| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/12/2009 | WO2009031968A1 Multi-stable actuator |
| 03/12/2009 | WO2009030572A1 Piezoelectric energy converter having a double membrane |
| 03/12/2009 | WO2009003803A3 Micromechanical component and method for exciting oscillations in an oscillating element of a micromechanical component |
| 03/12/2009 | WO2009002523A3 Micro-electro-mechanical systems and photonic interconnects employing the same |
| 03/12/2009 | US20090068781 Method of manufacture for microelectromechanical devices |
| 03/12/2009 | US20090065429 Stiffened surface micromachined structures and process for fabricating the same |
| 03/12/2009 | US20090064785 Integrated micro electro-mechanical system and manufacturing method thereof |
| 03/12/2009 | US20090064495 Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates |
| 03/12/2009 | DE102007057044A1 Mikromechanische Feder Micromechanical spring |
| 03/11/2009 | EP2032976A1 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| 03/11/2009 | EP1733468B1 Method for producing comb drive devices using etch buffers |
| 03/11/2009 | EP1075452B1 Temperature compensated microelectromechanical structures |
| 03/10/2009 | US7502482 Membrane and method for the production of the same |
| 03/05/2009 | WO2009028152A1 Piezoelectric actuator, optical reflection element using the same and piezoelectric driver |
| 03/05/2009 | WO2009010354A3 Micromechanical component and method for operating a micromechanical component |
| 03/05/2009 | WO2009005160A3 Oscillator device |
| 03/05/2009 | WO2008157325A3 Devices, systems, and methods for measuring glucose |
| 03/05/2009 | WO2008154652A3 Mems actuator with discretely controlled multiple motions |
| 03/05/2009 | WO2005078772A3 Method and apparatus for making a mems scanner |
| 03/04/2009 | EP2029475A1 Microstructure, micromachine, and manufacturing method of microstructure and micromachine |
| 03/04/2009 | EP1616159B1 Honeycomb-structured electromagnetic radiation thermal detector |
| 03/04/2009 | CN100466181C Electromechanical memory array using nanotube ribbons and the production method thereof |
| 03/03/2009 | US7498901 Filter device and transmitter-receiver utilizing beam-structured micro-resonators |
| 02/26/2009 | WO2009024762A2 Mems process and device |
| 02/26/2009 | US20090053846 Methods of Making Electromechanical Three-Trace Junction Devices |
| 02/26/2009 | US20090049911 Integrated micro electro-mechanical system and manufacturing method thereof |
| 02/25/2009 | CN101374757A Fluid-controlled structure, apparatus, method, and method for configuring instrument |
| 02/24/2009 | US7495882 Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors |
| 02/24/2009 | US7495302 Micromechanical component having a diaphragm |
| 02/24/2009 | US7494839 Method for manufacturing a membrane sensor |
| 02/24/2009 | US7494555 Microfabricated elastomeric valve and pump systems |
| 02/19/2009 | WO2009023088A1 Thermal actuator for a mems-based relay switch |
| 02/19/2009 | WO2009022498A1 Electronic component manufacturing method |
| 02/19/2009 | WO2009003811A3 Micromechanical component comprising a relatively thick oscillating element in relation to a thin suspension element |
| 02/19/2009 | US20090045473 Devices having horizontally-disposed nanofabric articles and methods of making the same |
| 02/18/2009 | EP2024775A2 Analog interferometric modulator device with electrostatic actuation and release |
| 02/18/2009 | EP2024271A1 Arrangement of electrodes with respect to moving micromechanical elements |
| 02/18/2009 | EP2024141A1 Production of a microgripper by means of a material deposition method |
| 02/18/2009 | EP1335878B1 Microstructure component |
| 02/18/2009 | CN101371132A Self-exciting, self-sensing piezoelectric cantilever sensor |
| 02/17/2009 | US7492020 Micro structure with interlock configuration |
| 02/17/2009 | US7491566 Method of forming a device by removing a conductive layer of a wafer |
| 02/12/2009 | WO2009020526A1 Tapered reinforcing struts for micromachined structures |
| 02/12/2009 | WO2009019086A1 Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component |
| 02/12/2009 | US20090040585 Optical scanning apparatus and image displaying apparatus having the same |
| 02/12/2009 | DE102007037555A1 Mikromechanisches Bauelement und Verfahren zur Schwingungsanregung eines Schwingungselements eines mikromechanischen Bauelements Micro-mechanical device and method for vibration excitation of a vibration element of a micromechanical component |
| 02/11/2009 | EP2022753A1 Flexible micro/nanofluidic devices |
| 02/11/2009 | EP1494868B1 Pusher actuation in a printhead chip for an inkjet printhead |
| 02/11/2009 | CN101364774A Electricity driving apparatus for minimized motor |
| 02/11/2009 | CN100460933C Mechanical structure including a layer of polymerised liquid crystal and manufacturing method thereof |
| 02/10/2009 | US7489211 Electromechanical filter and electrical circuit and electrical equipment employing electromechanical filter |
