B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2011
12/01/2011	DE102010029539A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
11/2011
11/30/2011	EP2390671A2 Physical quantity sensor and electronic apparatus
11/30/2011	EP2389336A2 Fabrication of mems based cantilever switches by employing a split layer cantilever deposition scheme
11/30/2011	CN102265644A 平衡信号输出型传感器 Balanced signal output sensor
11/30/2011	CN102262107A 微电子机械系统电容式相对湿度传感器 MEMS capacitive relative humidity sensor
11/30/2011	CN102259825A 一种mems原子蒸气腔室的制备方法及原子蒸气腔室 Method for preparing mems atomic vapor chamber and atomic vapor chamber
11/30/2011	CN102259820A 空腔结构和该结构的制备方法及压敏传感器的制作方法 Preparation cavity structure and the structure and manufacturing method of the pressure-sensitive sensor
11/30/2011	CN101881785B 四折叠梁变面积差分电容结构微加速度传感器及制备方法 Four fold differential capacitance variable area beam micro-accelerometer structure and preparation methods
11/24/2011	WO2011145549A1 Structure provided with wiring structure, and mems relay
11/24/2011	DE102010029074A1 Anbindungsstruktur für Mikroschwingeneinrichtungen Connection structure for micro swing facilities
11/24/2011	DE102010029072A1 Micro-electromechanical translation vibrator system, has acoustic resonator arranged such that resonance frequency of acoustic resonator is adapted to natural frequency of micro-electromechanical translation vibrator
11/24/2011	DE102008049647B4 Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements Micromechanical element and method for operating a micromechanical element
11/24/2011	DE102004064163B4 Switchable, high-frequency, micro-electromechanical system component, combines signal line and switching component in common plane on substrate
11/23/2011	EP2388234A1 Method and device for compensating for color shift as a function of angle of view
11/23/2011	EP1745516B1 Electromechanical nanotube tunneling device comprising source, drain and gate
11/23/2011	CN202049179U Silicon micro resonant type accelerometer with inconsistent base frequencies
11/23/2011	CN202049132U Quickly-responded relative humidity sensor of micro-electronic mechanical system
11/23/2011	CN202049131U Capacitive relative humidity sensor of microelectronic mechanical system
11/23/2011	CN102255128A Micro electro mechanical clamped beam type directional microwave power coupler and manufacturing method thereof
11/23/2011	CN102249177A Micro-electromechanical sensor and forming method thereof
11/23/2011	CN102249176A Micro electromechanical infrared imaging chip and manufacturing method thereof
11/23/2011	CN102249175A Method for manufacturing nano electronic device and/or circuit based on electron beam stimulated desorption
11/17/2011	WO2011142850A2 Etchant-free methods of producing a gap between two layers, and devices produced thereby
11/17/2011	WO2011142456A1 Display element, display, and projection display device
11/17/2011	WO2011142455A1 Display element, display, and projecting display device
11/17/2011	WO2011142256A1 Electromechanical conversion element
11/17/2011	WO2011117105A3 Micro-electromechanical device and use thereof
11/17/2011	WO2011088362A3 Mems sprung cantilever tunable capacitors and methods
11/17/2011	DE10321482B4 Verbesserung von Membraneigenschaften einer Halbleiteranordnung Improvement of membrane properties of a semiconductor device
11/17/2011	DE102010051515A1 Halbleiterdrucksensor Semiconductor pressure sensor
11/17/2011	DE102010012701A1 Microforce sensor for measuring micro forces at nano range and milli Newton range, has spring region provided between two support regions and stiffener marking unit, respectively, where spring regions comprise two-winged meander shape
11/16/2011	CN202041547U High-sensibility two-dimensional wind speed and wind direction sensor
11/16/2011	CN102243268A Micro-electro-mechanical directional coupling microwave power sensor and preparation method thereof
11/16/2011	CN102243251A Micromechanical silicon resonant accelerometer with different resonant frequencies
11/16/2011	CN102243199A Relative humidity sensor of fast-response microelectronic mechanical system
11/16/2011	CN101580222B Micro electromechanical component and manufacturing method thereof
11/16/2011	CN101428751B Micro electro-mechanical system and manufacturing method therefor
11/15/2011	US8058089 Electromechanical memory array using nanotube ribbons and method for making same
11/10/2011	WO2011083158A3 Micro-electromechanical semiconductor component
11/09/2011	EP1346445B1 Tunable distributed feedback laser
11/09/2011	CN202033147U Pressure detection module of electric pressure cooker based on MEMS (Micro Electro Mechanical System) technology
11/03/2011	WO2011134038A1 Semipermanently closed microfluidic valve
11/03/2011	DE10124822B4 Sensorvorrichtung und Sensorgerät Sensor device and sensor device
11/03/2011	CA2797429A1 Semipermanently closed microfluidic valve
11/02/2011	EP2383749A2 Nanofabric articles and methods of making the same
11/02/2011	EP1920229B1 Pressure sensors and methods of making the same
11/02/2011	CN102230837A Temperature compensating microscopic vacuum sensor
11/01/2011	USRE42887 Silicon carbide and other films and method of deposition
10/2011
10/27/2011	WO2011132532A1 Piezoelectric actuator and manufacturing method for piezoelectric actuator
