| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/03/2013 | WO2013145260A1 Electronic device and method for manufacturing same |
| 10/03/2013 | WO2013145244A1 Curvature variable mirror, curvature variable unit and method for manufacturing curvature variable mirror |
| 10/03/2013 | US20130256816 Mems process and device |
| 10/03/2013 | US20130256814 Physical quantity sensor and electronic apparatus |
| 10/02/2013 | EP2643261A1 Method for the wafer-level integration of shape memory alloy wires |
| 10/02/2013 | DE102013205249A1 Halbleitervorrichtung und Herstellungsverfahren hierfür A semiconductor device and manufacturing method thereof |
| 10/02/2013 | CN203222475U Miniature device and encapsulation mold for same |
| 10/01/2013 | CA2454845C Nanotube films and articles |
| 09/26/2013 | DE102012005546A1 Mikrospiegelanordnung und Verfahren zur Herstellung einer Mikrospiegelanordnung Micro-mirror array and method of manufacturing a micro-mirror array |
| 09/25/2013 | CN103323946A Light scanning mirror device, control method for the same, and image drawing device employing the same |
| 09/25/2013 | CN102539029B Three-dimensional fluid stress sensor based on flexible MEMS (microelectromechanical system) technology and array thereof |
| 09/25/2013 | CN102419283B Micro tensile measurement unit and production method thereof |
| 09/19/2013 | WO2013100860A8 Cost-effective single crystal multi-stake actuator and method of manufacture |
| 09/19/2013 | US20130240336 Hybrid mems rf switch and method of fabricating same |
| 09/19/2013 | DE102012203900A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure |
| 09/19/2013 | DE102012005262A1 Sensoranordnung aus Trägersubstrat und ferroelektrischer Schicht sowie Verfahren zur Herstellung und Verwendung der Sensoranordnung Sensor arrangement consisting of the carrier substrate and the ferroelectric layer, and methods for making and using the sensor arrangement |
| 09/18/2013 | CN103313172A Micromechanical Sound Transducer Arrangement and a Corresponding Production Method |
| 09/18/2013 | CN102255128B Micro electro mechanical clamped beam type directional microwave power coupler and manufacturing method thereof |
| 09/12/2013 | WO2013133792A1 Flexible circuits |
| 09/12/2013 | US20130234265 Planar cavity mems and related structures, methods of manufacture and design structures |
| 09/12/2013 | US20130234263 Mems element |
| 09/12/2013 | US20130234140 Micromechanical component having a diaphragm |
| 09/12/2013 | DE102012102021A1 Mikromechanisches Messelement und Verfahren zur Herstellung eines mikromechanischen Messelements Micromechanical sensing element and method for manufacturing a micro-mechanical sensing element |
| 09/12/2013 | DE102012102020A1 Mikromechanisches Messelement Micromechanical measuring element |
| 09/11/2013 | CN103288035A Silicon micro plane flexible connecting rod mechanism manufactured on semiconductor chip |
| 09/11/2013 | CN103288034A Off-plane electrostatic driver and production method thereof |
| 09/11/2013 | CN103288033A Micro-tip structure of carbon nano tube and preparation method of structure |
| 09/11/2013 | CN102066819B Microvalve and valve seat member |
| 09/05/2013 | US20130228881 High aspect ratio capacitively coupled mems devices |
| 09/05/2013 | DE102012203373A1 Mikromechanische Schallwandleranordnung und ein entsprechendes Herstellungsverfahren Micro-mechanical transducer array and a corresponding production method |
| 09/04/2013 | EP2634587A2 Electrostatic capacitance sensor |
| 09/04/2013 | EP2633541A2 Magnetically actuated micro-electro-mechanical capacitor switches in laminate |
| 09/04/2013 | EP2633540A1 Multi integrated switching device structures |
| 09/04/2013 | CN103282825A Micromechanical motion control device with internal actuator |
| 09/04/2013 | CN103282816A Linearly deployed actuators |
| 09/04/2013 | CN103282815A Lens barrel with mems actuators |
| 09/04/2013 | CN103278660A Difference resonant micro accelerometer and driving method thereof |
| 09/04/2013 | CN103274348A Cold-hot arm structure MEMS actuator for detonating sequence |
| 08/29/2013 | US20130221457 Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof |
| 08/29/2013 | US20130221456 Capacitance Type Micro-Silicon Microphone and Method for Making the Same |
| 08/29/2013 | US20130221454 Planar cavity mems and related structures, methods of manufacture and design structures |
| 08/29/2013 | US20130221411 Micromechanical sensor apparatus with a movable gate, and corresponding production process |
| 08/29/2013 | US20130220783 MEMS Switch Having One or More Vacuum Gaps |
| 08/29/2013 | DE19964638B3 Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer |
| 08/29/2013 | DE102013203379A1 Abstimmbare mems-vorrichtung und verfahren zur herstellung einer abstimmbaren mems-vorrichtung Tunable MEMS device and method of making a tunable MEMS device |
| 08/29/2013 | DE102013203180A1 Verstellbare Ventilationsöffnungen in MEMS-Aufbauten Adjustable vents in MEMS structures |
| 08/29/2013 | DE102012202783A1 Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren Micromechanical sensor device with movable gate and method of manufacture |
| 08/28/2013 | EP2630672A1 Dielectric elastomer self-sensing using plane approximation |
| 08/27/2013 | US8519493 Semiconductor device having multiple substrates |
| 08/22/2013 | WO2013123524A1 Acoustically triggered nano/micro-scale propulsion devices |
