| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/11/2008 | CN101195471A MEMS device and manufacturing method thereof |
| 06/11/2008 | CN100394539C Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 06/11/2008 | CN100393387C Component separating device, method of producing the device, and method of separating component by using the device |
| 06/10/2008 | US7385835 Membrane 3D IC fabrication |
| 06/10/2008 | US7385750 Spatial light modulator using an integrated circuit actuator |
| 06/10/2008 | US7385266 Sensor platform using a non-horizontally oriented nanotube element |
| 06/10/2008 | US7384530 Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials |
| 06/05/2008 | WO2008067386A2 Piezoelectric microcantilever sensors for biosensing |
| 06/05/2008 | WO2008067294A2 Microfabrication methods for forming robust isolation and packaging |
| 06/05/2008 | WO2008033269A3 Micro-acutuator and locking switch |
| 06/05/2008 | DE19804748B4 Anordnung und Verfahren der Isolierung gegen mechanische Spannung bei der Befestigung von Halbleiterchips Arrangement and method of the insulation against mechanical stress at the mounting of semiconductor chips |
| 06/05/2008 | DE102006057384A1 Semiconductor component manufacturing method, involves pivoting and/or tilting and/or rotating sensors relative to each other with plane under bending deformation of area, where sensors are displaced parallel to each other with plane |
| 06/04/2008 | EP1927878A1 Simplified manufacturing process for micro mirrors |
| 06/04/2008 | EP1927873A1 Micromirror device with a hybrid parallel plate and comb drive actuator |
| 06/04/2008 | EP1620351B1 Radiation sensor, wafer, sensor module, and method for the production of a radiation sensor |
| 06/04/2008 | CN201069862Y Micro mechanical filter not sensitive to silicon micro processing technology error |
| 06/04/2008 | CN100392467C Method and system for projecting images on objects |
| 06/04/2008 | CN100392448C Variable optical attenuator |
| 06/03/2008 | USRE40347 Acceleration sensor and process for the production thereof |
| 06/03/2008 | US7382510 Actuator |
| 06/03/2008 | US7382031 Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture |
| 06/03/2008 | US7380320 Piezoelectric device and method of manufacturing the device |
| 06/03/2008 | CA2232409C Microelectromechanical accelerometer for automotive applications |
| 05/30/2008 | CA2612206A1 Micromirror device with a hybrid actuator |
| 05/29/2008 | WO2008061439A1 Constructing planar and three-dimensional microstructures with pdms-based conducting composite |
| 05/29/2008 | US20080121042 Improved system sensitivity and accuracy; improved performance of micro-machined devices |
| 05/29/2008 | DE102006057567A1 Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen Micro-optical element comprising a substrate on which at least one optically effective surface of a height level is formed, process for its preparation and uses |
| 05/29/2008 | DE102006055484A1 Selbsttest bei einem mikromechanischen Drucksensor Self-test at a micromechanical pressure sensor |
| 05/29/2008 | DE102006055263A1 Micromechanical thermopile sensor for use as membrane sensor for detecting infrared radiation, has conductive areas laterally distanced from each other and electrically contacted at their upper and/or lower end areas as thermopile structure |
| 05/28/2008 | CN100391024C Piezoelectric functional part and method of manufacturing the part |
| 05/22/2008 | WO2008036725A3 Micro-electromechanical device |
| 05/22/2008 | WO2008005797A3 Mems device having distance stops |
| 05/22/2008 | WO2007120886A3 Microelectromechanical device and method utilizing a porous surface |
| 05/22/2008 | US20080117254 Wide Format Pagewidth Inkjet Printer |
| 05/21/2008 | EP1923995A1 Variable resonance frequency resonator and method for varying its resonance frequency |
| 05/21/2008 | EP1923730A1 Deformable mirror |
| 05/21/2008 | EP1841687B1 Micro electromechanical device for tilting a body in two degrees of freedom |
| 05/21/2008 | DE19850066B4 Mikromechanischer Neigungssensor Micro-mechanical tilt sensor |
| 05/15/2008 | US20080111866 Nozzle arrangement with a top wall portion having etchant holes therein |
| 05/15/2008 | US20080111861 Nozzle Arrangement For An Inkjet Printhead Incorporating A Protective Structure |
| 05/15/2008 | DE19826317B4 Verfahren zum Herstellen eines Halbleitersubstrats, Halbleiterdrucksensor und sein Herstellungsverfahren A method of manufacturing a semiconductor substrate, a semiconductor pressure sensor and its manufacturing method |
| 05/15/2008 | DE102005032927B4 Bewegungselement Mover |
| 05/14/2008 | EP1921484A1 Oscillator device, optical deflector and optical instrument using the same |
| 05/14/2008 | EP1920229A2 Pressure sensors and methods of making the same |
| 05/14/2008 | CN101180794A Method of manufacturing vibrating micromechanical structures |
| 05/14/2008 | CN100387508C Stepping omnibearing nano moving platform and control system control |
| 05/13/2008 | US7372619 Display device having a movable structure for modulating light and method thereof |
| 05/13/2008 | US7372191 Microswitch and method for manufacturing the same |
| 05/13/2008 | US7371600 Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same |
| 05/08/2008 | WO2008052306A1 Three-dimensional microstructures and methods for making same |
