| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/04/2012 | CN102530820A Dangling syntony photon device and preparation method thereof based on silicon substrate nitride |
| 07/04/2012 | CN102530819A Microelectromechanical system device and semi-manufacture and manufacturing method thereof |
| 07/04/2012 | CN102079498B Flexible electrothermal drive micro-gripper and manufacturing process method |
| 07/04/2012 | CN101872840B Method for manufacturing organic transistor |
| 06/28/2012 | WO2012085333A1 Sensor and a sensor system |
| 06/28/2012 | DE102010064120A1 Bauteil und Verfahren zu dessen Herstellung Component and process for its preparation |
| 06/28/2012 | DE102010056431A1 Bauelement und Verfahren zum Herstellen eines Bauelements Device and method for manufacturing a device |
| 06/28/2012 | DE102008046860B4 Akustischer Transducer mit einer Mehrschichtelektrode und Verfahren zu seiner Herstellung Acoustic transducer having a multilayer electrode and method for its preparation |
| 06/27/2012 | EP1719012B9 Mems scanning system with improved performance |
| 06/21/2012 | WO2012058659A3 Magnetically actuated micro-electro-mechanical capacitor switches in laminate |
| 06/21/2012 | DE102010061340A1 Multi-component injection molding system e.g. acceleration or rotational rate sensor, for ball-point pen, has plastic component comprising stiff part and elastic member and coupled with elastic member of another plastic component |
| 06/21/2012 | DE102010055417A1 Elektromechanischer Energiespeicher, insbesondere für integrierte Schaltungen Electromechanical energy storage, especially for integrated circuits |
| 06/20/2012 | EP2465816A1 Varifocal lens structure and method of manufacturing the same |
| 06/20/2012 | EP2465128A2 Miniature magnetic switch structures |
| 06/20/2012 | EP2464981A1 Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors |
| 06/20/2012 | EP2464595A2 A configurable micromechanical diffractive element with anti stiction bumps |
| 06/20/2012 | CN1723571B Microelectromechanical systems device and its manufacture method |
| 06/20/2012 | CN102508203A Novel MEMS (microelectromechanical systems) bionic acoustic vector sensor and manufacturing method thereof |
| 06/20/2012 | CN102507979A Micro acceleration sensor of contact type capacitance |
| 06/20/2012 | CN102507978A Embedded highly-sensitive micro-accelerometer based on e index semiconductor device |
| 06/20/2012 | CN102502476A Electric field control-based surface tension driving method and device in microscale |
| 06/20/2012 | CN102502475A Micro-scale driving method and device based on surface tension |
| 06/20/2012 | CN101749219B Miniature peristaltic pump |
| 06/20/2012 | CN101227185B Electromechanical switching circuitry in parallel with solid state switching circuitry |
| 06/14/2012 | DE102010062802A1 Sensor device for pressure measurement, has signal interface unit which outputs digital signals and receives input signals, and portion of analog components of signal interface unit is formed on sensor semiconductor component |
| 06/14/2012 | DE102010062555A1 Micromechanical membrane device e.g. speaker device has silicon carbide membrane which is arranged opposite to upper and lower electrodes and is electrically isolated in movable membrane range by air gaps of upper and lower electrodes |
| 06/14/2012 | DE102006061886B4 Ultraschallsensor Ultrasonic sensor |
| 06/13/2012 | EP2463230A1 Micromechanical element mobile about at least one axis of rotation |
| 06/13/2012 | CN102494813A Silicon micro-resonant mode pressure sensor based on differential motion structure with coupling beam |
| 06/13/2012 | CN102155987B Differential capacitor type micro-vibration sensor |
| 06/13/2012 | CN102147423B Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| 06/13/2012 | CN102052985B MEMS cylinder-type high-temperature and superhigh-pressure resistant sensor |
| 06/07/2012 | WO2012072586A1 Device for converting mechanical energy into electrical energy |
| 06/07/2012 | WO2012037501A3 Flexure bearing to reduce quadrature for resonating micromachined devices |
| 06/06/2012 | EP2461201A1 Mirror device |
| 06/06/2012 | EP2461200A1 Mirror device |
| 06/06/2012 | EP2460762A1 MEMS device having reduced stiction and manufacturing method |
| 06/06/2012 | EP2460200A1 Bending device for bending a piezoelectric bender, piezoelectric converter for converting mechanical energy into electrical energy by using the bending device, and method for converting mechanical energy into electrical energy |
| 06/06/2012 | EP1589059B1 Conductive polymer composite structure |
| 06/06/2012 | CN102141576B High-gravity (g) acceleration sensor in plane of micro-electromechanical system (MEMS) based on resonance tunnelling structure (RTS) |
| 06/06/2012 | CN101963564B Chiral sensor and preparation method thereof |
| 06/06/2012 | CN101473522B Polymer actuator |
| 06/05/2012 | US8193623 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/31/2012 | WO2012071003A1 Method for the wafer-level integration of shape memory alloy wires |
| 05/31/2012 | WO2012070610A1 Optical scanning device |
| 05/31/2012 | WO2012070166A1 Converter module and method for producing same |
| 05/31/2012 | DE102011083962A1 Method for fabricating semiconductor substrate for micro-electromechanical system (MEMS) sensor device, involves singulating structure at the chip singulation trench |
