Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
01/2013
01/02/2013EP2539616A1 Multi-position micro-fluidic valve system
01/02/2013CN102854402A Integrated electric field microsensor
01/02/2013CN102853898A Three-dimensional MEMS (Micro-electromechanical System) monolithic integrated vector hydrophone
01/02/2013CN102173374B Mems device
01/02/2013CN102067009B Movable structure and micro-mirror element using the same
12/2012
12/27/2012WO2012177954A2 Bi-metallic actuators
12/27/2012WO2012012650A3 Self-powered functional device using on-chip power generation
12/27/2012US20120328834 Microfabricated elastomeric valve and pump systems
12/26/2012EP2538265A1 Display device and manufacturing method of the display device
12/26/2012EP2536657A2 Mems-based ultra-low power devices
12/26/2012CN102844263A Electromagnetically actuated micro-shutter
12/26/2012CN102163606B Charge-detecting chip and manufacturing method thereof
12/20/2012WO2012173342A1 Sampler
12/20/2012DE112010004339T5 Einheit eines nichtflüchtigen nanoelektromechanischen Systems Unit of a non-volatile nanoelectromechanical system
12/20/2012DE112007003051B4 Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben Micromechanical component thereof with increased stiffness and methods for preparing
12/20/2012DE102011077499A1 Interferometrische Druckmesszelle Interferometric pressure cell
12/19/2012EP2535759A2 Optical scanning device
12/19/2012EP2535310A2 MEMS devices having membrane and methods of fabrication thereof
12/19/2012CN102834765A Magnetic force drive device, optical scanning device, and image display device
12/19/2012CN102834346A Mechanical layer and methods of shaping the same
12/19/2012CN102826500A Asymmetric variable cross-section jump mechanism
12/19/2012CN102826499A Elastic beam and MEMS (micro-electromechanical system) sensor comprising elastic beam
12/13/2012WO2012170748A2 Systems and methods for current density optimization in cmos-integrated mems capacitive devices
12/13/2012DE102010033284B4 Verfahren zum Herstellen einer Bauelementanordnung sowie mittels des Verfahrens hergestellte Bauelementanordnung A method of manufacturing a component arrangement and produced by the method of component assembly
12/13/2012DE102008059634B4 Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb The micromechanical actuator with electrostatic comb-drive
12/12/2012CN101891140B MEMS device
12/12/2012CN101792113B Method and apparatus for protecting wiring and integrated circuit device
12/11/2012US8330323 Thermal-mechanical signal processing
12/06/2012WO2012096480A3 Diagnostic cartridge and control method for diagnostic cartridge
12/06/2012DE102011103598A1 Schaltelement hergestellt mittels Stanz-Laminier-Technik Switching element produced by stamping lamination technology
12/06/2012DE102011076693A1 Mikrofluidische Vorrichtung mit elektronischem Bauteil und Federelement A microfluidic device with electronic component and spring element
12/06/2012DE102011075260B4 MEMS-Mikrofon MEMS microphone
12/05/2012EP2530509A1 Display device and method for producing the same
12/05/2012CN102809450A Silicon micro resonant type pressure sensor and manufacturing method thereof
12/05/2012CN101880022B Anti-vibration device and preparation method thereof
12/05/2012CN101426717B Torsion resilient element for hanging micromechanical elements which can be suspended and deflected
12/04/2012US8322810 Printhead assembly having interconnected controllers
11/2012
11/29/2012WO2012160845A1 Mems sensor
11/29/2012WO2012159869A1 Semi-conductor component comprising micro-bridges for adjusting a tensile strain state and method for the production thereof
11/29/2012WO2012112395A3 Micro-electromechanical system devices having beams and methods of making same
11/29/2012DE102011102266A1 Anordnung mit einem MEMS-Bauelement und Verfahren zur Herstellung Assembly comprising a MEMS device and methods for preparing
11/29/2012DE102011076555A1 Mikromechanisches Bauelement mit einer Dämpfungseinrichtung Micromechanical component with a damping device
11/29/2012DE102011076551A1 Inertialsensor Inertial sensor
11/29/2012DE102011076393A1 Mikromechanischer Drehbeschleunigungssensor und Verfahren zur Messung einer Drehbeschleunigung Micromechanical rotation acceleration sensor and method of measuring an angular acceleration
11/28/2012EP2527902A1 Display device and method for manufacturing the same
11/28/2012EP2527789A1 Oscillating micro-mechanical sensor of angular velocity
11/28/2012EP2527290A1 Semiconductor component with micro-bridges for adjusting a tensile elongation condition and method for producing same
11/28/2012CN202562949U Resonant type micro-accelerometer based on static rigidity
