Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
09/2012
09/04/2012CA2641184C Mirror element and method for manufacturing mirror element
09/04/2012CA2378725C Merged-mask micro-machining process
08/2012
08/30/2012WO2012115264A1 Light scanning device
08/30/2012WO2012114655A1 Mems resonator
08/30/2012WO2012114485A1 Actuator, micropump, and electronic apparatus
08/30/2012WO2012113902A2 Detachable micro- and nano-components for a space-saving use
08/30/2012DE10231730B4 Mikrostrukturbauelement Microstructure component
08/30/2012DE10001361B4 Verfahren zum Herstellen eines Mikroträgheitssensors A method of manufacturing a micro inertial sensor
08/29/2012CN102649535A Component support and assembly having a mems component on such a component support
08/29/2012CN101613073B Micro electromechanical system (MEMS)
08/29/2012CN101061059B Nano tweezers and scanning probe microscope having the same
08/23/2012WO2012112452A2 Strengthened micro-electromechanical system devices and methods of making thereof
08/23/2012WO2012111357A1 Composite sensor
08/23/2012WO2012111332A1 Vibrating element having meandering shape, and optical reflection element
08/23/2012WO2012110708A1 Novel micromechanical devices
08/22/2012EP2489629A2 Mems device having variable gap width and method of manufacture
08/22/2012CN102648577A Drive apparatus
08/22/2012CN102648150A Drive apparatus
08/22/2012CN102642801A Double-faced parallel symmetric silicon beam mass block structure and method for preparing same
08/22/2012CN101657961B Electrically conductive polymer actuator, method for manufacturing the same, and method of driving the same
08/16/2012WO2012107888A1 Microelectromechanical device with piezoelectric actuation structure
08/15/2012CN102639965A Optical mems device and remote sensing system utilizing the same
08/15/2012CN102639431A Actuator, and method for driving actuator
08/15/2012CN102633227A Film pressure damp adjustable device for MEMS (micro-electromechanical system) inertial sensor structure
08/14/2012US8241957 Negative thermal expansion system (NTES) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging
08/14/2012US8241509 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
08/09/2012WO2012105857A1 Gel actuator
08/09/2012DE10351761B4 Sensor für eine dynamische Grösse Sensor for dynamic size
08/08/2012EP2484008A1 A micromechanical resonator
08/08/2012CN102627251A Process residual stress based micro two-dimensional vibration energy collector
08/08/2012CN102183677B Integrated inertial sensor and pressure sensor and forming method thereof
08/08/2012CN102095489B Flow noise resistant sensitive body for vector hydrophone
08/02/2012WO2012102939A2 Electromechanical devices with variable mechanical layers
08/02/2012WO2012102292A1 Method for producing electrostatic capacitance device
08/02/2012WO2012040211A3 Microelectromechanical pressure sensor including reference capacitor
08/02/2012US20120193754 Mems device with integral packaging
08/02/2012US20120192952 Three-dimensional microfluidic systems
08/01/2012EP1831643B1 Oscillating micro-mechanical sensor of angular velocity
08/01/2012EP1531731B1 Embedded piezoelectric microcantilever sensors
08/01/2012CN102620865A Beam-film double island structure micro-pressure high-overload sensor chip
08/01/2012CN102620864A Capactive micro-machined ultrasonic transducer (CMUT)-based super-low range pressure sensor and preparation method thereof
08/01/2012CN102616728A Micro-electromechanical system element, out-of-plane sensor and manufacture method of micro-electromechanical system element
08/01/2012CN102616727A Micro electro mechanical system (MEMS) device and manufacture method of MEMS device
07/2012
07/26/2012WO2012099532A1 Microfluidic droplet generator
07/26/2012WO2012099112A1 Optical deflector
07/26/2012WO2012099084A1 Mems module, variable reactance circuit and antenna device
07/26/2012US20120187519 Cooling device for an integrated circuit
07/26/2012US20120186978 Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates
07/26/2012DE102011003195A1 Bauteil und Verfahren zum Herstellen eines Bauteils Component and method for manufacturing a component
07/25/2012CN102602877A Mems device
07/25/2012CN102602876A Mems device and fabrication method thereof
07/25/2012CN102602875A Mems sensor with folded torsion springs
07/25/2012CN102050417B Device with microstructure and method of forming such a device
07/24/2012US8227876 Single crystal silicon sensor with additional layer and method of producing the same
07/24/2012US8227286 Single crystal silicon sensor with additional layer and method of producing the same