| 08/22/2013 | DE102013201509A1 Optisches Bauelement Optical component |
| 08/22/2013 | DE102013201506A1 Optisches Bauelement Optical component |
| 08/21/2013 | EP2627442A2 Method and device for chemical conversion by means of an equilibrium reaction between reactants, and method for determining at least one parameter of such a chemical conversion |
| 08/21/2013 | CN102538949B Nano-electromechanical resonant sensor based on graphene sheet layer and manufacturing method thereof |
| 08/21/2013 | CN101636344B Mems cavity-coating layers and methods |
| 08/20/2013 | CA2747236C Shape-acceleration measurement device and method |
| 08/15/2013 | WO2013081458A3 Mems scanning micromirror |
| 08/15/2013 | US20130207281 Microelectronic substrate comprising a layer of buried organic material |
| 08/15/2013 | US20130207208 Pressure Sensor with Doped Electrode |
| 08/14/2013 | DE102012202183A1 Micromechanical structure, has aeration layer formed as lime layer in cavity for releasing gas in cavity and comprising reactant for endothermic reaction, and heating device provided in cavity for providing thermal energy to aeration layer |
| 08/14/2013 | DE102012202035A1 Mikromechanisches Bauelement mit einer Membran Micromechanical component with a membrane |
| 08/14/2013 | DE102012201981A1 Micromechanical component for deflecting light beams in e.g. pico projector, has assembly comprising torsion bars and bending bar, where torsion bars are suspended at drive body over bending bar aligned inclined to longitudinal direction |
| 08/14/2013 | CN103249864A Method for coating micromechanical parts with dual diamond coating |
| 08/14/2013 | CN103245409A Piezoelectric-effect-based vector hydroacoustic sensor with MEMS biomimetic structure |
| 08/14/2013 | CN103245377A Combo transducer and combo transducer package |
| 08/14/2013 | CN103241703A Electronic device, method for manufacturing thereof, and electronic apparatus |
| 08/14/2013 | CN103241702A Electronic device, method for manufacturing thereof, and electronic apparatus |
| 08/14/2013 | CN103241701A 3-degree of freedom (DOF) silicon-based plane parallel-connection positioning platform with automatic displacement detecting function and manufacture method |
| 08/14/2013 | CN102680738B Transverse-interference-resistant silicon nanobelt giant-piezoresistive-effect micro-accelerometer |
| 08/08/2013 | WO2013067525A3 Self-regulating chemo-mechano-chemical systems |
| 08/08/2013 | US20130200957 Mems oscillator and manufacturing method thereof |
| 08/08/2013 | US20130200473 Micromechanical component and method for the manufacture of same |
| 08/08/2013 | US20130200439 Micro-electromechanical semiconductor component |
| 08/08/2013 | DE102013001674A1 Vertikale druckempfindliche Struktur Vertical pressure sensitive structure |
| 08/08/2013 | DE102012201480A1 Mikromechanisches Bauelement und Verfahren zu dessen Herstellung Micromechanical component and method for its production |
| 08/07/2013 | CN203112490U Magnetostrictive composite cantilever beam driven by Terfenol-D sheets |
| 08/07/2013 | CN102323475B Three-channel micromechanical clamped beam indirect microwave power sensor and preparation method |
| 08/01/2013 | WO2013111266A1 Actuator |
| 08/01/2013 | WO2013111265A1 Actuator |
| 08/01/2013 | US20130193536 Method of manufacturing a semiconductor integrated circuit device having a mems element |
| 08/01/2013 | US20130193535 Micro-electromechanical device and use thereof |
| 08/01/2013 | US20130193533 Embedded circuit in a mems device |
| 08/01/2013 | US20130193529 Micro-electromechanical semiconductor component and method for the production thereof |
| 08/01/2013 | DE102013200106A1 Halbleitermessvorrichtung zur Minimierung von thermischem Rauschen Semiconductor measuring device to minimize thermal noise |
| 07/31/2013 | EP2619536A2 Microelectromechanical pressure sensor including reference capacitor |
| 07/30/2013 | CA2499208C Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 07/25/2013 | WO2013108705A1 Finely movable mechanism and variable capacitor |
| 07/25/2013 | DE102013100673A1 Sensorbauelement und Verfahren Sensor device and method |
| 07/25/2013 | DE102012200929A1 Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur Micromechanical structure and method for making a micromechanical structure |
| 07/24/2013 | EP2617129A1 Suspended-beam device and piezoresistive means for detecting the displacement thereof, and process for manufacturing the device |
| 07/24/2013 | EP2616771A2 Micromachined monolithic 6-axis inertial sensor |
| 07/24/2013 | EP2616386A1 In-plane actuated resonant device and method of manufacturing the device |
| 07/24/2013 | CN103221795A Microelectromechanical pressure sensor including reference capacitor |
| 07/24/2013 | CN103221778A Micromachined monolithic 3-axis gyroscope with single drive |
| 07/24/2013 | CN103217553A Resonance type micro-mechanic acceleration sensor based on electromagnetic excitation detection mode |
| 07/24/2013 | CN103213935A Controlled buckling structures in semiconductor interconnects and nanomembranes for stretchable electronics |
| 07/24/2013 | CN103213934A Micromechanical structure and method for manufacturing a micromechanical structure |
| 07/24/2013 | CN102156203B MEMS (micro-electromechanical system) inertial sensor and forming method of MEMS inertial sensor |
| 07/24/2013 | CN102046513B Mems sensor |
| 07/18/2013 | WO2013106783A1 Electrostatically transduced sensors composed of photochemically etched glass |