B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2013
12/11/2013	CN103439032A Processing method of silicon micro resonator
12/11/2013	CN103434998A Test structure and test method of wafer level airtightness
12/11/2013	CN102155944B Six-axis microtype inertial sensor integrating accelerometer and gyroscope and application method thereof
12/05/2013	WO2013181540A1 Anti-counterfeiting methods
12/05/2013	WO2013179247A1 Wafer and method of manufacturing the same
12/05/2013	WO2013178343A1 Method for fixation of a movable component of a micro-mechanical structural element
12/05/2013	US20130320467 Method for assembling conductive particles into conductive pathways and sensors thus formed
12/05/2013	US20130319138 Microelectromechanical sensor for measuring a force, and corresponding method
12/05/2013	US20130319076 Anti-stiction method in an inertial mems, corresponding computer program product, storage means and device
12/05/2013	DE112012000823T5 Kombinierter Sensor Combined sensor
12/05/2013	DE102012209238A1 Ultraschallsensor sowie Vorrichtung und Verfahren zur Messung eines Abstands zwischen einem Fahrzeug und einem Hindernis Ultrasonic sensor, as well as apparatus and method for measuring a distance between a vehicle and an obstacle
12/05/2013	DE102012209235A1 Sensormodul Sensor module
12/05/2013	DE102012010549A1 Verfahren zur Fixierung einer beweglichen Komponente eines mikromechanischenBauelementes Method for fixing a movable component of a micromechanical component
12/05/2013	DE102010000818B4 MEMS-Resonatorbauelemente MEMS resonator devices
12/04/2013	CN103430434A Actuator, optical scanner, and image generator
12/04/2013	CN103430260A Electronic apparatus comprising variable capacitance element and method of manufacturing same
12/04/2013	CN103424567A Capacitive micro-machine wind speed and direction sensor
12/03/2013	US8601405 Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
12/03/2013	CA2522790C A micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
11/2013
11/21/2013	WO2013171376A1 Energy collector structure and method
11/21/2013	WO2013171357A1 Beam for a movement amplifying device and movement amplifying device using said beam
11/21/2013	US20130305804 Microelectromechanical component and method for testing a microelectromechanical component
11/21/2013	DE102011015184B4 Vorrichtung für den Transport kleiner Volumina eines Fluids, insbesondere Mikropumpe oder Mikroventil A device for the transport of small volumes of a fluid, in particular micropump or microvalve
11/21/2013	DE102010032799B4 Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe Microvalve with elastically deformable valve lip, manufacturing processes and micropump
11/20/2013	EP2306057B1 Microvalve and valve seat member
11/20/2013	CN103402907A Microfluidic droplet generator
11/20/2013	CN102175909B Micro-electro-mechanical system (MEMS) cantilever type microwave power automatic detection system and detection method and preparation method thereof
11/20/2013	CN101076718B Detecting, measuring and controlling particles and electromagnetic radiation
11/19/2013	CA2732738C Efficient inkjet nozzle assembly
11/14/2013	WO2013168385A1 Optical reflection element
11/14/2013	US20130299928 Hybridly integrated component and method for the production thereof
11/14/2013	US20130299927 Hybrid intergrated component and method for the manufacture thereof
11/14/2013	US20130299926 Method for mems device fabrication and device formed
11/14/2013	US20130299925 Micromechanical inertial sensor and method for manufacturing same
11/14/2013	US20130299924 Hybrid integrated component and method for the manufacture thereof
11/14/2013	US20130299923 Flexible stop for an acceleration sensor
11/14/2013	DE19800574B4 Mikromechanisches Bauelement Micromechanical component
11/14/2013	DE102012208030A1 Mikromechanischer Inertialsensor und Verfahren zu dessen Herstellung Micromechanical inertial sensor and method for its production
11/14/2013	DE102011112638B4 Mikrofluidischer Chip mit mikrofluidischem Kanalsystem Microfluidic chip with a microfluidic channel system
11/12/2013	CA2714788C Merged-mask micro-machining process
11/07/2013	WO2013081458A4 Mems scanning micromirror
11/07/2013	US20130292783 Mems element and method for manufacturing same
11/07/2013	DE102005023699B4 Verfahren zur Herstellung eines mikromechanischen Bauelements mit einer Membran A process for producing a micromechanical component having a membrane
10/2013
10/31/2013	WO2013163065A1 Metal-insulator-metal capacitors on glass substrates
10/31/2013	WO2013134592A3 Atomic layer deposition strengthening members and method of manufacture
10/31/2013	US20130285173 Acoustic transducers with perforated membranes
10/31/2013	US20130285172 Combined Sensor
10/31/2013	US20130285171 Environment-resistant module, micropackage and methods of manufacturing same
10/31/2013	US20130285169 Method for producing an optical window device for a mems device
