| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/13/2009 | EP2058276A2 Capacitive MEMS device with programmable offset voltage control |
| 05/13/2009 | EP1593164A4 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 05/13/2009 | EP1592551A4 Nanofabric articles and methods of making the same |
| 05/13/2009 | EP1514110A4 An apparatus and method for two-dimensional electron gas actuation and transduction for gaas nems |
| 05/13/2009 | CN101428751A Micro electro-mechanical system and manufacturing method therefor |
| 05/13/2009 | CN100487837C Micro-electromechanical varactor with enhanced tuning range |
| 05/12/2009 | US7532385 Optical interference display panel and manufacturing method thereof |
| 05/07/2009 | WO2009057801A1 Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it |
| 05/07/2009 | WO2009057202A1 Micro movable element and micro movable element array |
| 05/07/2009 | WO2009056654A1 Method for the production of micro/nanofluidic devices for flow control and resulting device |
| 05/07/2009 | WO2009039640A9 A system, apparatus and method for applying mechanical force to a material |
| 05/07/2009 | WO2008156504A3 Self-assembled nanoparticles - nanotube structures based on antenna chemistry of conductive nanorods |
| 05/07/2009 | WO2007084341A3 Hysteretic mems thermal device and method of manufacture |
| 05/07/2009 | US20090115283 High-deformation composite microresonator |
| 05/07/2009 | US20090114954 Method of Forming a Device by Removing a Conductive Layer of a Wafer |
| 05/07/2009 | DE10200873B4 Dynamischer Sensor mit einer sich in Übereinstimmung mit einer darauf ausgeübten dynamischen Kraft ändernden Kapazität Dynamic sensor with a capacity varying in accordance with a dynamic force exerted thereon |
| 05/07/2009 | DE102007052787A1 Piezo-optical photon detector for detecting electromagnetic radiation in area of terahertz radiation, comprises component made of piezo-material, where radiation for measuring is applied at displaceable section by optical light conductors |
| 05/07/2009 | DE102007052367A1 Mikromechanisches System Micromechanical System |
| 05/06/2009 | EP2054336A2 Large area induced assembly of nanostructures |
| 05/06/2009 | EP1419396B1 Arcuately shaped flexures for micro-machined electromechanical system (mems) accelerometer device |
| 05/06/2009 | CN101426717A Torsion resilient element for hanging micromechanical elements which can be deflected |
| 04/30/2009 | WO2009053267A1 Complex-valued spatial light modulator |
| 04/29/2009 | CN101421597A Cantilever light detectors |
| 04/29/2009 | CN100483941C Temperature compensation mechanism for a micromechanical ring resonator |
| 04/29/2009 | CN100483740C MOS transistor with deformable gate |
| 04/29/2009 | CN100483610C Conductive etch stop for etching a sacrificial layer |
| 04/29/2009 | CN100483592C Microelectromechanical micro-relay with liquid metal contacts |
| 04/28/2009 | US7525718 Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 04/28/2009 | US7523560 Method and apparatus for detecting an electronic product being placed vertically of horizontally |
| 04/24/2009 | CA2641081A1 Electrical connection through a substrate to a microelectromechanical device |
| 04/23/2009 | WO2009050166A2 Semiconductor element and method for processing of a semiconductor element |
| 04/23/2009 | US20090101998 Electro-acoustic sensing device |
| 04/22/2009 | EP2049435A2 A multi-die apparatus including moveable portions |
| 04/22/2009 | CN101412494A Substrate support device |
| 04/22/2009 | CN100480510C Method for driving pump |
| 04/21/2009 | US7521736 Electromechanical three-trace junction devices |
| 04/16/2009 | WO2009048952A1 Liquid-gap electrostatic hydraulic micro actuators |
| 04/16/2009 | WO2009048526A1 Micro-electromechanical microshutter array |
| 04/16/2009 | WO2006134580A3 Micro-electro-mechanical transducer having an insulation extension |
| 04/16/2009 | US20090095927 Thermally actuated valves, photovoltaic cells and arrays comprising same, and methods for producing same |
| 04/16/2009 | DE102008046860A1 Mikrohergestellter akustischer Transducer mit einer Mehrschichtelektrode The fabricated micro-acoustic transducer with a multilayer electrode |
| 04/16/2009 | DE102007051591A1 Mikromechanische Vorrichtung mit Antriebsrahmen Micromechanical device with drive frame |
| 04/16/2009 | DE102007047010A1 Mikromechanisches Bauelement zur Modulation von elektromagnetischer Strahlung Micro-mechanical device for modulating electromagnetic radiation |
| 04/16/2009 | DE102006052693B4 Verfahren zur Fertigung eines Halbleitersensors A method for manufacturing a semiconductor sensor |
| 04/15/2009 | EP1116003B1 Apparatus for controlling fluid in a micromachined boiler |
| 04/15/2009 | CN101410717A Device and method for measuring electrical power |
| 04/15/2009 | CN100479195C Semiconductor device having actuator |
| 04/14/2009 | US7517164 Computer keyboard with a planar member and endless belt feed mechanism |
| 04/09/2009 | WO2009045346A2 Mems actuator |
