| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/08/2008 | CN100424539C Micro movable element and optical switching device |
| 10/07/2008 | US7431429 Printhead integrated circuit with planar actuators |
| 10/02/2008 | WO2008118098A1 Fluid cartridge, pump and fluid valve arrangement |
| 10/02/2008 | US20080237826 Method for protecting encapsulated sensor structures using stack packaging |
| 10/02/2008 | US20080236669 Microfabricated elastomeric valve and pump systmes |
| 10/02/2008 | DE10106840B4 Erfassungsgerät für eine physikalische Grösse Detecting device for a physical quantity |
| 10/01/2008 | CN101277897A Non-volatile memory device |
| 10/01/2008 | CN101276054A Micro-oscillating member, light-deflector, and image-forming apparatus |
| 10/01/2008 | CN101276053A Micro oscillating device and micro oscillating device array |
| 09/25/2008 | WO2008114330A1 Mems device and optical switch |
| 09/25/2008 | WO2008114199A2 An actuator device and a method of manufacturing the same |
| 09/25/2008 | WO2008113372A2 Electroactive polymer actuator devices and systems comprising such devices |
| 09/25/2008 | WO2008113166A1 Mems actuators and switches |
| 09/25/2008 | US20080231937 Spatial Light Modulator Using an Integrated Circuit Actuator and Method of Making and Using Same |
| 09/25/2008 | DE102007014468A1 Drucksensor-Chip Pressure sensor chip |
| 09/25/2008 | CA2679219A1 Mems actuators and switches |
| 09/24/2008 | CN101273456A 形状记忆装置 Shape memory device |
| 09/24/2008 | CN101269790A Surface discharge element and method of making the same microcomputer electric component and method for manufacturing same |
| 09/24/2008 | CN100420575C Electrostatic actuator, droplet discharging head, droplet discharging apparatus, electrostatic device |
| 09/23/2008 | US7427526 Deposited thin films and their use in separation and sacrificial layer applications |
| 09/17/2008 | EP1476394B1 Thin film encapsulation of mems devices |
| 09/17/2008 | CN101268400A Actuator |
| 09/17/2008 | CN100420148C Temperature compensation mechanism for a micromechanical ring resonator |
| 09/12/2008 | WO2008108865A2 Energy storing and recovering device working like spring motors using nanotubes as spring |
| 09/11/2008 | US20080220216 Microfabricated elastomeric valve and pump systems |
| 09/11/2008 | US20080219891 Portable sensor array system |
| 09/11/2008 | DE10357421B4 Verfahren zur Herstellung eines mikromechanischen Bauelements und damit hergestelltes Bauelement A process for producing a micromechanical component and thus prepared component |
| 09/11/2008 | DE102007010913A1 Drucksensor Pressure sensor |
| 09/10/2008 | EP1967488A2 Method for producing semiconductor device and a semiconductor device, more especially a membrane sensor |
| 09/10/2008 | CN101262958A Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers |
| 09/09/2008 | US7424330 Method and apparatus for controlling deformable actuators |
| 09/09/2008 | US7422928 Process for fabricating a micro-electro-mechanical system with movable components |
| 09/04/2008 | WO2008105735A1 Tunable photonic crystal using nanostructures |
| 09/04/2008 | US20080210320 Microfabricated elastomeric valve and pump systems |
| 09/04/2008 | US20080210306 Integrated surface-machined micro flow controller method and apparatus |
| 09/04/2008 | DE102006057567B4 Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen Micro-optical element comprising a substrate on which at least one optically effective surface of a height level is formed, process for its preparation and uses |
| 09/04/2008 | DE10130237B4 Kapazitiver Sensor für dynamische Größen mit Verschiebungsabschnitt, hergestellt durch Drahtbonden Capacitive sensor for dynamic variables with shift section made by wire bonding |
| 09/03/2008 | EP1487738B1 Silicon carbide microelectromechanical devices with electronic circuitry |
| 09/03/2008 | CN101258100A Microelectromechanical systems (MEMS) device including a superlattice and associated methods |
| 09/03/2008 | CN101256899A Movable micro-device |
| 09/03/2008 | CN101255861A Multiple channel micropump apparatus and drive method |
| 09/03/2008 | CN100415635C Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 09/02/2008 | US7420264 High reflector tunable stress coating, such as for a MEMS mirror |
| 09/02/2008 | US7419845 Methods of making electromechanical three-trace junction devices |
| 09/02/2008 | CA2370773C Actuator control in a micro electro-mechanical liquid ejection device |
| 08/28/2008 | WO2008103963A1 Micro fluid transfer system |
| 08/28/2008 | WO2008102813A1 Beam-like material comprising carbon nanotube, and method for production thereof |
| 08/28/2008 | WO2008101347A1 Mems actuators and switches |
| 08/28/2008 | US20080204843 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 08/28/2008 | CA2678680A1 Mems actuators and switches |
