| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/21/2011 | WO2011086767A1 Variable capacitance device |
| 07/21/2011 | WO2011086633A1 Angular velocity sensor, electronic device, and method for detecting angular velocity |
| 07/21/2011 | WO2011086271A1 Micro-electromechanical actuator produced in a substrate, and microvalve using said actuator |
| 07/21/2011 | DE102010001021A1 Method for manufacturing e.g. micromechanical acceleration sensor, utilized in motor car fitting area, involves selectively corroding sacrificial layer in relation to functional components for movement of components via trenches |
| 07/21/2011 | DE102010000879A1 Micromechanical structure i.e. turning rate sensor, for use during surface area micromechanical manufacturing process, has moving element driven along specific direction, and power unit coupled with moving element over transmission element |
| 07/20/2011 | CN1944235B Electromagnetic-magnetoelectric type micro mechanical resonant beam structure |
| 07/20/2011 | CN102128953A Capacitive micro-acceleration sensor with symmetrically inclined folded beam structure |
| 07/20/2011 | CN102128685A Micro-mechanical CMOS (complementary metal oxide semiconductor) thermopile infrared temperature sensor |
| 07/20/2011 | CN102128655A Automotive hot film air flow micro-electromechanical systems (MEMS) sensor with primary and secondary double cavity structure |
| 07/20/2011 | CN101277897B Method for manufacturing non-volatile microelectromechanical memory unit |
| 07/20/2011 | CN101221911B Packaging micro devices |
| 07/19/2011 | US7982937 Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein |
| 07/19/2011 | US7980667 Nozzle arrangement with pivotal wall coupled to thermal expansion actuator |
| 07/14/2011 | WO2011084644A1 Interferometric pixel with patterned mechanical layer |
| 07/14/2011 | WO2011083701A1 Oscillation mirror element |
| 07/14/2011 | WO2011083158A2 Micro-electromechanical semiconductor component |
| 07/14/2011 | DE102010000864A1 Micromechanical component e.g. acceleration sensor, has corrosion protection region for protecting insulation layer regions below strip guard regions against etching during corrosion of sacrificial layer by movement of functional components |
| 07/14/2011 | DE102010000811A1 Mikromechanischer Drehratensensor mit zwei sensitiven Achsen und gekoppelten Detektionsmoden Micromechanical rotation rate sensor with two sensitive axes and coupled detection modes |
| 07/14/2011 | DE102010000739A1 Micromechanical magnetic field sense element for magnetic field sensor, has spring element that is arranged within frame, and is designed as leads for current |
| 07/13/2011 | EP2343709A2 Nanotube films and articles |
| 07/13/2011 | EP1357611B1 Piezoelectric functional part and method of manufacturing the part |
| 07/13/2011 | CN201898615U Microelectronic mechanical system microphone component |
| 07/13/2011 | CN102122934A Piezo-resistive MEMS resonator |
| 07/13/2011 | CN101339202B Semiconductor device and manufacturing method of the same |
| 07/12/2011 | US7976129 Nozzle structure with reciprocating cantilevered thermal actuator |
| 07/07/2011 | WO2011081045A2 Vibrating mirror element and manufacturing method for same |
| 07/07/2011 | WO2011080883A1 Electro-mechanical converter, spatial optical modulator, exposure device, and methods for manufacturing them |
| 07/07/2011 | DE102010064381A1 Drucksensor und Verfahren Pressure sensor and method |
| 07/07/2011 | DE102010052071A1 Gehäusesysteme von Mikrosystemtechnik-Mikrofonen Housing systems of Microsystems Engineering microphones |
| 07/07/2011 | DE102010000666A1 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 07/06/2011 | EP2340172A1 Efficient inkjet nozzle assembly |
| 07/06/2011 | CN1657401B Micromachine semiconductor element and manufacturing method thereof |
| 07/06/2011 | CN102119318A Micro electro mechanical system |
| 07/06/2011 | CN102116622A Heartbeat type single structure three-axis micro-electromechanical gyroscope |
| 07/06/2011 | CN101120232B Oscillating micro-mechanical sensor of angular velocity |
| 07/05/2011 | US7973373 Microminiature moving device |
| 06/30/2011 | WO2011078015A1 Plate-like member swinging device |
| 06/30/2011 | US20110156528 Micro actuator, micro actuator system, and method for fabricating micro actuator |
| 06/29/2011 | EP2339748A1 Resonator |
| 06/29/2011 | EP1337458B1 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 06/29/2011 | CN102109534A Two-axis resonant silicon micro-accelerometer |
| 06/29/2011 | CN102107844A Two-dimensional micromechanical actuator with multiple-plane comb electrodes |
| 06/28/2011 | US7967412 Printer having multiple nozzle ics and cappers |
| 06/23/2011 | WO2011074256A1 Vibration element, optical scanning device, actuator, image projecting device, and image forming device |
| 06/23/2011 | WO2010121121A3 Long travel range mems actuator |
| 06/22/2011 | EP2336082A2 Translating and rotation micro mechanism |
