| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/16/2009 | US20090181487 Method of making microminiature moving device |
| 07/15/2009 | EP1723072B1 Mechanical sensor with pyramid socket suspension |
| 07/15/2009 | CN101484381A Method of manufacturing mems devices providing air gap control |
| 07/14/2009 | US7560070 For detecting nucleotide strand hybridization |
| 07/14/2009 | US7560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 07/09/2009 | WO2009085585A2 Mems structure for flow sensor |
| 07/09/2009 | WO2009037256A3 Microelectromechanical component and production method |
| 07/08/2009 | CN101475134A Devices having vertically-disposed nanofabric articles and methods of making the same |
| 07/08/2009 | CN100510835C Microactuator |
| 07/07/2009 | US7558453 Arrangement of a micro-optical component on a substrate, a method for adjustment of the arrangement, and an optical system with the arrangement |
| 07/07/2009 | US7556979 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 07/07/2009 | US7556355 Inkjet nozzle arrangement with electro-thermally actuated lever arm |
| 07/02/2009 | WO2009081459A1 Manufacturing method of packaged micro moving element and the packaged micro moving element |
| 07/02/2009 | WO2009037458A3 Mems device and process |
| 07/02/2009 | US20090165876 Microfluidic Structures |
| 07/02/2009 | US20090165295 Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates |
| 07/02/2009 | DE102007062707A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 07/01/2009 | EP2075224A2 Method for manufacturing a micromechanical or nanomechanical device with anti-stiction bumps |
| 07/01/2009 | EP2075220A2 Micromechanical element with reduced stress gradient |
| 07/01/2009 | CN101468784A Semiconductor miniature suspension structure and method of producing the same |
| 07/01/2009 | CN100506685C Method of driving micro-channel fluid utilizing magnetic droplet |
| 06/30/2009 | US7553686 Al2O3 atomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices |
| 06/25/2009 | WO2009079460A1 Electrothermal microactuator for large vertical displacement without tilt or lateral shift |
| 06/25/2009 | WO2009079188A1 Mems resonator structure and method for use in association with the resonator structure |
| 06/25/2009 | US20090162534 Membrane and method for the production of the same |
| 06/25/2009 | DE102007061727A1 Mikromechanisches Bauelement Micromechanical component |
| 06/25/2009 | DE102007061096A1 Mikromechanisches Bauelement mit auslenkfähigem Element Micromechanical component with auslenkfähigem element |
| 06/25/2009 | DE102007060878A1 Mikromechanisches System Micromechanical System |
| 06/25/2009 | DE10058864B4 Mikromechanikstruktur für integrierte Sensoranordnungen und Verfahren zur Herstellung einer Mikromechanikstruktur Micromechanics structure for integrated sensor arrays and methods for making a micromechanical structure |
| 06/24/2009 | EP2072456A2 Micromechanical element with reduced stress in the membrane structure |
| 06/24/2009 | CN100503879C Support for microelectronic, microoptoelectronic or micromechanical devices |
| 06/23/2009 | US7551044 Electric machine signal selecting element |
| 06/23/2009 | US7550895 Method for driving micro-oscillating element having comb-teeth electrodes |
| 06/23/2009 | US7550805 Stress-controlled dielectric integrated circuit |
| 06/23/2009 | US7550794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
| 06/23/2009 | US7549962 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components |
| 06/20/2009 | CA2645834A1 Mems microswitch having a conductive mechanical stop |
| 06/18/2009 | WO2009076680A1 Low-cost process-independent rf mems switch |
| 06/18/2009 | WO2009076074A1 Mems devices requiring no mechanical support |
| 06/18/2009 | US20090153935 Actuator |
| 06/18/2009 | US20090152654 Micromechanical system |
| 06/18/2009 | US20090151422 Microfabricated elastomeric valve and pump systems |
| 06/18/2009 | DE19924061B4 Halbleiterdrucksensor mit Dehnungsmeßstreifen und Spannungsausgleichsfilm Semiconductor pressure sensor with strain and stress compensation film |
| 06/18/2009 | DE19530510B4 Verfahren zur Herstellung eines Halbleitersensors mit aufgehängter bzw. beweglich gehaltener Mikrostruktur A process for producing a semiconductor sensor with movable held or suspended microstructure |
| 06/18/2009 | DE19521712B4 Vorrichtung zum Erfassen einer physikalischen Größe A device for detecting a physical quantity |
