| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/10/2014 | US20140191342 Mems sensor |
| 07/10/2014 | US20140191341 Method and Apparatus for a Semiconductor Structure |
| 07/10/2014 | US20140191185 Apparatus and method for fabricating nano resonator using laser interference lithography |
| 07/10/2014 | DE102013100075A1 Mikrofluidikvorrichtung und Verfahren zur Herstellung einer Mikrofluidikvorrichtung A microfluidic device and method for producing a microfluidic |
| 07/09/2014 | EP2752030A1 Piezoelectric microphone fabricated on glass |
| 07/09/2014 | EP2751608A1 Light control panel |
| 07/09/2014 | CN103917483A 通风微机电系统装置和制造方法 Ventilation MEMS device and method of manufacture |
| 07/09/2014 | CN103917482A 具有掩埋的导电区域的微机电器件及其制造工艺 MEMS devices and manufacturing process having the buried conductive regions |
| 07/09/2014 | CN103917481A 微机电系统（mems）以及相关的致动器凸块、制造方法和设计结构 Microelectromechanical systems (mems) and associated actuator bump, manufacturing method and design structure |
| 07/09/2014 | CN103910323A 微机电装置 MEMS devices |
| 07/09/2014 | CN102583216B 一种用于检测一维纳米材料力学性能的微结构 A one-dimensional micro-mechanical properties of structural materials for the detection of |
| 07/08/2014 | USRE44995 Method for producing a semiconductor component and a semiconductor component produced according to the method |
| 07/03/2014 | WO2014105718A1 Display apparatus including dual actuation axis electromechanical systems light modulators |
| 07/03/2014 | WO2014105471A1 Preventing glass particle injection during the oil fill process |
| 07/03/2014 | WO2014105147A1 Method, apparatus and system for providing metering of acceleration |
| 07/03/2014 | WO2014104892A1 A micromechanical system with a composite beam having an adjustable stiffness |
| 07/03/2014 | WO2014104163A1 Pressure-sensitive sensor |
| 07/03/2014 | WO2014102507A1 Micro-electromechanical device comprising a mobile mass that can move out-of-plane |
| 07/03/2014 | US20140183669 Resonant sensor with asymmetric gapped cantilevers |
| 07/03/2014 | US20140183014 Electric equipment having movable portion, and its manufacture |
| 07/03/2014 | US20140182377 Method, apparatus and system for providing metering of acceleration |
| 07/03/2014 | DE102005060641B4 Halbleiterdrucksensor Semiconductor pressure sensor |
| 07/02/2014 | EP2749890A1 A composite beam having an adjustable stiffness. |
| 07/02/2014 | EP2749526A1 Scanning mirror device |
| 07/02/2014 | CN203683082U 具有孔的半导体装置 The semiconductor device having a bore |
| 07/02/2014 | CN103901610A 百叶窗式mems大转角可调闪耀光栅光调制器及其阵列 Mems large angle adjustable louvered blazed grating light modulator and array |
| 07/02/2014 | CN103901609A 基于双层梳齿驱动mems大转角可动闪耀光栅光调制器 Movable blazed grating light modulator based on a large corner double comb drive mems |
| 07/02/2014 | CN103901227A 硅微谐振式加速度计 Silicon micro-resonant accelerometer |
| 07/02/2014 | CN103900753A 一种基于soi工艺的高精度硅微谐振式气压传感器 Based on silicon micro-precision technology soi resonant pressure sensor |
| 07/02/2014 | CN102792170B 物理量传感器 Physical sensors |
| 07/01/2014 | US8765512 Packaging compatible wafer level capping of MEMS devices |
| 06/26/2014 | WO2014096655A1 Microelectromechanical device possessing at least two deformable elements of different dimensions |
| 06/26/2014 | US20140175572 Mems device with multiple electrodes and fabricating method thereof |
| 06/26/2014 | US20140175571 Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region |
| 06/26/2014 | US20140175525 CMOS Integrated Moving-Gate Transducer with Silicon as a Functional Layer |