| 08/27/2008 | EP1960307A1 Micro-electromechanical system comprising a deformable portion and a stress sensor |
| 08/27/2008 | EP1960306A1 Microfluidic structures |
| 08/27/2008 | EP1509802B1 Bulk silicon mirrors with hinges underneath |
| 08/27/2008 | EP1248952B1 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 08/27/2008 | EP1240530B1 Micromechanical structure, in particular for an acceleration sensor |
| 08/27/2008 | CN101249935A Thermal isolation micro-bridge structure and processing method thereof |
| 08/26/2008 | US7417780 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
| 08/26/2008 | US7417778 Light deflector, light deflection array, image forming apparatus, and image projection display apparatus |
| 08/26/2008 | US7417315 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 08/26/2008 | US7416910 Pyramid socket suspension |
| 08/21/2008 | WO2008062316A3 A self-maintained sensor using a low power actuator |
| 08/21/2008 | DE102008000128A1 Halbleitersensor und sein Herstellungsverfahren Semiconductor sensor and its manufacturing method |
| 08/21/2008 | DE10024697B4 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/20/2008 | EP1958920A1 Fluid actuator, heat generating device using the same, and analysis device |
| 08/20/2008 | CN101248340A Pressure sensors and methods of making the same |
| 08/20/2008 | CN101246258A Electrostatic actuator with interdigitated electrode structure |
| 08/20/2008 | CN100412604C Micromirror array for projection TV |
| 08/20/2008 | CN100412603C Projection TV with improved micromirror array |
| 08/20/2008 | CN100412602C Micromirror with micromirror element arrays |
| 08/20/2008 | CN100411968C Flexible micro-electromechanical system changer and its manufacturing method and radio loud-speaker |
| 08/14/2008 | WO2008096901A1 Cantilever type oscillating optical deflector with mechanical guiding features |
| 08/14/2008 | WO2008096580A1 Microdevice and method for manufacturing the same |
| 08/14/2008 | WO2008072248A3 Tilting actuator with close-gap electrodes |
| 08/14/2008 | US20080192532 Hybrid circuit having nanotube memory cells |
| 08/14/2008 | US20080191978 Apparatus for driving micromechanical devices |
| 08/14/2008 | US20080191242 Method For Manufacturing An Electro-Mechanical Component And An Electro-Mechanical Component, Such As A Strained Si Fin-Fet |
| 08/14/2008 | DE19680763B4 Microelectromechanical device useful for data storage applications - has cantilevered beam free to move above substrate and carrying insulated conductors is able to position tip on beam in contact with one conductor and move parallel to and perpendicular to substrate plane |
| 08/14/2008 | DE112006002590T5 Formspeicherbauelement Shape memory device |
| 08/13/2008 | EP1956706A1 Micro-electromechanical device |
| 08/13/2008 | EP1216602B1 Mems digital-to-acoustic transducer with error cancellation |
| 08/13/2008 | CN101239697A Vertical integration microelectron mechanical structure, implementing method and system thereof |
| 08/13/2008 | CN100411294C Actuator |
| 08/13/2008 | CN100411189C Micro-switching device and method of manufacturing micro-switching device |
| 08/12/2008 | US7411714 Micromirror unit with torsion connector having nonconstant width |
| 08/12/2008 | US7411261 MEMS device and fabrication method thereof |
| 08/12/2008 | US7410816 Method for forming a chamber in an electronic device and device formed thereby |
| 08/07/2008 | WO2008094213A2 Large area induced assembly of nanostructures |
| 08/07/2008 | US20080187472 Magnetic bead-based arrays |
| 08/07/2008 | DE102006023724B4 Messzellenanordnung für einen Drucksensor mit Kraftmesselement aus Glas Measuring cell arrangement for a pressure sensor with force-measuring element made of glass |
| 08/06/2008 | EP1953583A2 Micro mirror arrays and microstructures with solderable connection sites |
| 08/06/2008 | EP1953116A2 Activation microsystem and associated manufacturing method |
| 08/06/2008 | EP1952405A1 A micro-electromechanical system memory device and method of making the same |
| 08/06/2008 | EP1725405A4 Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate |
| 08/06/2008 | EP1620352B1 Multi-stable electromechanical switches and methods of fabricating same |
| 08/06/2008 | CN100408470C Microchip with thermal stress relief means |
| 08/06/2008 | CN100408336C Thermoelastic expanding element |
| 08/05/2008 | US7408283 Micromachined ultrasonic transducer cells having compliant support structure |
| 08/05/2008 | US7407261 Image processing apparatus for a printing mechanism of a wide format pagewidth inkjet printer |
| 08/05/2008 | US7406866 Micromachined devices |
| 07/31/2008 | WO2008090050A1 Volume acoustic resonator having an adjustable resonance frequency and use of such resonator in the telephone industry |