Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
05/2014
05/28/2014DE102008007682B4 Modul mit einem Mikro-Elektromechanischen Mikrofon Module with a micro-electro-mechanical microphone
05/28/2014DE102005009422B4 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof
05/28/2014CN203616041U 高过载背压式绝压传感器模块 Backpressure high overload absolute pressure sensor module
05/28/2014CN103825494A 物联网射频收发组件中固支梁振动电磁自供电微传感器 Things RF transceiver module solid-supported beam of electromagnetic self-powered micro-vibration sensor
05/28/2014CN103818870A 物联网射频收发组件悬臂鱼刺梁振动电磁自供电微传感器 Things RF transceiver components Fishbone cantilever beam of electromagnetic self-powered micro-vibration sensor
05/28/2014CN103818869A 物联网射频收发组件固支鱼刺梁振动电磁自供电微传感器 Things Fishbone RF transceiver components clamped beam of electromagnetic self-powered micro-vibration sensor
05/28/2014CN102320549B 一种提高薄膜应变线性度的方法 Method for improving the linearity of the method of thin-film strain
05/27/2014US8737171 MEMS device and process
05/27/2014US8736254 Physical quantity sensor and electronic apparatus
05/21/2014EP2733114A1 Thin film device and manufacturing method thereof
05/21/2014EP2731908A2 Miniaturised sensor comprising a heating element, and associated production method
05/21/2014CN103814325A 光控制面板 Light control panel
05/21/2014CN103813974A 被涂覆的电容传感器 The coated capacitive sensor
05/21/2014CN103809285A 自对准垂直式梳状传感器及其制作方法 Self-aligned vertical comb sensor and manufacturing method thereof
05/21/2014CN103803478A 金属弹性构件、微机械装置、微机械装置的制造方法、摆动控制装置以及摆动控制方法 A metal elastic member, the micro-mechanical device, a method of manufacturing a micromechanical device, the swing control device and a control method swing
05/21/2014CN102692276B 一种非制冷红外探测器 A non-cooled infrared detectors
05/15/2014WO2014073638A1 Pump and liquid supply method
05/15/2014WO2014035530A3 Microelectronic structures with suspended lithium-based thin films
05/15/2014US20140131821 Pressure sensing device having contacts opposite a membrane
05/15/2014US20140131820 Method of fabrication of ai/ge bonding in a wafer packaging environment and a product produced therefrom
05/15/2014US20140131819 Process for manufacturing a lid for an electronic device package, and lid for an electronic device package
05/15/2014DE102012109325A1 Drucksensor mit Deckschicht Pressure sensor with topcoat
05/15/2014DE102004024285B4 Verfahren zur Herstellung eines mikrostrukturierten Bauelements A process for producing a microstructured component
05/14/2014EP2730928A1 Physical quantity sensor and physical quantity detection method
05/14/2014CN103796148A 微机电装置与制作方法 MEMS device and manufacturing method
05/14/2014CN103795291A 微型植入式超声共振无线能量传送接收器及其制备方法 Implantable miniature ultrasonic resonance energy transfer wireless receiver and its preparation method
05/14/2014CN103794553A 用于在衬底中制造电覆镀通孔的方法以及具有电覆镀通孔的衬底 The method of manufacturing an electrical substrate in the substrate for plating through holes, and having an electric plating through hole
05/14/2014CN103787263A 基于两级调控的静电驱动大变形微机械驱动器 Large deformation micromechanical drive control based on two-stage electrostatic drive
05/14/2014CN103787261A 一种集成式多道能量收集微机械结构 An integrated multi-channel energy harvesting micro-mechanical structure
05/14/2014CN103787260A 微机械构件 Micro-mechanical components
05/13/2014US8722445 Planar cavity MEMS and related structures, methods of manufacture and design structures
05/08/2014US20140127446 Amorphous carbon and aluminum membrane
05/08/2014US20140124879 Component and method for producing same
05/08/2014DE102013217300A1 MEMS microphone device, has electrically separate electrode portions formed in doped semiconductor layer and electrically separated from each other by p/n junction, and capacitor arrangement provided with electrode
05/08/2014DE102013206531A1 Device for displacing micromirror in optical module of illumination system, has compensating unit compensating linear displacement of micromirror or predetermined pivot axis during pivoting of micromirror
05/08/2014DE102012220323A1 Bauteil und Verfahren zu dessen Herstellung Component and process for its preparation
05/08/2014DE102012220006A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure
05/07/2014EP2727880A1 Three-dimensional, micromechanical component having chamfer and method for its production
05/07/2014CN103776437A 微机械结构 Micromechanical structure
05/07/2014CN102565148B 微型差分电容葡萄糖连续监测阻尼传感器及制作方法 Miniature damping differential capacitance sensor for continuous monitoring of glucose and production methods
05/07/2014CN102342014B 促动器元件及输入装置 The actuator element and an input device
05/06/2014US8713788 Method for fabricating miniature structures or devices such as RF and microwave components
05/01/2014WO2014063737A1 A mems device
05/01/2014US20140117472 Micromechanical component
05/01/2014US20140117471 Micromechanical component having a bond joint
04/2014
04/30/2014DE102012219622A1 Micro-technological component e.g. acceleration sensor, has interlayer arranged between substrate and multi-layer, where side surfaces of interlayer are covered by cover and bond is arranged between multi-layer and silicon layer
04/30/2014DE102012219591A1 Micromechanical component for use in e.g. sensor device for detecting mass of adjustable part, has actuator variable in shape such that restoring force is exerted on spring and/or adjustable part, and part is displaceable into movement