10/31/2013	US20130285168 Mems inertial sensor and method for manufacturing the same
10/31/2013	US20130285166 Hybrid integrated component and method for the manufacture thereof
10/31/2013	US20130285164 Mems device and method of manufacturing the same
10/31/2013	US20130285163 Mems element and method of manufacturing the same
10/31/2013	US20130285160 Microscale Metallic CNT Templated Devices and Related Methods
10/31/2013	US20130285122 Electronic device
10/31/2013	US20130284572 Through-silicon via resonators in chip packages and methods of assembling same
10/31/2013	DE102012206854A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production
10/31/2013	DE102005010393B4 Halbleitersensor zur Erfassung einer dynamischen Grösse A semiconductor sensor for detecting a dynamic amount
10/30/2013	EP2656506A1 Sensor and a sensor system
10/30/2013	CN103373697A Hybrid integrated component and method for the manufacture thereof
10/24/2013	US20130277775 Planar Structure For A Triaxial Gyrometer
10/24/2013	US20130277773 Through silcon via with reduced shunt capacitance
10/24/2013	US20130277772 Microelectromechanical pressure sensor including reference capacitor
10/24/2013	US20130277675 Soi wafer, manufacturing method therefor, and mems device
10/24/2013	DE112011103781T5 Verfahren zum Beschichten mikromechanischer Komponenten mit einer dualen Diamantbeschichtung A method for coating micromechanical components with a dual diamond coating
10/24/2013	DE112008001648B4 Mikroelektromechanisches optisches System und verteilte Rechenplattform mit optischem Datenstrahl Micro-electromechanical optical system and distributed computing platform with optical data beam
10/24/2013	DE102013207233A1 Gekapselte mems-vorrichtung und verfahren zur kalibrierung einer gekapselten mems-vorrichtung Encapsulated mems device and method for calibration of an encapsulated mems device
10/24/2013	DE102012206719A1 Mikromechanisches Sensorelement und Sensoreinrichtung mit einem derartigen Sensorelement The micromechanical sensor element and sensor means with such a sensor element
10/23/2013	EP2653832A1 Oscillating micro-mechanical sensor of angular velocity
10/23/2013	CN203247083U Microdevice and packaging die for same
10/23/2013	CN103370866A Actuator, micropump, and electronic apparatus
10/23/2013	CN103364592A Physical quantity sensor and manufacturing method thereof, and electronic device
10/23/2013	CN103364584A Piezoresistance type acceleration sensor containing silicon through holes and method for manufacturing same
10/23/2013	CN103359676A Package structure and packaging method
10/17/2013	WO2013152899A1 Membrane arrangement for a micro-electromechanical measuring transducer and method for producing a membrane arrangement
10/17/2013	US20130270658 Methods for producing a cavity within a semiconductor substrate
10/17/2013	US20130270657 Micromachined monolithic 6-axis inertial sensor
10/17/2013	US20130270096 Electromechanical microsystems with air gaps
10/17/2013	DE102012206280A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
10/17/2013	DE102012206269A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component
10/17/2013	DE102012205921A1 Membrananordnung für einen mikro-elektromechanischen Messumformer und Verfahren zum Herstellen einer Membrananordnung Membrane assembly for a micro-electro-mechanical transducer and method for producing a membrane assembly
10/17/2013	DE102012205878A1 Mikromechanischer Drucksensor The micromechanical pressure sensor
10/17/2013	DE102010012701B4 Mikrokraftsensor Micro force sensor
10/17/2013	DE102007029873B4 Verdrahtungssubstrat Wiring substrate
10/16/2013	CN203241472U Multiple-cantilever beam microwave power sensor
10/16/2013	CN102243268B Micro-electro-mechanical directional coupling microwave power sensor and preparation method thereof
10/16/2013	CN101973506B Van der Waals' force oscillator
10/10/2013	WO2013151834A1 Mems sensor with movable z-axis sensing element
10/10/2013	WO2013150326A1 Passive wireless microphone
10/10/2013	US20130264664 Semiconductor pressure sensor
10/10/2013	US20130264661 Physical quantity sensor and electronic apparatus
10/10/2013	DE102013205527A1 Mems-bauelement und verfahren zur herstellung eines mems-bauelements MEMS device and method of manufacturing a MEMS device
10/09/2013	EP2648003A1 Self test of mems accelerometer with asics integrated capacitors
10/09/2013	EP2647120A1 Device for converting mechanical energy into electrical energy
10/09/2013	CN103346252A MEMS vibration energy collector based on PZT piezoelectric beam array
10/09/2013	CN103342331A Silicon micro parallel-connection five-rod mechanism
10/03/2013	WO2013147031A1 Actuator element using carbon electrode
10/03/2013	WO2013146368A1 Method for manufacturing capacitive acceleration sensor, device for manufacturing same, and capacitive acceleration sensor
10/03/2013	WO2013146094A1 Optical scanner
10/03/2013	WO2013145735A1 Mems device

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