| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/13/2013 | CN102963857A Micro electro mechanical (MEM) comb tooth mechanism capable of modulating backlash under electromagnetic drive |
| 03/13/2013 | CN102963856A A micro-electro-mechanical system device and a manufacture method thereof |
| 03/13/2013 | CN102338681B Planar silicon pressure sensor and manufacturing method thereof |
| 03/07/2013 | WO2013032821A1 Piezoelectric microphone fabricated on glass |
| 03/07/2013 | WO2013030712A1 Light control panel |
| 03/07/2013 | WO2013008203A3 Miniaturised sensor comprising a heating element, and associated production method |
| 03/07/2013 | DE102009021957B4 Kombinierter Resonator/Beschleunigungssensor für ein Reifendrucküberwachungssystem Combined resonator / acceleration sensor for a tire pressure monitoring system |
| 03/06/2013 | EP2565153A1 Acoustic transducers with perforated membranes |
| 03/06/2013 | CN102959454A Optical reflection element |
| 03/06/2013 | CN102951600A Antibody fragment modified micro-cantilever preparation method, and immunity sensing detection system based on antibody fragment modified micro-cantilever |
| 03/06/2013 | CN102951599A Preparation method of microcantilever modified by antibody fragments, and microcantilever immune sensing detection system based on antibody fragment modification |
| 03/06/2013 | CN102951598A Preparation method of microcantilever modified by antibody fragments, and microcantilever immune sensing detection system based on antibody fragment modification |
| 03/06/2013 | CN102951597A Preparation method of micro-bridge structured infrared detector, and micro-bridge structure |
| 03/06/2013 | CN102951593A Electro-thermal-driven micro-electro-mechanical comb tooth mechanism for regulating variable intervals of teeth |
| 03/06/2013 | CN102951592A Multilayered nonon membrane in a mems sensor |
| 03/06/2013 | CN102393251B Two-layer micrometering bolometer and manufacturing method thereof |
| 03/06/2013 | CN102012270B High-performance thermal deformation beam for optical-mechanical thermal infrared sensor and applications thereof |
| 03/06/2013 | CN101968495B Cantilever beam acceleration transducer manufactured by micro-machining on single side of single silicon chip and method |
| 03/05/2013 | US8387459 MEMS sensor |
| 02/28/2013 | WO2013028546A1 Routing of mems variable capacitors for rf applications |
| 02/28/2013 | DE102011081651A1 Interferometrischer Drucksensor Interferometric pressure sensor |
| 02/28/2013 | DE102011081641A1 Sensor und Verfahren zum Herstellen eines Sensors Sensor and method for manufacturing a sensor |
| 02/27/2013 | EP2562836A1 Piezoelectric actuator and manufacturing method for piezoelectric actuator |
| 02/27/2013 | EP2562134A2 Capacitive transducer and methods of manufacturing and operating the same |
| 02/27/2013 | CN102947216A Micro-electromechanical device and use thereof |
| 02/27/2013 | CN102507979B Micro acceleration sensor of contact type capacitance |
| 02/27/2013 | CN102288173B Static-driving capacitance-detection micro solid modal gyroscope |
| 02/26/2013 | US8382896 High throughput screening of crystallization materials |
| 02/21/2013 | DE102011081033A1 Verfahren zur Herstellung einer mikromechanischen Struktur und mikromechanische Struktur A process for producing a micromechanical structure and micromechanical structure |
| 02/21/2013 | DE102011081014A1 Micromechanical component used in e.g. acceleration sensor, has a stator electrode finger or an actuator electrode finger which partially overlaps a separating trench formed partially surrounding the outer side of a movable mass |
| 02/21/2013 | DE102011081002A1 Mikromechanisches Bauteil, durch ein Herstellungsverfahren hergestelltes Zwischenprodukt und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical component, produced by a production process and an intermediate production method for a micromechanical component |
| 02/21/2013 | DE102011080993A1 Acceleration sensor for use with electronic stability program system in automobile sector, has substrate and seismic mass that is deflected against substrate on basis of outer acceleration force along deflection direction |
| 02/21/2013 | DE102011080982A1 Sensor arrangement i.e. acceleration sensor arrangement, has cantilevered measuring electrode performing capacitive measurement of deflection of seismic mass relative to electrode, where mass is movable around main extension plane |
| 02/21/2013 | DE102011075428B4 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 02/20/2013 | CN102935993A Single-arm beam device made of two-dimensional electronic materials and production method thereof |
| 02/19/2013 | CA2598740C Methods and apparatus for actuating displays |
| 02/19/2013 | CA2498669C Method for selectively covering a micro machined surface |
| 02/14/2013 | WO2013021425A1 Electronic device having variable capacitance element and method for manufacturing same |
| 02/13/2013 | CN1762786B System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
| 02/13/2013 | CN102928793A Micromechanical magnetic field sensor and application thereof |
| 02/13/2013 | CN101952194B Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| 02/13/2013 | CN101867080B Bulk silicon micro mechanic resonator and manufacturing method thereof |
| 02/13/2013 | CN101714410B Arrangement and method for controlling a micromechanical element |
| 02/13/2013 | CN101239697B Vertical integration microelectron mechanical structure, implementing method and system thereof |
| 02/13/2013 | CN101027707B Methods for visually inspecting interferometric modulators for defects |
| 02/12/2013 | US8373240 Sensor device having a structure element |
| 02/07/2013 | WO2013020080A1 Coated capacitive sensor |
| 02/07/2013 | WO2013019510A1 Mems force sensors fabricated using paper substrates |
