| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/15/2013 | CN103107739A Movable-magnet-type electromagnetism-piezoelectricity-combined-type broadband energy harvester based on micro-electromechanical systems (MEMS) |
| 05/15/2013 | CN102175305B Single chip integrated trivector vibration sensor |
| 05/10/2013 | WO2013066625A1 Sidewall spacers along conductive lines |
| 05/10/2013 | WO2013064978A1 Micro -electro -mechanical device with buried conductive regions, and manufacturing process thereof |
| 05/08/2013 | EP2589958A1 Chemical sensing |
| 05/08/2013 | EP2589568A1 Improved micromechanical part allowing an electric discharge |
| 05/08/2013 | DE102011085723A1 Bauelement und Verfahren zur Herstellung eines Bauelements Device and method for manufacturing a device |
| 05/08/2013 | CN202931549U Mems microphone |
| 05/08/2013 | CN202924718U Double-material micro-cantilever and electromagnetic radiation detector |
| 05/08/2013 | CN103097937A Oscillation mirror element |
| 05/08/2013 | CN103097281A Micro optical device |
| 05/08/2013 | CN103091510A Micromechanical Component And Method For Manufacturing A Micromechanical Component |
| 05/08/2013 | CN103090779A Eddy current sensor chip based on resonant structure and manufacture method of eddy current sensor chip |
| 05/08/2013 | CN102027404B Induced resonance comb drive scanner |
| 05/07/2013 | US8436432 RF MEMS switch and fabricating method thereof |
| 05/02/2013 | WO2013062406A1 Energy harvester |
| 05/02/2013 | WO2013060540A1 An actuator |
| 05/02/2013 | WO2013060021A1 Flexible micro bumps operably coupled to array of nan-piezoelectric sensors |
| 05/02/2013 | WO2012170748A3 Systems and methods for current density optimization in cmos-integrated mems capacitive devices |
| 05/02/2013 | WO2010136358A3 Micromechanical component and production method for a micromechanical component |
| 05/02/2013 | US20130106241 Microelectromechanical device provided with an anti-stiction structure, and corresponding anti-stiction method |
| 05/02/2013 | DE112011102135T5 MEMS-Strukturen mit planarem Hohlraum und verwandte Strukturen, Herstellungsverfahren und Design-Strukturen MEMS structures with planar cavity and related structures, manufacturing processes and design structures |
| 05/02/2013 | DE112011102124T5 Mikroelektromechanisches System Micro-Electro-Mechanical System |
| 05/02/2013 | DE102012209838A1 Halbleiterdrucksensor und Verfahren zum Herstellen eines Halbleiterdrucksensors A semiconductor pressure sensor and method for manufacturing a semiconductor pressure sensor |
| 05/02/2013 | DE102012200740A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 05/02/2013 | DE102012110308A1 Optische Schalteinrichtungen auf Siliziumbasis Optical switching devices based on silicon |
| 05/02/2013 | DE102011085566A1 Mikromechanischer Schalter The micromechanical switch |
| 05/01/2013 | CN103075952A Micro-touch measurement head for measuring micro-nano three-dimensional size |
| 05/01/2013 | CN102435776B Single-chip integrated eight-beam-arm triaxial accelerometer |
| 05/01/2013 | CN101371132B Self-exciting, self-sensing piezoelectric cantilever sensor |
| 04/25/2013 | WO2013059123A1 Tuning movable layer stiffness with protrusions in the movable layer |
| 04/25/2013 | WO2013059006A1 Method and apparatus for application of anti-stiction coating |
| 04/25/2013 | WO2013058401A1 Temperature change power generation system using rotating body |
| 04/25/2013 | WO2013057759A1 Electrical device having movable electrode |
| 04/25/2013 | WO2013006205A3 Reduced stiffness micro-mechanical structure |
| 04/25/2013 | US20130099333 Micro-electro-mechanical system having movable element integrated into leadframe-based package |
| 04/25/2013 | DE102011085088A1 Micromechanical acceleration sensor for electronic stability program (ESP) system installed motor car, has two rocker arms whose length and mass is different |
| 04/25/2013 | DE102011085032A1 Vorrichtung zum Halten eines mit Kunststoff zu umhüllenden Bauelements und Verfahren zum Umhüllen eines Bauelements A device for holding a component to be coated with plastic and method for wrapping a component |
| 04/25/2013 | DE102011085023A1 Component e.g. yaw rate sensor for use in electronic device, has stop that is provided for limiting maximum deflection of seismic mass perpendicular to main plane, and for suppressing levitation force acting on seismic mass |
| 04/24/2013 | CN103063352A Micro electro mechanical system pressure sensor and manufacture method thereof and micro electro mechanical system |
| 04/24/2013 | CN103063351A Micro electro mechanical system pressure sensor and manufacture method thereof and micro electro mechanical system |
| 04/24/2013 | CN103063350A Micro-electromechanical system (MEMS) pressure sensor array, manufacturing method of the same, and pressure measuring method |
| 04/24/2013 | CN103058123A Self-packaged MEMS (micro-electro-mechanical systems) device and infrared sensor |
| 04/24/2013 | CN102076601B Mems device with independent rotation in two axes of rotation |
| 04/18/2013 | DE102007033441B4 Vorrichtung zur gleichzeitigen Messung von Kräften Device for the simultaneous measurement of forces |
| 04/17/2013 | CN202880858U Double-micromirror rotary scanning device |
| 04/17/2013 | CN103043596A Flexible material with micron and nano composite array structure and preparation method and application of flexible material |
| 04/17/2013 | CN102305626B Novel MEMS (micro electro mechanical system) centrifugal-type gyroscope |
| 04/16/2013 | US8420427 Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
| 04/11/2013 | US20130087866 Micro-electromechanical semiconductor component and method for the production thereof |
