Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
10/2012
10/25/2012DE112010005121T5 In einem Substrat ausgeführtes, mikroelektromagnetisches Stellglied und Mikroventil, das dieses Stellglied nutzt Executed in a substrate, micro-electro-magnetic actuator and microvalve that uses this actuator
10/24/2012EP2515159A2 A device having a light-absorbing mask and a method for fabricating same.
10/24/2012EP2514712A2 MEMS device with central anchor for stress isolation
10/24/2012CN102754172A Variable capacitance element
10/24/2012CN102749479A Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect
10/24/2012CN102745638A MEMS device etch stop
10/24/2012CN102243251B Micromechanical silicon resonant accelerometer with different resonant frequencies
10/24/2012CN102005330B Micro-inertia switch chip and preparation method thereof
10/24/2012CN101802677B Mems device and manufacturing method thereof
10/23/2012US8295027 MEMS device with integral packaging
10/18/2012WO2012142431A1 Method of forming membranes with modified stress characteristics
10/18/2012WO2012142400A1 Method of forming membranes with modified stress characteristics
10/18/2012WO2012140846A1 Mems pressure sensor
10/18/2012WO2012108283A3 Method of manufacturing capacitive electromechanical membrane transducer
10/18/2012US20120261267 Methods of and Apparatus for Electrochemically Fabricating Structures Via Interlaced Layers or Via Selective Etching and Filling of Voids
10/18/2012DE102011016934A1 Micro electro mechanical system sensor, has membrane comprising base surface provided with two major axes, where major axes have different diameters, and base surface of membrane is elliptical in shape
10/17/2012EP2511749A2 Vibrating mirror element and manufacturing method for same
10/17/2012EP2511229A1 Micromechanical component with reinforced flanks
10/17/2012CN102741958A MEMS sprung cantilever tunable capacitors and methods
10/17/2012CN102740200A Micromechanical sound transducer having a membrane support with tapered surface
10/17/2012CN102736244A Actuator, optical scanner, and image forming apparatus
10/17/2012CN102128953B Capacitive micro-acceleration sensor with symmetrically inclined folded beam structure
10/17/2012CN101860262B Piezoelectric twin-wafer type MEMS energy collector and preparation method thereof
10/17/2012CN101513989B Functional device and manufacturing method thereof
10/16/2012US8287744 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
10/16/2012US8287105 Nozzle arrangement for an inkjet printhead having an ink ejecting roof structure
10/11/2012WO2012102939A3 Electromechanical devices with variable mechanical layers
10/11/2012DE102011007168A1 Micro-electro-mechanical sensor for determining movements of substrate, has fixing arrangement provided with two spring beams, which run between anchor and mass in parallel manner
10/10/2012CN202485818U Vertical structure filed emission micro mechanical temperature sensor structure
10/10/2012CN102183333B Capacitive type pressure transducer containing silicon through holes and manufacturing method thereof
10/10/2012CN102180435B Integrated micro electro-mechanical system (MEMS) device and forming method thereof
10/10/2012CN101993030B Micro movable device and method for manufacturing the same
10/10/2012CN101830425B Variable rigidity beam, manufacturing method and actuating method thereof
10/10/2012CN101558006B MEMS device with controlled electrode off-state position
10/10/2012CN101310206B MEMS switch having setting and latch electrodes
10/04/2012WO2012133505A1 Optical scanner and manufacturing method for optical scanner
10/04/2012WO2012131911A1 Electronic device and method for manufacturing same
10/04/2012WO2012131682A1 Compliant structures with time-varying moment of inertia
10/04/2012WO2012131360A2 Stress relief
10/04/2012DE102011006598A1 Bauteil mit einem verstellbaren Teil und Verfahren zum Betreiben eines Bauteils mit einem verstellbaren Teil Component with an adjustable part, and method of operating a component having an adjustable sub-
10/04/2012DE102011006422A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
10/04/2012DE102011006412A1 Manufacturing method for micromechanical system involves removing a portion of sacrificial layers in region of cavity structure with etch channels through trenches while not removing remaining portion of sacrificial layers
10/04/2012DE102011006399A1 Oscillating device for inertial sensor, particularly micromechanical inertial sensor, has substrate suspension for suspending oscillating mass to substrate, and adjusting unit is arranged for adjusting nonlinearity of oscillation
10/04/2012DE102011006397A1 Micromechanical device e.g. acceleration sensor used in e.g. automotive industry, has hooking structure whose structural elements are interlocked with each other, according to displacement of movable mass which is suspended movably
10/04/2012DE102011006394A1 Drehratensensor Rotation rate sensor
