| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/30/2011 | EP2302712A1 Method for resonance frequency tuning of micromachined structures |
| 03/30/2011 | EP2300355A1 Bonded microfluidics system comprising cmos-controllable microfluidic devices |
| 03/30/2011 | CN1874955B A method of manufacturing an electronic device and electronic device |
| 03/30/2011 | CN101993030A Micro movable device and method for manufacturing the same |
| 03/29/2011 | US7915066 Methods of making electromechanical three-trace junction devices |
| 03/29/2011 | US7914118 Integrated circuit (IC) incorporating rows of proximal ink ejection ports |
| 03/29/2011 | CA2479301C Micro light modulator arrangement |
| 03/24/2011 | WO2011033729A1 Mems switch and communication device using the same |
| 03/23/2011 | EP2299584A1 Moving structure and light scanning mirror using same |
| 03/23/2011 | EP2298448A2 Microfluidic large scale integration |
| 03/23/2011 | CN101990738A Actuator array sheet |
| 03/23/2011 | CN101988988A Light deflector, method of manufacturing light deflector, and image display device |
| 03/23/2011 | CN101987719A Sensing element structure and manufacturing method |
| 03/23/2011 | CN101987718A Microelectromechanical z-axis detection structure with low thermal drifts |
| 03/22/2011 | US7911012 Flexible and elastic dielectric integrated circuit |
| 03/17/2011 | WO2010090839A3 Fabrication of mems based cantilever switches by employing a split layer cantilever deposition scheme |
| 03/17/2011 | DE102009029248A1 Mikromechanisches System zum Erfassen einer Beschleunigung A micromechanical system for detecting an acceleration |
| 03/17/2011 | DE102004058103B4 Einrichtung zur Spalteinstellung Means for gap adjustment |
| 03/17/2011 | DE10141867B4 Halbleitersensor für dynamische Grössen mit beweglichen Elektroden und Festelektroden auf einem Unterstützungssubstrat Semiconductor sensor for dynamic variables with movable electrodes and fixed electrodes on a substrate support |
| 03/16/2011 | CN201766561U Novel electromagnetic excitation/electromagnetic vibration pickup microbridge resonator with three-beam structure |
| 03/15/2011 | CA2392006C Microfabricated devices for the delivery of molecules into a carrier fluid |
| 03/10/2011 | DE102009029202A1 Mikromechanisches System Micromechanical System |
| 03/09/2011 | EP2293135A1 Movable structure and micro-mirror element using the same |
| 03/09/2011 | EP1218289B1 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
| 03/09/2011 | CN101119924B Micromechanical membrane sensor comprising a double membrane |
| 03/03/2011 | WO2011024648A1 Mems, and method for manufacturing same |
| 03/03/2011 | WO2010141942A3 Mems switch with latch mechanism |
| 03/03/2011 | WO2010012541A3 Micromechanical structure and method for setting the working gap width of a micromechanical structure |
| 03/03/2011 | DE102009029095A1 Mikromechanisches Bauelement Micromechanical component |
| 03/02/2011 | CN101983412A Mems switch and method for manufacturing the same |
| 03/02/2011 | CN101982401A Carbon nanometer spiral micro heat conduction based motion sensor and preparing method thereof |
| 03/02/2011 | CN101224866B Micro-switching device |
| 02/24/2011 | WO2010121176A3 Microtensiometer |
| 02/23/2011 | EP2287624A2 Scanning Probe System |
| 02/23/2011 | EP2287110A2 Methods and apparatus for actuating displays |
| 02/23/2011 | EP2286929A1 Methods of nanotube films and articles |
| 02/23/2011 | EP2285732A2 Structure having plural conductive regions and process for production thereof |
| 02/23/2011 | CN1926055B MEMS-based actuator devices using electrets |
| 02/23/2011 | CN101980026A Two-dimensional wind speed and direction sensor for circular silicon film |
| 02/23/2011 | CN101980025A Circular platinum film two-dimensional wind speed and wind direction sensor |
| 02/23/2011 | CN101980024A Rectangular platinum film two-dimensional wind speed and direction sensor |
| 02/22/2011 | US7893796 High frequency device, power supply device and communication apparatus |
| 02/22/2011 | US7893595 Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator |
| 02/22/2011 | US7891779 Inkjet printhead with nozzle layer defining etchant holes |
| 02/17/2011 | WO2011019489A2 Miniature magnetic switch structures |
| 02/17/2011 | WO2011018521A2 Micro mechanical element |
| 02/17/2011 | WO2009105685A3 Molecular-scale beam pump assemblies and uses thereof |
| 02/17/2011 | US20110037907 Controller and driver features for bi-stable display |
| 02/17/2011 | US20110036431 Activatable nanoparticle composite valve |
| 02/17/2011 | DE102009043214A1 Piezoelektrischer Energiewandler zum Umwandeln mechanischer Energie in elektrische Energie mit Hilfe von Druckschwankungen, Verfahren zum Umwandeln von mechanischer Energie in elektrische Energie unter Verwendung des Energiewandlers und Verwendung des Verfahrens The piezoelectric energy converter for converting mechanical energy into electrical energy by means of pressure fluctuations, process for converting mechanical energy into electrical energy using the energy converter and using the method |
| 02/17/2011 | DE102009028371A1 Micromechanical component for use as acceleration sensor in motor vehicle i.e. automobile, has electrode elements for providing parasitic capacitance to contrary cause capacitance change between electrodes and compensator structures |
| 02/17/2011 | CA2771156A1 Micro mechanical element |
| 02/17/2011 | CA2770451A1 Miniature magnetic switch structures |
