| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/03/2014 | US20140091404 Acceleration sensor |
| 04/03/2014 | US20140090468 Tri-axial mems inertial sensor |
| 04/03/2014 | DE102012217979A1 Hybrid integriertes Drucksensor-Bauteil Hybrid integrated pressure sensor component |
| 04/03/2014 | DE102012217881A1 Sensoranordnung und Herstellungsverfahren Sensor assembly and manufacturing processes |
| 04/02/2014 | EP2713379A1 A switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches |
| 04/02/2014 | CN103703528A Electronic device having variable capacitance element and method for manufacturing same |
| 04/02/2014 | CN103700762A Piezoelectric actuator and optical scanning apparatus |
| 04/02/2014 | CN102190274B Micro-electromechanical system device and motion detection method |
| 03/27/2014 | WO2014022171A3 Interferometric modulator with improved primary colors |
| 03/27/2014 | US20140084397 Wafer-level packaging of a mems integrated device and related manufacturing process |
| 03/27/2014 | US20140084396 Mems device and process |
| 03/27/2014 | US20140084395 Mems microphone |
| 03/27/2014 | US20140084394 Micro electro mechanical system (mems) microphone and fabrication method thereof |
| 03/27/2014 | US20140084393 Micro electro mechanical systems device |
| 03/27/2014 | US20140083164 Calibration of mems sensor |
| 03/27/2014 | DE102012217228A1 Herstellungsverfahren für ein Nanoporen-aufweisendes Teil und entsprechendes Nanoporen-aufweisendes Teil Manufacturing method for a nanopore exhibiting part and corresponding nanopore part exhibiting |
| 03/27/2014 | DE102012217133A1 Mikroelektronisches Bauelement und entsprechendes Herstellungsverfahren Microelectronic component and corresponding production method |
| 03/27/2014 | DE102012216997A1 Electrical switching element i.e. reed contact, for e.g. contactless switch used in pacemaker, has contact pad contacted by deflection region of extension during deflecting deflection region in direction by external magnetic field |
| 03/27/2014 | DE102012216996A1 Micro-electromechanical systems (MEMS) sound transducer of MEMS sound transducer arrangement, has diaphragm whose projection is arranged above projection of substrate, and whose recess is extended themselves into recess of substrate |
| 03/26/2014 | EP2711696A1 Thermal flow sensor with vibrating element and gas sensor with at least one such thermal flow sensor |
| 03/26/2014 | CN203498071U Modulating switch for ion beam and electron beam |
| 03/26/2014 | CN203498070U Silicon micro parallel five-bar mechanism |
| 03/26/2014 | CN203498069U Silicon micro planar flexible linkage mechanism manufactured on semiconductor chip |
| 03/26/2014 | CN103675480A Mini electric field sensor with double-clamped piezoelectric beams |
| 03/26/2014 | CN103674397A High-overload back pressure type absolute-pressure sensor module and manufacturing technology thereof |
| 03/26/2014 | CN103674355A Suspended force-sensitive sensor chip capable of eliminating encapsulation stress and manufacture method thereof |
| 03/26/2014 | CN103674112A Method for preparing integrated silicon piezoresistive type sensor chip preparing and sensor chip |
| 03/26/2014 | CN103663359A Microelectronic component and corresponding production process |
| 03/26/2014 | CN103663356A Method and structure for encapsulating transparent substrate detector chip |
| 03/26/2014 | CN103663345A Microelectromechanical system (MEMS) device and fabrication method thereof |
| 03/26/2014 | CN103663344A Improved through silicon via including multi-material fill |
| 03/26/2014 | CN103663343A Electronic device, method of manufacturing the same, and oscillator |
| 03/20/2014 | WO2014042868A1 Imod pixel architecture for improved fill factor, frame rate and stiction performance |
| 03/20/2014 | WO2014041943A1 Capacitive sensor, acoustic sensor and microphone |
| 03/20/2014 | US20140077316 Wafer bonding and related methods and apparatus |
| 03/20/2014 | US20140077272 Micromechanical sensor device with movable gate and corresponding production method |
| 03/20/2014 | US20140076697 Mems electrostatic actuator |
| 03/20/2014 | DE10348908B4 Verfahren zur Herstellung eines Mikrosystems mit integrierter Schaltung und mikromechanischem Bauteil A process for producing a microsystem with an integrated circuit and the micromechanical component |
| 03/19/2014 | EP2707953A1 Micromechanical device and method of designing thereof |
| 03/19/2014 | CN103650343A Micromechanical device and method of designing thereof |
| 03/19/2014 | CN103645343A Multiaxial capacitive accelerometer |
| 03/13/2014 | WO2012177304A3 Micro-electro-mechanical system (mems) and related actuator bumps, method of manufacture and design structures |
| 03/13/2014 | US20140072829 Thin film structure including ordered alloy and method for manufacturing the thin film structure |
| 03/13/2014 | US20140070336 Semiconductor device and method for manufacturing the same |
| 03/13/2014 | US20140070335 Electronic device |
| 03/13/2014 | DE102012215897A1 Transducer device i.e. microelectromechanical system microphone, has coil formed to induce eddy current to membrane, for determination of sound pressure represented by acoustic signal depending on eddy current and impedance of coil |