| 02/05/2009 | WO2008035295A3 A micro-actuator device for the use in a biochip or biosystem |
| 02/05/2009 | WO2008020903A3 Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| 02/04/2009 | EP1243915B1 Apparatus for evaluating electrical characteristics |
| 02/04/2009 | CN101360679A Fluid actuator, heat generating device using the same, and analysis device |
| 02/03/2009 | US7485571 Method of making an integrated circuit |
| 02/03/2009 | US7485485 Method and apparatus for making a MEMS scanner |
| 01/29/2009 | WO2009014118A1 Mems sensor, and mems sensor manufacturing method |
| 01/29/2009 | WO2009012920A1 Apparatus and method for charge transfer |
| 01/28/2009 | EP2019301A1 Electromagnetic radiation detector and method of manufacturing such a detector |
| 01/27/2009 | US7483261 Cooling device for an electronic equipment |
| 01/27/2009 | US7483197 Photonic MEMS and structures |
| 01/27/2009 | US7482900 Micro relay |
| 01/27/2009 | US7482730 High performance MEMS scanner |
| 01/27/2009 | US7482194 Electronic component having micro-electrical mechanical system |
| 01/27/2009 | US7481518 Ink jet printhead integrated circuit with surface-processed thermal actuators |
| 01/22/2009 | WO2009010355A2 Micromechanical component and method for operating a micromechanical component |
| 01/22/2009 | WO2009010354A2 Micromechanical component and method for operating a micromechanical component |
| 01/22/2009 | WO2009010309A1 Microsystem and method for the production of a microsystem |
| 01/22/2009 | DE102007034888B3 Mikrosystem und Verfahren zum Herstellen eines Mikrosystems Micro system and method for producing a microsystem |
| 01/22/2009 | DE102007034701A1 Halbleitersubstrat und Verfahren zum Herstellen eines Halbleiterbauelements Semiconductor substrate and method for fabricating a semiconductor device |
| 01/22/2009 | DE102007033441A1 Vorrichtung zur gleichzeitigen Messung von Kräften Device for the simultaneous measurement of forces |
| 01/22/2009 | DE102007033002A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 01/22/2009 | DE102007033001A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component |
| 01/22/2009 | DE102007033000A1 Mikromechanisches Bauteil mit einem Positionserkennungsbauteil zur Positionsbestimmung und Amplitudenbestimmung eines schwingfähigen Elements Micromechanical component with a position-detecting device for determining the position and amplitude determination of a vibratable element |
| 01/21/2009 | CN101351399A Electronic part sealing board, electronic part sealing board in multiple part form, electronic device using electronic part sealing board, and electronic device fabricating method |
| 01/20/2009 | US7479694 Membrane 3D IC fabrication |
| 01/20/2009 | US7479234 Method for producing cavities having optically transparent wall |
| 01/20/2009 | US7479232 Method for producing a semiconductor component and a semiconductor component produced according to the method |
| 01/20/2009 | US7479186 Systems and methods for mixing reactants |
| 01/15/2009 | WO2009009319A1 A method and apparatus for coupling a microelectromechanical system scanner mirror to a frame |
| 01/15/2009 | WO2009007499A1 Measuring arrangement and method |
| 01/15/2009 | DE102008021175A1 Resonator, Oszillator und Kommunikationsvorrichtung Resonator, oscillator, and communication device |
| 01/14/2009 | EP2015358A2 Non-volatile SRAM memory cell with mobile-gate transistors and piezoelectric activation |
| 01/14/2009 | EP2014611A2 Suspended-gate MOS transistor with non-volatile operation by piezoelectric activation |
| 01/14/2009 | EP2014610A1 Actuator for manipulating a fluid, comprising an electro-active polymer or an electro-active polymer composition |
| 01/14/2009 | EP1544161B1 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device |
| 01/14/2009 | EP1532069B1 Thermal movement sensor |
| 01/14/2009 | EP1476780B1 Folded longitudinal torsional hinge for gimbaled mems mirror hinge |
| 01/14/2009 | EP1186002A4 Ic-compatible parylene mems technology and its application in integrated sensors |
| 01/14/2009 | CN100451725C Mirror device, mirror array, optical switch, and manufacturing method thereof |
| 01/13/2009 | US7477817 Probe for an optical near field microscope with improved scattered light suppression and method for producing the same |
| 01/13/2009 | US7476951 Selective isotropic etch for titanium-based materials |
| 01/13/2009 | US7476948 Microminiature moving device and method of making the same |
| 01/13/2009 | US7476561 Method of making microminiature moving device |
| 01/13/2009 | US7476327 Method of manufacture for microelectromechanical devices |
| 01/08/2009 | WO2009006122A1 Integrated imods and solar cells on a substrate |
| 01/08/2009 | WO2009006120A1 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/08/2009 | WO2009006119A1 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 01/08/2009 | WO2009006118A2 Microelectromechanical device with optical function separated from mechanical and electrical function |