Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2010
12/01/2010EP2254826A2 Microelectromechanical device with thermal expansion balancing layer or stiffening layer
12/01/2010CN1672929B Method for forming a chamber in an electronic device and device formed thereby
12/01/2010CN101903752A MEMS structure for flow sensor
12/01/2010CN101458262B Six-beam structure acceleration sensor and method for making same
11/2010
11/30/2010US7843025 Micromechanical semiconductor sensor
11/25/2010WO2010134244A1 Converter module and method for manufacturing same
11/25/2010US20100295902 Nozzle arrangement for inkjet printhead incorporating a protective structure
11/25/2010DE10324421B4 Halbleiterbauelement mit Metallisierungsfläche und Verfahren zur Herstellung desselben Of the same semiconductor device with metallization and methods for preparing
11/24/2010EP2252544A1 Methods for measurement and characterization of interferometric modulators
11/24/2010CN1805853B Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate
11/24/2010CN101895003A Radio frequency micro electromechanical resonator adopting torsional oscillation around shaft core
11/24/2010CN101891140A MEMS device
11/23/2010US7839559 Controller and driver features for bi-stable display
11/23/2010US7838950 Electro-mechanical component, such as a strained Si Fin-FET
11/18/2010WO2010131557A1 Actuator and optical scanning device using actuator
11/18/2010WO2010131449A1 Optical reflection element
11/18/2010US20100288382 Fluid cartridge, pump and fluid valve arrangement
11/18/2010DE102009002986A1 Micro mechanical transducer element for ascertainment of physical size, particularly pressure variable or accelerating variable depending on deflection of beam, has beam that deflects itself while applying voltage to piezoresistors
11/17/2010CN101885464A Aluminum oxide double-layer membrane electric heating micro-actuator
11/17/2010CN101885463A Development method of flexible pressure-sensitive element based on carbon nano-tube filled high polymer composite material
11/17/2010CN101027741B Bimorph element, bimorph switch, mirror element, and method for manufacturing these
11/16/2010US7833405 doped areas are first selectively anodized (porous etching), which is carried out locally by means of a monocrystalline cover layer, e.g., an epitaxial layer, followed by a time-controlled switch to selective electropolishing of doped layer buried under the membrane to produce a cavity under cover layer
11/16/2010US7832837 Print assembly and printer having wide printing zone
11/11/2010WO2010128864A1 Energy conversion device
11/10/2010CN101881785A Four-folding beam variable area differential capacitance structure micro-acceleration sensor and manufacture method thereof
11/10/2010CN101881667A Uncooled microbolometer and preparation method thereof
11/10/2010CN101881616A Vibration single gimbal microcontrol moment gyro
11/10/2010CN101880022A Anti-vibration device and preparation method thereof
11/10/2010CN101246258B Comb teeth type electrostatic actuator
11/09/2010US7830586 Transparent thin films
11/09/2010US7830228 Miniature RF and microwave components and methods for fabricating such components
11/09/2010US7829054 Actuator on the basis of geometrically anisotropic nanoparticles
11/09/2010US7828952 Building up a three-dimensional structure from a number of adhered layers by depositing a first material onto a substrate; selectively etching to a desired depth; depositing a second material at least into the voids created; at least one of the deposition processes is an electrodeposition process
11/04/2010WO2010125071A1 Micromechanical sensor
11/04/2010US20100277532 Printhead assembly having interconnected controllers
11/04/2010DE102009002702A1 Mikromechanischer Sensor Micromechanical sensor
11/03/2010EP2246726A2 System and method for micro-electromechanical operating of an interferometric modulator
11/03/2010EP2246706A1 Physical quantity sensor
11/03/2010EP2245738A1 A micromechanical resonator
11/03/2010EP1529217B1 Micromechanical component
11/03/2010EP1294494B1 Capacitive micromachined ultrasonic transducer and operating method thereof
11/03/2010CN1494106B Method and device used for protecting wiring and integrated circuit device
10/2010
10/28/2010WO2010122953A1 Mems element and method for manufacturing same
10/28/2010WO2010122751A1 Optical reflection element
10/28/2010WO2009152012A3 Method for avoiding electrostatic capture in micromachined devices
10/28/2010US20100270596 Mems sensor, method of manufacturing mems sensor, and electronic apparatus
10/28/2010DE102009002559A1 Sensoranordnung Sensor array
10/27/2010CN1833352B Actuator element and production method therefor
