Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2009
12/02/2009CN100566010C MEMS millimeter phase-shifter of low-exciting-voltage and precise control for phase shift performance
12/02/2009CN100565924C Integrated driver for mems device using high voltage thin film transistors
12/02/2009CN100565198C Hybrid microcantilever sensors
12/02/2009CN100564240C MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
12/01/2009US7626745 Diffractive thin-film piezoelectric micromirror and method of producing the same
11/2009
11/26/2009WO2009141681A1 Polymer mems having more controlled relationship between deformation and actuation voltage
11/26/2009US20090289996 Nozzle Arrangement With Pivotal Wall Coupled To Thermal Expansion Actuator
11/26/2009DE102008001952A1 Verfahren zur Herstellung von vereinzelten, auf einem Siliziumsubstrat angeordneten mikromechanischen Bauteilen und hieraus hergestellte Bauteile Process for the preparation of isolated, arranged on a silicon substrate micromechanical components and components produced therefrom
11/26/2009DE102008001885A1 Sensoranordnung und Verfahren zum Betrieb einer Sensoranordnung Sensor arrangement and method of operating a sensor arrangement
11/26/2009DE102008001738A1 Verfahren zur Herstellung von Chips A process for the production of chips
11/26/2009DE10196676B4 Substrat und Herstellungsverfahren dafür sowie Dünnschicht-Strukturkörper Substrate and manufacturing method thereof as well as thin-film structural body
11/26/2009DE10047500B4 Mikromechanische Membran und Verfahren zu ihrer Herstellung Micromechanical membrane and processes for their preparation
11/25/2009EP2121510A2 Mems device with controlled electrode off-state position
11/25/2009CN101589543A Micro-electro-mechanical transducers
11/25/2009CN101588987A Large area induced assembly of nanostructures
11/25/2009CN100562484C Cantilever structure and its making process and application
11/19/2009WO2009140017A2 Induced resonance comb drive scanner
11/19/2009US20090286429 Microelectronic contact structures, and methods of making same
11/19/2009US20090283803 Electromechanical memory array using nanotube ribbons and method for making same
11/19/2009DE19537814B4 Sensor und Verfahren zur Herstellung eines Sensors Sensor and method for manufacturing a sensor
11/19/2009DE10203631B4 Halbleitersensor für eine dynamische Grösse Semiconductor sensor for dynamic size
11/18/2009CN101583558A Structural member having a plurality of conductive regions
11/18/2009CN101581601A Detection method, micro-electromechanical component and micro-detection structure of micro-mechanical structure
11/18/2009CN101580222A Micro electromechanical component and manufacturing method thereof
11/17/2009US7619291 Devices having horizontally-disposed nanofabric articles and methods of making the same
11/17/2009US7617593 Micromachine and method of fabricating the same
11/17/2009CA2478213C Method and apparatus for actuation of a two-axis mems device using three actuation elements
11/12/2009WO2009095170A3 Electromagnetic membrane-microactuator
11/12/2009DE19852878B4 Mikromechanisches Bauelement und Herstellungsverfahren hierfür Micro-mechanical device and manufacturing method thereof
11/12/2009DE102008001663A1 Micromechanical component i.e. micro-mirror, has positioning element i.e. mirror plate, adjustable with respect to base substrate by bending spring mechanism based on different internal stresses of subunits
11/12/2009DE102005003888B4 Gelenkkonstruktion für eine Mikrospiegelvorrichtung Joint construction for a micromirror device
11/11/2009EP2114819A1 Mems actuators and switches
11/10/2009US7616365 Electromagnetic micro actuator and method of manufacturing the same
11/10/2009US7615837 Lithography device for semiconductor circuit pattern generation
11/10/2009US7615788 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry
11/10/2009US7615395 Method for containing a device and a corresponding device
11/05/2009WO2009133961A1 Methods of manufacturing capacitive electromechanical transducer and capacitive electromechanical transducers
11/05/2009WO2009132719A2 Micromechanical component, method for operating a micromechanical component and method for producing a micromechanical component
11/05/2009WO2009132440A1 Mems device with independent rotation in two axes of rotation
11/05/2009US20090273649 Inkjet Printhead With Nozzle Layer Defining Etchant Holes
11/05/2009DE102008001465A1 Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, method for operating a micromechanical component and manufacturing method for a micromechanical component
11/05/2009DE102008001442A1 Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements Micro-mechanical device and method for operating a micromechanical component
11/05/2009DE102008001248A1 Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil Manufacturing method for a micromechanical component and micromechanical component
11/05/2009CA2722783A1 Mems device with independent rotation in two axes of rotation
11/04/2009EP1889064B1 Sensor system with actuated structure releasing a coloured indicator
11/04/2009EP1345844B1 Soi/glass process for forming thin silicon micromachined structures
11/04/2009EP1133684B1 Micromachined structure with deformable membrane and method for making same
11/03/2009US7613039 Arrangement and method for controlling a micromechanical element
11/03/2009US7612484 High-deformation composite microresonator
11/03/2009CA2414736C Thermal bend actuator for a micro electro-mechanical device
10/2009
10/29/2009WO2009130171A1 Improved membrane, especially for an optical device having a deformable membrane
10/29/2009WO2009006162A3 Mems devices having improved uniformity and methods for making them
