| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/18/2013 | WO2013106141A1 Mems microphone with springs and interior support |
| 07/18/2013 | WO2013049679A3 Multiple degree of freedom actuator |
| 07/18/2013 | US20130181302 Method for making a suspended membrane structure with buried electrode |
| 07/17/2013 | EP2615485A1 Oscillation mirror element |
| 07/17/2013 | CN102164748B Efficient inkjet nozzle assembly |
| 07/11/2013 | WO2013044226A3 Artificial skin and elastic strain sensor |
| 07/11/2013 | US20130177738 Method of forming a micro-structure |
| 07/11/2013 | US20130175643 Method for production of a structure with a buried electrode by direct transfer and stucture obtained in this manner |
| 07/11/2013 | DE102013100160A1 Sensoranordnung, Messschaltkreis, Chipgehäuse und Verfahren zum Herstellen einer Sensoranordnung Sensor arrangement, measurement circuit, chip package and method for manufacturing a sensor arrangement |
| 07/11/2013 | DE102012200124A1 Micromechanical structure for rotational rate sensor, has substrate and movable mass that is movably mounted opposite to substrate by spring element, where substrate is provided with main extension plane |
| 07/10/2013 | CN103199738A Piezoelectricity-piezoelectricity combined type broadband energy harvester based on micro-electro-mechanical system (MEMS) technology |
| 07/10/2013 | CN103198922A Comb-tooth capacitor accurate assembly method based on bi-stable state compliant mechanism |
| 07/10/2013 | CN103193190A Infrared-terahertz dual-band array detector microbridge structure and production method thereof |
| 07/10/2013 | CN102060258B Microelectronic mechanical shutter device |
| 07/10/2013 | CN101360679B Fluid actuator, heat generating device using the same, and analysis device |
| 07/04/2013 | WO2013100860A1 Cost-effective single crystal multi-stake actuator and method of manufacture |
| 07/04/2013 | DE112010004339B4 Einheit eines nichtflüchtigen nanoelektromechanischen Systems Unit of a non-volatile nanoelectromechanical system |
| 07/04/2013 | DE102012223968A1 Strukturen mit mikroelektromechanischem System (MEMS) und Design-Strukturen Structures with micro-electro-mechanical system (MEMS) structures and design |
| 07/04/2013 | DE102011057169A1 Mikroelektromechanisches System Micro-Electro-Mechanical System |
| 07/04/2013 | DE102011057081A1 Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors Micro-yaw rate sensor and method for operating a micro-rotation rate sensor |
| 07/04/2013 | DE102004011144B4 Drucksensor und Verfahren zum Betreiben eines Drucksensors Pressure sensor and method of operating a pressure sensor |
| 07/03/2013 | CN103187947A Switchable filters and design structures |
| 07/03/2013 | CN103185576A Microelectromechanical system |
| 07/03/2013 | CN103183309A Micro-electro-mechanical system (MEMS) structures and design structures |
| 07/03/2013 | CN103183305A Comb electrode structure |
| 07/03/2013 | CN103183304A Micro-electro-mechanical sensing element and manufacturing method thereof |
| 07/03/2013 | CN102185097B Piezoelectric stacking type MEMS (Micro-electromechanical System) vibration energy collector and manufacturing method thereof |
| 07/03/2013 | CN102056838B Microfluidic device and methods |
| 07/03/2013 | CN101583558B Structural member, manufacture method and device comprising same |
| 07/03/2013 | CN101566506B Structure of film thermoelectric converter based on micro bridge resonator and fabricating method thereof |
| 07/02/2013 | CA2776399C Dry adhesives |
| 06/27/2013 | WO2013096089A1 Method for wafer-level surface micromachining to reduce stiction |
| 06/27/2013 | WO2013094875A1 Micro electro mechanical systems device and apparatus for compensating tremble |
| 06/27/2013 | WO2013093108A1 Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners |
| 06/27/2013 | DE102011057032A1 Mikro-Gyroskop und Verfahren zum Betreiben eines Mikro-Gyroskops Micro-gyroscope and method for operating a micro-gyroscope |
| 06/27/2013 | DE102011056971A1 Mikromechanischer Coriolis-Drehratensensor Micromechanical Coriolis rotation rate sensor |
| 06/26/2013 | EP2606002A1 Micromechanical substrate for a diaphragm with a diffusion barrier layer |
| 06/26/2013 | CN103180772A 光学扫描设备 The optical scanning device |
| 06/26/2013 | CN103180239A Piezo-electric based micro-electro-mechanical lens actuation system |
| 06/25/2013 | US8471573 Dynamic quantity sensor and manufacturing method thereof |
| 06/20/2013 | WO2013090887A1 Motion sensor integrated nano-probe n/mems apparatus, method and applications |
| 06/20/2013 | WO2013087717A1 Mechanical connection forming a pivot for mems and nems mechanical structures |
| 06/20/2013 | US20130154032 System With Recessed Sensing Or Processing Elements |
| 06/20/2013 | DE102012223550A1 Mikromechanisches Halbleitererfassungsbauelement The micromechanical semiconductor detection device |
| 06/20/2013 | DE102012221818A1 Strukturen und entwurfsstrukturen mikroelektromechanischer systeme (mems) Structures and structures design of microelectromechanical systems (mems) |
| 06/20/2013 | DE102011056648A1 Pressure sensor e.g. oil pressure sensor for sensing pressure in work fluid of automatic vehicle transmission, has diaphragm partially covered such that work fluid is diverted before impinging on sensor membrane in fluid flow direction |
| 06/19/2013 | EP2603976A1 Micromechanical resonator and method for manufacturing thereof |
