| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/02/2010 | US7654140 Heat pumped parametric MEMS device |
| 01/28/2010 | WO2010011733A2 Electro-mechanical switches and methods of use thereof |
| 01/28/2010 | WO2010010873A1 Polymer actuator |
| 01/28/2010 | WO2009105373A3 Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| 01/28/2010 | US20100022045 Sensor platform using a non-horizontally oriented nanotube element |
| 01/28/2010 | US20100020843 Thermal Bend Actuator Material Selection |
| 01/28/2010 | DE102008040597A1 Mikromechanisches Bauelement mit Rückvolumen Micromechanical component with back volume |
| 01/28/2010 | DE102008040564A1 Micromechanical sensor component, particularly acceleration sensor component, has substrate and seismic mass having primary extension plane |
| 01/26/2010 | CA2536431C Process for fabricating a micro-electro-mechanical system with movable components |
| 01/21/2010 | WO2009089946A3 Micromechanical component and method for producing a micromechanical component |
| 01/21/2010 | US20100012927 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 01/21/2010 | DE102008040525A1 Mikromechanisches Sensorelement, Verfahren zur Herstellung eines mikromechanischen Sensorelements und Verfahren zum Betrieb eines mikromechanischen Sensorelements The micromechanical sensor element, method for producing a micromechanical sensor element and method of operating a micromechanical sensor element |
| 01/21/2010 | DE102008040522A1 Method for manufacturing micromechanical structure, involves applying sacrificial layer on substrate, applying sacrificial layer on function layer, and applying another sacrificial layer on function layer |
| 01/21/2010 | DE102008040521A1 Verfahren zur Herstellung eines Bauelements, Verfahren zur Herstellung einer Bauelementanordnung, Bauelement und Bauelementanordnung A method for manufacturing a device, method of manufacturing a component assembly, the component and component arrangement |
| 01/21/2010 | DE102005053877B4 Drucksensor-Bauelement Pressure sensor component |
| 01/20/2010 | EP2146236A2 Vibrating mirror element |
| 01/20/2010 | CN100581984C Micro-mechanism testing probe card based on electroplating technique and manufacturing method thereof |
| 01/19/2010 | US7649662 Optical scanning apparatus and image displaying apparatus having the same, wherein a light beam having entered a housing from a first optical member enters a scanning mirror without transmitting through a transmission-type optical element, the light beam deflected by the scanning mirror enters a second optical member without transmitting through a transmission-type optical element |
| 01/19/2010 | US7648855 Device comprising an encapsulated microsystem and production method thereof |
| 01/19/2010 | CA2476802C Folded longitudinal torsional hinge for gimbaled mems mirror hinge |
| 01/14/2010 | WO2010006213A1 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
| 01/14/2010 | WO2010005062A1 Functional device and manufacturing method therefor |
| 01/14/2010 | WO2010004766A1 Mems device |
| 01/14/2010 | DE102009016487A1 Sensormodul und Halbleiterchip Sensor module and semiconductor chip |
| 01/13/2010 | CN100579892C Micro-electromechanical system device and manufacturing method thereof |
| 01/13/2010 | CN100579891C Method for forming microelectronic spring structures on substrate |
| 01/12/2010 | CA2461327C Mems waveguide shuttle optical latching switch |
| 01/07/2010 | WO2010001613A1 Micro-mirror array and optical switch |
| 01/07/2010 | WO2010001388A1 A mems device comprising oscillations' measurements means |
| 01/07/2010 | WO2010000969A1 Method of metallizing a vibrating cap, and vibrating sensor obtained |
| 01/07/2010 | US20100001355 RF MEMS Switch |
| 01/07/2010 | DE19921863B4 Halbleitersensor für eine dynamische Größe mit Elektroden in einer Rahmenstruktur Semiconductor sensor dynamic quantity with electrodes in a frame structure |
| 01/06/2010 | EP2141490A1 Chemical sensing microbeam device |
| 01/06/2010 | CN100579348C Cooler for electronic equipment |
| 01/05/2010 | US7643198 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 01/05/2010 | US7642110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 01/05/2010 | US7641806 Manufacturing method for membrane member |
| 01/05/2010 | US7641315 Printhead with reciprocating cantilevered thermal actuators |
| 12/31/2009 | US20090323168 Electromechanical devices and methods of fabricating same |
| 12/31/2009 | DE19843716B4 Halbleitersensor und Verfahren zu dessen Herstellung A semiconductor sensor and method for its production |
| 12/31/2009 | DE102009019029A1 Sensormodul Sensor module |
| 12/31/2009 | DE102008002675A1 Mikroventil und Abdichteinrichtung zur Verwendung in einem Mikrofluidiksystem sowie Verfahren zu deren Herstellung Micro valve and sealing means for use in a microfluidic system, as well as processes for their preparation |
| 12/31/2009 | DE102008002668A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 12/30/2009 | WO2009158354A1 Backlight displays |
| 12/30/2009 | WO2009157509A1 Movable structure and optical scanning mirror using same |
| 12/30/2009 | WO2009157491A1 Actuator element utilizing carbon nanotube electrode with added auxiliary conducting agent |