| 05/08/2008 | US20080108165 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 05/08/2008 | US20080105557 Methods of and Apparatus for Forming Three-Dimensional Structures Integral with Semiconductor Based Circuitry |
| 05/08/2008 | DE10227593B4 Strömungsschaltungs-Mikrobauelemente Flow circuit microdevices |
| 05/08/2008 | DE102006055147A1 Schallwandlerstruktur und Verfahren zur Herstellung einer Schallwandlerstruktur Transducer structure and method of making a transducer structure |
| 05/08/2008 | DE102006052466A1 Micromechanical tilting unit i.e. micro-mirror, has magnetic drive arranging coils on plate, and mounting brackets provided for current feed of coils, where each coil is arranged such that it permits symmetrical drive of plate |
| 05/08/2008 | DE102006051207A1 Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements Micromechanical component with a micro oscillating device and method for calibration of a device |
| 05/08/2008 | DE102006051197A1 Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verwendung eines Bauelements Micromechanical component with a micro oscillating device and use of a device |
| 05/07/2008 | EP1918244A1 MEMS actuation device |
| 05/07/2008 | EP1721173B1 Force sensor |
| 05/07/2008 | EP1259847B1 Semiconductor optoelectronic device with electrically adjustable transfer function |
| 05/07/2008 | CN101174802A Actuator and method for manufacturing the same |
| 05/06/2008 | US7370185 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| 05/06/2008 | US7368313 Method of making a differential pressure sensor |
| 05/06/2008 | US7367729 Printer within a computer keyboard |
| 05/06/2008 | US7367359 Proportional micromechanical valve |
| 05/06/2008 | CA2447282C Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/02/2008 | WO2008050354A2 A nanopositioner and method to nano position an object thereof |
| 04/30/2008 | EP1916559A1 Micro mirrors with metal alloy hinges |
| 04/30/2008 | EP1916222A2 MEMS device with reduced parasitic capacitance |
| 04/30/2008 | EP1915319A1 Mems device having support structures configured to minimize stress-related deformation and methods for fabricating same |
| 04/30/2008 | DE19829609B4 Verfahren zur Herstellung eines Mikrosystems A process for producing a microsystem |
| 04/30/2008 | DE19818060B4 Beschleunigungssensor, Winkelbeschleunigungssensor und Herstellverfahren für diese Sensoren Acceleration sensor, angular acceleration sensor and manufacturing method for these sensors |
| 04/30/2008 | DE102007001516B3 Micromechanical unit for e.g. use in light deflector, has resonance frequency adjusting device adjusting resonance frequency of oscillation system such that positions of spring hangers of hanger assembly are changed to one another |
| 04/30/2008 | DE102006004922B4 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung, Balkensonde, Rasterkraftmikroskop sowie Verfahren zu dessen Betrieb Miniaturized spring element and method for its manufacture, probe beam, atomic force microscope and method for its operation |
| 04/30/2008 | CN100385700C Curved electro-active actuators |
| 04/29/2008 | US7364942 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 04/29/2008 | US7364271 Nozzle arrangement with inlet covering cantilevered actuator |
| 04/29/2008 | US7363816 Inertial sensor |
| 04/24/2008 | WO2008046539A1 Device for converting a first motion into a second motion responsive to said first motion under a demagnif ication scale |
| 04/24/2008 | US20080096313 Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates |
| 04/24/2008 | US20080093694 Method for manufacturing a semcoductor component and a semiconductor component, in particular a diaphragm sensor |
| 04/24/2008 | US20080093605 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
| 04/24/2008 | DE19734530B4 Halbleiterbeschleunigungssensor Semiconductor acceleration sensor |
| 04/24/2008 | DE102006049886A1 Micromechanical component for use as e.g. humidity sensor, has two surfaces fixed relative to substrate and micromechanical structure, respectively, where one of surfaces is moved parallel to main extension plane of substrate |
| 04/23/2008 | EP1914195A2 Low resistance MEMS device |
| 04/23/2008 | EP1914194A1 Device for converting a first motion into a second motion responsive to said first motion under a demagnification scale |
| 04/23/2008 | EP1444543B1 Digital optical switch apparatus and process for manufacturing same |
| 04/23/2008 | EP1117937B1 Proportional micromechanical device |
| 04/23/2008 | CN101166690A MEMS actuators and switches |
| 04/22/2008 | US7362488 Tiltable-body apparatus, and method of fabricating the same |
| 04/22/2008 | US7361523 Three-axis accelerometer |
| 04/22/2008 | US7360455 Force detector and acceleration detector and method of manufacturing the same |
| 04/22/2008 | CA2414708C Seal in micro electro-mechanical ink ejection nozzle |
| 04/17/2008 | WO2008044720A1 Micromechanical resonator |
| 04/17/2008 | WO2008044470A1 Optical scanning device |
| 04/16/2008 | EP1910218A1 Mems devices having support structures and methods of fabricating the same |
| 04/16/2008 | EP1910217A2 Heat activated nanometer-scale pump |
| 04/16/2008 | EP1910216A1 Support structure for mems device and methods therefor |
| 04/15/2008 | US7359103 Transmission type spatial light modulator and transmission type spatial light modulation array device |
| 04/15/2008 | US7358580 Sacrificial layer technique to make gaps in MEMS applications |