| 06/22/2011 | EP2334589A1 Robust high aspect ratio semiconductor device |
| 06/22/2011 | EP1855986B1 Methods and apparatus for spatial light modulation |
| 06/22/2011 | EP1524881B1 Microphone |
| 06/22/2011 | EP1466333B1 Microstructures |
| 06/22/2011 | EP1381852B1 Biosensor matrix and method for making same |
| 06/22/2011 | CN102103013A 三维矢量水听器 Three-dimensional vector hydrophone |
| 06/22/2011 | CN102101637A Micro inertial sensor with embedded transverse movable electrode |
| 06/22/2011 | CN101249935B Thermal isolation micro-bridge structure and processing method thereof |
| 06/21/2011 | US7965547 Arrangement and method for controlling a micromechanical element |
| 06/21/2011 | US7964139 Microfluidic rotary flow reactor matrix |
| 06/15/2011 | EP2331975A1 Micromechanical sensor |
| 06/15/2011 | EP2331974A1 Sensor and method for the production of a sensor |
| 06/15/2011 | EP2035326B1 Sensor having diode pixels and method for producing the same |
| 06/15/2011 | CN102095489A Flow noise resistant sensitive body for vector hydrophone |
| 06/15/2011 | CN102094784A Millimeter-sized honeycomb capillary ultrasonic micro-pump |
| 06/09/2011 | DE19819456B4 Verfahren zur Herstellung eines mikromechanischen Bauelements A process for producing a micromechanical component |
| 06/09/2011 | DE10223729B4 Verfahren zur Herstellung einer Halbleitervorrichtung, die Imstande ist eine dynamische Größe zu erfassen A method of manufacturing a semiconductor device which is capable of detecting a dynamic amount |
| 06/09/2011 | DE102010062419A1 Bereichsunterteiltes Substrat und Halbleiterbauelement Range Divided substrate and semiconductor device |
| 06/09/2011 | DE102009047628A1 Micromechanical component i.e. capacitive microphone, has perforated membrane connected with sacrificial layer base by auxiliary layer, where auxiliary layer has same material characteristics as function layer |
| 06/08/2011 | EP2330456A1 Optical scanner |
| 06/08/2011 | CN102089700A Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
| 06/08/2011 | CN102088653A 传声器 Microphone |
| 06/08/2011 | CN102086020A Method for manufacturing silicon sub-carrier |
| 06/08/2011 | CN102086017A Micro electronmechanical element and micro electronmechanical spring element |
| 06/08/2011 | CN102086016A MEMS (micro-electro-mechanical system) micro-bridge structure and manufacturing method thereof |
| 06/08/2011 | CN101262958B Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers |
| 06/03/2011 | WO2011065192A1 Mems switch |
| 06/03/2011 | WO2011064569A1 Mems device and method of fabrication |
| 06/03/2011 | WO2011064568A1 Mems device and method of fabrication |
| 06/01/2011 | EP2327983A2 Functionalized monolayers for carbon dioxide detection by a resonant nanosensor |
| 06/01/2011 | EP2326305A1 Medical devices employing conductive polymers for delivery of therapeutic agents |
| 06/01/2011 | EP1187789B1 Precisely defined microelectromechanical structures and associated fabrication methods |
| 06/01/2011 | DE10161047B4 Verfahren zur Herstellung eines Sensors mit Membranstruktur A method for producing a sensor with membrane structure |
| 06/01/2011 | CN102079502A MEMS (micro electro mechanical system) device and wafer-level vacuum packaging method thereof |
| 06/01/2011 | CN102079499A Cantilever trace detection sensor and preparation method thereof |
| 06/01/2011 | CN102079498A Flexible electrothermal drive micro-gripper and manufacturing process method |
| 05/26/2011 | WO2011061833A1 Drive apparatus |
| 05/26/2011 | WO2011061832A1 Drive apparatus |
| 05/26/2011 | WO2010092406A3 Mems device with leakage path |
| 05/25/2011 | EP2325910A1 MEMS device and method of fabrication |
| 05/25/2011 | EP2325909A1 MEMS device and method of fabrication |
| 05/25/2011 | EP2325490A1 Sensitive membrane |
| 05/25/2011 | CN102076601A Mems device with independent rotation in two axes of rotation |
| 05/25/2011 | CN101581601B Detection method, micro-electromechanical component and micro-detection structure of micro-mechanical structure |
| 05/19/2011 | WO2011058884A1 Optical scanning device |
| 05/19/2011 | WO2011058826A1 Variable capacitance device |
| 05/19/2011 | WO2011058140A2 Method for producing at least one deformable membrane micropump and deformable membrane micropump |
| 05/19/2011 | WO2011057844A1 Nonvolatile nano-electromechanical system device |
| 05/19/2011 | DE102009046807A1 Verfahren zur der Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors A method for determining the sensitivity of an acceleration or magnetic field sensor |
| 05/18/2011 | EP1529297B1 Micromechanical switch |
| 05/18/2011 | CN102067433A Movable structure and optical scanning mirror using same |
| 05/18/2011 | CN102067009A Movable structure and micro-mirror element using the same |
| 05/18/2011 | CN102066874A Vibrating micro-mechanical sensor of angular velocity |
| 05/18/2011 | CN102066819A Microvalve and valve seat member |