| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/15/2008 | US7358579 Reducing the actuation voltage of microelectromechanical system switches |
| 04/10/2008 | WO2008041585A1 Optical sanning device |
| 04/10/2008 | WO2008041512A1 Optical scanner and image display equipped with it and retina scanning type image display, and driving method of optical scanning element |
| 04/10/2008 | DE102006043388B3 Verfahren zur Kompensation herstellungsbedingt auftretender Abweichungen bei der Herstellung mikromechanischer Elemente und deren Verwendung Method for compensating for production reasons occurring deviations in the manufacture of micromechanical elements, and their use |
| 04/09/2008 | EP1907316A1 Support structure for mems device and methods therefor |
| 04/09/2008 | EP1907133A2 Micro-electro-mechanical transducer having an insulation extension |
| 04/09/2008 | EP1166352B1 Micro-relay |
| 04/09/2008 | CN101160257A Micromachine structure system and method for manufacturing same |
| 04/09/2008 | CN100380699C Piezo-electric/electrostrictive membrane type element |
| 04/09/2008 | CN100380169C Method and device for modulating light beam and having improved gamma response |
| 04/09/2008 | CN100380138C High energy, low energy density, radiation-resistant optics used in micro-electromechical devices |
| 04/08/2008 | US7355782 Systems and methods of controlling micro-electromechanical devices |
| 04/08/2008 | US7355268 High reflector tunable stress coating, such as for a MEMS mirror |
| 04/08/2008 | US7354787 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure |
| 04/08/2008 | US7353719 Pressure sensor and method for fabricating the same |
| 04/03/2008 | WO2008038649A1 Optical scanning device |
| 04/03/2008 | WO2008038339A1 Bimorph switch |
| 04/03/2008 | WO2008036997A1 A system and method for controlling fluids within a microfluidic device |
| 04/03/2008 | WO2008008162A3 Support structure for free-standing mems device and methods for forming the same |
| 04/03/2008 | WO2007149569B1 Micro-electromechanical light modulator with anamorphic optics |
| 04/03/2008 | DE102007044204A1 Sensor einer dynamischen Grösse A dynamic sensor size |
| 04/03/2008 | DE102006046224A1 Electro-mechanical component i.e. piezoelectric resistive micro electromechanical system pressure sensor, for detecting measuring data in e.g. compressor, has piezo-resistive channel applied on surface of diaphragm layer |
| 04/02/2008 | EP1713881B1 Flexible foil moveable by means of light |
| 04/01/2008 | US7352266 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch |
| 04/01/2008 | US7351604 Microstructures |
| 03/27/2008 | WO2008036725A2 Micro-electromechanical device |
| 03/27/2008 | WO2008002459A3 Support structure for free-standing mems device and methods for forming the same |
| 03/27/2008 | US20080074466 Print assembly and printer having wide printing zone |
| 03/27/2008 | US20080073766 System for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/26/2008 | EP1258034B1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC |
| 03/26/2008 | CN101151507A Oscillating micro-mechanical sensor of angular velocity |
| 03/26/2008 | CN101151207A Methods and apparatus for spatial light modulation |
| 03/26/2008 | CN101151206A Methods and apparatus for actuating displays |
| 03/26/2008 | CN100376397C Thermoelastic inkjet actuator with heat conductive pathways |
| 03/25/2008 | US7347952 Method of fabricating an ink jet printhead |
| 03/20/2008 | WO2007146093A3 Beam scanner with reduced phase error |
| 03/20/2008 | US20080068424 Ink jet printhead integrated circuit with surface-processed thermal actuators |
| 03/20/2008 | US20080067655 Device Comprising an Encapsulated Microsystem and Production Method Thereof |
| 03/20/2008 | US20080067553 Electromechanical memory array using nanotube ribbons and method for making same |
| 03/19/2008 | EP1901047A1 Electronic detection device and detector comprising such a device |
| 03/19/2008 | EP1900679A1 Forming a sacrificial layer for making a suspended element |
| 03/19/2008 | EP1756591B1 Multi-axis capacitive transducer |
| 03/19/2008 | EP1685391A4 An oscillating probe with a virtual probe tip |
| 03/19/2008 | EP1497485A4 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| 03/19/2008 | CN100375914C Micro-optic device |
| 03/18/2008 | US7344756 Method for scanning probe contact printing |
| 03/13/2008 | US20080062638 Monolithic Structures Including Alignment and/or Retention Fixtures for Accepting Components |
| 03/12/2008 | EP1897122A2 Substrate contact for a capped mems and method of making the substrate contact at the wafer level |
| 03/12/2008 | EP1897110A2 Method and apparatus for reducing dielectric charging in mems structures |
| 03/12/2008 | EP1896361A2 Microelectromechanical systems (mems) device including a superlattice and associated methods |
