| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/28/2010 | EP1173773B1 Dynamically balanced microelectromechanical devices |
| 04/27/2010 | US7705693 μ-Flap type nano/micro mechanical device and fabrication method thereof |
| 04/27/2010 | US7704772 Method of manufacture for microelectromechanical devices |
| 04/27/2010 | US7704322 Microfluidic free interface diffusion techniques |
| 04/22/2010 | WO2010011733A3 Electro-mechanical switches and methods of use thereof |
| 04/22/2010 | US20100097681 Micromechanical element and sensor for monitoring a micromechanical element |
| 04/20/2010 | US7701155 Method for driving micro-oscillating element having comb-teeth electrodes |
| 04/15/2010 | WO2010042645A2 Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer |
| 04/15/2010 | WO2010042502A2 Active fixturing for micro/mesoscale machine tool systems |
| 04/15/2010 | WO2010040873A1 Electrostatic actuator for microelectromechanical systems (mems) |
| 04/14/2010 | EP2175280A1 Mounting system for torsional suspension of a mems device |
| 04/13/2010 | USRE41213 Dynamic amount sensor and process for the production thereof |
| 04/10/2010 | CA2685615A1 Single cell microinjection using flexible and compliant fluidic channels and electroosomotic dosage control |
| 04/08/2010 | WO2010039660A2 Multi-thickness layers for mems and mask - saving sequence for same |
| 04/08/2010 | DE102008049647A1 Mikromechanisches Element und Sensor zur Überwachung eines mikromechanischen Elements Micromechanical element and sensor for monitoring a micromechanical element |
| 04/08/2010 | DE102008048064A1 Mikrofluidisches Ventil, mikrofluidische Pumpe, mikrofluidisches System und ein Herstellungsverfahren The microfluidic valve, microfluidic pump microfluidic system and a production method |
| 04/08/2010 | DE10010975B4 Mikromechanisches Bauelement Micromechanical component |
| 04/07/2010 | EP2170761A1 Actuator for manipulating a fluid, comprising an electro-active polymer or an electro-active polymer composition |
| 04/06/2010 | US7691661 Method of fabricating a surface probing device |
| 04/01/2010 | WO2010035759A1 Optical scanner |
| 04/01/2010 | WO2010035469A1 Optical scanner and image display device equipped with optical scanner |
| 04/01/2010 | WO2010034554A1 Sensor and method for the production of a sensor |
| 04/01/2010 | WO2010034550A1 Micromechanical sensor |
| 04/01/2010 | WO2010034050A1 Efficient inkjet nozzle assembly |
| 04/01/2010 | WO2009037456A3 Mems device with reduced stress in the membrane and manufacturing method |
| 04/01/2010 | US20100080052 Arrangement and method for controlling a micromechanical element |
| 04/01/2010 | DE102008042366A1 Sensor und Verfahren zur Herstellung eines Sensors Sensor and method for manufacturing a sensor |
| 04/01/2010 | DE102008042351A1 Mikromechanischer Sensor Micromechanical sensor |
| 04/01/2010 | DE10152882B4 Halbleiterdrucksensor mit Signalprozessorschaltkreis A semiconductor pressure sensor having a signal processing circuit |
| 04/01/2010 | CA2732738A1 Efficient inkjet nozzle assembly |
| 03/31/2010 | EP2169400A1 Hydrogen sensor |
| 03/31/2010 | EP2168909A1 Microelectromechanical device provided with an anti-stiction structure and corresponding anti-stiction method |
| 03/31/2010 | EP2168908A1 Micromechanical thermal actuator |
| 03/31/2010 | CN101689444A A micro relay |
| 03/31/2010 | CN101688975A Microelectromechanical device with optical function separated from mechanical and electrical function |
| 03/31/2010 | CN101688974A Integrated imods and solar cells on a substrate |
| 03/31/2010 | CN101687630A Micro-electro-mechanical systems and photonic interconnects employing the same |
| 03/31/2010 | CN101687628A mems devices having improved uniformity and methods for making them |
| 03/30/2010 | US7688166 Multi-stable micro electromechanical switches and methods of fabricating same |
| 03/25/2010 | WO2010032822A1 Mems sensor |
| 03/25/2010 | WO2010032821A1 Mems sensor |
| 03/25/2010 | US20100073431 Nozzle Structure With Reciprocating Cantilevered Thermal Actuator |
| 03/25/2010 | US20100073428 Printing Integrated Circuit Having Piston Ejection |
| 03/24/2010 | CN101679018A Sample handling device |
| 03/23/2010 | CA2378736C Micro-machined mirror device |
| 03/18/2010 | US20100065432 Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions |
| 03/18/2010 | US20100065431 Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions |
| 03/17/2010 | EP2164088A1 A micro relay |
| 03/16/2010 | US7679154 Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor |
| 03/16/2010 | US7678599 Process for the fabrication of an inertial sensor with failure threshold |
| 03/16/2010 | US7678547 Determining velocity of particles in fluid; obtain fluid sample, monitor preferential activity in detction zone, calibrate and compare to control |
| 03/11/2010 | WO2010027600A2 Mems sensor with movable z-axis sensing element |
| 03/11/2010 | WO2010025853A1 Molecularly imprinted polymer (mip) chip sensor, use thereof, and analytical detection method |