| 04/09/2009 | WO2009044041A2 Actuator device with electro-active membrane |
| 04/09/2009 | WO2005031299A3 Sensor platform using a non-horizontally oriented nanotube element |
| 04/09/2009 | DE10310161B4 Monolithisch integrierte Schaltkreis-Anordnung The monolithic integrated circuit arrangement |
| 04/09/2009 | DE10130713B4 Halbleiterchip mit Sensorelementen und dynamischer Halbleitersensorchip und Verfahren zu deren Herstellung Semiconductor chip having sensing elements and dynamic semiconductor sensor chip and methods of manufacture |
| 04/08/2009 | EP2045645A1 Micro actuator, optical unit, exposure device, and device manufacturing method |
| 04/08/2009 | EP1846320B8 Micromechanical device comprising a mobile beam |
| 04/08/2009 | CN101405215A Microstructure, micromachine, and manufacturing method of microstructure and micromachine |
| 04/08/2009 | CN101402444A Mould condition excitation both-end fine beam and mould condition shape electrode width determining method thereof |
| 04/08/2009 | CN101402443A Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof |
| 04/07/2009 | US7515783 Micro-optic device and method of manufacturing same |
| 04/07/2009 | US7515023 Micro-switching device and method of manufacturing micro-switching device |
| 04/07/2009 | US7514283 Method of fabricating electromechanical device having a controlled atmosphere |
| 04/02/2009 | WO2009039640A1 A system, apparatus and method for applying mechanical force to a material |
| 04/02/2009 | US20090087630 Carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| 04/02/2009 | US20090085976 Nozzle arrangement for an inkjet printhead having an ink ejecting roof structure |
| 04/02/2009 | DE102007046498A1 Mikroelektromechanisches Bauelement und Herstellungsverfahren The micro-electro-mechanical device and manufacturing method |
| 04/02/2009 | DE10035605B4 Halbleitersensoren für eine Physikalische Grösse Semiconductor sensors for Physical Size |
| 04/02/2009 | CA2700946A1 A system, apparatus and method for applying mechanical force to a material |
| 04/01/2009 | EP2042466A2 A method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 04/01/2009 | EP1890958B1 Micromechanical component with active elements and method for producing a component of this type |
| 04/01/2009 | EP1345551B1 Microfabricated elastomeric valve and pump systems |
| 04/01/2009 | CN101397121A Silicon nanowire pressure sensor, cantilever beam, production method and pressure measurement method thereof |
| 04/01/2009 | CN101397120A Micromachined electromechanical device |
| 04/01/2009 | CN100474519C Three beam MEMS device and correlation method |
| 04/01/2009 | CN100474029C Micro-optic device manufacturing method |
| 04/01/2009 | CN100473350C Embedded piezoelectric microcantilever sensors |
| 03/31/2009 | US7511402 Polymer actuator |
| 03/31/2009 | US7511318 Electromechanical memory array using nanotube ribbons and method for making same |
| 03/26/2009 | WO2009038501A1 Systems, device and object comprising electroactive polymer material, methods and uses relating to operation and provision thereof |
| 03/26/2009 | WO2009037480A2 Mems transducer with reduced stress in the back- plate |
| 03/26/2009 | WO2009037458A2 Mems device and process |
| 03/26/2009 | WO2009037456A2 Mems device with reduced stress in the membrane and manufacturing method |
| 03/26/2009 | WO2009037256A2 Microelectromechanical component and production method |
| 03/26/2009 | WO2009010355A3 Micromechanical component and method for operating a micromechanical component |
| 03/26/2009 | US20090080044 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 03/26/2009 | US20090079017 Semiconductor device having multiple substrates |
| 03/25/2009 | EP2038206A2 Mems-based nanopositioners and nanomanipulators |
| 03/25/2009 | EP1412550B1 Support with getter-material for micromechanical device |
| 03/25/2009 | CN100472270C A microelectromechanical systems device and method for fabricating same |
| 03/24/2009 | US7507669 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 03/24/2009 | US7506961 Printer with serially arranged printhead modules for wide format printing |
| 03/19/2009 | WO2009036213A2 Interferometric modulator display devices |
| 03/19/2009 | WO2009035984A2 Periodic dimple array |
| 03/19/2009 | WO2009035125A1 Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor |
| 03/19/2009 | US20090074951 Substrates having through-hole vias and method of making same |
| 03/19/2009 | US20090073229 Ink jet printhead with displaceable nozzle crown |
| 03/19/2009 | DE102007034072B3 Vorrichtung und Verfahren zum Ladungstransfer Apparatus and method for charge transfer |
| 03/18/2009 | EP2035326A1 Sensor and method for producing the same |
| 03/18/2009 | CN100470697C Quick-break thermal control switch |
| 03/17/2009 | US7505394 Flexible membrane comprising notches |
| 03/17/2009 | US7504658 Sensor elements with cantilevered bar structures made of semiconductors based on group III-nitride |