2007	DE10056716B4 Mikrostrukturbauelement Microstructure component
10/17/2007	EP1845060A1 Comb structure fabrication methods and systems
10/17/2007	EP1845059A1 Micro-electromechanical sensor device
10/17/2007	EP1843970A1 Microresonator
10/17/2007	EP1532637B1 Method of forming atomic force microscope tips
10/17/2007	CN101055349A Space light adjusting device and method
10/17/2007	CN101054157A Electronic apparatus element and manufacturing method thereof, and resonator and manufacturing method thereof
10/17/2007	CN100343949C Micro-switching element fabrication method and micro-switching element
10/16/2007	US7283453 Recording/reproducing head
10/16/2007	US7282383 Micromachine production method
10/11/2007	WO2007114354A1 Actuator using comb teeth
10/11/2007	WO2007114065A1 Oscillating element, oscillation element manufacturing method, optical scanning device, image forming device and image display device
10/11/2007	US20070236767 Frequency tunable resonant scanner
10/11/2007	US20070235826 Devices having horizontally-disposed nanofabric articles and methods of making the same
10/11/2007	DE102006016811A1 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component
10/10/2007	EP1841688A1 Packaging of micro devices
10/10/2007	EP1841687A1 Micro electromechanical device for tilting a body in two degrees of freedom
10/10/2007	EP1379884B1 Sensor
10/10/2007	CN101051096A Optical tunable filter and method for manufacturing the optical tunable filter
10/10/2007	CN101051018A Film residual stress measuring structure and its producing and testing method
10/09/2007	US7279760 Nanotube relay device
10/09/2007	US7279431 Vapor phase etching MEMS devices
10/09/2007	US7278796 Keyboard for a computer system
10/09/2007	US7278326 Pressure sensor and method for fabricating the same
10/09/2007	US7278297 Oscillating probe with a virtual probe tip
10/05/2007	CA2584084A1 Multi-port monolithic rf mems switches and switch matrices
10/04/2007	WO2007110928A1 Movable element
10/04/2007	US20070231942 Micromechanical flow sensor with tensile coating
10/04/2007	US20070229601 Nozzle arrangement with inlet covering cantilevered actuator
10/04/2007	US20070229598 Inkjet Nozzle Arrangement With Electro-Thermally Actuated Lever Arm

1 ... 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 ... 128