| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/21/2010 | CN101027593B Method of fabricating interferometric modulator devices using lift-off processing techniques |
| 07/20/2010 | US7758142 High volume pagewidth printing |
| 07/15/2010 | WO2010079574A1 Mems device |
| 07/15/2010 | WO2010079151A1 Device for converting mechanical energy into electric energy using at least one piezoelectric transducer |
| 07/15/2010 | WO2010042502A3 Active fixturing for micro/mesoscale machine tool systems |
| 07/15/2010 | WO2010039660A3 Multi-thickness layers for mems and mask - saving sequence for same |
| 07/15/2010 | US20100175767 Microfabricated Elastomeric Valve and Pump Systems |
| 07/14/2010 | EP1135665B1 Measurements using tunnelling current between elongate conductors |
| 07/14/2010 | CN101335137B Planar flexible tri-steady mechanism |
| 07/13/2010 | US7755824 Micromirror unit with torsion connector having nonconstant width |
| 07/13/2010 | US7755459 Micro-switching device and method of manufacturing the same |
| 07/13/2010 | US7754010 Microfabricated elastomeric valve and pump systems |
| 07/08/2010 | US20100170572 Pumping and flow control in systems including microfluidic systems |
| 07/08/2010 | DE102009000056A1 Sensorelement zur kapazitiven Differenzdruckerfassung Sensor element for capacitive differential pressure sensing |
| 07/08/2010 | DE102009000053A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure |
| 07/06/2010 | US7749448 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems |
| 07/06/2010 | US7749444 Microfluidic device, method for testing reagent and system for testing reagent |
| 07/06/2010 | CA2460765C Mems optical latching switch |
| 07/01/2010 | WO2010074232A1 Wiring structure and micro relay comprising same |
| 07/01/2010 | WO2010073598A1 Balance signal output type sensor |
| 07/01/2010 | US20100162823 Mems sensor and mems sensor manufacture method |
| 06/30/2010 | EP2202526A2 Mems sensor and mems sensor manufacture method |
| 06/30/2010 | EP2202265A1 Electrolyte polymer film, polymer actuator using cross-linked PVDF-based polymer, and method of manufacturing the polymer actuator |
| 06/30/2010 | EP1593164B1 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 06/29/2010 | US7745810 Nanotube films and articles |
| 06/29/2010 | US7745211 employs an electronically activated and addressable tactile display to serve as active component actuators on microfluidic devices; Valving, pumping, mixing, cell crushing, and other functions are easily accomplished at low cost, including multiple valves, and pumps and mixers |
| 06/24/2010 | US20100158720 Valveless micropump |
| 06/24/2010 | US20100155204 Multi-stable micro electromechanical switches and methods of fabricating same |
| 06/24/2010 | DE102008054784A1 Micro-mirror, has electrostatic drive for adjusting two mirror elements with respect to holder, light window and reflective surface around two rotational axes, respectively, where axes are aligned parallel to each other |
| 06/23/2010 | EP2199769A2 Force measuring device |
| 06/23/2010 | EP2198168A1 A system, apparatus and method for applying mechanical force to a material |
| 06/23/2010 | CN101749219A Miniature peristaltic pump |
| 06/22/2010 | CA2688117A1 Micro-electromechanical system switch |
| 06/17/2010 | WO2010067532A1 Optical scanner and image display device using the optical scanner |
| 06/17/2010 | DE10024266B4 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component |
| 06/16/2010 | EP1415127B1 Isolated resonator gyroscope |
| 06/10/2010 | WO2009138906A3 Mems devices and fabrication thereof |
| 06/10/2010 | DE102008054369A1 Resonator i.e. micromechanical rotation rate sensor, for use in e.g. electronic stability program-system of vehicle, has springs comprising two spring rigidity during movement of masses with minimum and maximum amplitudes, respectively |
| 06/10/2010 | DE102008052477A1 Electrical field strength measuring sensor for use as microelectromechanical system sensor, has electrode arrangement including electrode strips located in spaces between electrode strips of another electrode arrangement |
| 06/10/2010 | DE102008044371A1 Sensor arrangement e.g. micromechanical sensor, has cavern provided perpendicular to main extension plane between movable element and substrate, where cavern is formed between intermediate layer and substrate |
| 06/10/2010 | DE102008044270A1 Micromechanical component i.e. micromirror, manufacturing method for use in e.g. mini-projector, involves aligning movable part at angle that is not equal to zero degree and one hundred and eighty degree with respect to base substrate |
| 06/09/2010 | EP2193098A1 Three-dimensional nanodevices including nanostructures |
| 06/09/2010 | EP2193096A1 Multi-stable actuator |
| 06/09/2010 | EP1062684B1 Trench isolation for micromechanical devices |
| 06/08/2010 | US7731827 capturing charged molecules traveling in electrolyte flow stream through electrically non-conductive channel, comprising anode and cathode individually separated from said channel, but in electrical contact with said flow stream, by a conductive ion selective semi-permeable membrane |
| 06/03/2010 | WO2010061364A2 Electromechanical transducer device and method of forming a electromechanical transducer device |
| 06/03/2010 | WO2010061363A2 Electromechanical transducer device and method of forming a electromechanical transducer device |
| 06/03/2010 | WO2010019665A3 Microvalve device with improved fluid routing |
| 06/02/2010 | EP2191522A2 Actuator device with electro-active membrane |
| 06/02/2010 | DE19817310B4 Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components |
| 06/02/2010 | DE102008059634A1 Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb The micromechanical actuator with electrostatic comb-drive |