| 06/26/2014 | DE102012222426A1 Herstellungsverfahren für ein mikromechanisches Bauelement und entsprechendes mikromechanisches Bauelement Manufacturing method for a micromechanical component and corresponding micromechanical component |
| 06/25/2014 | EP2746218A1 Reducing MEMS stiction by deposition of nanoclusters |
| 06/25/2014 | EP2746217A1 Reducing MEMS stiction by introduction of a carbon barrier |
| 06/25/2014 | EP2745301A1 Routing of mems variable capacitors for rf applications |
| 06/25/2014 | CN103890932A 电子部件及其制造方法 An electronic component and its manufacturing method |
| 06/25/2014 | CN103889886A 用于施加抗粘附涂层的方法及设备 Method for applying anti-adhesion coating and equipment |
| 06/25/2014 | CN103879949A 具多重电极的微机电装置及其制作方法 MEMS device and method of making a multi-electrode |
| 06/25/2014 | CN102759720B 一种易于封装的磁场传感器 An easily encapsulated magnetic field sensors |
| 06/19/2014 | US20140169607 Integrated Microphone Package |
| 06/19/2014 | US20140167189 Reducing mems stiction by deposition of nanoclusters |
| 06/19/2014 | US20140167188 Reducing mems stiction by introduction of a carbon barrier |
| 06/18/2014 | EP2743639A1 Structure of displacement monitoring electrode |
| 06/18/2014 | DE102013111795A1 Micro-electromechanical structure i.e. out-of-plane-acceleration sensor, for use in e.g. vehicle parts, has compensation-stopper producing force and torque on testing mass for compensating force and torque produced by impact-stoppers |
| 06/18/2014 | DE102013109240A9 Mikrofluidische mischervorrichtungen und verfahren zum mischen eines fluids A microfluidic mixer devices and methods for mixing fluids of a |
| 06/18/2014 | DE102012223605A1 MEMS-Bauelement zum Erzeugen von Druckpulsen MEMS device for generating pressure pulses |
| 06/18/2014 | DE102012223016A1 Micromechanical inertial sensor has substrate with main extension plane, and two functional layers which are arranged above one another parallel to main extension plane, where seismic mass is formed in functional layers |
| 06/18/2014 | CN103869099A MEMS device having low expansion factor difference |
| 06/18/2014 | CN103864005A Reducing MEMS stiction by deposition of nanoclusters |
| 06/18/2014 | CN103864002A Mems element, electronic device, altimeter, electronic apparatus, and moving object |
| 06/18/2014 | CN103864001A Mems element, electronic device, altimeter, electronic apparatus, and moving object |
| 06/18/2014 | CN102530832B Inertia MEMS (micro-electro-mechanical system) sensor and making method thereof |
| 06/12/2014 | WO2014088021A1 Acceleration sensor |
| 06/12/2014 | WO2014088020A1 Piezoresistive mems sensor |
| 06/12/2014 | WO2014086884A1 Mems sensor for detecting environmental parameters |
| 06/12/2014 | US20140161290 Mems device and process |
| 06/12/2014 | US20140159827 Micromechanical resonator arrangement |
| 06/12/2014 | US20140158506 Mechanical switch |
| 06/12/2014 | DE10311076B4 Kapazitive Vorrichtung Capacitive device |
| 06/12/2014 | DE10310339B4 Verfahren zum Herstellen einer Halbleitervorrichtung A method of manufacturing a semiconductor device |
| 06/12/2014 | DE102012222988A1 Mikromechanische Resonatoranordnung Micromechanical resonator |
| 06/11/2014 | EP2741082A1 Sampler |
| 06/11/2014 | EP2739561A1 Coated capacitive sensor |
| 06/11/2014 | CN103858199A Electric equipment with moving part and manufacturing method thereof |
| 06/11/2014 | CN103852598A Microelectromechanical structure having low sensitivity on thermodynamic stress |
| 06/05/2014 | WO2014083799A1 Fluidic chip and waste liquid processing method for same |