04/30/2014DE102012219550A1 Hybrid integriertes Bauteil Hybrid integrated component
04/30/2014DE102012219511A1 Mikromechanische Struktur Micromechanical structure
04/30/2014DE102012218906A1 Beschleunigungssensor und Verfahren zum Herstellen eines Beschleunigungssensors Acceleration sensor and method for producing an acceleration sensor
04/30/2014DE102012021413A1 Sensor mit Maskierung Sensor with masking
04/30/2014CN102792168B Mems传感器 Mems Sensor
04/30/2014CN102597847B Optical scanning device
04/30/2014CN102341341B MEMS devices
04/30/2014CN102311090B Two-dimensional comb actuator and manufacturing method thereof
04/29/2014US8709152 Microfluidic free interface diffusion techniques
04/24/2014US20140110800 Method for manufacturing a cap for a mems component, and hybrid integrated component having such a cap
04/24/2014DE102013220984A1 Vorrichtung, Speichergerät, Schalter und Verfahren, die Mikrostrukturen umfassen, welche sich von einer Unterlage aus erstrecken Device, storage device, switch and processes comprise the microstructures, which extend from a base of
04/24/2014DE102012218096A1 Micro-fluidic layer system for measuring of fluid printings for medical applications, has transparent layer arranged adjacent to tensile layer, and optical path influenced by recess of transparent layer by elongation unit of tensile layer
04/23/2014CN103748646A Routing of MEMS variable capacitors for RF applications
04/23/2014CN103746602A Screw-type piezoelectric type energy collector and preparation method thereof
04/23/2014CN103746157A Phase shifting unit and MEMS (micro-electromechanical system) terahertz phase shifter composed of same
04/23/2014CN102749479B Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect
04/23/2014CN102405432B Optical reflection element
04/17/2014US20140103779 Microelectromechanical component and method for producing a microelectromechanical component
04/17/2014US20140103468 Micro-electromechanical pressure sensor having reduced thermally-induced stress
04/17/2014US20140103462 MEMS Devices and Methods for Forming the Same
04/17/2014DE102012218845A1 Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil Manufacturing method for a micromechanical component and micromechanical component
04/17/2014DE102012218725A1 Mikroelektromechanisches Bauelement und Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes The micro-electro-mechanical device and method for manufacturing a micro-electro-mechanical component
04/17/2014DE102012218501A1 Bauelement mit einer mikromechanischen Mikrofonstruktur Component having a micromechanical microphone structure
04/16/2014EP2718225A2 Systems and methods for current density optimization in cmos-integrated mems capacitive devices
04/16/2014CN203545671U Hydraulic micro-displacement driver and micro-displacement device
04/16/2014CN103732527A Dry adhesives
04/16/2014CN103732526A Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devices
04/16/2014CN103723675A Production process for a micromechanical component and micromechanical component
04/16/2014CN102918401B Dynamic sensor
04/16/2014CN102275857B Micro-electro-mechanical device and manufacturing method thereof
04/16/2014CN101970339B Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
04/15/2014US8698292 Environment-resistant module, micropackage and methods of manufacturing same
04/15/2014US8695640 Microfabricated elastomeric valve and pump systems
04/10/2014WO2014055194A1 Electromechanical systems device with protrusions to provide additional stable states
04/10/2014WO2012170068A3 Wireless microactuators and control methods
04/10/2014DE102012223210B3 Thermal sensor device such as thermal flow sensor, has aerogel which is located on one side of membrane facing away from support substrate, so that membrane is mechanically reinforced
04/09/2014CN103717526A Miniaturised sensor comprising a heating element, and associated production method
04/09/2014CN103712737A Self-testing structure and method for pressure sensor
04/09/2014CN103708406A Resonant type infrared detector structure capable of isolating packaging stress and manufacturing method thereof
04/09/2014CN102768290B MEMS (micro-electrochemical systems) accelerometer and production method thereof
04/09/2014CN102539055B High-temperature-resistant anti-corrosion pressure sensor based on smart-cut silicon isolation chip
04/09/2014CN102313985B Two-circuit integrated variable optical attenuator with teeterboard structure and manufacturing method thereof
04/08/2014US8693083 Micromirror unit and method of making the same
04/08/2014CA2678680C Mems actuators and switches
04/03/2014WO2014050586A1 Mirror driving device and driving method for same
04/03/2014WO2014050229A1 Device member comprising cavity and production method for device member comprising cavity
04/03/2014WO2014048671A1 A system and a method comprising an array of bending elements for determining a condition
04/03/2014WO2013165907A3 Apparatus for positioning interferometric modulator based on programmable mechanical forces
04/03/2014US20140091871 Mems element and oscillator
04/03/2014US20140091674 Stress relieved microfabricated cantilever
04/03/2014US20140091409 Applications of contact-transfer printed membranes
04/03/2014US20140091408 Sensor module and semiconductor chip
04/03/2014US20140091405 Hybrid integrated pressure sensor component
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