| 06/02/2010 | DE102008044177A1 Verfahren zur Herstellung eines mikromechanischen Bauelements sowie mit dem Verfahren hergestelltes Bauelement bzw. dessen Verwendung A process for producing a micromechanical component, and produced with the method component or use thereof |
| 06/02/2010 | DE102005033801B4 Torsionsfeder für mikromechanische Anwendungen Torsion spring for micromechanical applications |
| 06/02/2010 | CN101717067A Barium strontium titanate-porous silicon composite material and preparation method thereof |
| 06/02/2010 | CN101717062A Suspended polyphenylene ethyl film structure and preparation process thereof |
| 05/27/2010 | WO2009132719A3 Piezoresistive element for use in a micromechanical component, method for operating the micromechanical component and method for producing the micromechanical component |
| 05/26/2010 | EP2188662A2 Periodic dimple array |
| 05/26/2010 | CN1929067B 开关 Switch |
| 05/26/2010 | CN1660691B Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated flu |
| 05/26/2010 | CN1607648B A method to make a weight compensating layer on a substrate, system and product therefor |
| 05/26/2010 | CN101714410A Arrangement and method for controlling a micromechanical element |
| 05/26/2010 | CN101054157B Electronic apparatus element and manufacturing method thereof, and resonator and manufacturing method thereof |
| 05/20/2010 | DE102008043797A1 Mikromechanischer Infrarotsender und Auswertekonzept Micromechanical infrared transmitter and evaluation concept |
| 05/20/2010 | DE102008043790A1 Micromechanical component i.e. acceleration sensor, for use in automotive industry, has insulating layer comprising hole structure with recesses in region, which is extended below electrode of conductive layer |
| 05/20/2010 | DE102008043788A1 Mikromechanisches Bauelement Micromechanical component |
| 05/20/2010 | DE10046622B4 Verfahren zur Herstellung einer Membransensoreinheit sowie Membransensoreinheit A method for producing a membrane sensor unit as well as membrane sensor unit |
| 05/19/2010 | EP2185908A1 Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor |
| 05/18/2010 | US7719067 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 05/14/2010 | WO2009127274A3 Micromechanical component comprising a rotatable adjusting element, method for the operation of said component, and method for the production of said component |
| 05/12/2010 | EP2183782A1 Methods and devices for fabricating tri-layer beams |
| 05/12/2010 | DE10320357B4 Strahlungssensor, Wafer, Sensorarray und Sensormodul Radiation sensor wafer sensor array and sensor module |
| 05/12/2010 | DE102008043598A1 Bauteil und Herstellungsverfahren für ein Bauteil Component and manufacturing method for a component |
| 05/12/2010 | DE102008043524A1 Beschleunigungssensor und Verfahren zu seiner Herstellung Acceleration sensor and method for its preparation |
| 05/12/2010 | DE102008011175B4 Mikromechanischer Aktuator und Verfahren zu seiner Herstellung Micromechanical actuator and method for its preparation |
| 05/12/2010 | DE102008002674B3 Mikroventil und Abdichteinrichtung zur Verwendung in einem Mikrofluidiksystem sowie Verfahren zu deren Herstellung Micro valve and sealing means for use in a microfluidic system, as well as processes for their preparation |
| 05/12/2010 | DE102007047010B4 Mikromechanisches Bauelement zur Modulation von elektromagnetischer Strahlung und optisches System mit demselben Micro-mechanical device for the modulation of electromagnetic radiation and an optical system with the same |
| 05/12/2010 | CN1614458B Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 05/11/2010 | US7713772 Micromechanical flow sensor with tensile coating |
| 05/11/2010 | US7712366 Multi-axis capacitive transducer and manufacturing method for producing it |
| 05/06/2010 | WO2010049865A1 Mems switch with reduced impact stress |
| 05/06/2010 | WO2009127273A3 Method for the production of a micromechanical component having electrode units on two planes, and micromechanical component |
| 05/06/2010 | US20100111770 Microfluidic Chip and Method of Fabricating The Same |
| 05/06/2010 | DE19930779B4 Mikromechanisches Bauelement Micromechanical component |
| 05/06/2010 | DE112008001648T5 Mikroelektromechanische Systeme und photonische Zwischenverbindungen, die dieselben einsetzen Microelectromechanical systems and photonic interconnects, which use the same |
| 05/06/2010 | DE102008043382A1 Bauelement und Verfahren zu dessen Herstellung Device and process for its preparation |
| 05/06/2010 | DE102008043271A1 Sensoranordnung zur Differenzdruckmessung Sensor arrangement for measuring the differential pressure |
| 05/05/2010 | CN1771575B Micro relay |
| 05/05/2010 | CN101051096B Optical tunable filter and method for manufacturing the optical tunable filter |
| 05/04/2010 | US7709285 Method of manufacturing a MEMS device and MEMS device |
| 05/04/2010 | US7707714 Method for producing a microcoil |
| 05/04/2010 | CA2400768C Semiconductor optoelectronic device with electrically adjustable transfer function |
| 05/04/2010 | CA2384889C Temporary bridge for micro machined structures |
| 04/29/2010 | WO2010024664A8 Actuator and method for positioning an object |
| 04/29/2010 | WO2009127275A3 Electrode comb, micromechanical component, and methods for the production of an electrode comb and a micromechanical component |
| 04/29/2010 | US20100104477 Microfluidic rotary flow reactor matrix |
| 04/29/2010 | US20100101324 Mems sensor |
| 04/29/2010 | DE102008043084A1 Verfahren zum Erzeugen von monokristallinen Piezowiderständen und Drucksensorelemente mit solchen Piezowiderständen A method for producing monocrystalline piezo resistors and pressure-sensing elements with such piezoresistors |
| 04/28/2010 | EP2179318A1 Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component |
| 04/28/2010 | EP2178789A2 Micromechanical component and method for operating a micromechanical component |
| 04/28/2010 | EP1529301B1 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |