| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/18/2011 | CN102066239A MEMS device |
| 05/18/2011 | CN102065362A MEMS microphone package and packaging method |
| 05/18/2011 | CN102060259A Micro-optic-electromechanical sensor based on integration of silicon-based MEMS (Micro-electromechanical System) sensitive structure and optical detection technology and application method thereof |
| 05/18/2011 | CN102060258A Microelectronic mechanical device |
| 05/17/2011 | USRE42359 Dynamical quantity sensor |
| 05/17/2011 | US7942160 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 05/17/2011 | CA2539261C Implantable wireless sensor |
| 05/12/2011 | WO2011034972A3 Display device with at least one movable stop element |
| 05/12/2011 | DE102009046515A1 Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate |
| 05/11/2011 | EP2319558A2 Mems device for delivery of therapeutic agents |
| 05/11/2011 | EP2318876A1 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
| 05/11/2011 | EP2318303A2 Micromechanical structure and method for setting the working gap width of a micromechanical structure |
| 05/11/2011 | EP1451584B1 High surface area substrates for microarrays and methods to make same |
| 05/11/2011 | CN201828268U Superminiature MEMS (micro-electromechanical system) gyro sensor |
| 05/11/2011 | CN102056838A Multilevel microfluidic systems and methods |
| 05/11/2011 | CN102056063A Mems microphone and method for manufacturing same |
| 05/11/2011 | CN102052985A MEMS cylinder-type high-temperature and superhigh-pressure resistant sensor |
| 05/11/2011 | CN102050417A Device with microstructure and method of forming such a device |
| 05/05/2011 | WO2011053734A1 System on a chip using integrated mems and cmos devices |
| 05/05/2011 | WO2011053471A1 Interferometric modulation devices having triangular subpixels |
| 05/05/2011 | WO2011053363A1 Optical mems device and remote sensing system utilizing the same |
| 05/05/2011 | WO2011051620A2 Electromagnetically actuated micro-shutter |
| 05/05/2011 | WO2011019489A3 Miniature magnetic switch structures |
| 05/05/2011 | WO2010141942A4 Mems switch with latch mechanism |
| 05/05/2011 | WO2010090839A4 Fabrication of mems based cantilever switches by employing a split layer cantilever deposition scheme |
| 05/05/2011 | US20110101474 Method for protecting encapsulated sensor structures using stack packaging |
| 05/05/2011 | DE102009046388A1 Micromechanical structural element i.e. micro-mirror, for use in e.g. device for deflection of rays in monochromatic light in optical network, has linear drive elastically designed regarding to form change due to compression of structure |
| 05/05/2011 | DE102009046110A1 Koppelfeder für Drehratensensor Coupling spring for angular rate sensor |
| 05/04/2011 | EP2317365A1 Drive device |
| 05/04/2011 | EP2316505A2 Mems device for delivery of therapeutic agents |
| 05/04/2011 | EP1444779B1 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator |
| 05/04/2011 | CN201821326U Wafer-level package structure of oscillator device with enhanced air tightness |
| 05/04/2011 | CN1603225B Mems device and method of forming mems device |
| 05/04/2011 | CN102046516A Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices |
| 05/04/2011 | CN102046515A Structure having plural conductive regions and process for production thereof |
| 05/04/2011 | CN102046514A Capacitive sensor with stress relief that compensates for package stress |
| 05/04/2011 | CN102046513A Semiconductor device with reduced sensitivity to package stress |
| 05/04/2011 | CN102042887A Rectangular silicon thin film micro-electromechanical pressure sensor |
| 05/03/2011 | US7934803 Inkjet nozzle arrangement with rectangular plan nozzle chamber and ink ejection paddle |
| 04/28/2011 | WO2010139496A3 Semiconductor component having a micromechanical microphone structure |
| 04/28/2011 | US20110096125 Inkjet printhead with nozzle layer defining etchant holes |
| 04/28/2011 | US20110095384 Single Crystal Silicon Sensor with Additional Layer and Method of Producing the Same |
| 04/28/2011 | DE19921241B4 Verfahren zur Herstellung eines Halbleitersensors für eine dynamische Größe A process for producing a semiconductor dynamic quantity sensor |
| 04/27/2011 | CN201811815U Circular silicon film micro-electro-mechanical pressure sensor based on heat loss working mode |
| 04/27/2011 | CN1898150B Method for containing a device and a corresponding device |
| 04/27/2011 | CN102035497A Piezoelectric resonator, oscillator and oscillator package |
| 04/27/2011 | CN102032970A Mems压力传感器 Mems pressure sensor |
| 04/27/2011 | CN102030307A Manufacturing method for micromechanical component and micromechanical component |
| 04/27/2011 | CN102030302A Micromechanical structure and method for manufacturing micromechanical structure |
| 04/27/2011 | CN101402443B Mould condition excitation cantilever arm fine beam and mould condition shape electrode width determining method thereof |
| 04/21/2011 | WO2011046161A1 Polymer actuator element and polymer sensor comprising same |
| 04/21/2011 | WO2011006028A3 Small scale smart material actuator and energy harvesting apparatus |
| 04/21/2011 | DE102009045720A1 Mikromechanisches Bauteil mit einer verstellbaren Komponente Micromechanical element with an adjustable component |
