| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 09/29/2010 | CN101219769B Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same |
| 09/23/2010 | WO2010106733A1 Semiconductor device |
| 09/23/2010 | WO2010047772A3 Deposition of nanowires and other nanoscale objects on surfaces |
| 09/23/2010 | US20100237744 basic concept of invention resides in orienting 80% of nanoparticles or tubes in actuator in a preferred direction, preferably parallel to one another with a maximum angle deviation of +-20 degrees in particle rows and to firmly interconnect them by way of webs which extend normal to preferred direction |
| 09/23/2010 | US20100237446 Thin film encapsulation of mems devices |
| 09/22/2010 | EP2230314A1 Method of sensing an analyte |
| 09/21/2010 | US7799197 Nanopump devices and methods |
| 09/21/2010 | US7798822 Microelectronic contact structures |
| 09/16/2010 | WO2010103474A1 Mems electrostatic actuator |
| 09/16/2010 | US20100233799 Integrated microfluidic control employing programmable tactile actuators |
| 09/16/2010 | US20100230767 Mems sensor, mems sensor manufacturing method, and electronic device |
| 09/16/2010 | DE102010002796A1 Doppelaxialer Drehratensensor Doppelaxialer rotation rate sensor |
| 09/16/2010 | DE102009059871A1 Elastische Vorrichtung Elastic device |
| 09/16/2010 | DE102008054222A1 Mikroventil in keramischer Mehrlagentechnik sowie dessen Verwendung Microvalve in ceramic multilayer technology and its use |
| 09/15/2010 | CN101830426A MEMS sensor, MEMS sensor manufacturing method, and electronic device |
| 09/15/2010 | CN101830425A Variable rigidity beam, manufacturing method and actuating method thereof |
| 09/14/2010 | USRE41673 Micro electromechanical system controlled organic LED and pixel arrays and method of using and of manufacturing same |
| 09/14/2010 | US7794610 Optical components and production thereof |
| 09/10/2010 | WO2010101023A1 Parallel displacement mechanism and method for manufacturing parallel displacement mechanism |
| 09/10/2010 | WO2010100622A1 Mems devices |
| 09/10/2010 | WO2010100334A1 Vibrating micro-mechanical sensor of angular velocity |
| 09/10/2010 | WO2010100333A1 Micro-mechanical sensor of angular velocity |
| 09/09/2010 | DE102010002545A1 Sensorvorrichtung und Herstellverfahren für eine Sensorvorrichtung Sensor device and manufacturing method for a sensor device |
| 09/09/2010 | DE102010000729A1 Halbleitervorrichtung und Verfahren zu deren Fertigung A semiconductor device and method of manufacturing |
| 09/09/2010 | DE102009001381A1 Antriebselement und Verfahren zum Betrieb eines Antriebselements Drive element and method for operating a drive member |
| 09/08/2010 | EP2226620A2 Semiconductor Sensor and Method of Manufacturing the Same |
| 09/08/2010 | EP2225555A2 Detection apparatus |
| 09/08/2010 | CN1893142B Minute structure, micromachine, organic transistor, electric appliance, and manufacturing method thereof |
| 09/08/2010 | CN101827781A Micro movable element and micro movable element array |
| 09/02/2010 | WO2009079188A9 Mems resonator structure and method for use in association with the resonator structure |
| 09/02/2010 | DE102010000818A1 MEMS-Resonatorbauelemente MEMS resonator devices |
| 09/01/2010 | EP2223887A1 Sensor using nanowires |
| 09/01/2010 | CN1618722B Mems having a three-wafer structure |
| 09/01/2010 | CN101821660A Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device |
| 08/31/2010 | US7786540 Sensor platform using a non-horizontally oriented nanotube element |
| 08/31/2010 | US7785422 Self-cleaning adhesive structure and methods |
| 08/26/2010 | WO2010096081A1 Mems-based ftir spectrometer |
| 08/26/2010 | WO2010096020A1 Miniaturized piezoelectric accelerometers |
| 08/26/2010 | WO2010095960A1 System and method for dynamic self-sensing of dielectric elastomer actuators |
| 08/26/2010 | WO2010095587A1 Light beam scanning device |
| 08/26/2010 | US20100216669 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal |
| 08/26/2010 | US20100213161 Capillary-Channel Probes For Liquid Pickup, Transportation And Dispense Using Stressy Metal |
| 08/26/2010 | US20100213068 Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns |
| 08/25/2010 | EP2221852A1 Trench isolation for micromechanical devices |
| 08/25/2010 | CN101269790B Surface discharge element and method for manufacturing same |
| 08/24/2010 | US7782170 Low consumption and low actuation voltage microswitch |
| 08/24/2010 | US7782161 Magnetically actuated microelectromechanical systems actuator |
| 08/24/2010 | US7781850 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 08/24/2010 | US7780918 detectors comprising patterned carbon nanotubes having electrical properties on support structures so that it may be exposed to fluids and control circuits; analysis apparatus |
| 08/19/2010 | WO2010092845A1 Micro-flow passage structure and micropump |
| 08/19/2010 | WO2010042645A3 Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer |
| 08/19/2010 | WO2009149213A3 Low temperature amorphous silicon sacrificial layer for controlled adhesion in mems devices |
| 08/19/2010 | US20100207411 Mems-based micro and nano grippers with two-axis force sensors |
