Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
05/2012
05/09/2012CN101223692B Resonator and filter using same
05/03/2012WO2012058659A2 Magnetically actuated micro-electro-mechanical capacitor switches in laminate
05/03/2012WO2012058323A1 Multi integrated switching device structures
05/03/2012WO2012056889A1 Variable capacitance device
05/03/2012US20120105936 Micromirror unit and method of making the same
05/03/2012DE102010043277A1 Mikroelektromechanischer Sensor zur Messung einer Kraft sowie entsprechendes Verfahren The microelectromechanical sensor for measuring a force and corresponding method
05/03/2012DE102010040238B4 Hochintegriertes piezoelektrisches Energieversorgungsmodul Highly integrated piezoelectric power supply module
05/03/2012CA2816026A1 Multi integrated switching device structures
05/02/2012EP2447209A1 Microelectromechanical system (MEMS)
05/02/2012CN102435776A Single-chip integrated eight-beam-arm triaxial accelerometer
05/02/2012CN102435183A Rotation rate sensor
05/02/2012CN102435180A Micro electrostatically suspended gyroscope based on SOI (Silicon-On-Insulator) process
05/02/2012CN101980024B Rectangular platinum film two-dimensional wind speed and direction sensor
05/01/2012US8168139 Recirculating fluidic network and methods for using the same
04/2012
04/26/2012WO2012053906A1 Dielectric elastomer self-sensing using plane approximation
04/26/2012WO2011102962A3 Mems-based ultra-low power devices
04/26/2012DE102011112879A1 Halbleiterherstellung und Halbleiterbauelement mit Halbleiterstruktur Semiconductor fabrication, and semiconductor device having semiconductor structure
04/25/2012EP2444368A2 A method of manufacturing an electronic device and electronic device
04/25/2012EP2442902A2 Microfluidic system and corresponding method for transferring elements between liquid phases and use of said system for extracting said elements.
04/25/2012EP1105344B1 Micromechanical sensor and corresponding production method
04/25/2012CN102428376A Micromechanical sensor
04/25/2012CN102103013B 三维矢量水听器 Three-dimensional vector hydrophone
04/24/2012US8164183 Integrated circuit cooling device
04/24/2012US8164174 Microstructure component
04/19/2012WO2012049427A2 Method and device for chemical conversion by means of an equilibrium reaction between reactants, and method for determining at least one parameter of such a chemical conversion
04/19/2012WO2012048424A1 Soi-based cmut device with buried electrodes
04/19/2012WO2011163618A3 Array structures of containers
04/19/2012US20120091374 Microfabricated elastomeric valve and pump systems
04/19/2012DE102010042399A1 Micromechanical component for sensing pressure in nonlinear and reversible printer socket, has sensor element to generate signal, when physical/chemical property of one medium is changed with respect to pressure/force in another medium
04/19/2012DE102010042379A1 Elektronisches Bauteil Electronic component
04/19/2012CA2814123A1 Soi-based cmut device with buried electrodes
04/18/2012EP2442169A2 Microelectromechanical device with optical function separated from mechanical and electrical function
04/18/2012EP2442168A2 Microelectromechanical device with optical function separated from mechanical and electrical function
04/18/2012EP2038206B1 Mems-based nanopositioners and nanomanipulators
04/18/2012CN202195888U Mems热电堆红外探测器芯片 Mems thermopile infrared detector chip
04/18/2012CN102422521A Actuator and optical scanning device using actuator
04/18/2012CN102420517A 基于图形化永磁体完全集成的微型电磁式振动能量采集器 Based on a fully integrated graphical permanent magnet micro electromagnetic vibration energy harvester
04/18/2012CN102419283A 微型拉伸测量组件及其制作方法 Miniature tension measurement assembly and manufacturing method thereof
04/18/2012CN102419227A 新型微压力传感器芯片 New micro pressure sensor chip
04/18/2012CN102417153A 一种静电驱动微悬臂梁结构太赫兹频段可调超吸收体 An electrostatic driven micro-cantilever structure terahertz band tunable superabsorbent
04/18/2012CN102101637B 嵌入横向可动电极的微惯性传感器 Transversely movable electrode embedded micro inertial sensors
04/18/2012CN101273456B 形状记忆装置 Shape memory device
04/12/2012WO2011159351A3 Electrodes to improve reliability of nanoelectromechanical systems
04/12/2012WO2011153259A3 Curved multimorph microactuators that bend and/or twist
04/11/2012EP2439542A1 Physical quantity sensor
04/11/2012EP2438004A2 Semiconductor component having a micromechanical microphone structure
04/11/2012EP1546028B1 Method for selectively covering a micro machined surface
04/11/2012CN102413408A 一种增加背腔空间的微机电麦克风芯片及其制作工艺 An increase in MEMS microphone chip and its manufacturing process back cavity space