10/27/2011	DE102010028111A1 Mikromechanisches Element Micromechanical element
10/26/2011	CN202018355U Miniature high-temperature pressure sensor structure
10/26/2011	CN102226776A Cantilever room temperature gas sensor
10/26/2011	CN102226721A Non-refrigerated infrared detection focal plane device
10/25/2011	US8043882 Method of making microminiature moving device
10/20/2011	WO2011129352A1 Mems device and production method for same
10/20/2011	WO2011129351A1 Mems device and production method for same
10/19/2011	CN202013362U Three-shaft integrated silicone micro-resonance type accelerometer
10/19/2011	CN101688974B Integrated imods and solar cells on a substrate
10/18/2011	US8038890 Piezoelectric-driven MEMS device and method for manufacturing the same
10/13/2011	WO2011125494A1 Optical scanning device and image display device
10/13/2011	US20110251075 System and method for the analysis of bodily fluids
10/13/2011	DE102010032799A1 Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe Microvalve with elastically deformable valve lip, manufacturing processes and micropump
10/12/2011	EP2374169A1 Device for converting mechanical energy into electric energy using at least one piezoelectric transducer
10/12/2011	CN1977454B Electromechanical filter
10/12/2011	CN102211752A Driving element, driving element array module and structure of driving element array module
10/11/2011	CA2399096C Microelectromechanical micro-relay with liquid metal contacts
10/06/2011	WO2011122410A1 Optical scanning device and image display device
10/06/2011	WO2011121946A1 Optical reflection element
10/06/2011	WO2011121680A1 Flowrate sensor and flowrate detection device
10/06/2011	CA2794467A1 Flowrate sensor and flowrate detection device
10/05/2011	EP2370346A2 Electromechanical transducer device and method of forming a electromechanical transducer device
10/05/2011	EP2370345A2 Electromechanical transducer device and method of forming a electromechanical transducer device
10/05/2011	EP1805100B1 Microsystem comprising a deformable bridge
10/05/2011	CN1986386B initiating structure used for manufacturing tiny mechanical devices and method for forming tiny mechanical devices
10/05/2011	CN102205940A Bicrystal electrothermal actuator for MEMS (Micro-electromechanical System)
10/05/2011	CN101151206B Methods and apparatus for actuating displays
10/04/2011	US8028567 AFM tweezers, method for producing AFM tweezers, and scanning probe microscope
09/2011
09/29/2011	WO2011119379A2 Mechanical layer and methods of shaping the same
09/29/2011	WO2011118391A1 Polymer actuator and method for producing same
09/29/2011	WO2011118296A1 Magnetic force drive device, optical scanning device, and image display device
09/29/2011	WO2011118090A1 Dynamic quantity sensor and manufacturing method therefor
09/29/2011	WO2011117262A2 Circuit board sensor and method for producing same
09/29/2011	WO2011117105A2 Micro-electromechanical device and use thereof
09/29/2011	DE102010012607A1 HF-MEMS-Schalter RF MEMS switch
09/29/2011	DE102010012441A1 Milli-Newton micro force measuring device for measuring forces in micro-electro-mechanical system, has micro sensor whose end is fastened to retaining unit and another end is designed as free end that moves relative to retaining unit
09/29/2011	DE102007015726B4 Auslenkbare Struktur, mikromechanische Struktur mit derselben und Verfahren zur Einstellung einer mikromechanischen Struktur Deflectable structure, micromechanical structure with the same and method for adjusting a micromechanical structure
09/28/2011	EP2369609A2 HF-MEMS switch
09/28/2011	EP2368837A1 Circuit board sensor and method for manufacturing the same
09/28/2011	CN101276053B Micro oscillating device and micro oscillating device array
09/27/2011	US8025366 Inkjet printhead with nozzle layer defining etchant holes
09/22/2011	WO2011114628A1 Mems element, and manufacturing method of mems element
09/22/2011	DE102010002992A1 Piezoresistive micromechanical sensor component e.g. acceleration sensor has piezoresistive doping regions provided at top face and underside of bending joists which are arranged between substrate and seismic mass at opposed sides
09/22/2011	DE102007021920B4 Vorrichtung zum Entewerfen eines mikromechanischen Bauelements mit angepasster Empfindlichkeit, Verfahren zur Herstellung eines mikromechanischen Bauelements und eines mikromechanischen Systems An apparatus for subjecting a duck micromechanical component with adapted sensitivity, methods of making a micromechanical device and a micromechanical system
09/21/2011	EP2367015A1 Force sensor with reduced noise
09/21/2011	EP1866235B1 Mems actuators and switches
09/21/2011	CN201984082U 双轴谐振式硅微加速度计 Resonant Silicon Micro biaxial accelerometer
09/21/2011	CN102193001A SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor and manufacturing method thereof
09/21/2011	CN102190284A MEMS sensor and methods for manufacturing MEMS sensor, film, mass block and cantilever beam
09/21/2011	CN102190280A Micromechanical component and method for manufacturing a micromechanical component
09/21/2011	CN102190275A Electrostatic actuator and driving method thereof

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