| 08/18/2010 | EP2218677A1 Electrode configuration for pivotable MEMS micromirror |
| 08/18/2010 | EP1499500B1 Translation to rotation conversion in an inkjet printhead |
| 08/18/2010 | CN1764595B Micro-electro-mechanical systems (MEMS) device and system and method of producing the same |
| 08/17/2010 | US7777285 Semiconductor device having a suspended micro-system |
| 08/17/2010 | US7774930 Method of manufacturing a micromachined polymer beam structure |
| 08/12/2010 | WO2010090839A2 Fabrication of mems based cantilever switches by employing a split layer cantilever deposition scheme |
| 08/12/2010 | US20100204830 Self-cleaning adhesive structure and methods |
| 08/12/2010 | US20100200782 Microfabricated Elastomeric Valve And Pump Systems |
| 08/11/2010 | EP2216288A1 Micro movable element and micro movable element array |
| 08/11/2010 | EP2215005A1 Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
| 08/11/2010 | CN1599939B Microstructures |
| 08/11/2010 | CN101802677A Periodic dimple array |
| 08/11/2010 | CN101802586A Cantilever-type sensor, as well as a substance sensing system and a substance sensing method that use the sensor |
| 08/11/2010 | CN101798053A Fully compliant penta-stable mechanism and implementation method thereof |
| 08/11/2010 | CN101798052A Fully compliant tetra-stable mechanism and implementation method thereof |
| 08/10/2010 | US7772024 Method of manufacturing a micro-mechanical element |
| 08/10/2010 | US7771017 Nozzle arrangement for an inkjet printhead incorporating a protective structure |
| 08/05/2010 | US20100194407 MEMS sensor |
| 08/05/2010 | US20100194237 Mems devices and systems actuated by an energy field |
| 08/05/2010 | DE102009000950A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Mikrofonbauelements Component having a micromechanical microphone structure and method of operating such a device microphone |
| 08/05/2010 | DE102009000606A1 Mikromechanische Strukturen Micromechanical structures |
| 08/05/2010 | DE102009000599A1 Elektrostatischer Antrieb, Verfahren zum Betreiben eines mikromechanischen Bauteils mit einem elektrostatischen Antrieb und Herstellungsverfahren für einen elektrostatischen Antrieb An electrostatic drive method for operating a micromechanical component with an electrostatic actuator and a manufacturing method for the electrostatic drive |
| 08/05/2010 | DE102009000583A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Bauelements Component having a micromechanical microphone structure and method of operating such a device |
| 08/05/2010 | DE102009000574A1 Sensorvorrichtung Sensor device |
| 08/05/2010 | DE10046621B4 Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array A method for producing a membrane sensor array as well as membrane sensor array |
| 08/04/2010 | EP2213615A2 Microfluidic Large Scale Integration |
| 08/04/2010 | CN101792113A Method and apparatus for protecting wiring and integrated circuit device |
| 08/04/2010 | CN101792110A Mems传感器 Mems Sensor |
| 08/03/2010 | US7766055 Microfabricated elastomeric valve and pump systems |
| 07/29/2010 | US20100192268 Method and Apparatus for Micromachines, Microstructures, Nanomachines and Nanostructures |
| 07/29/2010 | US20100187105 Microfabricated Elastomeric Valve And Pump Systems |
| 07/29/2010 | US20100186841 Microfluidic dispensing assembly |
| 07/29/2010 | DE102009000429A1 Micro-mechanical device, e.g. for an acceleration sensor for releasing an airbag on a motor vehicle, has a moving element, limiting surfaces and restricting knobs |
| 07/29/2010 | DE102009000416A1 Mikromechanischer Drucksensor mit vertikaler Membranaufhängung The micromechanical pressure sensor with vertical diaphragm suspension |
| 07/29/2010 | DE102004030380B4 Mikromechanischer Drucksensor und Verfahren zum Selbsttest eines solchen The micromechanical pressure sensor and method for self-testing of such |
| 07/29/2010 | DE10004964B4 Mikromechanische Kappenstruktur Micromechanical cap structure |
| 07/28/2010 | EP2211362A1 Method for controlling a micromechanical element |
| 07/28/2010 | EP2210857A1 MEMS switch with set and latch electrodes |
| 07/28/2010 | EP2210138A1 Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device |
| 07/28/2010 | CN101790840A Piezoelectric actuator, optical reflection element using the same and piezoelectric driver |
| 07/27/2010 | US7763948 Flexible and elastic dielectric integrated circuit |
| 07/27/2010 | CA2520250C Micro relay |
| 07/22/2010 | WO2010061364A3 Electromechanical transducer device having stress-compensation layers and method of manufacture |
| 07/22/2010 | WO2010061363A3 Electromechanical transducer device having thermal compensation and method of manufacture |
| 07/22/2010 | DE102009000168A1 Micromechanical structure for rotary sensors, has substrate provided with main extending level, and seismic mass that moves relative to substrate |
| 07/21/2010 | CN101784892A Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry |
| 07/21/2010 | CN101029966B Micro mechanical-electric device and array, optical modulating device and array and image forming equipment |