| 02/16/2011 | EP1648038B1 Actuator element and device having actuator element |
| 02/16/2011 | CN101975934A Integrated bias coil type giant magneto-impedance effect (GMI) magneto-dependent sensor |
| 02/16/2011 | CN101975870A Rectangular silicon-film two-dimensional wind speed and direction sensor |
| 02/16/2011 | CN101973506A Van der Waals' force oscillator |
| 02/16/2011 | CN101412494B Substrate support device |
| 02/15/2011 | US7887233 Thermal bend actuator material selection |
| 02/15/2011 | CA2492595C Optical module, optical add/drop apparatus, and optical transmission apparatus |
| 02/10/2011 | US20110034047 Negative Thermal Expansion System (NTES) Device for TCE Compensation in Elastomer Composites and Conductive Elastomer Interconnects in Microelectronic Packaging |
| 02/10/2011 | DE10303751B4 Kapazitiver Sensor für eine dynamische Größe Capacitive sensor for dynamic size |
| 02/10/2011 | DE102010038988A1 Sensoranordnung und Chip mit zusätzlichen Befestigungsbeinen Sensor array and chip with additional mounting legs |
| 02/10/2011 | DE102009028177A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zur Herstellung eines solchen Bauelements Component having a micromechanical microphone structure and method for producing such a component |
| 02/09/2011 | EP2280906A1 Mems device with independent rotation in two axes of rotation |
| 02/09/2011 | EP2280905A1 Multilevel microfluidic systems and methods |
| 02/09/2011 | CN201740612U Double-side simultaneous electrostatic sealing structure type force sensor |
| 02/09/2011 | CN201737690U Mems sensor |
| 02/09/2011 | CN101971495A Micromechanical resonator |
| 02/09/2011 | CN101970339A Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
| 02/09/2011 | CN101968495A Cantilever beam acceleration transducer manufactured by micro-machining on single side of single silicon chip and method |
| 02/09/2011 | CN101663748B Functional element package and fabrication method therefor |
| 02/08/2011 | USRE42119 Microelectrochemical systems device and method for fabricating same |
| 02/08/2011 | US7883919 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer compsites and conductive elastomer interconnects in microelectronic packaging |
| 02/08/2011 | US7882612 Method for producing a membrane |
| 02/08/2011 | CA2586707C Oscillating micro-mechanical sensor of angular velocity |
| 02/03/2011 | WO2011013593A1 Actuator element and method for manufacturing actuator element |
| 02/03/2011 | WO2011012430A1 Piezoelectric energy converter for converting mechanical energy into electrical energy with increased efficiency of the conversion process, method for converting mechanical energy into electrical energy and use of the method |
| 02/03/2011 | WO2011012425A1 Bending device for bending a piezoelectric bender, piezoelectric converter for converting mechanical energy into electrical energy by using the bending device, and method for converting mechanical energy into electrical energy |
| 02/03/2011 | WO2011012403A1 Piezoelectric energy converter for converting mechanical energy into electrical energy by means of a fluid flow, method for converting mechanical energy into electrical energy by using the energy converter and using the method |
| 02/03/2011 | WO2011012365A1 Piezoelectric energy converter for converting mechanical energy into electrical energy by means of pressure variations, method for converting mechanical energy into electrical energy using the energy converter and the method |
| 02/03/2011 | US20110025777 Printer having multiple nozzle ics and cappers |
| 02/03/2011 | DE19847305B4 Herstellungsverfahren für eine mikromechanische Vorrichtung Manufacturing method for a micromechanical device |
| 02/02/2011 | EP1514096B1 Hybrid microcantilever sensors |
| 02/02/2011 | CN201733285U High-power three-phase alternating-current switch |
| 02/02/2011 | CN101964272A Pressure switch based on micro-electromechanical system technology |
| 02/02/2011 | CN101964229A Carbon nano tube stranded wire and preparation method thereof |
| 02/02/2011 | CN101963624A Silicon micro-resonant accelerometer |
| 02/02/2011 | CN101963564A Chiral sensor and preparation method thereof |
| 02/02/2011 | CN101962167A Method for preparing film for testing mechanical characteristics of silica thin film |
| 02/02/2011 | CN101962165A Microbridge structure of micro-electromechanical system and manufacturing method thereof |
| 02/01/2011 | USRE42083 Acceleration sensor and process for the production thereof |
| 01/27/2011 | WO2011009164A1 Three-dimensional microfluidic systems |
| 01/27/2011 | US20110022207 Methods of and Apparatus for Electrochemically Fabricating Structures Via Interlaced Layers or Via Selective Etching and Filling of Voids |
| 01/27/2011 | DE102009027873A1 Micromechanical system has substrate and two conductive elements which are electrically isolated from each other and are mechanically rigidly connected with each other |
| 01/27/2011 | DE102006055147B4 Schallwandlerstruktur und Verfahren zur Herstellung einer Schallwandlerstruktur Transducer structure and method of making a transducer structure |
| 01/26/2011 | CN1994859B Manufacture method of ripple structure film and mould possessing the structure |
| 01/26/2011 | CN101960718A Apparatus, method, and computer program product providing edgeless nanotube resonator arrays |
| 01/26/2011 | CN101960275A Three-dimensional structure and method of manufacturing the same |
| 01/26/2011 | CN101957246A Integrated detector for micro-force micro-displacement measurement system |