| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/05/2014 | CN103552975A Hydraulic micro-displacement driver and micro-displacement device |
| 02/05/2014 | CN103552974A MEMS (micro-electromechanical systems) electrostatic actuation type cantilever beam structure with camber beam electric heating actuator |
| 02/05/2014 | CN103552973A Micro cantilever beam structure with thermal-driving adhesion elimination mechanism in micro electro mechanical system |
| 02/05/2014 | CN102249177B Micro-electromechanical sensor and forming method thereof |
| 02/04/2014 | US8643935 Photonic MEMS and structures |
| 02/04/2014 | CA2490975C A device having a light-absorbing mask and a method for fabricating same |
| 01/30/2014 | WO2014017341A1 Display device equipped with power generation function |
| 01/30/2014 | DE102012213313A1 Micromechanical structure, particularly acceleration sensor, comprises micromechanical functional structure formed on surface of substrate, and strip conductor arrangement with two insulating layers and intermediate strip conductor layer |
| 01/30/2014 | DE102012213310A1 MEMS component i.e. microphone component, has vibrating body vibratorily suspended within vacuum-sealed cavity and mechanically coupled to membrane element, so that vibrating body is deformed in case of membrane deflection |
| 01/30/2014 | DE102012213305A1 Method for manufacturing microelectromechanical system element of component, involves spanning rear connection opening in substrate under membrane structure, producing cavity in substrate and opening cavity by backside thinning of substrate |
| 01/30/2014 | DE102012212112A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure |
| 01/29/2014 | EP2690764A1 Actuator, optical scanner, and image generator |
| 01/29/2014 | CN103547528A Optical module and production method for same |
| 01/29/2014 | CN103539061A Micromechanical structure, in particular sensor arrangement, and corresponding operating method |
| 01/28/2014 | CA2807564C Microfluidic devices and methods of using same |
| 01/23/2014 | WO2014013760A1 Optical beam scanning element and optical beam scanning device |
| 01/23/2014 | US20140022865 Temperature compensation in a cmut device |
| 01/23/2014 | US20140021564 Microelectromechanical gyroscope with enhanced rejection of acceleration noises |
| 01/23/2014 | US20140021562 Mems device, electronic module, electronic apparatus, and mobile unit |
| 01/23/2014 | US20140021561 Microfabrication of High Quality Three Dimensional Structures Using Wafer-Level Glassblowing of Fused Quartz and Ultra Low Expansion Glasses |
| 01/23/2014 | US20140021443 Nano resonator and manufacturing method thereof |
| 01/23/2014 | DE102013213445A1 Verfahren zur Herstellung einer Membran aus Halbleitermaterial A method for producing a membrane of semiconductor material |
| 01/23/2014 | DE102012212445A1 Mikromechanische Struktur, insbesondere Sensoranordnung, und entsprechendes Betriebsverfahren Micromechanical structure, in particular the sensor array and corresponding operating method |
| 01/22/2014 | CN103534195A Method of forming membranes with modified stress characteristics |
| 01/22/2014 | CN103523737A MEMS-based interdigital gap beam structure energy collector and manufacturing method thereof |
| 01/21/2014 | CA2679219C Mems actuators and switches |
| 01/16/2014 | WO2014010960A1 Fluid analysis cartridge |
| 01/16/2014 | WO2014010243A1 Semiconductor device |
| 01/16/2014 | US20140017844 Integrated circuit switches, design structure and methods of fabricating the same |
| 01/16/2014 | US20140016798 Mems device |
| 01/16/2014 | US20140015070 Component having a micromechanical microphone pattern |
| 01/15/2014 | CN1821048B Micronl nano thermoacoustic vibration excitor based on thermoacoustic conversion |
| 01/15/2014 | CN103512572A Method for operating and/or for measuring micromechanical device, and micromechanical device |
| 01/15/2014 | CN103278660B Difference resonant micro accelerometer and driving method thereof |
| 01/15/2014 | CN102853898B Three-dimensional MEMS (Micro-electromechanical System) monolithic integrated vector hydrophone |
| 01/15/2014 | CN102589762B Micro-voltage high-overload sensor chip of beam membrane single island structure |
| 01/15/2014 | CN102405433B Optical reflection element |
| 01/14/2014 | US8631511 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| 01/09/2014 | WO2014008497A1 Sensor mems device cantilever packaging |
| 01/09/2014 | WO2014007991A1 Cavity liners for electromechanical systems devices |
| 01/09/2014 | WO2014006831A1 Spatial light modulator and exposure apparatus |
| 01/09/2014 | WO2013145735A4 Mems device |
| 01/09/2014 | US20140008740 Mems microphone and method for packaging the same |
| 01/09/2014 | US20140008739 Semiconductor device and method of fabricating same |
| 01/09/2014 | US20140007705 Microelectromechanical load sensor and methods of manufacturing the same |
| 01/08/2014 | CN103502713A Clamping device, in particular for hoses |
| 01/08/2014 | CN103502138A Method for the wafer-level integration of shape memory alloy wires |
