| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 09/21/2011 | CN102190274A Micro-electromechanical system device and motion detection method |
| 09/20/2011 | US8021480 Microfluidic free interface diffusion techniques |
| 09/20/2011 | CA2631009C Spring, mirror element, mirror array and optical switch |
| 09/15/2011 | WO2011111541A1 Mems sensor |
| 09/15/2011 | WO2011111540A1 Physical quantity sensor |
| 09/15/2011 | WO2011111539A1 Physical quantity sensor |
| 09/15/2011 | WO2011111042A1 Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
| 09/15/2011 | WO2011081045A3 Vibrating mirror element and manufacturing method for same |
| 09/15/2011 | DE102010002818A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelementes Micromechanical component and process for producing a micromechanical component |
| 09/15/2011 | CA2792741A1 Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
| 09/14/2011 | CN201976248U 微电子机械系统传声器 MEMS microphones |
| 09/14/2011 | CN102185518A Static micro-actuator with limiting locking function |
| 09/14/2011 | CN102185517A 静电致动器 Electrostatic actuator |
| 09/14/2011 | CN102185097A Piezoelectric stacking type MEMS (Micro-electromechanical System) vibration energy collector and manufacturing method thereof |
| 09/14/2011 | CN102183677A Integrated inertial sensor and pressure sensor and forming method thereof |
| 09/14/2011 | CN102183335A Mems压力传感器及其制作方法 Mems pressure sensor and manufacturing method thereof |
| 09/14/2011 | CN102183333A Capacitive type pressure transducer containing silicon through holes and manufacturing method thereof |
| 09/14/2011 | CN102183247A Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes |
| 09/14/2011 | CN102183246A Integrated microelectromechanical gyroscope with improved driving structure |
| 09/14/2011 | CN102180435A Integrated micro electro-mechanical system (MEMS) device and forming method thereof |
| 09/14/2011 | CN101846653B Piezoelectric film bulk acoustic wave sensor with polygonal electrodes |
| 09/14/2011 | CN101298987B Robustness tuning fork vibrating type micromechanical gyroscope |
| 09/14/2011 | CN101279707B Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure |
| 09/13/2011 | US8018077 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 09/08/2011 | DE112006003854B4 Torsionsfederelement für die Aufhängung auslenkbarer mikromechanischer Elemente Torsion spring for the suspension of deflectable micromechanical elements |
| 09/07/2011 | EP1874678B1 Mems sensor comprising a deformation-free back electrode |
| 09/07/2011 | CN201966133U 一种金属光热驱动微开关 One metal photothermal drive micro switch |
| 09/07/2011 | CN201965150U Biax integration full decoupling micro-silicon resonant type accelerometer |
| 09/07/2011 | CN201962063U 一种嵌入横向可动电极的微惯性传感器 A transversely movable electrode embedded micro inertial sensors |
| 09/07/2011 | CN102176506A Transverse micro electro mechanical system (MEMS) microactuator adopting piezoelectric thick film actuating and manufacturing method thereof |
| 09/07/2011 | CN102175909A Micro-electro-mechanical system (MEMS) cantilever type microwave power automatic detection system and detection method and preparation method thereof |
| 09/07/2011 | CN102175890A Sandwich type translational closed-loop silicon-micro-accelerometer |
| 09/07/2011 | CN102175764A Quality chemical sensor using functionalized mesoporous material as sensitive material and method |
| 09/07/2011 | CN102175305A Single chip integrated trivector vibration sensor |
| 09/07/2011 | CN102175287A Measurement component of flow meter chip based on MEMS (micro electronic mechanical system) technology and manufacturing method thereof |
| 09/07/2011 | CN102173374A Mems device |
| 09/07/2011 | CN101364774B Electricity driving apparatus for minimized motor |
| 09/06/2011 | US8011754 Wide format pagewidth inkjet printer |
| 09/01/2011 | WO2011106675A1 Multi-position micro-fluidic valve system |
| 09/01/2011 | WO2011059831A3 A superfilling secondary metallization process in mems fabrication |
| 09/01/2011 | DE102010043980A1 Sensor i.e. gyroscope, has micromechanical structure comprising substrate, structure firmly connected with substrate, and another structure movably arranged at substrate, where latter structure is formed for enclosing former structure |
| 09/01/2011 | DE102010002463A1 Mikromechanisches Drucksensorelement und Verfahren zu dessen Herstellung Micromechanical pressure sensor element and method for its production |
| 09/01/2011 | CA2790165A1 Multi-position micro-fluidic valve system |
| 08/31/2011 | CN102171134A Microvalve device with improved fluid routing |
| 08/31/2011 | CN101858745B All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity |
| 08/31/2011 | CN101798052B Fully compliant tetra-stable mechanism and implementation method thereof |
| 08/25/2011 | WO2011102962A2 Mems-based ultra-low power devices |
| 08/25/2011 | WO2011102474A1 Single crystal diamond movable structure and manufacturing method thereof |
| 08/25/2011 | WO2011101547A1 Improved micromechanical resonator |
| 08/25/2011 | WO2011018521A3 A configurable micromechanical diffractive element with anti stiction bumps |
| 08/25/2011 | US20110205300 Translation to rotation conversion in an inkjet printhead |
| 08/25/2011 | DE102011004550A1 Gehäuste Vorrichtung mit einem akustischen Transducer und Verstärker Packaged device with an acoustic transducer and amplifier |
| 08/25/2011 | DE102010028305A1 Drucksensor für das Erfassen bzw. Messen aggressiver Medien und flexibles Unterbringen bzw. Konfektionieren Pressure sensor for detecting or measuring aggressive media and flexible housing and making-up |
