| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/31/2008 | WO2008089786A1 Micromechanical component having increased stiffness, and method for the production of the same |
| 07/31/2008 | WO2008050354A3 A nanopositioner and method to nano position an object thereof |
| 07/31/2008 | US20080182273 allowed to mix by diffusion without convective flow across the interface; protein crystallization system; gradual and non-directional mixing, avoiding asymmetries and steep concentration gradients associated with convective flow between the fluids |
| 07/31/2008 | US20080180821 Apparatus, method and system for providing enhanced mechanical protection of thin beams |
| 07/31/2008 | US20080178675 Force detector and acceleration detector and method of manufacturing the same |
| 07/31/2008 | DE102007003544A1 Verfahren zur Herstellung eines Bauteils und Sensorelement A process for the production of a component and the sensor element |
| 07/31/2008 | DE10196678B4 Herstellungsverfahren für einen Dünnfilmstrukturkörper Manufacturing method of a thin-film structure body |
| 07/30/2008 | EP1950778A2 Drive control method and unit for micro machine device |
| 07/30/2008 | EP1950174A2 MEMS Device with movement limiting arrangement |
| 07/30/2008 | EP1949165A1 Mems switch with set and latch electrodes |
| 07/30/2008 | EP1255980B1 Portable sensor array system |
| 07/29/2008 | US7405854 Fibrous micro-composite material |
| 07/29/2008 | US7405635 MEMS switch |
| 07/29/2008 | US7404338 Force sensor |
| 07/29/2008 | US7404325 Micro-machined vibrating structure and associated micro-gyroscope |
| 07/29/2008 | CA2414722C Seal for a micro electro-mechanical liquid chamber |
| 07/24/2008 | WO2008088032A1 Structural member having a plurality of conductive regions |
| 07/24/2008 | WO2008087631A1 A tilting device with integrated motion transformer and amplifier |
| 07/24/2008 | US20080173365 Microfabricated elastomeric valve and pump systems |
| 07/23/2008 | EP1947053A2 Vertical movement microelectromechanical device with stopper structure |
| 07/23/2008 | EP1697254B1 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 07/23/2008 | CN101228093A MEMS devices having support structures and methods of fabricating the same |
| 07/23/2008 | CN101228092A Support structure for MEMS device and methods thereof |
| 07/23/2008 | CN101228091A Support structure for MEMS device and methods thereof |
| 07/23/2008 | CN101227185A Electromechanical switching circuitry in parallel with solid state switching circuitry |
| 07/23/2008 | CN101224866A Micro-switching device |
| 07/23/2008 | CN101224865A Micro-switching device and manufacturing method thereof |
| 07/23/2008 | CN100405135C A device having a light-absorbing mask and a method for fabricating same |
| 07/23/2008 | CN100405122C Microactuator provided with displacement detection function |
| 07/23/2008 | CN100405121C System and method for guiding optical signal path |
| 07/22/2008 | US7403317 Optical scanning device and method of manufacturing the same |
| 07/22/2008 | US7402877 Micromachine and method of manufacturing the micromachine |
| 07/22/2008 | US7402849 Parallel, individually addressable probes for nanolithography |
| 07/22/2008 | US7402449 Integrated micro electro-mechanical system and manufacturing method thereof |
| 07/22/2008 | CA2358115C Electrostatic/pneumatic actuators for active surfaces |
| 07/17/2008 | WO2008083446A1 Sample handling device |
| 07/17/2008 | WO2008067386A3 Piezoelectric microcantilever sensors for biosensing |
| 07/17/2008 | US20080169488 Device selection circuitry constructed with nanotube technology |
| 07/17/2008 | DE102007002273A1 Verfahren zur Herstellung eines Bauteils und Sensorelement A process for the production of a component and the sensor element |
| 07/17/2008 | CA2675172A1 Sample handling device |
| 07/16/2008 | EP1943185A1 Method of manufacturing mems devices providing air gap control |
| 07/16/2008 | EP1943184A1 Non-volatile memory device |
| 07/16/2008 | CN101223692A Resonator and filter using same |
| 07/16/2008 | CN101222792A Sound transducer structure and method for manufacturing a sound transducer structure |
| 07/16/2008 | CN101221911A Packaging micro devices |
| 07/16/2008 | CN101219769A Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same |
| 07/16/2008 | CN100403552C Capacitive momentum sensor |
| 07/16/2008 | CN100402850C Microfabricated elastomeric valve and pump systems |
| 07/16/2008 | CN100402411C Micromachine and method of producing the same |
| 07/16/2008 | CN100402290C Print head chip with discrete air and nozzle chambers for an inkjet print head |
| 07/10/2008 | WO2007142846A3 Analog interferometric modulator device with electrostatic actuation and release |
| 07/10/2008 | US20080165409 Micromirror unit with torsion connector having nonconstant width |