| 02/07/2013 | WO2013017959A2 Flow-valve diagnostic microfluidic system |
| 02/07/2013 | DE102011104843B4 Mikrospiegelbauteil mit linienförmiger Biegefeder sowie Verfahren zu dessen Herstellung Micro-mirror device having line-shaped bending spring and to processes for the preparation thereof |
| 02/07/2013 | DE102011052336A1 Einrichtung zur variablen Umlenkung von Licht Device for variable deflection of light |
| 02/07/2013 | DE102009016487B4 Mikrofonchip Microphone chip |
| 02/06/2013 | EP2554952A1 Flowrate sensor and flowrate detection device |
| 02/06/2013 | EP2552824A2 Micro-electromechanical device and use thereof |
| 02/06/2013 | CN202717577U SOC (system on a chip) using integrated MEMS (micro electronic mechanical system) and CMOS (complementary metal oxide semiconductor) |
| 02/06/2013 | CN102918401A Dynamic sensor |
| 02/05/2013 | US8368124 Electromechanical devices having etch barrier layers |
| 02/05/2013 | US8367426 Chemical sensor with oscillating cantilevered probe |
| 02/05/2013 | US8367215 Radio-frequency microelectromechanical systems and method of manufacturing such systems |
| 01/31/2013 | WO2013014905A1 Fluid treatment apparatus and method for treating fluid |
| 01/31/2013 | DE102004013583B4 Sensor für eine physikalische Grösse mit einem Balken Sensor for a physical quantity with a bar |
| 01/30/2013 | EP2550233A2 Circuit board sensor and method for producing same |
| 01/30/2013 | EP2550232A2 Mechanical layer and methods of shaping the same |
| 01/30/2013 | CN202710738U Easily-packaged magnetic sensor |
| 01/30/2013 | CN102906621A Display element, display, and projecting display device |
| 01/30/2013 | CN102906010A Planar cavity mems and related structures, methods of manufacture and design structures |
| 01/30/2013 | CN102906009A Planar cavity micro-electro-mechanical system and related structures, methods of manufacture and design structures |
| 01/30/2013 | CN102906008A Micro-electro-mechanical system |
| 01/30/2013 | CN102904543A Mems vibrator and oscillator |
| 01/30/2013 | CN102901567A Thermopile infrared detector, array and preparation method of thermopile infrared detector |
| 01/30/2013 | CN102901520A Method for improving temperature stability of capacitor type micromechanical sensor and micromechanical sensor |
| 01/30/2013 | CN102897706A Method and apparatus for protecting wiring and integrated circuit device |
| 01/30/2013 | CN102897704A Micro-electro-mechanical comb tooth mechanism capable of adjusting tooth gaps by electrostatic force |
| 01/30/2013 | CN102156201B Three-axis capacitive micro accelerometer based on silicon on insulator (SOI) process and micropackage technology |
| 01/24/2013 | WO2013011864A1 Thin film device and manufacturing method thereof |
| 01/24/2013 | WO2012131360A3 Stress relieved microfabricated cantilever |
| 01/23/2013 | CN102893199A Display element, display, and projection display device |
| 01/23/2013 | CN102889933A Chip of MEMS (micro-electromechanical system) thermopile infrared detector and method for manufacturing inner chip in chip of MEMS thermopile infrared detector and chip of MEMS thermopile infrared detector |
| 01/23/2013 | CN102887476A Hanger beam structure and circuit chip |
| 01/22/2013 | US8357559 Method of making sensor platform using a non-horizontally oriented nanotube element |
| 01/17/2013 | WO2013008263A1 Physical quantity sensor and physical quantity detection method |
| 01/17/2013 | WO2013008203A2 Miniaturised sensor comprising a heating element, and associated production method |
| 01/17/2013 | DE102011107649A1 Micromechanical sensor for, e.g. analyzing topographies in grid force microscopy, has unilateral bendable cantilever in which gate electrode of FET is inserted, and is spaced at free space from semiconductor substrate |
| 01/17/2013 | DE102011079222A1 Method for manufacturing micro-electro-mechanical system structure for e.g. acceleration sensor, involves depositing oxide layer as sacrificial layer such that porous region is formed in oxide layer by impinging ions on oxide layer |
| 01/17/2013 | DE102011078976A1 Mikrofluidische Vorrichtung sowie Verfahren zur Herstellung einer mikrofluidischen Vorrichtung The microfluidic device and methods for producing a microfluidic device |
| 01/16/2013 | EP2545715A1 Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
| 01/16/2013 | CN102879607A Micro-electro-mechanical accelerometer and manufacturing method thereof |
| 01/16/2013 | CN102874735A Two-material micro-cantilever, electromagnetic radiation detector and detection method |
| 01/16/2013 | CN102393252B Two-layer micrometering bolometer and manufacturing method thereof |
| 01/10/2013 | WO2013005289A1 Electronic device, method of manufacturing same, and electronic device drive method |
| 01/09/2013 | CN102868318A Mini-type combined type energy collector based on PVDF (Poly Vinyli Dene Fluoride) and preparation method |
| 01/09/2013 | CN102862949A Double-cantilever-beam MEMS (Micro-electromechanical System) device based on inversion process and forming method thereof |
| 01/09/2013 | CN101405215B Microstructure, micromachine, and manufacturing method of microstructure and micromachine |
| 01/08/2013 | CA2429508C Piano mems micromirror |
| 01/03/2013 | DE102012211058A1 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 01/03/2013 | DE102012208361A1 Integrierte drucksensordichtung Integrated pressure sensor seal |
| 01/03/2013 | DE102009026682A9 Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung Component having a micromechanical microphone structure and process for its preparation |
| 01/03/2013 | DE102008000128B4 Halbleitersensorvorrichtung und deren Herstellungsverfahren A semiconductor sensor device and its manufacturing method |
| 01/02/2013 | EP2540877A1 Single crystal diamond movable structure and manufacturing method thereof |
| 01/02/2013 | EP2539999A1 Improved micromechanical resonator |