11/28/2012CN102798498A Multi-range integrated pressure sensor chip
11/28/2012CN102798489A Pressure sensor and preparation method thereof
11/28/2012CN102798386A Three-degree-of-freedom resonance silicon micromechanical gyroscope
11/28/2012CN102323449B Dual mass block-based triaxial micro accelerometer
11/28/2012CN102147424B Triaxial integration silicon micro-resonance type accelerometer
11/28/2012CN101944860B Piezoelectric cantilever vibration energy harvester and preparation method thereof
11/28/2012CN101228093B MEMS devices having support structures and methods of fabricating the same
11/22/2012WO2012157357A1 Optical module and production method for same
11/22/2012WO2012156585A1 Micromechanical device and method of designing thereof
11/22/2012WO2012155259A1 Dry adhesives
11/22/2012US20120291543 Microsystem
11/22/2012DE102011050493A1 Vorrichtung und Verfahren zur Detektion der Auslenkung elastischer Elemente Apparatus and method for detecting the deflection of elastic members
11/21/2012EP2524390A2 Micro-electromechanical semiconductor sensor component
11/21/2012EP2524383A2 Mems sprung cantilever tunable capacitors and methods
11/21/2012EP2523895A2 Micro-electromechanical semiconductor component
11/21/2012CN102792170A 物理量传感器 Physical sensors
11/21/2012CN102792168A Mems传感器 Mems Sensor
11/21/2012CN102792130A Flowrate sensor and flowrate detection device
11/21/2012CN102368042B Microflow sensor
11/21/2012CN102094784B Millimeter-sized honeycomb capillary ultrasonic micro-pump
11/20/2012US8313941 Integrated microfluidic control employing programmable tactile actuators
11/20/2012US8313332 Oblique parts or surfaces
11/15/2012WO2012152719A1 Semiconductor device and method for producing a semiconductor device
11/15/2012WO2011051620A3 Electromagnetically actuated micro-shutter
11/15/2012DE102011084020A1 Sensorelement Sensor element
11/15/2012DE102008012826B4 Verfahren zur Erzeugung einer dreidimensionalen mikromechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement A method for generating a three-dimensional micro structure from two-dimensional mechanical elements and micromechanical component
11/14/2012EP2523034A1 Oscillation mirror element
11/14/2012EP2521935A1 Interferometric pixel with patterned mechanical layer
11/14/2012CN102778586A Differential capacitive micro-acceleration transducer and manufacturing method thereof
11/14/2012CN101975934B Integrated bias coil type giant magneto-impedance effect (GMI) magneto-dependent sensor
11/14/2012CN101374757B Fluid-controlled structure, apparatus, method, and method for configuring instrument
11/14/2012CN101248340B Pressure sensors and methods of making the same
11/14/2012CN101139078B Fuunctional element, semiconductor device and electronic machine
11/13/2012US8310015 Sensor platform using a horizontally oriented nanotube element
11/08/2012DE102011104843A1 Micro-mirror structure of micro-mirror device, has contact region that is formed between mirror portions by coating process during deposition of one mirror portion on another mirror portion
11/08/2012DE102011075260A1 MEMS-Mikrofon MEMS microphone
11/07/2012CN102770770A Physical quantity sensor
11/07/2012CN102768290A MEMS (micro-electrochemical systems) accelerometer and production method thereof
11/07/2012CN102012434B Capacitive angular speed sensor of micro electro mechanical system and manufacturing method thereof
11/07/2012CN101922984B Nano-silicon thin-membrane four-island-beam-membrane sensor chip and preparation method thereof
11/01/2012WO2012149039A1 Nerve interface electrode with fibers for insertion between nerve fascicles
11/01/2012WO2012113524A3 Clamping device, in particular for hoses
11/01/2012US20120272742 Nems comprising alsi alloy based transduction means
10/2012
10/31/2012EP2518011A2 Micromechanical composite part and its method of manufature
10/31/2012DE102011018588A1 Method for manufacturing integrated pressure sensor of highly integrated switching circuit, involves forming diaphragm by formation of depression of substrate by back corrosion of substrate
10/31/2012CN102759720A Magnetic sensor easy to encapsulate
10/31/2012CN102759637A MEMS (micro electro mechanical system) triaxial acceleration transducer and manufacture method thereof
10/31/2012CN102757011A Micromechanical thermopile infrared detector and manufacturing method thereof
10/31/2012CN101589543B Micro-electro-mechanical transducers
10/30/2012CA2496320C Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof
10/26/2012WO2012145279A2 Energy harvesting device including mems composite transducer
10/26/2012WO2012144256A1 Mems sensor and method for manufacturing same
1 ... 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 ... 128