| 08/25/2011 | DE102008012825B4 Mikromechanisches Bauelement mit verkippten Elektroden Micromechanical component with tilted electrode |
| 08/25/2011 | DE102007046498B4 Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes A method for producing a microelectromechanical component |
| 08/25/2011 | CA2789949A1 Mems-based ultra-low power devices |
| 08/24/2011 | CN201945318U 心跳型单结构三轴微机电陀螺仪 Heartbeat-type single-axis MEMS gyroscope structure |
| 08/24/2011 | CN201942512U 一种制备带隙单调连续变化的硫硒化镉纳米材料的装置 Apparatus for preparing a bandgap continuously changes monotonically sulfur cadmium selenide nanomaterials |
| 08/24/2011 | CN102164748A Efficient inkjet nozzle assembly |
| 08/24/2011 | CN102163606A Charge-detecting chip and manufacturing method thereof |
| 08/24/2011 | CN102162756A Fully symmetric miniature silicon resonant pressure sensor |
| 08/24/2011 | CN102161470A Method of enclosing a micromechnical element formed between a base layer and a metallization layer |
| 08/23/2011 | US8004736 Optical interference display panel and manufacturing method thereof |
| 08/18/2011 | DE19959369B4 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 08/18/2011 | DE19954022B4 Halbleitersensor für eine physikalische Grösse und Verfahren zu dessen Herstellung A semiconductor sensor for a physical quantity, and process for its preparation |
| 08/18/2011 | DE102010001824A1 Zusammengepackte Vorrichtung und Herstellungsverfahren davon Packed together device and manufacturing method thereof |
| 08/18/2011 | DE102005002304B4 Mikroelektromechanischer Sensor und Verfahren zu dessen Herstellung The microelectromechanical sensor and method for its production |
| 08/17/2011 | CN102156203A MEMS (micro-electromechanical system) inertial sensor and forming method of MEMS inertial sensor |
| 08/17/2011 | CN102156201A Three-axis capacitive micro accelerometer based on silicon on insulator (SOI) process and micropackage technology |
| 08/17/2011 | CN102156012A Micro electromechanical system (MEMS) pressure sensor and manufacturing method thereof |
| 08/17/2011 | CN102155987A Differential capacitor type micro-vibration sensor |
| 08/17/2011 | CN102155944A Six-axis microtype inertial sensor integrating accelerometer and gyroscope and application method thereof |
| 08/17/2011 | CN102153043A Microelectromechanical device having an oscillating mass, and method for controlling a microelectromechanical device having an oscillating mass |
| 08/17/2011 | CN101881616B Vibration single gimbal microcontrol moment gyro |
| 08/17/2011 | CN101717062B Preparation process of suspended polyphenylene ethyl film structure |
| 08/11/2011 | WO2011096460A1 Variable capacitance element |
| 08/11/2011 | DE10324960B4 Kapazitiver Drucksensor A capacitive pressure sensor |
| 08/11/2011 | DE10302618B4 Elektrostatische Betätigungsvorrichtung Electrostatic actuation device |
| 08/11/2011 | DE10231729B4 Bauelement mit einer oberflächenmikromechanischen Struktur Component having a surface-micromechanical structure |
| 08/11/2011 | DE10223359B4 Mikromechanisches Bauteil und Verfahren zur Herstellung einer Anti-Haftschicht auf einem mikromechanischen Bauteil Micromechanical element and method for producing an anti-adhesive layer on a micromechanical component |
| 08/11/2011 | DE10219254B4 Mikromechanisches Bauelement mit einem Isolationsbereich und entsprechendes Herstellungsverfahren Micromechanical component with an isolation region and corresponding method of production |
| 08/11/2011 | DE10213579B4 Deformierbare Spiegelvorrichtung Deformable mirror device |
| 08/11/2011 | DE102010001797A1 Mikromechanisches Sensorelement zur kapazitiven Differenzdruckerfassung A micromechanical sensor element for capacitive differential pressure sensing |
| 08/11/2011 | DE10046017B4 Halbleiter-Drucksensorvorrichtung mit von Schutzelement bedecktem Sensorchip Semiconductor pressure sensor device with covered by protective element sensor chip |
| 08/10/2011 | EP1255150B1 Actuator equipped with a mirror for optical scanning |
| 08/10/2011 | CN1703932B Membrane and method for the production of the same |
| 08/10/2011 | CN102147424A Triaxial integration silicon micro-resonance type accelerometer |
| 08/10/2011 | CN102147423A Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| 08/09/2011 | US7994592 Method for integrating micro and nanoparticles into MEMS and apparatus including the same |
| 08/03/2011 | EP2349913A2 Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer |
| 08/03/2011 | EP1623188B1 Quantum tunnelling transducer device |
| 08/03/2011 | CN1884038B Semiconductor composite device and method of manufacturing the same |
| 08/03/2011 | CN102141576A High-gravity (g) acceleration sensor in plane of micro-electromechanical system (MEMS) based on resonance tunnelling structure (RTS) |
| 08/02/2011 | US7987703 Tweezer-equipped scanning probe microscope and transfer method |
| 07/28/2011 | DE19932541B4 Verfahren zur Herstellung einer Membran A method for producing a membrane |
| 07/28/2011 | DE102010001073A1 Sensor e.g. absolute pressure sensor, for measurement of differential pressure, has sensor element whose upper and lower sides are separated in pressure-tight manner by membrane or film structure that is formed as deformed plastic film |
| 07/27/2011 | CN102134051A Electronic device |
| 07/27/2011 | CN101798053B Fully compliant penta-stable mechanism and implementation method thereof |
| 07/27/2011 | CN101468784B Semiconductor miniature suspension structure and method of producing the same |
| 07/27/2011 | CN101317328B Micro-electromechanical device |