10/04/2012DE102011006332A1 Verfahren zum Erzeugen von monokristallinen Piezowiderständen A method for producing monocrystalline piezoresistors
10/04/2012DE10159415B4 Verfahren zur Herstellung einer Mikrospule und Mikrospule A process for producing a microcoil and microcoil
10/03/2012EP2505548A2 Micromechanical sound transducer having a membrane support with tapered surface
10/03/2012EP2504274A1 Mems device and method of fabrication
10/03/2012EP2504273A1 Mems device and method of fabrication
10/03/2012CN102713722A Vibrating mirror element
10/03/2012CN102713721A Interferometric pixel with patterned mechanical layer
10/03/2012CN102712461A Nonvolatile nano-electromechanical system device
10/03/2012CN102712460A Micromechanical component and production method for a micromechanical component
10/02/2012US8278726 Controlling electromechanical behavior of structures within a microelectromechanical systems device
09/2012
09/27/2012WO2012127858A1 Actuator, optical scanner, and image generator
09/27/2012US20120245042 Debubbler for microfluidic systems
09/27/2012DE102011001496A1 Micro electrical mechanical sensor has substrate and plate that is fixed with substrate for movement around drive axis and elastically connected to sensor axis
09/27/2012DE102010056431B4 Bauelement und Verfahren zum Herstellen eines Bauelements Device and method for manufacturing a device
09/27/2012DE102009019029B4 Verfahren zur Herstellung eines Sensormoduls A process for producing a sensor module
09/26/2012EP2503681A1 Drive apparatus
09/26/2012CN102695978A Vibrating mirror element and manufacturing method for same
09/26/2012CN102695115A Sound pressure sensing element for micro electro mechanical system (MEMS) and manufacturing method thereof
09/26/2012CN102692276A Non-refrigeration infrared detector
09/26/2012CN102689869A In-plane resonant-type direct-pull direct-pressure micro cantilever beam structure and preparation method thereof
09/26/2012CN102116622B Heartbeat type single structure three-axis micro-electromechanical gyroscope
09/26/2012CN101964272B Pressure switch based on micro-electromechanical system technology
09/20/2012WO2012125503A1 Microelectromechanical system device including a metal proof mass and a piezoelectric component
09/20/2012WO2012125312A1 System and method for tuning multi-color displays
09/20/2012WO2012124366A1 Semiconductor physical quantity detecting sensor
09/20/2012WO2012123991A1 Electronic apparatus comprising variable capacitance element and method of manufacturing same
09/20/2012WO2012122878A1 Integrated inertial sensor and pressure sensor, and forming method therefor
09/20/2012WO2012122877A1 Mems pressure sensor and manufacturing method therefor
09/20/2012WO2012122876A1 Integrated mems component and forming method therefor
09/20/2012US20120235694 Dynamic quantity sensor and manufacturing method thereof
09/20/2012DE112006003849B4 Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements Method for operating an oscillating deflectable micromechanical element
09/20/2012DE102011005676A1 Bauteil Component
09/19/2012EP2499368A2 Method for producing at least one deformable membrane micropump and deformable membrane micropump
09/19/2012CN102686507A Method and device for energy harvesting
09/19/2012CN102685657A 部件 Part
09/19/2012CN102680738A Transverse-interference-resistant silicon nanobelt giant-piezoresistive-effect micro-accelerometer
09/19/2012CN102674240A Micromechanical sensor and manufacturing method thereof
09/19/2012CN102674232A Double-micromirror rotary scanning device
09/19/2012CN102674231A 静电致动器 Electrostatic actuator
09/19/2012CN102107844B Bi-axial micromechanical actuator with multiple-plane comb electrodes
09/18/2012US8268660 Process for fabricating micromachine
09/13/2012DE102012202643A1 Hohlraumstrukturen für mems-bauelemente Cavity structures for mems devices
09/12/2012EP2497745A2 Mems device having support structures configured to minimize stress-related deformation and methods for fabricating same
09/12/2012CN102666367A Vibration element, optical scanning device, actuator, image projecting device, and image forming device
09/12/2012CN101963624B Silicon micro-resonant accelerometer
09/11/2012US8264763 Controller and driver features for bi-stable display
09/11/2012US8264054 MEMS device having electrothermal actuation and release and method for fabricating
09/05/2012EP2495866A1 Electrostatic actuator of a mobile structure with improved relief of trapped charges
09/05/2012EP2495572A1 Acceleration sensor
09/05/2012EP2495212A2 Mems devices having support structures and methods of fabricating the same
09/05/2012CN202420685U Optical read-out heat-mechanical infrared detector structure
09/05/2012CN102109534B Two-axis resonant silicon micro-accelerometer
09/05/2012CN101590995B Same plane sensor
09/04/2012US8256465 Microfluidic valve structure
09/04/2012CA2682795C Micromirror element and micromirror array
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