| 06/17/2009 | CN101460392A Oscillating, deflectable micromechanical element and method for use thereof |
| 06/17/2009 | CN100501495C Optical controller |
| 06/17/2009 | CN100501455C Regulating composite micro lens device with micro motor structure controller |
| 06/16/2009 | US7547402 Flexible foil moveable by means of light |
| 06/11/2009 | WO2009071746A1 Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
| 06/11/2009 | US20090146228 Microminiature moving device |
| 06/10/2009 | EP2067159A2 Micro-acutuator and locking switch |
| 06/10/2009 | EP2066582A2 A micro-actuator device for the use in a biochip or biosystem |
| 06/10/2009 | DE102006057384B4 Halbleiterbauelement und Verfahren zum Herstellen eines solchen A semiconductor device and method for manufacturing such a |
| 06/10/2009 | CN100498407C Bulk silicon mirrors with hinges underneath |
| 06/09/2009 | US7545251 Micro-electromechanical actuator |
| 06/09/2009 | US7545236 Electromechanical filter utilizing a quantum device and sensing electrode |
| 06/09/2009 | US7545234 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof |
| 06/04/2009 | WO2009070622A2 Cantilever with pivoting actuation |
| 06/04/2009 | WO2009069807A1 Optical device, sealing board and method for manufacturing optical device |
| 06/04/2009 | WO2009069000A2 Detection apparatus |
| 06/04/2009 | WO2006123301A3 Micro-electro-mechanical transducers |
| 06/04/2009 | WO2006123300A3 Micro-electro-mechanical transducers |
| 06/04/2009 | DE102006036499B4 Mikromechanisches Bauelement Micromechanical component |
| 06/04/2009 | CA2705130A1 Cantilever with pivoting actuation |
| 06/03/2009 | EP1578579B1 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 06/02/2009 | US7540968 Micro movable device and method of making the same using wet etching |
| 06/02/2009 | CA2438810C Microfluidic valve and microactuator for a microvalve |
| 05/28/2009 | WO2009067222A1 Microfabricated cantilever slider with asymmetric spring constant |
| 05/28/2009 | WO2009035984A3 Periodic dimple array |
| 05/28/2009 | US20090134522 Micro-Electromechanical System Memory Device and Method of Making the Same |
| 05/27/2009 | EP2063452A2 A mounting arrangement |
| 05/27/2009 | EP1601874B1 Integrated microfluidic control employing programmable tactile actuators |
| 05/27/2009 | EP1514096A4 Hybrid microcantilever sensors |
| 05/27/2009 | CN100492575C Microswitching element |
| 05/27/2009 | CN100492096C MEMS scanner adapted to a laser printer |
| 05/27/2009 | CN100492095C SLM addressing methods |
| 05/26/2009 | US7538930 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 05/26/2009 | US7538471 Microactuator having increased rigidity with reduced mass |
| 05/26/2009 | US7538400 Sensor platform using a non-horizontally oriented nanotube element |
| 05/26/2009 | CA2481619C Micro-optic device and method of manufacturing same |
| 05/22/2009 | WO2009064024A1 Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device |
| 05/22/2009 | WO2009063627A1 Electromechanical device and electric equipment using the same |
| 05/22/2009 | WO2008094213A3 Large area induced assembly of nanostructures |
| 05/21/2009 | US20090130857 Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask |
| 05/21/2009 | US20090129981 Microfluidic device |
| 05/21/2009 | US20090128606 Integrated circuit (ic) incorporating rows of proximal ink ejection ports |
| 05/21/2009 | US20090127640 Method for manufacturing a semiconductor component, as well as a semiconductor component, in particular a membrane sensor |
| 05/20/2009 | EP2060532A2 Micro electro mechanical device with a gate electrode |
| 05/20/2009 | DE102007054505A1 Drehratensensor Rotation rate sensor |
| 05/20/2009 | CN100490044C Switch |
| 05/19/2009 | US7534658 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/19/2009 | US7533582 Force detector and acceleration detector and method of manufacturing the same |
| 05/14/2009 | WO2009061154A1 Flexible tactile sensor module and method for manufacturing the same |
| 05/14/2009 | WO2009060906A1 Microactuator, optical device, display, exposure apparatus and device manufacturing method |
| 05/14/2009 | WO2009059857A2 Micromechanical component comprising a membrane lattice |
| 05/14/2009 | WO2009036213A3 Interferometric modulator display devices |
| 05/14/2009 | WO2009008904A3 Microcantilever sensor for analyte detection |
| 05/14/2009 | WO2009006118A3 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 05/14/2009 | US20090122036 Controller and driver features for bi-stable display |