| 03/12/2008 | CN101139078A Fuunctional element, semiconductor device and electronic machine |
| 03/12/2008 | CN100375236C Method of forming separable interface and producing micro-electromechanical film with the method |
| 03/12/2008 | CN100374865C Acceleration sensor and manufacturing method for the same |
| 03/12/2008 | CN100374820C Isolated resonator gyroscope |
| 03/11/2008 | US7342818 Hybrid circuit having nanotube electromechanical memory |
| 03/11/2008 | US7342703 Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action |
| 03/11/2008 | US7342349 Piezoelectric actuator array and manufacturing method |
| 03/06/2008 | WO2008026652A1 Micromovement device and method of producing the same |
| 03/06/2008 | DE102006040345A1 Micro-mechanical component for use as e.g. microphone, has hollow space formed between diaphragm area and carrier substrate, and diaphragm structure with inversion that extends into complementary recess in carrier substrate |
| 03/06/2008 | DE102006040343A1 Verfahren zur Herstellung von Bauteilen zur Steuerung eines Fluidflusses sowie Bauteile, hergestellt nach diesem Verfahren A process for the production of components for controlling a fluid flow as well as components manufactured according to this method |
| 03/05/2008 | EP1894884A1 Method of Reducing Temperature Difference Between a Pair of Substrates and Fluid Reaction Device Using the Same |
| 03/05/2008 | EP1535297B1 Diaphragm activated micro-electromechanical switch |
| 03/05/2008 | EP1514123B1 Monolithic silicon acceleration sensor |
| 03/05/2008 | CN101137923A Micromachine structure |
| 03/05/2008 | CN101134556A Deflection amplitude device for micro-drive structure and method for manufacturing same |
| 03/05/2008 | CN100373209C Micro-oscillating element |
| 03/04/2008 | US7337670 Physical quantity sensor having multiple through holes |
| 02/28/2008 | WO2008023465A1 Microelectronic machine mechanism device, and its manufacturing method |
| 02/28/2008 | US20080050283 Microfluidic devices and methods of use |
| 02/28/2008 | US20080048305 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Composites and Conductive Elastomer Interconnects in Microelectronic Packaging |
| 02/28/2008 | US20080047816 Mems switch |
| 02/27/2008 | EP1890958A1 MICROMECHANICAL COMPONENT WITH ACTIVE ELEMENTS AND METHOD FOR PRODUCING A COMPONENT OF THIS TYPEMICROMECHANICAL COMPONENT WITH ACTIVE ELEMENTS AND METHOD FOR PRODUCING A COMPONENT OF THIS TYPEv |
| 02/27/2008 | EP1294635B1 Improved thermal bend actuator |
| 02/27/2008 | CN101130426A Micro-electromechanical systems device and manufacturing method thereof |
| 02/27/2008 | CN100371763C Projection display and packaged micromirror array for the projection display |
| 02/26/2008 | US7335971 Method for protecting encapsulated sensor structures using stack packaging |
| 02/26/2008 | US7335528 Methods of nanotube films and articles |
| 02/26/2008 | US7334873 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
| 02/26/2008 | US7334491 Sensor arrangement, in particular a micro-mechanical sensor arrangement |
| 02/21/2008 | WO2008020903A2 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| 02/21/2008 | WO2008001252A3 Method for manufacturing mems devices with moveable structure |
| 02/21/2008 | WO2007149569A3 Micro-electromechanical light modulator with anamorphic optics |
| 02/21/2008 | WO2007147241A3 Mems-based nanopositioners and mano manipulators |
| 02/21/2008 | CA2651840A1 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| 02/20/2008 | EP1890354A2 Density sensing device and fuel cell system with it |
| 02/20/2008 | EP1890181A1 Digital optical switch apparatus and process for manufacturing same |
| 02/20/2008 | EP1889064A1 Sensor system with actuated structure releasing a coloured indicator |
| 02/20/2008 | EP1490721A4 Double-electret mems actuator |
| 02/20/2008 | CN100370316C Optical attenuator element, and variable optical equalizer and optical amplifier |
| 02/14/2008 | US20080038861 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 02/13/2008 | EP1887412A1 Optical deflection element |
| 02/13/2008 | EP1885645A2 Interferometric modulator with internal polarization and drive method |
| 02/13/2008 | EP1569865B1 Production of microelectromechanical systems (MEMS) using the high-temperature silicon fusion bonding of wafers |
| 02/12/2008 | US7330616 Micromirror element and optical switch |
| 02/12/2008 | CA2467174C Differential stress reduction in thin films |
| 02/06/2008 | EP1738181B1 Out-of-plane compensation electrode suspension for an accelerometer |
| 02/06/2008 | CN101120232A Oscillating micro-mechanical sensor of angular velocity |
| 02/06/2008 | CN101119924A Micromechanical membrane sensor comprising a double membrane |
| 02/06/2008 | CN100367069C Micromirror element and optical switch |
| 02/05/2008 | US7326296 High throughput screening of crystallization of materials |