| 06/05/2014 | WO2014082662A1 Light driven liquid crystal elastomer actuator |
| 06/05/2014 | US20140151823 Mems devices and methods of forming same |
| 06/05/2014 | US20140151822 Structured Gap for a MEMS Pressure Sensor |
| 06/05/2014 | US20140151237 Methods of and Apparatus for Electrochemically Fabricating Structures Interlaced Layers or Via Selective Etching and Filling of Voids |
| 06/05/2014 | DE102013111787A1 Microelectromechanical structure for out-of-plane acceleration sensor, has substrate, testing mass suspended over substrate and armature fastened on substrate, where testing mass reacts to acceleration |
| 06/04/2014 | EP2738431A1 Fluid treatment apparatus and method for treating fluid |
| 06/04/2014 | CN103843370A Piezoelectric microphone fabricated on glass |
| 06/04/2014 | CN103843089A Electrical device having movable electrode |
| 06/04/2014 | CN103842885A Mechanical layer for interferometric modulators and methods of making the same |
| 06/04/2014 | CN103840744A Light, heat, electromagnetism and vibration self-powered micro-nano sensor of Internet-of-things radio frequency transceiving assembly |
| 06/04/2014 | CN103840709A Hole-formed mixed-beam vibration and electromagnetism self-powered micro-sensor of internet of things radio frequency receiving-transmitting assembly |
| 06/04/2014 | CN103840708A Hole-formed cantilever beam vibration and electromagnetism self-powered micro-sensor of internet of things radio frequency receiving-transmitting assembly |
| 06/04/2014 | CN103840707A Cantilever beam vibration and electromagnetism self-powered microsensor of Internet-of-things radio frequency transceiving assembly |
| 06/04/2014 | CN103840706A Perforated cantilever beam vibration energy self-powered microsensor of Internet-of-things radio frequency transceiving assembly |
| 06/04/2014 | CN103840075A Miniature piezoelectric vibration energy collector and manufacturing method thereof |
| 06/04/2014 | CN102353609B MEMS fluid density sensor chip with dual Wheatstone full bridges structure and its preparation method |
| 06/03/2014 | US8742872 MEMS element, and manufacturing method of MEMS element |
| 05/30/2014 | WO2014036112A4 Electrochemically-actuated microfluidic devices |
| 05/29/2014 | US20140145553 Vibration element and electronic device |
| 05/29/2014 | US20140145551 Vibrator, manufacturing method of vibrator, electronic apparatus, and moving object |
| 05/29/2014 | US20140145276 Mems microphone and method for manufacture |
| 05/29/2014 | US20140145275 Ultrasonic transducer and method of manufacturing the same |
| 05/29/2014 | US20140145244 Mems device and process for rf and low resistance applications |
| 05/29/2014 | US20140144234 Micro-electro-mechanical device having low thermal expansion difference |
| 05/28/2014 | DE112007000263B4 Differentialmikrofon, hergestellt in Mikrofertigung Differential microphone made in micro-manufacturing |
| 05/28/2014 | DE10322523B4 Halbleiterdrucksensor mit einer Membran A semiconductor pressure sensor comprising a diaphragm |
| 05/28/2014 | DE102012221509A1 Integrated device of microphone device, has function layer which is patterned from micro-mechanical functional element, so that function elements are arranged one above other and spaced from each other |
| 05/28/2014 | DE102012220407A1 Ventilanordnung in einem Mikrofluidiksystem Valve arrangement in a microfluidic |
| 05/28/2014 | DE102012202035B4 Mikromechanisches Bauelement mit einer Membran Micromechanical component with a membrane |
| 05/28/2014 | DE102011084020B4 Sensorelement Sensor element |