| 07/10/2008 | US20080164541 Sensor platform using a non-horizontally oriented nanotube element |
| 07/10/2008 | US20080164237 Piezoelectric-driven mems device and method for manufacturing the same |
| 07/10/2008 | DE19808549B4 Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur Micromechanical comb structure and acceleration sensor and actuator with this comb structure |
| 07/10/2008 | DE10260860B4 Schicht aus Si1-xGex, Verfahren zu deren Herstellung und mikromechanisches Bauelement damit Layer of Si1-xGex, to processes for their preparation and micromechanical component thus |
| 07/10/2008 | DE102007001290A1 Module comprises semiconductor chip with mobile element, where substrate is made of glass or semiconductor material and covers main surface of semiconductor chip, and another substrate is made of glass or semiconductor material |
| 07/09/2008 | EP1942348A1 Method and system for calibrating a micro-electromechanical system (MEMS) based sensor using tunneling current sensing |
| 07/09/2008 | EP1941316A2 Diffusion barrier layer for mems devices |
| 07/09/2008 | EP1568655B1 Micromachine and method of producing the same |
| 07/09/2008 | EP1486815B1 Mems device and its manufacturing method, optical modulator, glv device and its manufacturing method, and laser display |
| 07/09/2008 | EP1200865B1 Micro-machined mirror device |
| 07/09/2008 | CN101214916A Micro-mechanism testing probe card based on electroplating technique and manufacturing method thereof |
| 07/09/2008 | CN100401192C Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 07/09/2008 | CN100400411C Microactuator device and optical switching system using the same |
| 07/08/2008 | US7397326 Electromechanical filter |
| 07/08/2008 | US7397097 Integrated released beam layer structure fabricated in trenches and manufacturing method thereof |
| 07/08/2008 | US7396476 Method for reducing harmonic distortion in comb drive devices |
| 07/03/2008 | WO2008079229A1 Aluminum fluoride films for microelectromechanical system applications |
| 07/03/2008 | WO2008051351A3 Sacrificial spacer process and resultant structure for mems support structure |
| 07/03/2008 | US20080157129 Alternative sensingsensing circuit for mems microphone and sensingsensing method therefof |
| 07/02/2008 | EP1939599A2 Pressure transducer diaphragm and method of making same |
| 07/02/2008 | EP1939137A2 Three-dimensional microstructures and methods of formation thereof |
| 07/02/2008 | EP1938396A1 Flat substrate having an electrically conductive structure |
| 07/02/2008 | EP1716070B1 Micromechanical sensor |
| 07/02/2008 | EP1389307B1 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 07/02/2008 | CN100399103C Micro-mirror device with dielectrophoretic micro- emulsions |
| 07/01/2008 | US7393714 Method of manufacturing external force detection sensor |
| 06/26/2008 | WO2008075778A1 Thin film structure, microactuator, optical shutter device, luminous flux adjusting device and microswitch |
| 06/26/2008 | WO2008075612A1 Microactuator |
| 06/26/2008 | DE19812583B4 Verfahren zur Herstellung eines Bauelementes A method for producing a component |
| 06/26/2008 | DE10053307B4 Kapsel für Mikrosensoren, Verfahren zur Verkapselung von Mikrosensoren und Kapselelement Capsule for micro sensors, processes for the encapsulation of micro-sensors and capsule element |
| 06/25/2008 | EP1846320B1 Micromechanical device comprising a mobile beam |
| 06/25/2008 | EP1274584B1 Ink jet ejector |
| 06/25/2008 | EP1230689B1 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 06/19/2008 | WO2008072419A1 Light-activated actuator element |
| 06/19/2008 | WO2008072248A2 Tilting actuator with close-gap electrodes |
| 06/19/2008 | WO2008072163A2 Mems device with controlled electrode off-state position |
| 06/19/2008 | WO2008071172A1 Micromirror actuator with encapsulation possibility and method for production thereof |
| 06/19/2008 | DE102006059073A1 Mikrospiegelanordnung Micro-mirror array |
| 06/19/2008 | CA2672797A1 Micro-mirror actuator having encapsulation capability and method for the production thereof |
| 06/18/2008 | EP1933188A1 Non-contact tilting micro mirrors |
| 06/18/2008 | EP1569865B8 Production of microelectromechanical systems (MEMS) using the high-temperature silicon fusion bonding of wafers |
| 06/18/2008 | CN101200279A High-sensitivity nickel/silicon composite micro-cantilever and preparation method thereof |
| 06/17/2008 | US7388706 Photonic MEMS and structures |
| 06/17/2008 | US7388702 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 06/17/2008 | US7388285 Hermetically sealed package for optical, electronic, opto-electronic and other devices |
| 06/17/2008 | US7387737 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 06/12/2008 | WO2008070533A2 A variable thermal resistor system |
| 06/11/2008 | CN101195472A Electrothermal actuator and technique of producing the same |