| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 09/23/2009 | EP2103807A1 Light-activated actuator element |
| 09/23/2009 | EP1277033B1 Micromechanical component and balancing method |
| 09/23/2009 | CN101541667A Construction planar and three-dimensional microstructures with PDMS-based conducting composition |
| 09/22/2009 | US7592739 Tunable bulk acoustic wave MEMS micro-resonator |
| 09/17/2009 | WO2009113315A1 Three-dimensional structure and method of manufacturing the same |
| 09/17/2009 | WO2009092846A8 A micromechanical resonator |
| 09/17/2009 | US20090233815 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal |
| 09/16/2009 | EP2100848A1 Micromechanical component with a mirror and its manufacturing method |
| 09/16/2009 | EP2100179A1 Micromirror actuator with encapsulation possibility and method for production thereof |
| 09/16/2009 | EP2100125A2 Piezoelectric microcantilever sensors for biosensing |
| 09/16/2009 | EP1663850B1 Process for fabricating a micro-electro-mechanical system with movable components |
| 09/16/2009 | CN100542001C Displacement continuously variable static micro electromechanical device |
| 09/15/2009 | CA2454963C Parallel, individually addressable probes for nanolithography |
| 09/10/2009 | US20090223924 Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same |
| 09/09/2009 | CN100538913C Sensor with suspending arm and optical resonator |
| 09/08/2009 | US7586668 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/08/2009 | CA2351132C Method of fabricating a suspended microstructure with a sloped support, and a suspended microstructure fabricated by the method |
| 09/08/2009 | CA2348606C Membrane-actuated charge controlled mirror |
| 09/03/2009 | WO2009107835A1 Mems device and manufacturing method of the same |
| 09/03/2009 | WO2009106674A1 Apparatus, method, and computer program product providing edgeless nanotube resonator arrays |
| 09/03/2009 | WO2009106046A1 Micromechanical actuator |
| 09/03/2009 | US20090219605 Optical interference display panel and manufacturing method thereof |
| 09/03/2009 | US20090219604 Photonic mems and structures |
| 09/03/2009 | US20090219113 Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator |
| 09/03/2009 | US20090218909 Micro-oscillation element and method for driving the same |
| 09/03/2009 | DE102008011175A1 Mikromechanischer Aktuator The micromechanical actuator |
| 09/03/2009 | DE10036106B4 Halbleitersensor für eine physikalische Größe Semiconductor sensor for a physical quantity |
| 09/02/2009 | CN101520034A Integrated normal-closed PDMS micro-valve, preparation process thereof and micro-pump containing micro-valve |
| 09/02/2009 | CN100535706C Micromirrors with off-angle electrodes and stops |
| 09/01/2009 | US7582497 Method of manufacturing micro-optic device |
| 09/01/2009 | US7582219 Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same |
| 09/01/2009 | US7581816 Nozzle arrangement with a pivotal wall coupled to a thermal expansion actuator |
| 08/27/2009 | WO2009105685A2 Molecular-scale beam pump assemblies and uses thereof |
| 08/27/2009 | WO2009105373A2 Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| 08/27/2009 | WO2009104541A1 Micromechanical resonator |
| 08/27/2009 | WO2009104486A1 Microelectromechanical device and method for fabricating the same |
| 08/27/2009 | US20090215213 Microelectromechanical device having a common ground plane and method for making aspects thereof |
| 08/27/2009 | US20090212664 Micro movable device and method of making the same using wet etching |
| 08/27/2009 | US20090212658 Micro--electromechanical actuator with spacer separated layers |
| 08/27/2009 | DE102008010241A1 Mikromechanische Vorrichtung mit Drehschwinger Micromechanical device with rotary vibrator |
| 08/26/2009 | EP1866235A4 Mems actuators and switches |
| 08/26/2009 | EP1726049B1 Wide frequency range electromechanical actuator |
| 08/26/2009 | CN101516764A A micro-actuator device for the use in a biochip or biosystem |
| 08/26/2009 | CN100533634C zipper switch with ultra-low voltage ability |
| 08/26/2009 | CN100532248C Process for fabricating a micro-electro-mechanical system with movable components |
| 08/26/2009 | CN100531915C Liquid flow micro switch for cutting-off liquid flow during the time interval |
| 08/25/2009 | US7579206 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 08/25/2009 | US7578949 Flexible foil moveable by non-mechanical means |
| 08/25/2009 | CA2356342C Piezoelectric micropump |
| 08/20/2009 | WO2009102646A1 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | WO2009102645A1 Methods for measurement and characterization of interferometric modulators |