07/19/2012WO2012097233A1 Valves with hydraulic actuation system
07/19/2012WO2012096480A2 Diagnostic cartridge and control method for diagnostic cartridge
07/19/2012WO2011162949A3 Planar cavity mems and related structures, methods of manufacture and design structures
07/19/2012US20120182595 Photonic mems and structures
07/18/2012CN102597847A 光扫描装置 Optical scanning device
07/18/2012CN102590555A Resonance-force balance capacitance type three-axis acceleration transducer and manufacture method
07/18/2012CN102589762A Micro-voltage high-overload sensor chip of beam membrane single island structure
07/18/2012CN102583216A Microstructure for detecting mechanical properties of one-dimensional nanometer materials
07/18/2012CN102583215A Suspension nano photonic device based on silicon substrate nitride and preparation method for same
07/18/2012CN101955151B Two-dimensional comb tooth electrostatic driver based on silicon plastic deformation principle and manufacturing method thereof
07/18/2012CN101316789B Micro-mechanical element capable of derivation
07/18/2012CA2776399A1 Dry adhesives
07/12/2012DE102004010670B4 Halbleiterdrucksensor mit einem Diaphragma A semiconductor pressure sensor comprising a diaphragm
07/11/2012EP2473830A1 A mems stress concentrating structure for mems sensors
07/11/2012CN202330222U Microfluidic chip for granule and cell fixation
07/11/2012CN102577118A A micromechanical resonator
07/11/2012CN102572662A Micromachined microphone and multisensor and method for producing same
07/11/2012CN102565148A Miniature differential capacitance glucose continuous monitoring damping sensor and manufacturing method thereof
07/11/2012CN102564623A Temperature sensor structure vertical to structure field emission micro machine
07/11/2012CN102556934A Adjustable multistable mechanism and implementation method thereof
07/11/2012CN102556933A Mems kinetic energy conversion
07/11/2012CN102175890B Sandwich type translational closed-loop silicon-micro-accelerometer
07/05/2012WO2012091677A1 Microfluidic valve module and system for implementation
07/05/2012WO2012089059A1 Mems display
07/05/2012WO2012089054A1 Optical switch and mems display
07/05/2012WO2012037540A3 Micromachined monolithic 3-axis gyroscope with single drive
07/05/2012WO2012037538A3 Micromachined monolithic 6-axis inertial sensor
07/05/2012DE102011011160A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
07/05/2012DE102011002460A1 Microphone has housing comprising cover that is provided with aperture through which MEMS component is mounted inside housing, and external contact that is fed exclusively over housing cover
07/05/2012DE102011002457A1 Mikromechanische Mikrofoneinrichtung und Verfahren zum Herstellen einer mikromechanischen Mikrofoneinrichtung Micromechanical microphone device and method for fabricating a micromechanical microphone means
07/05/2012DE102011002456A1 Micromechanical microphone component manufacturing method, involves realizing layer structure on semiconductor substrate, and opening sound pressure-sensitive membrane by extracting sacrificial layer material over corroding entrances
07/04/2012CN202305094U Soi结构高温压力传感器 Soi High Temperature Pressure Sensor
07/04/2012CN1977453B Filter device and transmitter-receiver
07/04/2012CN102544349A MEMS (Micro-electromechanical Systems) wideband frequency vibration energy collector based on PMNT (Lead Magnesium Niobate-Lead Titanate) piezoelectric mono-crystal, and preparation method
07/04/2012CN102540458A Actuator, optical scanner, and image forming apparatus
07/04/2012CN102540455A Micro motor mechanism and driving method thereof
07/04/2012CN102540312A Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
07/04/2012CN102539055A High-temperature-resistant anti-corrosion pressure sensor based on smart-cut silicon isolation chip
07/04/2012CN102539029A Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof
07/04/2012CN102538949A Nano-electromechanical resonant sensor based on graphene sheet layer and manufacturing method thereof
07/04/2012CN102538834A Coplanar sensor and manufacturing method thereof
07/04/2012CN102530832A Inertia MEMS (micro-electro-mechanical system) sensor and making method thereof
07/04/2012CN102530823A Systems and methods for a four-layer chip-scale MEMS device
07/04/2012CN102530822A Suspending imaging hafnium oxide substrate nitride syntony photon device and preparation method thereof
07/04/2012CN102530821A Suspending resonant photonic device based on silicon substrate nitride material and preparation method for same
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