| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/26/2011 | CN101957245A Sensor package assembly having unconstrained sense die |
| 01/26/2011 | CN101955151A Two-dimensional comb tooth electrostatic driver based on silicon plastic deformation principle and manufacturing method thereof |
| 01/25/2011 | US7875941 Thin film encapsulation of MEMS devices |
| 01/25/2011 | US7875940 Micromachine and production method thereof |
| 01/25/2011 | CA2378190C Microfabricated elastomeric valve and pump systems |
| 01/20/2011 | WO2011008070A1 Cantilever microvalve structure and method of fabricating same |
| 01/20/2011 | WO2011006885A1 Nems comprising alsi alloy based transduction means |
| 01/20/2011 | WO2010134302A3 Method for manufacturing a capacitive electromechanical transducer |
| 01/20/2011 | DE102009027712A1 Digital/analog converter, has sensor detecting physical and/or chemical condition of conveying unit, signal for data bit is formed by signal conductors, and output signal determined and/or formed based on condition of conveying unit |
| 01/19/2011 | EP2276047A1 Mem switch and method for manufacturing the same |
| 01/19/2011 | EP2275383A2 Vertical sensor assembly method |
| 01/19/2011 | EP2274108A1 Methods of manufacturing capacitive electromechanical transducer and capacitive electromechanical transducers |
| 01/19/2011 | CN101952194A Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| 01/19/2011 | CN101947453A Preparation method of Fe/TiO2 nano tube array and application thereof to degradation of sugar waste water |
| 01/19/2011 | CN101947452A Preparation method of Co/TiO2 nanotube array and application thereof in degradation of sugar wastewater |
| 01/13/2011 | WO2011006028A2 Small scale smart material actuator and energy harvesting apparatus |
| 01/13/2011 | WO2011003803A1 Method for forming mems variable capacitors |
| 01/13/2011 | WO2011003404A1 Reduction of the dynamic deformation of translational mirrors using inertial masses |
| 01/13/2011 | DE102010029284A1 MEMS-Bauelement MEMS device |
| 01/13/2011 | DE102009033191A1 Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen Reduction of the dynamic deformation of translational levels using inert masses |
| 01/12/2011 | CN101946400A Mems resonator structure and method for use in association with the resonator structure |
| 01/12/2011 | CN101945819A Micro-electromechanical device and method for fabricating the same |
| 01/12/2011 | CN101945818A Methods for measurement and characterization of interferometric modulators |
| 01/12/2011 | CN101944860A Piezoelectric cantilever vibration energy harvester and preparation method thereof |
| 01/12/2011 | CN101941670A Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay |
| 01/12/2011 | CN101941669A MEMS sensor, silicon microphone, and pressure sensor |
| 01/12/2011 | CN101397121B Silicon nanowire pressure sensor, cantilever beam, production method and pressure measurement method thereof |
| 01/12/2011 | CN101308051B Three-dimensional micro- force silicon micro- sensor |
| 01/11/2011 | CA2463900C Digital optical switch apparatus and process for manufacturing same |
| 01/11/2011 | CA2413965C Accelerometer with folded beams |
| 01/06/2011 | WO2011001680A1 Resonator and production method thereof |
| 01/06/2011 | US20110001143 Composition Comprising Silicon Carbide |
| 01/05/2011 | EP2271134A1 Proximity sensor comprising an acoustic transducer for receiving sound signals in the human audible range and for emitting and receiving ultrasonic signals. |
| 01/05/2011 | EP2269109A1 Improved membrane, especially for an optical device having a deformable membrane |
| 01/05/2011 | EP2269001A1 Vibrating micro-mechanical sensor of angular velocity |
| 01/05/2011 | DE10111149B4 Mikromechanischer kapazitiver Beschleunigungssensor The micromechanical capacitive acceleration sensor |
| 01/05/2011 | CN201699116U Radio frequency micro-electro-mechanical resonator by turning and vibrating around central spindle |
| 01/05/2011 | CN1950291B Reduction of etching charge damage in manufacture of microelectromechanical devices |
| 01/05/2011 | CN1923670B Modified SU8 electric heating micro-performer with multi-arc structure for straight line propulsion |
| 01/05/2011 | CN101936937A Micro-cantilever gas sensor and manufacturing method thereof |
| 12/30/2010 | DE102009027284A1 Method for manufacturing micromechanical structure, involves forming substrate with main extension level and manufacturing two caverns within substrate |
| 12/30/2010 | DE102009027180A1 Mikromechanisches Element sowie Verfahren zu dessen Herstelllung The micromechanical element and method of Manufacture |
| 12/30/2010 | DE10003066B4 Halbleitersensor für eine physikalische Größe und Verfahren zum Herstellen desselben Of the same semiconductor sensor for a physical quantity and methods of making |
| 12/29/2010 | EP2267807A2 Piezoelectric macro-fiber composite actuator and manufacturing method |
| 12/29/2010 | EP1382565B1 A method of forming a hollow structure from a silicon structure |
| 12/29/2010 | CN101931379A Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same |
| 12/29/2010 | CN101929977A Enzyme bioelectrochemical sensing chip and preparation and using methods thereof |
| 12/29/2010 | CN101488724B Electric heating micro driver of multiple polymer composite material |
| 12/29/2010 | CN101402444B Mould condition excitation both-end fine beam and mould condition shape electrode width determining method thereof |