| 04/21/2011 | DE10151376B4 Dynamischer Halbleitergrößensensor zum Erfassen einer dynamischen Größe in zwei Achsen mit einem x-förmigen Massenabschnitt Dynamic semiconductor size sensor for detecting a dynamic quantity in two axes with an x-shaped ground portion |
| 04/21/2011 | DE10128577B4 Halbleiterdrucksensor mit Dehnungsmesser und Schaltungsabschnitt auf einem Halbleitersubstrat A semiconductor pressure sensor with strain gauges and circuit portion on a semiconductor substrate |
| 04/21/2011 | DE10023379B4 Membranmeßfühler und Membranmessfühleraufbauten, Verfahren zu ihrer Herstellung und mit ihnen angewandte Testverfahren Membranmeßfühler and membrane probe structures, processes for their preparation and applied them test method |
| 04/20/2011 | EP2311567A1 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams |
| 04/20/2011 | EP1805099B1 Composite connector in an interferometric optical modulator and manufacturing method |
| 04/20/2011 | CN201803819U Rectangular silicon thin film micro-electronic-mechanical pressure sensor based on heat loss working way |
| 04/20/2011 | CN1994860B Silicon micromachine cantilever beam sensor driving structure, production method and uses under torsion mode |
| 04/20/2011 | CN102027404A Induced resonance comb drive scanner |
| 04/20/2011 | CN102025337A Resonator |
| 04/20/2011 | CN102023234A Micromachined accelerometer with monolithic electrodes and method of making the same |
| 04/19/2011 | US7926328 Sample manipulating apparatus |
| 04/14/2011 | WO2011042611A1 Method and device for energy harvesting |
| 04/14/2011 | WO2011042597A1 A micromechanical resonator |
| 04/14/2011 | WO2011042562A1 Meniscus-supported compliant table |
| 04/14/2011 | WO2011042041A1 Microelectromechanical sensor with a differential capacitor principle |
| 04/14/2011 | WO2010136356A3 Micromechanical component, and method for the production thereof |
| 04/14/2011 | DE10392851B4 Verfahren zum Herstellen eines Mikroelektromechanischen variablen Kondensators A method of manufacturing a microelectromechanical variable capacitor |
| 04/14/2011 | DE102009045645A1 Sensor device has base plate, inertial mass and spring, where distance of counter electrode from rotation axis is less than distance of another counter electrode from rotational axis |
| 04/13/2011 | EP2309130A2 Microfabricated elastomeric valve and pump systems |
| 04/13/2011 | EP2308796A1 Meniscus-supported compliant table |
| 04/13/2011 | EP1383707B1 Fabrication of silicon micro mechanical structures |
| 04/13/2011 | CN201796049U Silicon micro resonant accelerometer |
| 04/13/2011 | CN102015127A Methods of manufacturing capacitive electromechanical transducer and capacitive electromechanical transducers |
| 04/13/2011 | CN102012436A Micromechanical system for detecting an acceleration |
| 04/13/2011 | CN102012434A Capacitive angular speed sensor of micro electro mechanical system and manufacturing method thereof |
| 04/13/2011 | CN102012287A Electrical pressure sensor of circular silicon film microcomputer |
| 04/13/2011 | CN102012270A High-performance thermal deformation beam for optical-mechanical thermal infrared sensor and applications thereof |
| 04/13/2011 | CN101023508B Improved method and apparatus for the etching of microstructures |
| 04/12/2011 | US7922298 Ink jet printhead with displaceable nozzle crown |
| 04/12/2011 | US7921858 Self-cleaning adhesive structure and methods |
| 04/12/2011 | CA2485749C Device for the actively-controlled and localised deposition of at least one biological solution |
| 04/07/2011 | WO2010111153A3 Display device with openings between sub-pixels and method of making same |
| 04/07/2011 | US20110080236 Miniature RF and Microwave Components and Methods for Fabricating Such Components |
| 04/07/2011 | DE102010039952A1 Schwingungs-Winkelgeschwindigkeitssensor Vibration type angular velocity sensor |
| 04/07/2011 | DE102009048139A1 Micro-mechanical sensor for use as frequency-selective solid borne sound sensor, has mass elements connected with each other by flexible connection, where elements are oscillatable in same- and opposite phase to each other in same direction |
| 04/07/2011 | DE102009045393A1 Micromechanical component i.e. z-sensor, for use as acceleration sensor in motor vehicle, has movable mass deflectably mounted at substrate, and spring structure with spring elements formed and running perpendicular to each other |
| 04/07/2011 | DE102009045391A1 Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur Micromechanical structure and method for making a micromechanical structure |
| 04/07/2011 | DE102009045158A1 Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung Sensor arrangement and method of manufacturing a sensor arrangement |
| 04/06/2011 | EP2306057A1 Microvalve and valve seat member |
| 04/06/2011 | EP2303767A1 Linear fluidic actuator |
| 04/06/2011 | CN1798696B Method of manufacturing a micro-mechanical element |
| 04/06/2011 | CN102005330A Micro-inertia switch chip and preparation method thereof |
| 04/06/2011 | CN102003560A Normally closed active micro valve for electrically driven shape memory alloy wire |
| 04/06/2011 | CN101151507B Oscillating micro-mechanical sensor of angular velocity |
| 03/31/2011 | WO2011037025A1 Light beam scanning device |
| 03/31/2011 | WO2011036808A1 Switch element and circuit provided with switch element |
| 03/31/2011 | DE102006059091B4 Mikrooptisches reflektierendes Bauelement und dessen Verwendung Microoptical reflective component and its use |