10/27/2010CN1680186B Interlaced array of piano mems micromirrors
10/27/2010CN1495293B Surfactant enhanced protection method for preventing micromechanical component from electrically ageing
10/27/2010CN101872840A Method for manufacturing organic transistor
10/26/2010USRE41889 Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
10/26/2010USRE41856 Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
10/26/2010US7820469 Stress-controlled dielectric integrated circuit
10/21/2010WO2010121176A2 Microtensiometer
10/21/2010WO2010121121A2 Long travel range mems actuator
10/21/2010WO2010119857A1 Actuator element and input device
10/21/2010US20100263732 Microfluidic Free Interface Diffusion Techniques
10/21/2010DE102010011631A1 Kointegrierter MEMS-Sensor und Verfahren hierzu Kointegrierter MEMS sensor and method therefor
10/21/2010DE102008002674B9 Mikroventil und Abdichteinrichtung zur Verwendung in einem Mikrofluidiksystem sowie Verfahren zu deren Herstellung Micro valve and sealing means for use in a microfluidic system, as well as processes for their preparation
10/20/2010CN1826285B Stacked structure and production method thereof
10/20/2010CN101867080A Bulk silicon micro mechanic resonator and manufacturing method thereof
10/19/2010US7817458 Hybrid circuit having nanotube memory cells
10/19/2010US7816165 Method of forming a device by removing a conductive layer of a wafer
10/19/2010US7814652 Method of making through-hole vias in a substrate
10/14/2010WO2010116332A1 Mems resonator
10/14/2010WO2010116061A1 Piezoelectric microelectromechanical device
10/14/2010WO2010115445A1 Micromechanical system and method for building a micromechanical system
10/13/2010EP2239845A1 MEMS resonator
10/13/2010CN1729086B Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
10/13/2010CN101860262A Piezoelectric twin-wafer type MEMS energy collector and preparation method thereof
10/13/2010CN101858745A All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity
10/12/2010US7812502 Shell type actuator
10/12/2010US7811427 Monolithic structures including alignment and/or retention fixtures for accepting components
10/07/2010WO2010113603A1 Optical scanner
10/07/2010WO2010113602A1 Optical scanner
10/07/2010WO2010113251A1 Micro movable element array and communication apparatus
10/07/2010WO2010112051A1 Vibrating micromechanical system having a beam-shaped element
10/07/2010WO2010012532A3 Method for producing a micromechanical component having an inclined planar structure, and micromechanical component
10/07/2010US20100255322 Radio-Frequency Microelectromechanical Systems and Method of Manufacturing such Systems
10/07/2010US20100254837 Actuator for manipulating a fluid, comprising an electro-active polymer or an electro-active polymer composition
10/07/2010DE102005058870B4 Differenzdrucksensor mit einer Membran Differential pressure sensor with a membrane
10/06/2010EP2236455A1 Micromechanical component with reduced wear
10/06/2010EP2235821A1 Mems resonator structure and method for use in association with the resonator structure
10/06/2010CN1721993B System and method for moving an object employing piezo actuators
10/06/2010CN101855586A Microelectromechanical device with optical function separated from mechanical and electrical function
10/06/2010CN101850943A Mems sensor and mems sensor manufacture method
10/05/2010US7808091 Wafer structure with discrete gettering material
09/2010
09/30/2010WO2010111153A2 Display device with openings between sub-pixels and method of making same
09/30/2010WO2010110417A1 Actuator device and input device
09/30/2010WO2010110315A1 Transmission line
09/30/2010WO2009148144A3 Structure having plural conductive regions and process for production thereof
09/30/2010DE102009001856A1 Vorrichtung zum resonanten Antreiben eines mikromechanischen Systems Device for driving a resonant micromechanical system
09/30/2010DE102009001847A1 Micro-mechanical component for sensor device, has holder, where seismic measure is connected with holder by spring in displacing manner, and condenser surfaces of two condensers are coupled to common electrical contact
09/29/2010EP2233961A1 Micro scanner and method for controlling micro scanner
09/29/2010EP2232205A2 Mems structure for flow sensor
09/29/2010CN1966392B Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
09/29/2010CN1583541B Microdriver with multilayer driving membrane structure and manufacturing method thereof
09/29/2010CN1572719B MEMS device and method of forming MEMS device
09/29/2010CN101846653A Piezoelectric film bulk acoustic wave sensor with polygonal electrodes
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