| 12/28/2010 | US7859167 Micro actuator having tilt and vertical displacement and device having such micro actuator |
| 12/28/2010 | US7859093 Method for protecting encapsulated sensor structures using stack packaging |
| 12/23/2010 | WO2010147078A1 Method for manipulating particles, and microfluidic device |
| 12/23/2010 | WO2010146261A2 Microfluidic system and corresponding method for transferring elements between liquid phases and use of said system for extracting said elements. |
| 12/23/2010 | US20100320555 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 12/22/2010 | EP2264468A2 Merged-mask micro-machining process |
| 12/22/2010 | CN101922984A Nano-silicon thin-membrane four-island-beam-membrane sensor chip and preparation method thereof |
| 12/22/2010 | CN101922934A Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope |
| 12/22/2010 | CN101015120B Thermal-mechanical signal processing |
| 12/21/2010 | CA2436656C Optical switch, optical add/drop apparatus, optical transmission system, and method of producing optical switch |
| 12/16/2010 | WO2010143363A1 Resonator and oscillator using same |
| 12/16/2010 | US20100313691 Device for converting a first motion into a second motion responsive to the first motion under a demagnification scale |
| 12/15/2010 | EP2262095A1 Actuator array sheet |
| 12/15/2010 | EP2261171A1 Composite micromechanical part and method for manufacturing same |
| 12/15/2010 | EP1725405B1 Liquid drop discharge head, ink cartridge and inkjet recording device |
| 12/15/2010 | CN1842884B MEMS switch and computer system |
| 12/15/2010 | CN101919159A A micromechanical resonator |
| 12/15/2010 | CN101915871A MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof |
| 12/15/2010 | CN101915870A MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof |
| 12/15/2010 | CN101915793A Microelectrode array and microchannel integrated sensor structure and manufacturing method thereof |
| 12/15/2010 | CN101913550A Microbridge structure of micro-electromechanical system and manufacture method thereof |
| 12/14/2010 | US7851976 Micro movable device and method of making the same using wet etching |
| 12/14/2010 | US7851056 Ultralyophobe interfaces |
| 12/09/2010 | WO2010141942A2 Mems switch with latch mechanism |
| 12/09/2010 | WO2010139496A2 Semiconductor component having a micromechanical microphone structure |
| 12/09/2010 | WO2010139055A1 Methods and systems for detection using threshold-type electrostatic sensors |
| 12/09/2010 | DE102009026682A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 12/09/2010 | DE102009026677A1 Halbleiterbauelement mit einer mikromechanischen Mikrofonstruktur A semiconductor device comprising a micromechanical microphone structure |
| 12/09/2010 | DE102009026639A1 Electromechanical microstructure for e.g. acceleration sensor, has movable elements connected with substrate and with area made of partially monocrystalline silicon, and spring with area made of partially polycrystalline silicon |
| 12/08/2010 | CN1902818B Electromechanical filter |
| 12/08/2010 | CN1675728B Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 12/08/2010 | CN1564780B Method for producing a semiconductor component and a semiconductor component |
| 12/08/2010 | CN101905852A Electrostatic MEMS micro actuator combined device and processing method thereof |
| 12/08/2010 | CN101905851A Electro-thermal micro-actuator based on combined action of alumina film and polymer |
| 12/08/2010 | CN101276054B Micro-oscillating member, light-deflector, and image-forming apparatus |
| 12/07/2010 | US7847885 locally adhered to substrate with polyimide surface and delaminated via thermal shock; eliminates under-etching |
| 12/07/2010 | US7845869 Computer keyboard with internal printer |
| 12/02/2010 | WO2010138931A2 Mechanical isolation for mems electrical contacts |
| 12/02/2010 | WO2010138717A1 Mems mass spring damper systems using an out-of-plane suspension scheme |
| 12/02/2010 | WO2010138077A1 A microfluidic device |
| 12/02/2010 | WO2010137604A1 Macromolecule actuator device |
| 12/02/2010 | WO2010136358A2 Micromechanical component and production method for a micromechanical component |
| 12/02/2010 | WO2010136356A2 Micromechanical component, and method for the production thereof |
| 12/02/2010 | US20100303687 Fluidic devices with diaphragm valves |
| 12/02/2010 | DE102010001128A1 Akustischer Oberflächenwellendrucksensor Surface acoustic wave pressure sensor |
| 12/02/2010 | DE102009026511A1 Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden Raumachsen Micro-gyroscope for detecting rotational movements around at least one of three mutually perpendicular spatial axes, |
| 12/02/2010 | DE102009026507A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 12/02/2010 | DE102009026506A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 12/02/2010 | DE102009026502A1 Micromechanical component for micromirror arrangement, has torsion spring device, which extends in direction of torsion axis between anchoring area and mobile element |
| 12/02/2010 | DE102009026501A1 Micro-mechanical device i.e. micromirror, has outer actuator and stator electrode components designed such that middle actuator electrode component is adjustable by applying voltage between outer actuator and stator electrode components |
| 12/02/2010 | DE102009002701A1 Mikromechanischer Sensor Micromechanical sensor |