| 08/20/2009 | WO2009085585A3 Mems structure for flow sensor |
| 08/20/2009 | DE202009007836U1 MEMS-Sensor MEMS sensor |
| 08/20/2009 | DE102008063422A1 Sensor zur Erfassung einer physikalischen Grösse Sensor for detecting a physical quantity |
| 08/20/2009 | DE102008009215A1 Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung Device for displaying symbols and optical display device produced therewith |
| 08/19/2009 | EP2090866A1 Dynamic quantity sensor and method of manufacturing it |
| 08/19/2009 | EP1769544B1 Production of a piezoelectric and pyroelectric thin film on a substrate |
| 08/19/2009 | EP1494869B1 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| 08/19/2009 | EP1269526B1 Method for depositing polycrystalline sige suitable for micromachining |
| 08/19/2009 | CN101512702A Micro-acutuator and locking switch |
| 08/19/2009 | CN100528735C Micro actuator and device having micro actuator |
| 08/13/2009 | WO2009098817A1 Optical scanner |
| 08/13/2009 | DE102008008206A1 Micromechanical actuator has swivel plate and mounting plate, in which swivel plate is held in tilted manner around axis, where surface electrode is arranged on electrode carrier surface |
| 08/13/2009 | DE102008007665A1 Micro-mechanical component has two comb electrodes, and contact element for applying voltage between comb electrodes, where former comb electrode has connection part and two electrode fingers |
| 08/12/2009 | EP1252028B1 Method of fabricating a micro machined structure |
| 08/12/2009 | CN100526207C MEMS actuators |
| 08/12/2009 | CN100526206C Thermal movement sensor |
| 08/11/2009 | US7573111 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/11/2009 | US7572660 Electrical through-plating of semiconductor chips |
| 08/06/2009 | WO2009096205A1 Actuator mechanism |
| 08/06/2009 | WO2009095170A2 Electromagnetic membrane-microactuator |
| 08/06/2009 | DE102008007345A1 Mikromechanisches Bauelement und Verfahren zur Herstellung desselben Micromechanical component and method of manufacturing the same |
| 08/05/2009 | EP1417518A4 Stress tuned blazed grating light valve |
| 08/05/2009 | CN100525090C Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator |
| 08/05/2009 | CN100523998C Optical appts. and image generator |
| 08/05/2009 | CN100523821C Accelerometers and method for reducing offset in accelerometers |
| 08/04/2009 | US7570134 Micro-resonator and communication apparatus |
| 08/04/2009 | US7569152 Method for separating a useful layer and component obtained by said method |
| 08/04/2009 | US7568791 Nozzle arrangement with a top wall portion having etchant holes therein |
| 07/30/2009 | WO2009094236A2 Autonomous electrochemical actuation of microfluidic circuits |
| 07/30/2009 | WO2009092846A1 A micromechanical resonator |
| 07/30/2009 | WO2009037480A3 Mems transducer with reduced stress in the back- plate |
| 07/30/2009 | US20090188576 Check valve diaphragm micropump |
| 07/30/2009 | DE102008005521A1 Capacitive transducer for use as actuator or sensor in e.g. micromechanical component, has plate electrodes arranged in plane that is parallel to another plane such that electrodes overlap each other during tilting of one of plates |
| 07/29/2009 | EP2083309A1 Optical scanning device |
| 07/29/2009 | EP2082989A2 Method for manufacturing a sensor device |
| 07/29/2009 | EP1613969B1 Micromechanical component having an adjustable resonance frequency |
| 07/29/2009 | CN100519405C Micro or nano structure inertia sensor and its production method |
| 07/28/2009 | US7566957 Support device with discrete getter material microelectronic devices |
| 07/28/2009 | US7566939 Fabrication of silicon micro-mechanical structures |
| 07/28/2009 | US7565744 Method of manufacturing a micropump check valve |
| 07/23/2009 | WO2009089946A2 Micromechanical component and method for producing a micromechanical component |
| 07/23/2009 | DE102008004639A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 07/22/2009 | EP1459334B1 Electromechanical three-trace junction devices |
| 07/22/2009 | CN100515921C Method for fabricating microstructure and microstructure |
| 07/16/2009 | WO2009087883A1 Micro scanner and method for controlling micro scanner |
| 07/16/2009 | WO2009086976A2 Micromechanical component and production method for a micromechanical component |
| 07/16/2009 | WO2009069000A3 Detection apparatus |
| 07/16/2009 | WO2009059857A3 Micromechanical component comprising a membrane lattice |
| 07/16/2009 | WO2009024762A3 Mems process and device |