| 03/13/2014 | DE102004008148B4 Sensor mit Membran und Verfahren zur Herstellung des Sensors Sensor with membrane and method of manufacturing the sensor |
| 03/13/2014 | DE10196677B4 Elektrodenstruktur und Verfahren zum Herstellen eines Dünnschicht-Strukturkörpers Electrode structure and method of manufacturing a thin-film structure body |
| 03/12/2014 | EP2706039A2 Liquid MEMS component responsive to pressure |
| 03/12/2014 | CN103626115A Ultrathin nitride micro-nano static actuator and manufacturing method thereof |
| 03/12/2014 | CN102778586B Differential capacitive micro-acceleration transducer and manufacturing method thereof |
| 03/12/2014 | CN102134051B 电子器件 Electronic devices |
| 03/06/2014 | WO2014036112A1 Electrochemically-actuated microfluidic devices |
| 03/06/2014 | WO2014035697A1 Microstructure film |
| 03/06/2014 | WO2014034602A1 Electrostatic induction conversion device and dc-dc converter |
| 03/06/2014 | US20140061826 Ultrasonic transducer and method of manufacturing the same |
| 03/06/2014 | US20140061825 Micro electro mechanical system(mems) acoustic sensor and fabrication method thereof |
| 03/06/2014 | US20140061824 Mems packaging scheme using dielectric fence |
| 03/06/2014 | US20140061730 Cap and Substrate Electrical Connection at Wafer Level |
| 03/06/2014 | DE102012215600A1 Capacitive energy converter for vehicle, has capacitive array arranged corresponding to contour of vibrating electrode, and stator electrode, to perform relative movement of both electrodes of electrode assembly perpendicular to plane |
| 03/06/2014 | DE102012215239A1 Bauteil und Verfahren zum Prüfen eines solchen Bauteils Component and method for testing such a component |
| 03/05/2014 | EP2703824A1 MEMS accelerometer comprising pendolus masses being pivotable in the substrate plane |
| 03/05/2014 | EP2701586A1 Nerve interface electrode with fibers for insertion between nerve fascicles |
| 02/27/2014 | US20140054732 Method and apparatus for release-assisted microcontact printing of mems |
| 02/27/2014 | US20140054731 Mems pressure sensor with multiple membrane electrodes |
| 02/27/2014 | US20140054730 System and method for forming a buried lower electrode in conjunction with an encapsulated mems device |
| 02/27/2014 | US20140054729 Mems device, electronic apparatus, and manufacturing method of mems device |
| 02/27/2014 | DE102013109240A1 Mikrofluidische mischervorrichtungen und verfahren zum mischen eines fluids A microfluidic mixer devices and methods for mixing fluids of a |
| 02/26/2014 | CN103604538A MEMS pressure sensor chip based on SOI technology and manufacturing method thereof |
| 02/25/2014 | US8659101 Physical quantity detector |
| 02/25/2014 | US8656958 Microfabricated elastomeric valve and pump systems |
| 02/20/2014 | WO2014027435A1 Fluid handling device and fluid handling method |
| 02/20/2014 | WO2014026857A1 Mems component and method for the production thereof |
| 02/20/2014 | US20140049256 Resonant mems lorentz-force magnetometer using force-feedback and frequency-locked coil excitation |
| 02/20/2014 | US20140048395 Normally closed micromechanical device comprising a laterally movable element and method for forming |
| 02/20/2014 | DE102012107457A1 MEMS-Bauelement und Verfahren zur Herstellung MEMS device and methods for preparing |
| 02/19/2014 | EP2697154A1 Method of forming membranes with modified stress characteristics |
| 02/19/2014 | CN101931379B Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same |
| 02/13/2014 | WO2014025844A1 Variable capacitor comprising mems devices for radio frequency applications |
| 02/13/2014 | US20140042563 Integrated circuit with mems element and manufacturing method thereof |
| 02/13/2014 | US20140042498 Starting substrate for semiconductor engineering having substrate-through connections and a method for making same |
| 02/13/2014 | US20140041727 High throughput screening of crystallization of materials |
| 02/13/2014 | DE112012002104T5 Optisches Modul und Herstellungsverfahren für dasselbe Optical module and manufacturing method for the same |
| 02/12/2014 | EP2695848A1 Integrated circuit with MEMS element designed to avoid sticking and manufacturing method thereof |
| 02/12/2014 | CN103575431A Device for measuring forces and method of making same |
| 02/12/2014 | CN103569942A Hybrid MEMS bump design to prevent in-process and in-use stiction |
| 02/12/2014 | CN103569936A Oscillation structure of micro actuator |
| 02/12/2014 | CN102411018B Sheet oxygen sensor |
| 02/12/2014 | CN102375075B Micro electro mechanical system accelerator with enhanced structure strength |
| 02/11/2014 | CA2764403C Micromirror element and micromirror array |
| 02/11/2014 | CA2764402C Micromirror element and micromirror array |
| 02/06/2014 | WO2014022487A1 Microphone assembly |
| 02/06/2014 | WO2014022171A2 Interferometric modulator with improved primary colors |
| 02/06/2014 | WO2014021868A1 Device including interposer between semiconductor and substrate |
| 02/06/2014 | WO2014020905A1 Actuator |
| 02/06/2014 | US20140038335 Integrated acoustic transducer in mems technology, and manufacturing process thereof |
| 02/06/2014 | US20140036342 Electrical Routing |
| 02/06/2014 | US20140034820 Light-detection systems |
| 02/05/2014 | EP2693254A1 Mems device with increased tilting range |
| 02/05/2014 | EP2691336A2 Stress relief |