| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/08/2009 | WO2009005160A2 Oscillator device |
| 01/08/2009 | WO2009003811A2 Micromechanical component comprising a relatively thick oscillating element in relation to a thin suspension element |
| 01/08/2009 | WO2009003803A2 Micromechanical component and method for exciting oscillations in an oscillating element of a micromechanical component |
| 01/08/2009 | WO2008131981A3 Micromechanical membrane sensor with reduced stray capacitance and corresponding production method |
| 01/08/2009 | WO2008100838A3 Shelled thermal structures for fluid sensing |
| 01/08/2009 | US20090007668 Multi-axis capacitive transducer and manufacturing method for producing it |
| 01/08/2009 | DE102007030994A1 Mikromechanisches Bauelement und Verfahren zur Schwingungsanregung eines Schwingungselements eines mikromechanischen Bauelements Micro-mechanical device and method for vibration excitation of a vibration element of a micromechanical component |
| 01/08/2009 | DE102007030797A1 Mikromechanisches Bauelement mit einem vergleichsweise dicken schwingfähigen Element gegenüber einem dünnen Aufhängungselement Micromechanical component with a comparatively thick vibratable element with respect to a thin suspension member |
| 01/08/2009 | DE10102993B4 Herstellungsverfahren für ein mikromechanisches Bauelement Manufacturing method for a micromechanical component |
| 01/08/2009 | CA2691674A1 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/07/2009 | EP2012169A2 MEMS devices having improved uniformity and methods for making them |
| 01/07/2009 | EP2012168A2 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/07/2009 | EP2012167A2 Integrated imods and solar cells on a substrate |
| 01/07/2009 | EP2012166A2 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/07/2009 | EP2012165A2 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/07/2009 | EP2011132A2 Capacitive micro- electro- mechanical sensors with single crystal silicon electrodes |
| 01/07/2009 | EP1534433A4 Valve assembly for microfluidic devices, and method for opening and closing same |
| 01/07/2009 | CN101339202A Semiconductor device and manufacturing method of the same |
| 01/07/2009 | CN100449789C Method of manufacturing a micro-electrical-mechanical system |
| 01/07/2009 | CN100448771C Method of predetermining micro structure mechanical property |
| 01/06/2009 | US7474452 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 01/06/2009 | US7473572 Micromechanical sensors and methods of manufacturing same |
| 01/02/2009 | DE10291877B4 Mikroschalter und Verfahren zum Herstellen eines Mikroschalters Micro-switch and method of manufacturing a micro-switch |
| 01/02/2009 | DE10046958B4 Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse Capacitive device for detecting a physical quantity |
| 01/01/2009 | US20090004765 Method of manufacturing micro-optic device |
| 01/01/2009 | US20090004388 Method for Depositing an Anti-Adhesion Layer |
| 01/01/2009 | US20090003039 Electromechanical Memory, Electric Circuit Using the Same, and Method of Driving Electromechanical Memory |
| 01/01/2009 | US20090000365 AFM Tweezers, Method for Producing AFM Tweezers, and Scanning Probe Microscope |
| 12/31/2008 | WO2009002523A2 Micro-electro-mechanical systems and photonic interconnects employing the same |
| 12/31/2008 | WO2009001848A1 Microrelay |
| 12/31/2008 | WO2009000687A1 Detector of micromechanical resonator design having a coating for gas molecules to be detected |
| 12/31/2008 | WO2008114199A3 An actuator device and a method of manufacturing the same |
| 12/31/2008 | WO2003036737A8 Stiffened surface micromachined structures and process for fabricating the same |
| 12/31/2008 | EP2008965A2 Resonant device with piezoresistive detection made using surface technologies |
| 12/31/2008 | EP2008964A2 Micro-oscillation element and array of micro-oscillation elements |
| 12/31/2008 | EP1485758B1 A method for fabricating a structure for a microelectromechanical systems (mems) device |
| 12/31/2008 | EP1456699B1 Microsystem switches |
| 12/31/2008 | EP1227534B1 Small-sized phase shifter and method of manufacture thereof |
| 12/31/2008 | CN101335137A Planar flexible tri-steady mechanism |
| 12/31/2008 | CN101334526A micro-oscillation element and array of micro-oscillation elements |
| 12/31/2008 | CN100448046C Micromachined electromechanical device |
| 12/31/2008 | CN100447915C Micro-electromechanical inductive switch |
| 12/31/2008 | CN100447467C Microvalve integrated in flow passage |
| 12/31/2008 | CN100447074C Micromachine and method of manufacturing the micromachine |
| 12/31/2008 | CA2690010A1 A micro relay |
| 12/30/2008 | US7470003 Ink jet printhead with active and passive nozzle chamber structures arrayed on a substrate |
| 12/30/2008 | CA2492865C Microfluidic devices, methods, and systems |
| 12/25/2008 | US20080314131 Sample manipulating apparatus |
| 12/24/2008 | WO2008157325A2 Devices, systems, and methods for measuring glucose |
| 12/24/2008 | WO2008156504A2 Self-assembled nanoparticles - nanotube structures based on antenna chemistry of conductive nanorods |
