| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/08/2012 | US20120058741 Thermal-mechanical signal processing |
| 03/08/2012 | DE102010040243A1 Piezoelectric energy converter for integrated power generation system used in industrial automation field, has piezoelectric element which is excited to mechanical vibration, and is provided with electrically passive carrier layer |
| 03/08/2012 | DE102010040238A1 Hochintegriertes piezoelektrisches Energieversorgungsmodul Highly integrated piezoelectric power supply module |
| 03/08/2012 | DE10066435B4 Halbleitersensor für eine physikalische Größe Semiconductor sensor for a physical quantity |
| 03/07/2012 | EP2179318B1 Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component |
| 03/07/2012 | CN102369153A Micro movable element array and communication apparatus |
| 03/07/2012 | CN102368042A Microflow sensor |
| 03/06/2012 | US8129802 Integrated micro electro-mechanical system and manufacturing method thereof |
| 03/01/2012 | WO2012027340A1 System and method for determining humidity based on determination of an offset voltage shift |
| 03/01/2012 | WO2012026055A1 Actuator, and method for driving actuator |
| 03/01/2012 | WO2011160985A3 Micro-electro-mechanical system |
| 03/01/2012 | DE102011018296A1 Bauelement und Verfahren zum Herstellen eines Bauelements Device and method for manufacturing a device |
| 03/01/2012 | DE102010035931A1 Verfahren zur Herstellung einer Messspitze für ein Rastersondenmikroskop sowie Messsonde mit nach diesem Verfahren hergestellter Messspitze A method for manufacturing a probe tip for a scanning probe microscope and measuring probe with generated by this method Probe |
| 03/01/2012 | DE102010035606A1 Fabricating microstructure with inner metal structure, comprises preparing substrate structure with internal fluid channel, introducing electrolyte solution into fluid channel, and forming internal metal structure |
| 03/01/2012 | DE102004062992B4 Schaltbares Hochfrequenz-MEMS-Element mit bewegbarem Schaltelement und Verfahren zu seiner Herstellung Switchable RF MEMS element with movable switching element and method for its preparation |
| 02/29/2012 | CN101987719B Sensing element structure and manufacturing method |
| 02/29/2012 | CN101941670B Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay |
| 02/28/2012 | US8124218 Microfabricated elastomeric valve and pump systems |
| 02/28/2012 | US8123963 Method for producing a semiconductor component and a semiconductor component produced according to the method |
| 02/23/2012 | WO2010060552A3 An electrostatic comb-drive micromechanical actuator |
| 02/23/2012 | US20120046639 Microfluidic free interface diffusion techniques |
| 02/23/2012 | DE10206711B4 Mikromechanisches Bauelement Micromechanical component |
| 02/22/2012 | EP2419370A2 Long travel range mems actuator |
| 02/22/2012 | CN202150936U 微机电传感器 MEMS sensors |
| 02/22/2012 | CN102361814A Display device with openings between sub-pixels and method of making same |
| 02/22/2012 | CN102358612A Silicon-based coplanar micro-gas sensor chip and its application in micro-gas sensor preparation |
| 02/21/2012 | US8120160 Integrated circuit device including a bifunctional core material in a chamber |
| 02/16/2012 | WO2012021776A2 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 02/16/2012 | WO2012021420A1 Mems gas sensor |
| 02/16/2012 | WO2012020788A1 Optical scan device |
| 02/16/2012 | WO2012020601A1 Disk-type mems vibrator |
| 02/16/2012 | WO2012020172A1 Micromechanical resonator and method for manufacturing thereof |
| 02/16/2012 | WO2012020095A1 Microelectromechanical system with air gap |
| 02/16/2012 | DE102010039293A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 02/16/2012 | DE102010039180A1 Method for manufacturing semiconductor chip for micro-electro-mechanical systems structure used in e.g. acceleration sensor, involves depositing seed layer of polycrystalline silicon on lateral regions of arrangement |
| 02/16/2012 | DE102005043906B4 Sensor vom kapazitiven Typ für eine physikalische Größe, der einen Sensorchip und einen Schaltkreischip aufweist The capacitance type sensor for a physical quantity that has a sensor chip and a circuit chip |
| 02/15/2012 | EP2417700A1 Mems resonator |
| 02/15/2012 | EP2417645A1 Piezoelectric microelectromechanical device |
| 02/15/2012 | EP2417053A1 Micromechanical system and method for building a micromechanical system |
| 02/15/2012 | CN102356042A Mems device and process |
| 02/15/2012 | CN102353610A Capacitance micro-machining ultrasonic sensor for measuring density and production method thereof |
| 02/15/2012 | CN102353609A MEMS fluid density sensor chip with dual Wheatstone full bridges structure and its preparation method |
| 02/15/2012 | CN102353459A Detector and manufacturing method thereof |
| 02/15/2012 | CN102353371A Triaxial microgyroscope for capacitance detection through static driving |
| 02/15/2012 | CN101885464B 铝氧化铝双层膜电热微驱动器 Aluminum aluminum bilayer membrane electric micro drive |
| 02/09/2012 | US20120036603 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 02/09/2012 | DE102010039057A1 Sensormodul Sensor module |
| 02/09/2012 | DE102010038919A1 Mikromechanisches System Micromechanical System |
| 02/09/2012 | DE102010038809A1 Inertialsensor und Verfahren zum Herstellen eines Inertialsensors Inertial sensor and method of manufacturing an inertial sensor |