10/29/2009DE102009018266A1 Sensor zur Erfassung einer physikalischen Grösse und Verfahren zu dessen Fertigung Sensor for detecting a physical quantity and process for its manufacturing
10/29/2009DE102008001422A1 Mikromechanisches Bauteil und Verfahren zu dessen Herstellung Micromechanical element and process for its preparation
10/28/2009CN101566506A Structure of film thermoelectric converter based on micro bridge resonator and fabricating method thereof
10/28/2009CN100555852C A mu-flap type nano/micro mechanical device and fabrication method thereof
10/28/2009CN100555669C Method for producing variable capacitor of micro electromechanical system
10/28/2009CN100554137C Multi-scale cantilever structures having fine holes of nano size and the preparation method thereof
10/27/2009US7607826 Thermoelastic device with preselected resistivity, inertness and deposition characteristics
10/22/2009WO2009128473A1 Mems actuator
10/22/2009WO2009127782A1 Vibrating micro-mechanical sensor of angular velocity
10/22/2009WO2009127275A2 Electrode comb, micromechanical component, and methods for the production of an electrode comb and a micromechanical component
10/22/2009WO2009127274A2 Micromechanical component, method for the operation of a micromechanical component, and method for the production of a micromechanical component
10/22/2009US20090263991 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Compsites and Conductive Elastomer Interconnects in Microelectronic Packaging
10/22/2009DE102008001238A1 Mikromechanisches Bauteil, Verfahren zum Betreiben eines mikromechanischen Bauteils und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, method for operating a micromechanical component and manufacturing method for a micromechanical component
10/21/2009EP2109935A1 Volume acoustic resonator having an adjustable resonance frequency and use of such resonator in the telephone industry
10/21/2009CN101559913A Structure for increasing strength and service life of deformable beam and application thereof
10/21/2009CN100552820C A memory array and a display apparatus using mechanical switch, method for controlling the same
10/15/2009WO2009126826A1 Multilevel microfluidic systems and methods
10/15/2009WO2009126378A2 Enhanced detection sensitivity with piezoelectric microcantilever sensors
10/15/2009WO2009125728A1 Actuator array sheet
10/15/2009WO2009050166A3 Semiconductor element and method for processing of a semiconductor element
10/15/2009US20090258415 Fluid Manipulation Assembly
10/15/2009DE102008001075A1 Micromechanical component e.g. micromirror, manufacturing method for e.g. microfluidics, involves bending base components by fastening outer surfaces of respective subunits to corresponding surfaces formed on upper side of base substrate
10/15/2009DE102008001071A1 Mikromechanische Aktuatorstruktur und entsprechendes Betätigungsverfahren Micromechanical actuator structure and corresponding operating method
10/15/2009DE102008001058A1 Mikromechanische Elektrodenstruktur, entsprechendes Herstellungsverfahren und Mikroaktuatorvorrichtung Micromechanical electrode structure, method of manufacture and Mikroaktuatorvorrichtung
10/14/2009EP2108493A1 Electromechanical three-trace junction devices
10/14/2009CN101558552A Micro-electro-mechanical transducer having an insulation extension
10/14/2009CN101558006A MEMS device with controlled electrode off-state position
10/14/2009CN100550429C MEMS device having contact and standoff bumps and related methods
10/14/2009CN100548866C Device with beam structure, and semiconductor device
10/13/2009US7601270 Microfabricated elastomeric valve and pump systems
10/08/2009WO2009123111A1 Mem switch and method for manufacturing the same
10/08/2009WO2009122466A1 Electroconductive polymer actuator, process for producing the electroconductive polymer actuator, and method for driving the electroconductive polymer actuator
10/08/2009US20090250853 Torsion resilient element for hanging micromechanical elements which can be deflected
10/08/2009DE102008037947A1 Element-Wafer und Verfahren zu dessen Herstellung Element wafer and process for its preparation
10/07/2009EP2107039A2 Microelectromechanical thin film device of transition metal oxide, and manufacturing method thereof
10/07/2009EP2107038A2 Electrostatically actuatable MEMS device
10/07/2009EP2024141B1 Production of a microgripper by means of a material deposition method
10/07/2009CN100547794C Electromechanical memory, electric circuit employing the same, and driving method of electromechanical memory
10/07/2009CN100547723C Micro movable device and method of making the same using wet etching
10/01/2009US20090242048 Structured polydiorganosiloxane polyamide containing devices and methods
10/01/2009DE102006018675B4 Dünnschichtstruktur zur Verwendung in einer Halbleitervorrichtung mit stationären und beweglichen Elektroden und Herstellungsverfahren derselben Thin film structure for use in a semiconductor device having stationary and movable electrodes, and producing method thereof
09/2009
09/29/2009US7595539 Method for release of surface micromachined structures in an epitaxial reactor
09/29/2009CA2414354C Nano-electromechanical filter
09/29/2009CA2372508C Sensor for microfluid handling system
09/24/2009WO2009116162A1 Process for manufacture of packaged micro moving element, and packaged micro moving element
09/24/2009WO2009094236A3 Autonomous electrochemical actuation of microfluidic circuits
09/24/2009US20090237458 Inkjet Nozzle Arrangement With Rectangular Plan Nozzle Chamber And Ink Ejection Paddle
09/24/2009DE102008034165A1 Sensorbaustein Sensor module
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