| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/31/2008 | WO2008014305A2 A multi-die apparatus including moveable portions |
| 01/31/2008 | WO2008013982A1 Nano electromechanical resonator |
| 01/31/2008 | US20080026328 Method for fabricating a structure for a microelectromechanical systems (mems) device |
| 01/31/2008 | DE102006036499A1 Micromechanical component has movable element, which is held at frame part by spring, where and electrical voltage is build between frame part and movable component with spring |
| 01/31/2008 | DE102005018867B4 Piezoelektrischer Mikro-Power Wandler Piezoelectric Micro-power converter |
| 01/30/2008 | CN100365402C Force sensor based on Micro-Nano composite structure |
| 01/29/2008 | US7323960 Electromagnetostrictive actuator |
| 01/29/2008 | US7323354 Method of manufacturing MEMS device |
| 01/24/2008 | WO2008011466A1 Method and apparatus for electromagnetic actuation |
| 01/24/2008 | WO2008010436A1 Electrostatic actuator and method for manufacturing same |
| 01/24/2008 | US20080020579 Method For Manufacturing A Membrane In A (111) Surface Of A (100) Silicon Wafer |
| 01/24/2008 | US20080019756 Computer keyboard with a planar member and endless belt feed mechanism |
| 01/24/2008 | US20080018708 Nozzle Arrangement With A Pivotal Wall Coupled To A Thermal Expansion Actuator |
| 01/24/2008 | DE102006023724A1 Measuring cell device for pressure sensor, has membrane and strength measuring element, impinged with pressure for measuring fluid, where measuring element is connected with side facing away from pressure of membrane |
| 01/24/2008 | DE102004002908B4 Verfahren zum Herstellen eines Halbleiterbauelements oder einer mikromechanischen Struktur A method of manufacturing a semiconductor device or a micromechanical structure |
| 01/23/2008 | EP1461828B1 Method of fabricating micro-electromechanical switches on cmos compatible substrates |
| 01/23/2008 | CN101111911A Microelectromechanical element, and electromechanical switch using the same |
| 01/22/2008 | US7320896 Infrared radiation detector |
| 01/22/2008 | CA2450412C Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 01/17/2008 | WO2008008162A2 Support structure for free-standing mems device and methods for forming the same |
| 01/17/2008 | WO2007100478A3 Mems device having a layer movable at asymmetric rates |
| 01/17/2008 | US20080013140 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 01/16/2008 | EP1289876B1 Microstructure and method for the production thereof |
| 01/16/2008 | CN101107711A Electromechanical memory, electric circuit employing the same, and driving method of electromechanical memory |
| 01/16/2008 | CN101107195A Micro electromechanical device for tilting a body in two degrees of freedom |
| 01/16/2008 | CN100362388C Micro oscillating element and its driving method |
| 01/15/2008 | US7319527 Sensor with cantilever and optical resonator |
| 01/10/2008 | WO2008005109A1 Method of manufacturing mems devices providing air gap control |
| 01/10/2008 | WO2008004664A1 Micro actuator, optical unit, exposure device, and device manufacturing method |
| 01/10/2008 | WO2008004572A1 Micro passage chip, and fluid transferring method |
| 01/10/2008 | DE19503623B4 Drehratensensor Rotation rate sensor |
| 01/10/2008 | DE102007030034A1 Sensoreinrichtung und Verfahren zu deren Herstellung Sensor means and methods for their preparation |
| 01/10/2008 | CA2656686A1 Micro passage chip and fluid transferring method |
| 01/10/2008 | CA2656530A1 Method of manufacturing mems devices providing air gap control |
| 01/09/2008 | EP1876139A2 Bi-axially driven MEMS Device |
| 01/09/2008 | EP1874678A1 Mems sensor comprising a deformation-free back electrode |
| 01/09/2008 | CN100360984C Rotary-type comb-drive actuator and variable optical attenuator using the same |
| 01/08/2008 | US7317233 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 01/08/2008 | US7316899 Apparatus for high speed characterization and discrimination of toxins and/or bacteria in medical, food/beverage and environmental solutions |
| 01/03/2008 | WO2008002459A2 Support structure for free-standing mems device and methods for forming the same |
| 01/03/2008 | DE102006029627A1 Micromechanical system e.g. micro reflector, has mass connected by spring unit with supporting structure, and force transmission unit enabling force transmission to mass additionally to forces, which result from deformations of spring unit |
| 01/03/2008 | DE102006028682A1 Hearing device e.g. behind-the-ear hearing device, for binaural system, has sensor produced by micro-electro-mechanical system-technology, where sensor serves as orientation or position sensor to detect orientation or position of device |
| 01/02/2008 | CN100359361C Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| 01/02/2008 | CN100359360C Micro-support structures |
| 01/01/2008 | US7315106 Actuator element and production method therefor |
| 12/27/2007 | WO2007148572A1 Polymer actuator |
| 12/27/2007 | WO2007147663A1 Sensor and method for producing the same |
| 12/27/2007 | WO2007147241A2 Mems-based nanopositioners and mano manipulators |