| 06/19/2013 | EP2603448A1 Microelectromechanical system with air gap |
| 06/19/2013 | CN203006933U Metal micro-driver based on phase change acting force and driving device |
| 06/19/2013 | CN103166504A Impact micro-energy harvesting array structure |
| 06/19/2013 | CN103163327A Silicon micro-resonance acceleration sensor |
| 06/19/2013 | CN101484381B Method of manufacturing mems devices providing air gap control |
| 06/18/2013 | CA2454895C Methods of nanotube films and articles |
| 06/13/2013 | WO2013086505A1 Integrated organ-on-chip system and applications of the same |
| 06/13/2013 | WO2013086486A1 Integrated human organ-on-chip microphysiological systems |
| 06/13/2013 | WO2013084096A1 A nano- electromechanical switch having a curved cantilever beam |
| 06/13/2013 | US20130146873 Integrated Mechanical Device for Electrical Switching |
| 06/13/2013 | DE102011088331A1 Micromechanical structure, particularly micromechanical sensor structure, has substrate, movable mass and spring element, where substrate has main extension plane, and movable mass is fastened to substrate by spring element |
| 06/12/2013 | CN103145087A Magnetostrictive composite cantilever beam driven by Terfenol-D sheets |
| 06/12/2013 | CN102384984B Capacitive single-mass block full comb electrode sensor for triaxial acceleration and manufacturing method thereof |
| 06/11/2013 | US8460962 Capacitive MEMS switch and method of fabricating the same |
| 06/06/2013 | WO2013079596A1 Device and method for generating a second temperature variation from a first temperature variation |
| 06/06/2013 | US20130141769 Micro structure, micro actuators, method of fabricating micro structure and micro actuators |
| 06/06/2013 | US20130140651 Microelectromechanical systems (mems) resonators and related apparatus and methods |
| 06/06/2013 | US20130139592 Mems multi-axis gyroscope z-axis electrode structure |
| 06/06/2013 | DE102011087844A1 Baugruppe zur Energieerzeugung sowie einen Biegewandler für eine solche Baugruppe Module for power and a bending transducer for such an assembly |
| 06/06/2013 | DE102008037947B4 Verfahren zum Herstellen eines Element-Wafer und eines Elements A method of manufacturing a wafer-element and an element |
| 06/05/2013 | EP2598591A1 Contact closure component |
| 06/05/2013 | CN202974172U Micro tactile probe for measuring micro-nano scale two-dimensional size |
| 06/05/2013 | CN103134951A Three-dimensional microcomputer electric transducer |
| 06/05/2013 | CN103130177A Suspension structure micro-electro-mechanical-systems (MEMS) device and manufacturing method thereof |
| 06/05/2013 | CN102297741B Silicon resonant air pressure sensor based on Micro-Electro-Mechanical Systems |
| 06/04/2013 | USRE44255 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 05/30/2013 | WO2013076845A1 Actuator manufacturing method and actuator |
| 05/30/2013 | WO2013076844A1 Actuator |
| 05/30/2013 | WO2013076830A1 Electronic component and method for producing same |
| 05/30/2013 | WO2013017959A3 Flow-valve diagnostic microfluidic system |
| 05/30/2013 | US20130135971 Method for manufacturing capacitive micromachined ultrasonic transducer and apparatus configured to obtain subject information using the capacitive micromachined ultrasonic transducer |
| 05/30/2013 | US20130134528 Etchant-free methods of producing a gap between two layers, and devices produced thereby |
| 05/29/2013 | EP2597679A2 Memory elements with relay devices |
| 05/29/2013 | DE102012022829A1 Verfahren zum Herstellen von isolierten Halbleiterstrukturen A method for producing isolated semiconductor structures |
| 05/29/2013 | CN103121657A Micro electrical mechanical system with bending deflection of backplate structure |
| 05/29/2013 | CN102015127B Methods of manufacturing capacitive electromechanical transducer and capacitive electromechanical transducers |
| 05/29/2013 | CN101903752B MEMS structure for flow sensor |
| 05/28/2013 | USRE44246 Method for containing a device and a corresponding device |
| 05/28/2013 | CA2521171C Microfluidic devices and methods of using same |
| 05/23/2013 | WO2013072790A1 Microfluidic device with deformable valve |
| 05/23/2013 | US20130126993 Electromechanical transducer and method of producing the same |
| 05/23/2013 | US20130126992 MEMS Chip Package and Method for Manufacturing an MEMS Chip Package |
| 05/23/2013 | DE102012215235A1 Sensor component has micro-electro mechanical system (MEMS) component that is integrated with pressure sensor, temperature sensor, humidity sensor and evaluation circuit |
| 05/22/2013 | CN103119111A Contact closure component |
| 05/22/2013 | CN103116037A Quartz vibration beam accelerometer and manufacture method thereof |
| 05/22/2013 | CN102032970B Mems pressure sensor |
| 05/22/2013 | CN101495900B Analog interferometric modulator device with electrostatic actuation and release |
| 05/16/2013 | WO2013069333A1 Variable capacitance apparatus |
| 05/16/2013 | WO2013044222A3 Systems and methods for providing microfluidic devices |
| 05/16/2013 | US20130119441 Microelectronic device and mems package structure and fabricating method thereof |
| 05/15/2013 | EP2590890A1 Piezo-electric based micro-electro-mechanical lens actuation system |
| 05/15/2013 | EP2590889A1 Switchable surfaces based on freely floating colloidal particles |
| 05/15/2013 | CN202939208U Micro electro mechanical system current sensing device based on capacitance readout |