| 02/09/2012 | DE102010033284A1 Method for producing arrangement of electronic component e.g. microelectro mechanical system (MEMS) chip, involves partially removing support elements, such that supporting elements are in non-contact state with respect to component |
| 02/09/2012 | DE102008013098B4 Mikromechanisches System mit Temperaturstabilisierung The micromechanical system with temperature stabilization |
| 02/09/2012 | DE102007044204B4 Sensor einer dynamischen Grösse A dynamic sensor size |
| 02/08/2012 | EP2414274A1 Vibrating micromechanical system having a beam-shaped element |
| 02/08/2012 | CN202141809U Mems模拟检波器机芯 Mems analog geophone movement |
| 02/08/2012 | CN102003560B 一种电驱动形状记忆合金丝的常闭型主动微阀 An electrically driven shape memory alloy wire active micro valve normally closed |
| 02/07/2012 | US8111118 Multi-stable micro electromechanical switches and methods of fabricating same |
| 02/07/2012 | US8109611 Translation to rotation conversion in an inkjet printhead |
| 02/02/2012 | WO2012015301A2 Micro-electromechanical system |
| 02/02/2012 | WO2012014792A1 Physical quantity sensor and manufacturing method for same |
| 02/02/2012 | WO2012013290A1 Contact closure component |
| 02/02/2012 | DE19983754B3 Diagnostische medizinische Ultraschallsysteme und Wandler, unter Verwendung mikromechanischer Komponenten Diagnostic medical ultrasound systems and transducers, micromechanical components using |
| 02/02/2012 | DE102010038534A1 Sensorelement zur kapazitiven Differenzdruckmessung Capacitive sensor element for differential pressure measurement |
| 02/02/2012 | DE102010038461A1 Drehratensensor und Verfahren zur Herstellung eines Masseelements Rotation rate sensor and method for producing a mass element |
| 02/01/2012 | EP2411321A2 Display device with openings between sub-pixels and method of making same |
| 02/01/2012 | CN102342014A 促动器元件及输入装置 The actuator element and the input device |
| 02/01/2012 | CN102342013A Macromolecule actuator device |
| 02/01/2012 | CN102341341A MEMS devices |
| 02/01/2012 | CN102338681A Planar silicon pressure sensor and manufacturing method thereof |
| 02/01/2012 | CN102336391A Method for manufacturing piezoresistive sensor device and sensor device |
| 02/01/2012 | CN102336390A Micro-electro-mechanical structure with pressure sensor and manufacturing method thereof |
| 02/01/2012 | CN102334988A Manual combined type microelectrode propeller and production method thereof |
| 02/01/2012 | CN101980025B 圆形铂金薄膜二维风速风向传感器 Film-dimensional circular platinum Wind Sensor |
| 02/01/2012 | CN101957246B 一种用于微力微位移测量系统的集成探测器 Integrated detector for Merak micro-displacement measuring system |
| 02/01/2012 | CN101688975B 具有与机械及电功能分离的光学功能的微机电装置 Micro-electromechanical device having a function of mechanical and electrical separation of the optical function |
| 02/01/2012 | CN101222792B 声换能器结构以及制造声换能器结构的方法 Acoustic transducer structures and the structure of the acoustic transducer manufacturing method |
| 01/31/2012 | US8107157 Micromirror unit and method of making the same |
| 01/31/2012 | US8105860 Support with integrated deposit of gas absorbing material for manufacturing microelectronic microoptoelectronic or micromechanical devices |
| 01/31/2012 | US8104515 Microfabricated elastomeric valve and pump systems |
| 01/31/2012 | US8104497 Microfabricated elastomeric valve and pump systems |
| 01/26/2012 | WO2012011703A2 Mems switch and method for manufacturing same |
| 01/26/2012 | WO2012011012A1 Micro optical device |
| 01/26/2012 | WO2011142850A3 Etchant-free methods of producing a gap between two layers, and devices produced thereby |
| 01/26/2012 | DE10356507B4 Gefederte mikromechanische Struktur und Verfahren zu ihrer Herstellung Sprung micromechanical structure and process for their preparation |
| 01/26/2012 | DE10236773B4 Beschleunigungssensor Acceleration sensor |
| 01/26/2012 | DE102010031659A1 Micromechanical sensor element for capacitive differential pressure sensor used in e.g. medical field, has rotatable connecting support to rigidly connect upper membrane and frame area of lower membrane |
| 01/26/2012 | DE102010012607B4 HF-MEMS-Schalter RF MEMS switch |
| 01/25/2012 | EP2410344A2 Method for manufacturing an accelerometer |
| 01/25/2012 | CN202126442U Piezoresistive acceleration sensor of ultra-thin sensitive beams |
| 01/25/2012 | CN102334275A Actuator device and input device |
| 01/25/2012 | CN102334008A Angular velocity sensor, electronic device, and method for detecting angular velocity |
| 01/25/2012 | CN102332882A Structure of surface mount device micro electromechanical oscillator and manufacturing method thereof |
| 01/25/2012 | CN102332529A Piezoelectric energy collector with flexible substrate and manufacturing method thereof |
| 01/25/2012 | CN102331513A Ultrathin sensitive beam piezoresistance acceleration transducer |
| 01/25/2012 | CN102327738A Liquid processing structure, flow control device and plug member assembling and method |
| 01/24/2012 | US8102097 Electrostatic acting device including an electret film |
| 01/24/2012 | US8101976 Device selection circuitry constructed with nanotube ribbon technology |
| 01/19/2012 | WO2012008113A1 Micro-electromechanical generator and electric apparatus using same |
| 01/19/2012 | DE102011078937A1 Drucksensorgehäusesysteme und -verfahren Pressure sensor housing systems and procedures |
| 01/19/2012 | DE102009030281B4 Vorrichtung und Verfahren zur aktiven Abschirmung von Leitern in MEMS-Vorrichtungen Apparatus and method for active shielding of conductors in MEMS devices |
| 01/18/2012 | EP2406172A1 Mems electrostatic actuator |