| 05/31/2012 | DE102011005963B3 Micromechanical device, has sense element and sensor chip that are arranged with each other, where electrical contact takes place by solder connection between contact surfaces of sense element and sensor chip |
| 05/31/2012 | DE102010062095A1 Drehratensensor und Verahren zum Betrieb eines Drehratensensors Yaw rate sensor and Vera Hren for operating a yaw rate sensor |
| 05/31/2012 | DE102010062056A1 Mikromechanisches Bauteil Micromechanical element |
| 05/31/2012 | DE102010060906A1 Sensormodul mit Weckeinrichtung Sensor module with alarm |
| 05/31/2012 | DE102005034927B4 Gelenkkonstruktion für eine Mikrospiegelvorrichtung Joint construction for a micromirror device |
| 05/31/2012 | CA2818301A1 Method for the wafer-level integration of shape memory alloy wires |
| 05/30/2012 | EP2456713A1 Three-dimensional microfluidic systems |
| 05/30/2012 | EP1409156B1 Method of fabricating conductive nanotube articles |
| 05/30/2012 | CN202255704U Novel micro pressure sensor chip |
| 05/30/2012 | CN102484020A Miniature magnetic switch structures |
| 05/30/2012 | CN102482071A 三维微流体系统 Three-dimensional microfluidic systems |
| 05/30/2012 | CN102079499B Cantilever trace detection sensor and preparation method thereof |
| 05/30/2012 | CN101964229B Carbon nano tube stranded wire and preparation method thereof |
| 05/30/2012 | CN101827781B Micro movable element and micro movable element array |
| 05/30/2012 | CN101541667B Construction planar and three-dimensional microstructures with PDMS-based conducting composition |
| 05/30/2012 | CN101298315B Preparation of nano-tube contilever beam array |
| 05/24/2012 | WO2012067857A1 Micromechanical motion control device with internal actuator |
| 05/24/2012 | WO2012067856A1 Linearly deployed actuators |
| 05/24/2012 | WO2012067849A1 Lens barrel with mems actuators |
| 05/24/2012 | WO2012065802A1 Method for coating micromechanical parts with dual diamond coating |
| 05/24/2012 | WO2011162950A3 Planar cavity mems and related structures, methods of manufacture and design structures |
| 05/24/2012 | DE102010061795A1 Verfahren zum Erzeugen einer mikromechanischen Membranstruktur und MEMS-Bauelement A method of producing a micromechanical membrane structure and MEMS device |
| 05/23/2012 | EP2455328A2 Mems sensor using multi-layer movable combs |
| 05/23/2012 | EP2455327A2 A mems vertical comb structure with linear drive / pickoff |
| 05/23/2012 | EP2454573A1 Nems comprising alsi alloy based transduction means |
| 05/23/2012 | EP1546028B8 Method for selectively covering a micro machined surface |
| 05/23/2012 | CN102473839A 用于使压电弯曲元件弯曲的弯曲装置、用于借助于弯曲装置将机械能转换成电能的压电能量转换器和用于将机械能转换成电能的方法 The piezoelectric bending element for bending the bending apparatus by means of a bending device for converting mechanical energy into electrical energy and a piezoelectric energy converter for converting mechanical energy into electrical energy method |
| 05/23/2012 | CN102471046A 一种带有抗摩擦力凸块的可配置微型机械衍射元件 One kind of the anti-friction bumps with a configurable diffractive micro-mechanical element |
| 05/23/2012 | CN102464292A Actuator, protective cover, manufacturing method, optical deflector, scanner and image projector |
| 05/23/2012 | CN102042887B Rectangular silicon thin film micro-electromechanical pressure sensor |
| 05/23/2012 | CN101980026B Two-dimensional wind speed and direction sensor for circular silicon film |
| 05/23/2012 | CN101975870B Rectangular silicon-film two-dimensional wind speed and direction sensor |
| 05/23/2012 | CN101915871B MEMS (Micro Electronic Mechanical System) clamped beam type online microwave power sensor and production method thereof |
| 05/23/2012 | CN101915870B MEMS (Micro Electronic Mechanical System) cantilever beam type online microwave power sensor and production method thereof |
| 05/23/2012 | CN101573861B Micro-electro-mechanical transducers |
| 05/23/2012 | CN101305308B Diffusion barrier layer for mems devices |
| 05/22/2012 | US8183651 MEMS sensor, method of manufacturing MEMS sensor, and electronic apparatus |
| 05/22/2012 | CA2643847C Method for producing implant structures for contacting or electrostimulation of living tissue cells or nerves |
| 05/18/2012 | WO2012063818A1 Sensor element, and method for producing sensor element |
| 05/16/2012 | EP2453038A1 Method for coating micromechanical parts with dual diamond coating |
| 05/16/2012 | EP2452375A2 Small scale smart material actuator and energy harvesting apparatus |
| 05/16/2012 | EP2452349A1 Method for forming mems variable capacitors |
| 05/16/2012 | CN102452637A Novel device for nanometer (micrometer) spherical membrane and automatic boundary finishing technology |
| 05/16/2012 | CN102452635A Micro-electromechanical systems (mems) structure |
| 05/15/2012 | US8179215 MEMS device with integral packaging |
| 05/10/2012 | WO2012061205A1 Electromechanical systems apparatuses and methods for providing rough surfaces |
| 05/10/2012 | WO2012021776A3 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 05/10/2012 | US20120111129 Device for the Actively-Controlled and Localized Deposition of at Least One Biological Solution |
| 05/09/2012 | CN102449906A Mems element, and manufacturing method of mems element |
| 05/09/2012 | CN102449488A Micromechanical structure |
| 05/09/2012 | CN102448872A Micromechanical component, and method for the production thereof |
| 05/09/2012 | CN102445246A Thermal mass flow sensor packaging part and manufacturing method thereof |
| 05/09/2012 | CN102442636A Semiconductor structure with lamella defined by singulation trench |