| 12/24/2008 | WO2008118740A3 Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry |
| 12/24/2008 | EP2006247A2 MEMS device with an angular vertical comb actuator |
| 12/24/2008 | EP2005127A1 Cantilever light detectors |
| 12/24/2008 | EP2004278A1 Method for producing implant structures for contacting or electrically stimulating living tissue cells or nerves |
| 12/24/2008 | EP1494866B1 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
| 12/24/2008 | EP1258035A4 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 12/24/2008 | DE102007028292A1 Bauelement mit spannungsreduzierter Befestigung Component with reduced voltage mounting |
| 12/24/2008 | CN101327904A Micro structre and manufacture method thereof |
| 12/23/2008 | US7468826 Silicon mirrors having reduced hinge stress from temperature variations |
| 12/18/2008 | WO2008154652A2 Mems actuator with discretely controlled multiple motions |
| 12/18/2008 | WO2008153395A1 Actuator for manipulating a fluid, comprising an electro-active polymer or an electro-active polymer composition |
| 12/18/2008 | WO2008152927A1 Microdevice for display |
| 12/18/2008 | WO2008121543A3 Microelectromechanical device and method utilizing conducting layers separated by stops |
| 12/18/2008 | DE19957111B4 Halbleitervorrichtung mit flacher Schutzklebstofffolie und Herstellungsverfahren dafür A semiconductor device with a flat protection adhesive film and production method thereof |
| 12/18/2008 | DE102007027428A1 Bauelement mit einem Schwingungselement Component having a vibration member |
| 12/17/2008 | EP2002535A2 Electromechanical transducer |
| 12/17/2008 | EP1475856B1 Micromachine vibration filter |
| 12/17/2008 | EP1155442B1 Method for fabricating a multilayer structure with controlled internal stresses |
| 12/17/2008 | CN100444422C Electronic component, electronic component module and mfg. method for said electronic component |
| 12/16/2008 | US7466065 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 12/16/2008 | US7466000 Semiconductor device having multiple substrates |
| 12/16/2008 | US7465026 Nozzle arrangement with thermally operated ink ejection piston |
| 12/11/2008 | WO2008150016A1 Piezoelectric mirror device, optical device using the piezoelectric mirror device and method for manufacturing piezoelectric mirror device |
| 12/11/2008 | WO2008148654A2 Electrical contact for a micromechanical component |
| 12/11/2008 | WO2008148413A1 Rolled- up micro-solenoids and micro-transformers |
| 12/11/2008 | US20080303873 Printhead with reciprocating cantilevered thermal actuators |
| 12/11/2008 | US20080302559 Flexible and elastic dielectric integrated circuit |
| 12/11/2008 | DE10392426B4 Halbleitervorrichtungs-Herstellungsverfahren A semiconductor device manufacturing method |
| 12/11/2008 | DE102008007682A1 Modul mit einem Mikro-Elektromechanischen Mikrofon Module with a micro-electro-mechanical microphone |
| 12/11/2008 | DE102007051879A1 Gattungsbildender mikromechanischer Siliziumkreisel Genus visual silicon micromechanical gyroscope |
| 12/11/2008 | DE10196643B4 Herstellungsverfahren für einen Dünnschicht-Strukturkörper Manufacturing method of a thin-film structure body |
| 12/10/2008 | CN100442540C Micro electro-mechanical variable capacitor |
| 12/10/2008 | CN100442101C Semiconductor optoelectronic device with electrically adjustable transfer function |
| 12/09/2008 | US7463454 Micro-actuator for hard drive utilizing insulating portions to separate biasing regions from adjacent regions of the micro-actuator and simplified manufacture process therefore |
| 12/04/2008 | WO2008108865A3 Energy storing and recovering device working like spring motors using nanotubes as spring |
| 12/04/2008 | US20080295585 Tweezer-Equipped Scanning Probe Microscope and Transfer Method |
| 12/03/2008 | EP1998212A2 Methods of fabricating interferometric modulators having black masks and devices formed by same |
| 12/03/2008 | EP1998211A2 Methods of fabricating mems with a shaped substrate and devices formed by same |
| 12/03/2008 | EP1998210A2 Methods of fabricating mems with a carrier for patterned mechanical strips and devices formed by same |
| 12/03/2008 | EP1998209A2 Methods of fabricating static interferometric display devices and devices formed by same |
| 12/03/2008 | EP1861926B1 Method of manufacturing vibrating micromechanical structures |
| 12/03/2008 | CN101317328A Micro-electromechanical device |
| 12/03/2008 | CN101316789A Micro-mechanical element capable of derivation |
| 12/03/2008 | CN100440420C Method of forming semiconductor devices through epitaxy |
| 12/03/2008 | CN100439233C Method for selectively covering a micro machined surface |
| 12/02/2008 | US7459827 Piezoelectric-driven MEMS device and method for manufacturing the same |
| 12/02/2008 | US7459331 Micro mirror unit and method of making the same |
| 12/02/2008 | US7459329 Method of fabricating silicon-based MEMS devices |
| 12/02/2008 | US7459325 MEMS passivation with transition metals |
| 11/27/2008 | WO2008142980A1 Two-direction shape-memory alloy thin film actuator and method for manufacturing shape-memory alloy thin film used in the actuator |