| 12/27/2007 | WO2007147239A1 Mems-based micro and nano grippers with two- axis force sensors |
| 12/27/2007 | WO2003057619A3 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 12/27/2007 | DE10221660B4 Verfahren zur Herstellung eines mikromechanischen, kapazitiven Wandlers Process for producing a micromechanical capacitive transducer |
| 12/27/2007 | DE102006028986A1 Fluid conveying micropump, has contrary membrane provided in pump chamber and operated in temporal coordination with main pump membrane by using drive mechanism, where chamber forms fluidic connection between inlet and outlet openings |
| 12/27/2007 | DE102006028435A1 Sensor und Verfahren zu seiner Herstellung Sensor and method for its preparation |
| 12/27/2007 | CA2655534A1 Mems-based nanopositioners and nanomanipulators |
| 12/27/2007 | CA2655390A1 Mems-based micro and nano grippers with two-axis force sensors |
| 12/26/2007 | EP1869520A2 Antireflective coating for semiconductor devices and method for the same |
| 12/26/2007 | EP1683172B1 Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| 12/26/2007 | EP1194369A4 Thermal bend actuator for a micro electro-mechanical device |
| 12/26/2007 | CN100357772C Micromirror device with light angle enlarge |
| 12/25/2007 | US7312677 Micro-switching element fabrication method and micro-switching element |
| 12/25/2007 | US7312553 Micromechanical component and method for producing same |
| 12/25/2007 | US7311503 Micromachined fluidic device and method for making same |
| 12/23/2007 | CA2551194A1 Mems-based nanomanipulators/nanopositioners |
| 12/23/2007 | CA2551191A1 Electrothermally-driven mems microgrippers with integrated dual-axis capacitive force sensors |
| 12/21/2007 | WO2007145294A1 Electromechanical element and electric apparatus using same |
| 12/21/2007 | WO2007145290A1 Oscillator, resonator using the oscillator and electromechanical filter using the resonator |
| 12/20/2007 | US20070292185 Computer Keyboard With Internal Printer |
| 12/20/2007 | US20070289940 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 12/20/2007 | DE102006027619A1 Light-optical controlling device for temperature-sensitive structures, particularly hydraulic gel structures, has ray of light projected by element controllable in light transmission one temperature-sensitive structure |
| 12/19/2007 | EP1866235A2 Mems actuators and switches |
| 12/18/2007 | US7310175 MEMS device and method of forming MEMS device |
| 12/13/2007 | WO2007141997A1 High frequency circuit component |
| 12/13/2007 | WO2007140731A1 Arrangement of electrodes with respect to moving micromechanical elements |
| 12/13/2007 | US20070285757 Yokeless Hidden Hinge Digital Micromirror Device |
| 12/13/2007 | US20070284360 Heating element for microfluidic and micromechanical applications |
| 12/13/2007 | DE10249105B4 Mikrofluides System und Verfahren zur Herstellung eines solchen A micro fluid system and method for producing such |
| 12/13/2007 | DE102006026881A1 Micromechanical sensor structure for pressure sensor, has sensor chip partially covered with passivation gel by one of enclosures in region, and another enclosure partially arranged on chip so that latter region is enclosed on chip |
| 12/12/2007 | EP1865358A1 Oscillator device, optical deflector and optical instrument using the same |
| 12/12/2007 | EP1864945A2 Michromechanical structure |
| 12/12/2007 | EP1863597A2 Surface micromechanical process for manufacturing micromachined capacitive ultra- acoustic transducers |
| 12/12/2007 | CN100355057C Electrode structure, and method for manufacturing thin-film structure |
| 12/12/2007 | CN100355045C Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 12/12/2007 | CN100355016C Process for producing a movable structure and etchant for silicon oxide film |
| 12/11/2007 | US7307775 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 12/11/2007 | US7307370 Long-stroke, high-resolution nanopositioning mechanism |
| 12/11/2007 | US7307020 Membrane 3D IC fabrication |
| 12/11/2007 | US7306966 Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor |
| 12/11/2007 | US7306672 Microfluidic free interface diffusion techniques |
| 12/06/2007 | WO2007078495A3 Method of creating mems device cavities by a non-etching process |
| 12/06/2007 | US20070279140 Flap Type Nano/Micro Mechanical Device and Fabrication Method Thereof |
| 12/06/2007 | US20070278663 Integrated Circuit Cooling Device |
| 12/06/2007 | US20070278650 Semiconductor Device |
| 12/06/2007 | DE102006025513A1 Monolithic oscillator for measuring object coordinates of measuring objects, has passive area formed in such a manner that excitation oscillation transferred to section of oscillator to shift/transfer section to returning oscillation |
| 12/05/2007 | EP1863055A2 Milimeter wave switches |
| 12/05/2007 | EP1863046A1 Switch array |
| 12/05/2007 | EP1861926A1 Method of manufacturing vibrating micromechanical structures |
| 12/05/2007 | EP0774681B1 Electromagnetic actuator |
| 12/05/2007 | CN100353475C Contact switch and appts. provided with contact switch |
| 12/04/2007 | US7304800 Optical tunable filter and method of manufacturing the same |
| 12/04/2007 | US7304358 MOS transistor with a deformable gate |