| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/18/2012 | CN202116291U Mems device |
| 01/18/2012 | CN102323475A Three-channel micromechanical clamped beam indirect microwave power sensor and preparation method |
| 01/18/2012 | CN102323449A Dual mass block-based triaxial micro accelerometer |
| 01/18/2012 | CN102322961A Micromachine thermopile infrared sensor with high duty cycle and manufacture method thereof |
| 01/18/2012 | CN102320562A Method for forming layers to realize tapered edges within a MEMS device |
| 01/18/2012 | CN102320549A Method for improving stress linearity of film |
| 01/18/2012 | CN101284643B Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 01/12/2012 | WO2012004415A1 Switchable surfaces based on freely floating colloidal particles |
| 01/12/2012 | WO2012003529A1 Piezo-electric based micro-electro-mechanical lens actuation system |
| 01/12/2012 | US20120007698 Miniature RF and Microwave Components and Methods for Fabricating Such Components |
| 01/12/2012 | DE102010031214A1 Micromechanical sensor for measuring e.g. acceleration of electronic stability program in motor car, has control unit designed such that seismic mass is continuously subjected with periodically varying force |
| 01/12/2012 | DE102010026519A1 Micro-electro-mechanical system microphone for use in mobile telephone, has sound inlet port arranged in cover or in carrier, and sealing structure attached around sound inlet port on microphone |
| 01/11/2012 | EP2404866A1 Switchable surfaces based on freely floating colloidal particles |
| 01/11/2012 | EP2404139A1 Vibrating micro-mechanical sensor of angular velocity |
| 01/11/2012 | EP2404138A1 Micro-mechanical sensor of angular velocity |
| 01/11/2012 | EP2403799A1 Mems devices |
| 01/11/2012 | CN102318369A Semiconductor device |
| 01/11/2012 | CN102313985A Two-circuit integrated variable optical attenuator with teeterboard structure and manufacturing method thereof |
| 01/11/2012 | CN102313821A Physical quantity sensor and electronic apparatus |
| 01/11/2012 | CN102313820A Element structure, inertia sensor, and electronic device |
| 01/11/2012 | CN102311090A Two-dimensional comb actuator and manufacturing method thereof |
| 01/11/2012 | CN101947453B Preparation method of Fe/TiO2 nano tube array and application thereof to degradation of sugar waste water |
| 01/10/2012 | US8094351 Fibrous micro-composite material |
| 01/05/2012 | WO2012002233A1 Method of producing sensor device and sensor device |
| 01/05/2012 | WO2011119379A3 Mechanical layer and methods of shaping the same |
| 01/05/2012 | DE10303263B4 Mikrophonanordnung Microphone array |
| 01/05/2012 | DE102008035990B4 Ein Mikroventil und ein Verfahren zur Herstellung desselben A micro valve and a method of manufacturing the same |
| 01/04/2012 | CN202099044U Elastic beam and MEMS sensor thereof |
| 01/04/2012 | CN1654310B Microconnectors ,microconnector sockets, microassembly and as well as assemby and manufacture method thereof |
| 01/04/2012 | CN102305626A Novel MEMS (micro electro mechanical system) centrifugal-type gyroscope |
| 01/04/2012 | CN101947452B Preparation method of Co/TiO2 nanotube array and application thereof in degradation of sugar wastewater |
| 01/04/2012 | CN101258100B Microelectromechanical systems (MEMS) device including a superlattice and associated methods |
| 01/04/2012 | CN101151207B Display device and method of image formation |
| 01/03/2012 | US8089194 Electrostatic acting device including an electret film and an electrostatic power generator including an electret film |
| 12/29/2011 | WO2011163618A2 Array structures of containers |
| 12/29/2011 | WO2011162950A2 Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/29/2011 | WO2011162949A2 Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/29/2011 | WO2011162239A1 Dynamic quantity sensor |
| 12/29/2011 | WO2011161943A1 Optical reflection element |
| 12/29/2011 | WO2011161917A1 Acceleration sensor |
| 12/29/2011 | US20110318853 Method for forming nozzle chamber of inkjet printhead |
| 12/29/2011 | CA2787130A1 Micro-electro-mechanical system |
| 12/28/2011 | EP2269109B1 Improved membrane, especially for an optical device having a deformable membrane |
| 12/28/2011 | CN202093043U Saw-mems加速度传感器 Saw-mems accelerometer |
| 12/28/2011 | CN102298073A 一种mems微加速度传感器及其应用 One kind of micro-accelerometer mems sensor and its application |
| 12/28/2011 | CN102297741A 一种基于微电子机械技术的硅谐振式气压传感器 Silicon-based MEMS technology resonant pressure sensor |
| 12/28/2011 | CN102295265A 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/28/2011 | CN102295264A 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/28/2011 | CN102295263A Planar cavity mems and related structures, methods of manufacture and design structures |
| 12/22/2011 | WO2011159351A2 Electrodes to improve reliability of nanoelectromechanical systems |
| 12/22/2011 | WO2011158708A1 Variable capacitance device |
| 12/22/2011 | WO2011158707A1 Dynamic sensor |
| 12/22/2011 | WO2011158620A1 Variable capacitance device |
| 12/22/2011 | WO2011158619A1 Variable capacitance device |
| 12/22/2011 | WO2011158429A1 Converter module and method for manufacturing same |
| 12/22/2011 | WO2011156853A1 Microfluidic test module with flexible membrane for internal microenvironment pressure-relief |