| 04/11/2013 | US20130087865 Micro-electromechanical semiconductor component |
| 04/11/2013 | US20130087864 Semiconductor component |
| 04/11/2013 | DE102011102266B4 Anordnung mit einem MEMS-Bauelement mit einer PFPE Schicht und Verfahren zur Herstellung Arrangement with a MEMS device having a PFPE layer and processes for preparing |
| 04/10/2013 | CN103030092A Metal micro actuator based on phase change acting force, driving device and driving method thereof |
| 04/09/2013 | US8416487 Photonic MEMS and structures |
| 04/04/2013 | WO2013049679A2 Multiple degree of freedom actuator |
| 04/04/2013 | WO2013047933A1 Mems resonant accelerometer |
| 04/04/2013 | WO2013046283A1 Electric equipment with moving part and manufacturing method thereof |
| 04/04/2013 | WO2012145279A3 Energy harvesting device including mems composite transducer |
| 04/04/2013 | DE112011102134T5 MEMS-Strukturen mit planarem Hohlraum und verwandte Strukturen, Herstellungsverfahren und Design-Strukturen MEMS structures with planar cavity and related structures, manufacturing processes and design structures |
| 04/04/2013 | DE112011102030T5 Dynamiksensor Dynamic sensor |
| 04/03/2013 | EP2575164A2 3d integrated electronic device structure including increased thermal dissipation capabilities |
| 04/03/2013 | CN103026732A Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
| 04/03/2013 | CN103018289A Capacitive humidity sensor |
| 04/03/2013 | CN103011049A Method of manufacturing MEMS devices providing air gap control |
| 04/03/2013 | CN103011048A Isolation structure, semiconductor device having the same, and method for fabricating the isolation structure |
| 04/03/2013 | CN101410717B Device and method for measuring electrical power |
| 03/28/2013 | WO2013044226A2 Artificial skin and elastic strain sensor |
| 03/28/2013 | WO2013044222A2 Systems and methods for providing microfluidic devices |
| 03/28/2013 | WO2013043953A1 Vented mems apparatus and method of manufacture |
| 03/28/2013 | DE102011083644A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 03/28/2013 | DE102011083487A1 Acceleration sensor has detection unit, which is coupled with seismic mass such that amplitude of deflection movement along direction of deflection is greater than amplitude of detecting motion along direction of detection |
| 03/28/2013 | DE102004036433B4 Mikromechanisches Bauteil und Verfahren zur Herstellung eines solchen Bauteils Micromechanical element and process for producing such a component |
| 03/28/2013 | CA2849900A1 Systems and methods for providing microfluidic devices |
| 03/27/2013 | EP2573611A2 Display device |
| 03/27/2013 | EP2572788A1 Method and device for thermal insulation of micro-reactors |
| 03/27/2013 | CN102998794A MEMS bistable optical switch and methods for use thereof |
| 03/27/2013 | CN102998037A Dielectric isolation piezoresistive pressure sensor and method for manufacturing same |
| 03/27/2013 | CN102992257A Actuator and method for manufacturing the same |
| 03/27/2013 | CN102046514B Device with miniature electromechanical system sensor and preparation method thereof |
| 03/27/2013 | CN101784892B Design and deposition of sensing layers for surface acoustic wave chemical sensors based on supra-molecular chemistry |
| 03/21/2013 | WO2012177954A3 Bi-metallic actuators |
| 03/21/2013 | WO2012170850A3 Mems devices made with isotopic materials |
| 03/21/2013 | DE102012215251A1 Micro-electro-mechanical systems component e.g. valve component, has anchorage structure setting counter-element under tensile stress so that deflections of counter-element counteract perpendicular to layer planes |
| 03/20/2013 | EP2571156A1 Electromechanical conversion element |
| 03/20/2013 | CN1875447B Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| 03/20/2013 | CN102981264A Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| 03/20/2013 | CN102980695A MEMS (Micro Electro Mechanical System) piezoresistive type absolute pressure sensor based on SOI (Silicon on Insulator) silicon chip |
| 03/20/2013 | CN102980694A MEMS piezoresistive pressure transducer without strain membrane structure and manufacture method thereof |
| 03/20/2013 | CN102980565A Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
| 03/20/2013 | CN102976260A System and method for protecting microelectromechanical systems array using back-plate with non-flat portion |
| 03/20/2013 | CN102313821B Physical quantity sensor and electronic apparatus |
| 03/20/2013 | CN102023234B Micromachined accelerometer with monolithic electrodes and method of making the same |
| 03/20/2013 | CN101790840B Piezoelectric actuator, optical reflection element using the same and piezoelectric driver |
| 03/19/2013 | US8400053 Carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| 03/14/2013 | WO2013036436A1 Mechanical layer for interferometric modulators and methods of making the same |
| 03/14/2013 | DE102012216150A1 Mikroelektromechanisches System mit Biegeauslenkung der Rückplattenstruktur The micro-electro mechanical system with bending deflection of the backplate structure |
| 03/14/2013 | DE102011112638A1 Microfluidic chip used for in-vitro simulation of biological processes in small blood vessels during extravasation of tumor cells from human body, has microfluidic channel system including horizontal channel and horizontal chamber |
| 03/14/2013 | DE102011082320A1 Micro-electromechanical magnetic field sensor i.e. linear magnetic field sensor, for detecting e.g. direction of three-dimensional earth's magnetic field, has conductive layer whose vibrating element is excitable relative to carrier |
| 03/13/2013 | CN102967409A Wireless inactive capacitive gas pressure sensor |