| 03/11/2010 | DE102008041942A1 Sensoranordnung, Verfahren zum Betrieb einer Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung Sensor arrangement, method of operating a sensor arrangement and method of manufacturing a sensor arrangement |
| 03/10/2010 | EP2161238A1 Very high-density three-dimensional structure |
| 03/09/2010 | US7675698 Fibrous micro-composite material |
| 03/04/2010 | WO2010024664A1 Actuator and method for positioning an object |
| 03/04/2010 | WO2010023720A1 Structure, electronic device, and method of forming structure |
| 03/04/2010 | WO2010023344A1 Ultrasound device for the emission of acoustic waves in air in the ultrasonic range |
| 03/04/2010 | DE102008041757A1 Herstellungsverfahren für eine Rotationssensorvorrichtung und Rotationssensorvorrichtung Manufacturing method of a rotation sensor device and the rotation sensor device |
| 03/04/2010 | DE102008041542A1 Mikropumpe Micropump |
| 03/03/2010 | EP2159608A1 Systems and methods for micromachined cylindrical lenses |
| 03/03/2010 | EP2159540A1 Mechanical quantity sensor and its manufacturing method |
| 03/03/2010 | CN101663230A Micro fluid transfer system |
| 03/02/2010 | US7671429 Micro-mechanical device comprising suspended element which is connected to a support by means of a pier and producing method thereof |
| 03/02/2010 | US7671428 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/02/2010 | US7670893 Membrane IC fabrication |
| 03/02/2010 | US7670496 Process for producing structural body and etchant for silicon oxide film |
| 02/25/2010 | WO2010021242A1 Micro electro mechanical system |
| 02/25/2010 | WO2010021216A1 Drive device |
| 02/24/2010 | EP2157468A1 Piezoelectric mirror device, optical device using the piezoelectric mirror device and method for manufacturing piezoelectric mirror device |
| 02/24/2010 | EP2157047A2 Method of manufacturing MEMS devices providing a control of their cavity depth |
| 02/24/2010 | EP2157046A2 Method of manufacturing MEMS devices providing a control of their cavity depth |
| 02/18/2010 | WO2010019665A2 Microvalve device with improved fluid routing |
| 02/18/2010 | WO2010019521A1 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
| 02/18/2010 | WO2009140017A3 Induced resonance comb drive scanner |
| 02/18/2010 | DE102008041178A1 Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil Manufacturing method for a micromechanical component and micromechanical component |
| 02/17/2010 | EP2152627A2 Micromechanical component and corresponding production method |
| 02/17/2010 | EP1572574B8 Method and device for capturing charged molecules traveling in a flow stream |
| 02/17/2010 | EP1520446B1 Method for forming acoustically active element in a multi-layer circuit-board structure and a multi-layer circuit-board structure |
| 02/16/2010 | US7662301 Method of making a free standing structure |
| 02/16/2010 | CA2379179C Microelectromechanical optical switch and method of manufacture thereof |
| 02/11/2010 | DE102008041028A1 Rotation sensor device for rotatable body i.e. rotatable vehicle component, has sensor- and evaluation device determining information concerning rotational movement of device by considering relative movement of masses |
| 02/11/2010 | DE102008040970A1 Mikromechanische Vorrichtung mit Kavernen mit unterschiedlichem atmosphärischen Innendruck Micromechanical device with caverns with different internal atmospheric pressure |
| 02/11/2010 | DE102008035990A1 Micro-valve for hydrogen gas cells, has valve seat with valve opening and valve flap for locking valve opening with cover section of valve flap |
| 02/10/2010 | CN100588606C Micro electromechanical device for tilting a body in two degrees of freedom |
| 02/09/2010 | US7659652 Electrostatic actuator with interdigitated electrode structure |
| 02/04/2010 | WO2010012666A1 Linear fluidic actuator |
| 02/04/2010 | WO2010012541A2 Micromechanical structure and method for setting the working gap width of a micromechanical structure |
| 02/04/2010 | WO2010012532A2 Method for producing a micromechanical component, and micromechanical component |
| 02/04/2010 | WO2009006120A8 Microelectromechanical device with optical function separated from mechanical and electrical function |
| 02/04/2010 | US20100025784 Fibrous micro-composite material |
| 02/04/2010 | DE102008040854A1 Mikromechanische Struktur sowie Verfahren zum Einstellen der Arbeitsspaltbreite einer mikromechanischen Struktur Micromechanical structure and method for adjusting the working gap width a micromechanical structure |
| 02/04/2010 | DE102008040852A1 Herstellungsverfahren für ein mikromechanisches Bauteil und Mikromechanisches Bauteil Manufacturing method for a micromechanical component and Micromechanical element |
| 02/04/2010 | DE102005053876B4 Drucksensor-Bauteil Pressure sensor component |
| 02/03/2010 | EP2149704A1 Two-direction shape-memory alloy thin film actuator and method for manufacturing shape-memory alloy thin film used in the actuator |
| 02/03/2010 | EP2149537A1 Linear fluidic actuator |
| 02/02/2010 | US7655492 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/02/2010 | US7654677 Yokeless hidden hinge digital micromirror device |
| 02/02/2010 | US7654159 MEMS nanoindenter |