| 12/22/2011 | DE102011050839A1 Sensor und Verfahren zur Herstellung desselben Of the same sensor and process for producing |
| 12/22/2011 | DE102010030345A1 Method for manufacturing piezoresistive sensor arrangement of inertial sensor e.g. rotation rate sensor, involves forming remaining strips of electrical insulating layer between strip guard and bar |
| 12/21/2011 | EP2396274A2 Mems device with leakage path |
| 12/21/2011 | CN102292279A 通过采用分割层悬臂沉积方案来制造基于mems的悬臂式开关 By using segmentation layer deposition solutions to the manufacturing mems cantilever cantilever-based switch |
| 12/21/2011 | CN102288173A 静电驱动电容检测微固体模态陀螺 Electrostatically actuated micro-capacitance detection solid modal gyroscope |
| 12/21/2011 | CN102285623A 双环结构微纳生物传感器及其制作方法 Bicyclic structure of micro-nano biosensors and production methods |
| 12/21/2011 | CN101885463B 基于碳纳米管填充高分子复合材料的柔性压敏元件及其制作方法 Based on the flexible sensitive element and its production method of carbon nanotube polymer composites |
| 12/20/2011 | US8080221 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal |
| 12/20/2011 | US8079832 Device for the actively-controlled and localised deposition of at least one biological solution |
| 12/15/2011 | DE102011075365A1 Halbleitervorrichtung und Herstellungsverfahren hierfür A semiconductor device and manufacturing method thereof |
| 12/15/2011 | DE102011007217A1 Erfassungsvorrichtung für eine physikalische Größe und Verfahren zum Herstellen derselben Detecting apparatus for a physical quantity, and methods for manufacturing the same |
| 12/14/2011 | CN202075068U 高稳定高灵敏单片硅基微压传感器 High sensitivity and stable monolithic silicon micro pressure sensor |
| 12/14/2011 | CN1977452B 扭转谐振器和采用其的滤波器 Torsional resonator and uses its filters |
| 12/14/2011 | CN1868002B 具有多个控件的基于纳米管的开关元件及由其制成的电路 Based on circuit switching element and nanotubes made therefrom have multiple controls |
| 12/14/2011 | CN1854061B 一种微型组件、与微型连接器装配的插座及其装配方法 A miniature components, and miniature connector socket assembly and assembly method |
| 12/14/2011 | CN102280573A 一种带柔性支承的微型压电风能采集器 Piezoelectric micro wind energy collectors with a flexible support of |
| 12/14/2011 | CN102279206A 热分析型化学及气体探测传感器 Thermal analytical chemistry and gas detection sensors |
| 12/14/2011 | CN102275867A 带有部分密封壳体的半导体器件及其制造方法 Semiconductor device and manufacturing method with a portion of the seal housing |
| 12/14/2011 | CN102275865A 压力传感器及其制造方法 Pressure sensor and its manufacturing method |
| 12/14/2011 | CN102275858A 石墨烯-离子交换聚合物电致动器及其制备方法与应用 Graphene - ion exchange polymer electric actuator and its preparation method and application |
| 12/14/2011 | CN102275857A 微机电装置及其制造方法 Micro-electromechanical device and manufacturing method thereof |
| 12/14/2011 | CN102012287B 圆形硅薄膜微机电压力传感器 Circular silicon thin film MEMS pressure sensor |
| 12/14/2011 | CN101035739B 微系统和在微系统中相对于第一元件来定位第二元件的方法 Microsystems and in microsystems positioned relative to the first element to the second element method |
| 12/08/2011 | WO2011153259A2 Curved multimorph microactuators that bend and/or twist |
| 12/08/2011 | WO2011152192A1 Variable capacitance element |
| 12/08/2011 | US20110298065 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 12/08/2011 | DE112005003758B4 Auslenkbares mikromechanisches Element Deflectable micromechanical element |
| 12/08/2011 | DE102011015184A1 Vorrichtung für den Transport kleiner Volumina eines Fluids, insbesondere Mikropumpe oder Mikroventil A device for the transport of small volumes of a fluid, in particular micropump or microvalve |
| 12/08/2011 | DE102010029708A1 Mikromechanisches System Micromechanical System |
| 12/08/2011 | DE102010029645A1 Mikromechanisches Bauelement mit einer Teststruktur zur Bestimmung der Schichtdicke einer Abstandsschicht und Verfahren zum Herstellen einer solchen Teststruktur Micromechanical component with a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure |
| 12/08/2011 | DE102004006201B4 Drucksensor mit Siliziumchip auf einer Stahlmembran Pressure sensor with silicon chip on a steel membrane |
| 12/07/2011 | EP2392897A1 Angular velocity sensor, electronic device, and method for detecting angular velocity |
| 12/07/2011 | CN101663230B 微流体传输系统 Micro fluid transfer system |
| 12/07/2011 | CN101351399B 电子部件密封用基板、可取多个形态的电子部件密封用基板、及使用了电子部件密封用基板的电子装置及其制法 Electronic component sealing substrate, preferably a plurality of electronic component sealing substrate morphology, and using the electronic component sealing substrate of the electronic device and its preparation method |
| 12/07/2011 | CN101256899B 可移动微器件 Removable Micro Devices |
| 12/06/2011 | US8072117 Thermal-mechanical signal processing |
| 12/06/2011 | US8071057 Microfluidic device |
| 12/06/2011 | US8071056 Thermal microvalves |
| 12/01/2011 | WO2011148973A1 Pressure sensor and method for manufacturing pressure sensor |
| 12/01/2011 | WO2011148698A1 Mems switch |
| 12/01/2011 | WO2011147430A1 Device and method for detecting vibrations |
| 12/01/2011 | US20110291644 Physical quantity sensor and electronic apparatus |
| 12/01/2011 | US20110290023 Element structure, inertia sensor, and electronic device |
| 12/01/2011 | DE102010029541A1 Combined micromechanical rotation rate-and magnetic field sensor, has elastically deflectable suspended vibrating structure, and detection structure detecting deflection of vibrating structure caused by Coriolis-force and Lorentz-force |