| 01/08/2014 | CN103499796A Microcomputer electromagnetic field sensor with comb tooth structure |
| 01/08/2014 | CN103499534A High-sensitivity terahertz microfluidic channel sensor and preparation method thereof |
| 01/08/2014 | CN101919159B A micromechanical resonator |
| 01/07/2014 | CA2389146C Piezoelectric macro-fiber composite actuator and manufacturing method |
| 01/03/2014 | WO2014004700A1 Mems die and methods with multiple-pressure sealing |
| 01/02/2014 | US20140004364 Dielectric film and transducer including the same |
| 01/02/2014 | US20140001584 Mems pressure sensor and manufacturing method therefor |
| 01/02/2014 | US20140001581 Mems microphone and forming method therefor |
| 01/02/2014 | US20140001580 Transducer with Enlarged Back Volume |
| 01/02/2014 | US20140001579 Mems pressure sensor and manufacturing method therefor |
| 01/02/2014 | DE112012001271T5 Halbleitersensor zur Erfassung einer physikalischen Größe A semiconductor sensor for detecting a physical quantity |
| 01/02/2014 | DE102010060906B4 Sensormodul mit Weckeinrichtung Sensor module with alarm |
| 01/01/2014 | EP2680429A1 Actuator, micropump, and electronic apparatus |
| 01/01/2014 | EP2678598A2 Clamping device, in particular for hoses |
| 01/01/2014 | EP2678265A2 Detachable micro- and nano-components for a space-saving use |
| 12/31/2013 | US8617406 Device for the actively-controlled and localized deposition of at least one biological solution |
| 12/31/2013 | CA2501012C Interlaced array of piano mems micromirrors |
| 12/27/2013 | WO2013192335A1 Membrane-based nano-electromechanical systems device and methods to make and use same |
| 12/27/2013 | WO2013190744A1 Vibration generator |
| 12/26/2013 | US20130341742 Wafer level mems force dies |
| 12/26/2013 | US20130341741 Ruggedized mems force die |
| 12/26/2013 | US20130341738 Method for manufacturing a component having an electrical through-connection |
| 12/26/2013 | US20130341737 Packaging to reduce stress on microelectromechanical systems |
| 12/26/2013 | US20130341736 Packaging Compatible Wafer Level Capping of MEMS Devices |
| 12/25/2013 | EP2676366A1 Novel micromechanical devices |
| 12/25/2013 | EP2675748A2 Strengthened micro-electromechanical system devices and methods of making thereof |
| 12/25/2013 | EP2274108B1 Methods of manufacturing a capacitive electromechanical transducer |
| 12/25/2013 | CN103477405A Electronic device and method for manufacturing same |
| 12/25/2013 | CN103466539A Super-lyophobic surface and preparation method thereof |
| 12/25/2013 | CN102185518B Static micro-actuator with limiting locking function |
| 12/24/2013 | US8614491 Package interface plate for package isolation structures |
| 12/24/2013 | DE10348335B4 Brückenförmiges Mikrobauteil mit einem bimetallischen Biegeelement Bridge type micro-component with bimetallic bending element |
| 12/24/2013 | DE102012210374A1 Drehratensensor Rotation rate sensor |
| 12/19/2013 | WO2013187781A1 Self-sensing dielectric elastomer device |
| 12/19/2013 | US20130335122 Electronic device, method of manufacturing the electronic device, and method of driving the electronic device |
| 12/19/2013 | US20130334627 Semiconductor integrated device assembly and related manufacturing process |
| 12/19/2013 | US20130334626 Hybrid integrated component and method for the manufacture thereof |
| 12/19/2013 | US20130334624 Method of providing a semiconductor structure with forming a sacrificial structure |
| 12/19/2013 | US20130334623 MEMS Sensing Device and Method for the Same |
| 12/19/2013 | US20130334622 Micromechanical device and method for manufacturing a micromechanical device |
| 12/19/2013 | US20130334621 Hybrid integrated component and method for the manufacture thereof |
| 12/19/2013 | DE112011103124T5 Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen Flexure pivots for reducing quadrature for resonant micromechanical devices |
| 12/19/2013 | DE102012210144A1 Verfahren zum Betrieb und/oder zur Vermessung einer mikromechanischen Vorrichtung und mikromechanische Vorrichtung Method for operating and / or for measuring a micromechanical device and micromechanical device |
| 12/19/2013 | DE102012210052A1 Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung Hybrid integrated component and method for its production |
| 12/18/2013 | EP1652219B1 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same |
| 12/18/2013 | EP1552721B1 Micromachined ultrasonic transducers and method of fabrication |
| 12/18/2013 | CN103460112A System and method for tuning multi-color displays |
| 12/18/2013 | CN103449353A 传感器模块 The sensor module |
| 12/18/2013 | CN102259820B Cavity structure, manufacturing method of cavity structure and manufacturing method of pressure-sensitive sensor |
| 12/12/2013 | WO2013184223A1 Micro electromagnetically actuated latched switches |
| 12/12/2013 | US20130328143 Semiconductor Manufacturing and Semiconductor Device with semiconductor structure |
| 12/12/2013 | US20130328140 Vibration isolated mems structures and methods of manufacture |
| 12/11/2013 | CN103444079A Novel micromechanical device |