| 12/30/2009 | WO2009157486A1 Movable structure and micro-mirror element using the same |
| 12/30/2009 | WO2009157474A1 Microvalve and valve seat member |
| 12/30/2009 | CN100576386C MEMS-switched stepped variable capacitor and method of making same |
| 12/30/2009 | CN100575242C A method for making MEMS switch, and MEM device and its making method |
| 12/29/2009 | US7639413 Resonant optical scanner using vibrating body with optimized resonant frequency characteristics and image forming apparatus having the same |
| 12/29/2009 | US7638429 Thin film encapsulation of MEMS devices |
| 12/24/2009 | US20090317302 Microfluidic System Comprising MEMS Integrated Circuit |
| 12/24/2009 | US20090317272 MEMS Integrated Circuit Comprising Peristaltic Microfluidic Pump |
| 12/24/2009 | DE102008002579A1 Mikro-elektromechanisches Sensorelement Micro-electromechanical sensor element |
| 12/24/2009 | DE102008002336A1 Quetschventil und Verfahren zu dessen Herstellung Pinch valve and method of producing the |
| 12/24/2009 | DE10065013B4 Verfahren zum Herstellen eines mikromechanischen Bauelements A method for producing a micromechanical component |
| 12/23/2009 | WO2009155405A1 Medical devices employing conductive polymers for delivery of therapeutic agents |
| 12/23/2009 | WO2009154158A1 Actuator and input device using the same |
| 12/23/2009 | WO2009152547A1 Bonded microfluidics system comprising cmos-controllable microfluidic devices |
| 12/23/2009 | WO2009124913A3 Flow controlling component |
| 12/23/2009 | EP2136215A2 Accelerometer with folded beams |
| 12/23/2009 | CA2728159A1 Medical devices employing conductive polymers for delivery of therapeutic agents |
| 12/22/2009 | USRE41047 Acceleration sensor and process for the production thereof |
| 12/22/2009 | US7635454 Integrated chemical microreactor with separated channels |
| 12/22/2009 | CA2445285C Biosensor matrix and method for making same |
| 12/17/2009 | WO2009152012A2 Anti-capture method and apparatus for micromachined devices |
| 12/17/2009 | WO2009150610A1 Polymer micro-actuators sensitive to one or more inputs |
| 12/17/2009 | US20090309175 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 12/17/2009 | DE102009021957A1 Silizium-MEMS-Resonatoren Silicon MEMS resonators |
| 12/17/2009 | DE102008026886A1 Verfahren zur Strukturierung einer Nutzschicht eines Substrats Method for structuring a wear layer of a substrate |
| 12/17/2009 | DE102008002332A1 Verfahren zur Herstellung einer mikromechanischen Membranstruktur mit Zugang von der Substratrückseite Process for producing a micromechanical membrane structure with access from the substrate rear side |
| 12/16/2009 | EP2133306A1 Polymer micro-actuators sensitive to one or more inputs |
| 12/16/2009 | CN101606213A Electromechanical device and electric equipment using the same |
| 12/16/2009 | CN100570429C Fibrous-composite-material-based MEMS optical scanner |
| 12/16/2009 | CN100570428C Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 12/15/2009 | US7631957 Pusher actuation in a printhead chip for an inkjet printhead |
| 12/15/2009 | US7631549 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 12/15/2009 | CA2410306C Micromachined fluidic device and method for making same |
| 12/10/2009 | WO2009148144A2 Structure having plural conductive regions and process for production thereof |
| 12/10/2009 | WO2009147654A1 Gimbaled scanning micro-mirror apparatus |
| 12/10/2009 | US20090301176 Microelectromechanical System Comprising a Deformable Portion and a Stress Sensor |
| 12/09/2009 | CN101597019A Film micro-bridge structure taking polyimide as mechanical carrier and preparation method thereof |
| 12/09/2009 | CN100568720C Torsion resonator and filter using same |
| 12/09/2009 | CN100568719C Microelectromechanical apparatus and methods for surface acoustic wave switching |
| 12/09/2009 | CN100567734C Multiple channel micropump apparatus and drive method |
| 12/09/2009 | CN100567581C Multi-step release method for electrochemically fabricated structures |
| 12/08/2009 | US7629657 Episeal pressure sensor |
| 12/08/2009 | US7629190 Method for making a micromechanical device by using a sacrificial substrate |
| 12/08/2009 | CA2487819C Bulk silicon mirrors with hinges underneath |
| 12/03/2009 | WO2009145967A1 Semiconductor device with reduced sensitivity to package stress |
| 12/03/2009 | WO2009145963A1 Capacitive sensor with stress relief that compensates for package stress |
| 12/03/2009 | WO2009126378A3 Enhanced detection sensitivity with piezoelectric microcantilever sensors |
| 12/03/2009 | DE10314875B4 Temperaturbeständiges elektronisches Bauteil in Form eines Sensors oder Aktors und Verfahren zu seiner Herstellung Temperature resistant electronic component in the form of a sensor or actuator and process for its preparation |
| 12/02/2009 | EP2126942A1 Mems actuators and switches |
| 12/02/2009 | EP2125606A1 Micro fluid transfer system |
| 12/02/2009 | EP2125605A1 Sample handling device |
| 12/02/2009 | EP2125604A1 Structural member having a plurality of conductive regions |
| 12/02/2009 | EP1572574B1 Method and device for capturing charged molecules traveling in a flow stream |
| 12/02/2009 | CN101590995A Same plane sensor and manufacturing method thereof |