04/11/2012CN102411018A 一种片式氧传感器 A chip oxygen sensor
04/11/2012CN102408089A 可同时量测加速度及压力的微机电传感器 Can simultaneously measure the acceleration and pressure sensor MEMS
04/10/2012US8153280 Composition comprising silicon carbide
04/10/2012CA2721172C Microfabricated elastomeric valve and pump systems
04/05/2012WO2012043644A1 Vibration power generation element and vibration power generation device provided with same
04/05/2012WO2012043464A1 Mems switch
04/05/2012WO2012043041A1 Microscanner and optical instrument provided with same
04/05/2012WO2012041539A1 Micromechanical substrate for a diaphragm with a diffusion barrier layer
04/05/2012WO2012015301A3 Statically -balanced compliant micromechanisms
04/05/2012DE102011075428A1 Winkelgeschwindigkeitssensor Angular velocity sensor
04/05/2012DE102010041763A1 Mikromechanisches Substrat Micromechanical substrate
04/04/2012EP2435789A1 Mems mass spring damper systems using an out-of-plane suspension scheme
04/04/2012EP2435354A2 Micromechanical component, and method for the production thereof
04/04/2012EP2435353A2 Micromechanical component and production method for a micromechanical component
04/04/2012CN1872657B 微结构及其制造方法 Micro-structure and manufacturing method
04/04/2012CN102405433A Optical reflection element
04/04/2012CN102405432A 光学反射元件 Optical reflecting elements
04/04/2012CN102401841A 一种多悬臂梁加速度传感器 A multi-cantilever beam accelerometer
04/04/2012CN102401706A Mems压力传感器件及其制造方法 Mems device and method of manufacturing the pressure sensor
04/04/2012CN102398885A 微机电传感器装置 MEMS sensor device
03/2012
03/29/2012WO2012040211A2 Microelectromechanical pressure sensor including reference capacitor
03/29/2012WO2012038244A1 Injection molded micro-cantilever and membrane sensor devices and process for their fabrication
03/29/2012WO2012011703A3 Mems switch and method for manufacturing same
03/29/2012DE102006040235B4 Verfahren zur Herstellung einer optischen Vorrichtung, sowie hiermit hergestellte optische Vorrichtung A process for producing an optical device and optical device produced therewith
03/28/2012EP1719012B1 Mems scanning system with improved performance
03/28/2012CN202177638U 一种微电子加速度传感器 A microelectronic acceleration sensor
03/28/2012CN102393563A Microelectromechanical device with optical function separated from mechanical and electrical function
03/28/2012CN102393562A Microelectromechanical device with optical function separated from mechanical and electrical function
03/28/2012CN102393252A Two-layer micrometering bolometer and manufacturing method thereof
03/28/2012CN102393251A Two-layer micrometering bolometer and manufacturing method thereof
03/28/2012CN102390801A Implantable double performance testing micro electrode array
03/28/2012CN101301991B Micromechanical component, device for designing micromechanical component, procedures for manufacturing micromechanical component, and micro-mechanical system
03/28/2012CN101284642B Micromechanical device with tilted electrodes
03/22/2012WO2012037540A2 Micromachined monolithic 3-axis gyroscope with single drive
03/22/2012WO2012037538A2 Micromachined monolithic 6-axis inertial sensor
03/22/2012WO2012037501A2 Flexure bearing to reduce quadrature for resonating micromachined devices
03/22/2012WO2012034949A1 In-plane actuated resonant device and method of manufacturing the device
03/22/2012DE102010040908A1 Drehratensensor Rotation rate sensor
03/21/2012EP1488270B1 Micro light modulator arrangement
03/21/2012CN102388533A Mems谐振器 Mems resonator
03/21/2012CN102387983A Micromechanical structure and method for setting the working gap width of a micromechanical structure
03/21/2012CN102384984A Capacitive single-mass block full comb electrode sensor for triaxial acceleration and manufacturing method thereof
03/21/2012CN102162756B Fully symmetric miniature silicon resonant pressure sensor
03/15/2012WO2012032918A1 Oscillation mirror element
03/14/2012EP1781566B1 Method for depositing a nonstick coating
03/14/2012CN102378733A Micromechanical system and method for building a micromechanical system
03/14/2012CN102378732A Vibrating micromechanical system having a beam-shaped element
03/14/2012CN102378091A Micro electromechanical radio receiver structure
03/14/2012CN102375075A Micro electro mechanical system accelerator with enhanced structure strength
03/14/2012CN102374909A Micromachine-based electromagnetic excitation resonant pressure sensor
03/14/2012CN102370505A Adding microscopic porosity to the surface of a microcoil to be used for medical implantation
03/08/2012WO2011117262A3 Circuit board sensor and method for producing same
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