Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2008
11/27/2008WO2008067294A3 Microfabrication methods for forming robust isolation and packaging
11/27/2008US20080289710 Microfabricated elastomeric valve and pump systems
11/27/2008DE102007024199A1 Micromechanical component, has carrier element made of semiconductor material and including silicon membranes with porous structures, where porous structures include uniform microporous structure over surface of membranes
11/26/2008CN100438334C Micromechanical electrostatic resonator
11/26/2008CN100437017C Measurements using tunnelling current between elongate conductors
11/20/2008US20080286970 Method for producing a semiconductor component and a semiconductor component produced according to the method
11/20/2008US20080285109 Micromirror unit with torsion connector having nonconstant width
11/20/2008US20080284078 Micromechanical Element Which Can be Deflected
11/20/2008DE102007021920A1 Mikromechanisches Bauelement, mikromechanisches System, Vorrichtung zum Einstellen einer Empfindlichkeit eines mikromechanischen Bauelements, Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component, micro-mechanical system, means for adjusting a sensitivity of a micromechanical component, method for producing a micromechanical component
11/19/2008EP1991879A1 Device and method for measuring electrical power
11/19/2008EP1651560B1 Stacked structure and production method thereof
11/19/2008EP1360144B1 Gyroscope and fabrication method thereof
11/19/2008CN101310341A A micro-electromechanical system memory device and method of making the same
11/19/2008CN101310206A MEMS switch having setting and latch electrodes
11/19/2008CN101308051A Three-dimensional micro- force silicon micro- sensor
11/18/2008US7453613 Scanning type image forming apparatus having the same containing scanning mirror in a space sealed by first and second optical members and the housing, the second optical member includes five surfaces
11/18/2008US7453269 Magnetic MEMS sensor device
11/18/2008US7453187 Piezoelectric micro-transducers, methods of use and manufacturing methods for same
11/18/2008CA2458732C A keyboard
11/18/2008CA2370950C Actuator element
11/18/2008CA2272104C Method for making a thin film resonant microbeam absolute pressure sensor
11/13/2008WO2008136316A1 Laminated substrate structure and method for manufacturing the same
11/13/2008WO2008135916A1 Magnetochemical sensor
11/13/2008US20080277005 Microfabricated elastomeric valve and pump systems
11/13/2008US20080276727 Mems Nanoindenter
11/12/2008EP1990672A2 Methods of fabricating MEMS with spacers between plates and devices formed by same
11/12/2008EP1990669A2 Method of fabrication MEMS by lamination and devices formed by same
11/12/2008CN101305308A Diffusion barrier layer for mems devices
11/12/2008CN101301991A Micromechanical component, device for designing micromechanical component, procedures for manufacturing micromechanical component, and micro-mechanical system
11/11/2008US7449358 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
11/06/2008US20080272867 Mems device with integral packaging
11/06/2008US20080272749 High Frequency Device, Power Supply Device and Communication Apparatus
11/06/2008DE102007020508A1 Micromechanical valve component for dosage of medicines and anesthetics, has valve element that is implemented in form of diaphragm structure over layer of layer structure, and cavity is provided
11/06/2008DE102004021693B4 Mikromechanischer Sensor Micromechanical sensor
11/05/2008EP1987337A1 Manufacturing process for integrated piezoelectric components
11/05/2008CN101298987A Robustness tuning fork vibrating type micromechanical gyroscope
11/05/2008CN101298315A Preparation of nano-tube contilever beam array
11/04/2008USRE40561 Acceleration sensor and process for the production thereof
11/04/2008US7447891 Light modulator with concentric control-electrode structure
11/04/2008US7445723 Optical scanner and method of fabricating the same
10/2008
10/30/2008WO2008131088A1 Mems devices and systems actuated by an energy field
10/30/2008WO2008129988A1 Micromirror element and micromirror array
10/30/2008WO2005019793A3 Sensor platform using a horizontally oriented nanotube element
10/30/2008US20080264058 Comprises alternating array of first and second foil sections each resiliently and nonmechanically moveable between flattened and bent states; relatively large amplitude and displacement of edge portions of the foil relative to another provided by the movement is more linear than bent
10/30/2008DE19817357B4 Mikromechanisches Bauelement Micromechanical component
10/30/2008DE112006003394T5 Abstimmbare Elektronikbauelemente und Elektronikanordnungen, solche abstimmbaren Bauelemente umfassend Tunable electronic components and electronic devices, such tunable components comprising
10/30/2008DE10255690B4 Halbleitersensor für eine dynamische Größe Semiconductor sensor dynamic quantity
10/30/2008DE102008012825A1 Mikromechanisches Bauelement mit verkippten Elektroden Micromechanical component with tilted electrode
10/30/2008DE102007019639A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof
10/30/2008CA2764403A1 Micromirror element and micromirror array
10/30/2008CA2764402A1 Micromirror element and micromirror array
10/29/2008EP1194369B1 Thermal bend actuator for a micro electro-mechanical device
10/29/2008CN100429791C Semiconductor device manufacturing method and accelerator sensor
10/29/2008CN100429555C Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects
10/29/2008CN100429141C Micro-oscillating member, light-deflector, and image-forming apparatus
10/28/2008US7443569 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
10/28/2008US7443002 Encapsulated microstructure and method of producing one such microstructure
10/28/2008US7441321 Method of manufacturing ultrasound transducer device having acoustic backing
10/23/2008WO2008072163A3 Mems device with controlled electrode off-state position
10/23/2008US20080259253 Mechanical Structure Including a Layer of Polymerised Liquid Crystal and Method of Manufacturing Such
10/23/2008US20080259226 Mechanical Shutter with Polymerised Liquid Crystal Layer
10/23/2008US20080258108 Flexible Foil Moveable by Means of Light
10/23/2008US20080257497 Device for manufacturing a silicon structure, and manufacturing method thereof
10/23/2008DE102007051820A1 Mikromechanisches Bauelement mit erhöhter Steifigkeit Micromechanical component with increased stiffness
10/22/2008EP1983584A2 Piezoelectric macro-fiber composite actuator and manufacturing method
10/22/2008EP1410436B1 Parallel, individually addressable probes for nanolithography
10/21/2008US7441134 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
10/21/2008US7440254 Micro-electromechanical variable capacitor
10/21/2008US7439823 Electromechanical filter
10/21/2008US7439547 Micro electro mechanical system apparatus
10/21/2008US7438887 A single crystal ultra-long nanowire includes an ordered porous manganese oxide-based octahedral molecular sieve in the form of a layer; microporous network; axially aligned layers; superior thermal and chemical properties to organic polymers; decreased brittleness; increased mechanical properties
10/16/2008WO2008124084A2 Nanoelectromechanical systems and methods for making the same
10/16/2008WO2008123525A1 Fabry-perot type wavelength-variable filter and its manufacturing method
10/16/2008WO2008123165A1 Functional element package and fabrication method therefor
10/16/2008WO2008021144A3 Mems comb drive actuators and method of manufacture
10/16/2008DE102008012826A1 Verfahren zur Erzeugung einer mikro-mechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement Method for producing a micromechanical structure from two-dimensional elements and micromechanical component
10/15/2008EP1981034A1 Actuator element
10/15/2008EP1979939A1 Miniaturized high conductivity thermal/electrical switch
10/15/2008EP1979267A2 Microelectromechanical device and method utilizing a porous surface
10/15/2008EP1588383B1 Probe for an optical near field microscope and method for producing the same
10/15/2008CN101288137A Mems tunable device
10/15/2008CN101286714A Electrothermal micro-driver of composite material with V-type beam
10/15/2008CN101284643A Method for fabricating a structure for a microelectromechanical systems (MEMS) device
10/15/2008CN101284642A Micromechanical device with tilted electrodes
10/15/2008CN100425524C Electromagnet excitated high order mode silicon micromechanical cantilever driving structure, its production method and uses
10/14/2008US7436574 Frequency tunable resonant scanner
10/14/2008US7435991 Micromechanical sensor
10/14/2008US7434457 Fluid property sensors
10/09/2008WO2008121543A2 Microelectromechanical device and method utilizing conducting layers separated by stops
10/09/2008US20080249510 Membrane-based fluid control in microfluidic devices
10/09/2008US20080246558 Miniature RF and Microwave Components and Methods for Fabricating Such Components
10/09/2008DE102008013098A1 Mikromechanisches Bauelement mit Temperaturstabilisierung und Verfahren zur Einstellung einer definierten Temperatur oder eines definierten Temperaturverlaufes an einem mikromechanischen Bauelement Micromechanical component with temperature stabilization and method for setting a defined temperature or a defined temperature profile on a micromechanical device
10/09/2008DE102007015726A1 Auslenkbare Struktur, mikromechanische Struktur mit derselben und Verfahren zur Einstellung einer mikromechanischen Struktur Deflectable structure, micromechanical structure with the same and method for adjusting a micromechanical structure
10/08/2008EP1753534B1 A valve for a microfluidic device
10/08/2008EP1641710B1 Micromechanical apparatus and method of forming a micromechanical device layer
10/08/2008EP1296886B1 Method for producing a micromechanical component
10/08/2008CN101282903A Mems device having support structures configured to minimize stress-related deformation and methods for fabricating same
10/08/2008CN101281209A Inertial sensor and electrical or electronic device
10/08/2008CN101279708A Micromechanical device of increased rigidity
10/08/2008CN101279707A Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure
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