Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
09/2014
09/18/2014US20140264650 Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same
09/18/2014US20140264649 Micromechanical structure and corresponding production process
09/18/2014US20140264648 MEMS Integrated Pressure Sensor Devices and Methods of Forming Same
09/18/2014US20140264647 Method of forming monolithic cmos-mems hybrid integrated, packaged structures
09/18/2014US20140264646 Microelectromechanical system and method
09/18/2014US20140264644 MEMS Method and Structure
09/18/2014DE102014204712A1 MEMS-Akustikwandler, MEMS-Mikrofon, MEMS-Mikrolautsprecher, Lautsprecher-Array und Verfahren zur Herstellung eines Akustikwandlers MEMS-acoustic transducer, the MEMS microphone, MEMS micro-speaker, the speaker array and methods for producing an acoustic transducer
09/18/2014DE102014103341A1 Halbleiterbauelemente und Verfahren zu ihrer Bildung Semiconductor devices and methods for their formation
09/17/2014EP2778743A1 Interference filter, interference filter manufacturing method, optical module, electronic apparatus, and bonded substrate
09/17/2014EP2778118A2 Integrated structure with bidirectional vertical actuation
09/16/2014US8836111 Semiconductor integrated device assembly and related manufacturing process
09/16/2014US8836053 Hybrid integrated component and method for the manufacture thereof
09/16/2014US8835207 Method of manufacturing a semiconductor integrated circuit device having a MEMS element
09/11/2014US20140252512 Methods And Apparatus For MEMS Structure Release
09/11/2014US20140252511 Mems apparatus
09/11/2014US20140252509 Mems device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress
09/11/2014US20140252508 MEMS Device with a Capping Substrate
09/11/2014US20140252506 Semi-conductor sensor fabrication
09/11/2014US20140252358 Methods and Apparatus for MEMS Devices with Increased Sensitivity
09/09/2014US8826742 Pressure sensor using MEMS resonator
09/04/2014US20140246740 Implantation of gaseous chemicals into cavities formed in intermediate dielectrics layers for subsequent thermal diffusion release
09/04/2014US20140246737 Mems vibrator, method of manufacturing mems vibrator, electronic device, and moving object
09/04/2014DE102013203656A1 Mikrofluidisches Drehventil Microfluidic rotary valve
09/04/2014DE102013101731A1 Drucksensorsystem Pressure sensor system
09/04/2014DE102010061340B4 Mehrkomponentenspritzgusssystem und Verfahren zu dessen Herstellung Multi-component injection molding system and process for its preparation
09/04/2014DE10196506B3 Herstellungsverfahren für einen Dünnfilmstrukturkörper Manufacturing method of a thin-film structure body
09/03/2014EP2771732A1 An actuator
09/02/2014CA2516724C Capillary stop
08/2014
08/28/2014WO2014130135A1 Capacitive micromachined ultrasound transducers with pressurized cavities
08/28/2014US20140239424 Cap bonding structure and method for backside absolute pressure sensors
08/28/2014US20140239423 Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
08/28/2014US20140239352 Cmos compatible silicon differential condenser microphone and method for manufacturing the same
08/28/2014US20140238828 Merged legs and semi-flexible anchoring for mems device
08/27/2014EP2769464A1 Energy harvester
08/26/2014US8816492 Method and apparatus for isolating MEMS devices from external stimuli
08/26/2014US8816453 MEMS component and a semiconductor component in a common housing having at least one access opening
08/26/2014US8813564 MEMS multi-axis gyroscope with central suspension and gimbal structure
08/21/2014WO2014126890A1 Shutter assemblies fabricated on multi-height molds
08/21/2014US20140231939 Capacitive pressure sensor and method
08/21/2014US20140230557 Sensor with vacuum-sealed cavity
08/21/2014US20140230547 Microelectromechanical Bulk Acoustic Wave Devices and Methods
08/19/2014US8809982 Robust high aspect ratio semiconductor device
08/19/2014US8809975 Semiconductor pressure sensor
08/19/2014US8809200 Method of manufacturing a structure based on anisotropic etching, and silicon substrate with etching mask
08/14/2014WO2014123862A1 Display apparatus incorporating multi-level shutters
08/14/2014US20140225206 Pressure level adjustment in a cavity of a semiconductor die
08/14/2014US20140225205 Mems component
08/14/2014US20140225204 Acoustic sensor and method for manufacturing same
08/14/2014US20140225167 Vertical electromechanical switch device and method for manufacturing the same
08/14/2014US20140224656 Micro-hydraulic device
08/14/2014US20140224017 Physical quantity sensor and electronic apparatus
08/14/2014DE112012004560T5 Mikroelektromechanische Vorrichtung mit vergrabenen leitfähigen Bereichen sowie Verfahren zum Herstellen derselben A microelectromechanical device with buried conductive regions and methods of making the same
08/13/2014CN103987653A 为mems以及nems机械结构形成枢轴的机械连接部 Mechanical coupling portion forming a pivot for mems and nems mechanical structure
08/13/2014CN102249175B 基于电子束激励脱附的纳电子器件和/或电路的制作方法 Production method based on electron beam stimulated desorption of nanoelectronic devices and / or circuits
08/13/2014CN102079502B 一种mems器件及其圆片级真空封装方法 One kind of mems devices and wafer level vacuum packaging method
08/12/2014US8804300 Method of forming a cooling device for an integrated circuit
08/07/2014WO2014120444A1 Low-voltage mems shutter assemblies
08/07/2014WO2014120206A1 Sensor having particle barrier
08/07/2014US20140217929 Stiction resistant mems device and method of operation
08/07/2014US20140217521 MEMS Device With Stress Relief Structures
08/07/2014US20140217478 Cmos ultrasonic transducers and related apparatus and methods
08/07/2014DE102013201795A1 Mikromechanisches Bauelement mit einer Membranstruktur A micromechanical component having a membrane structure
08/07/2014DE102013105803A1 Träger zur Halterung von Halbleitersubstraten und Prober zu deren Testung Carrier for supporting semiconductor substrates and prober to the testing
08/06/2014EP2762893A1 Mems resonant accelerometer
08/06/2014CN103964364A 微纳尺度静电力开关及其制造方法 Micro- and nanoscale electrostatic switch and its manufacturing method
08/06/2014CN102879607B 微机电加速度计的制造方法 Manufacturing method MEMS accelerometer
08/06/2014CN102275867B 带有部分密封壳体的半导体器件及其制造方法 Semiconductor device and manufacturing method with a portion of the seal housing
08/05/2014US8796901 Micro-electro-mechanical transducer having an insulation extension
08/05/2014US8796792 Micro-electro-mechanical system having movable element integrated into leadframe-based package
08/05/2014CA2523446C Mems actuators
07/2014
07/31/2014WO2014117067A1 Addressable actuator system
07/31/2014US20140210020 MEMS Device and Method of Manufacturing a MEMS Device
07/31/2014US20140210019 Low-cost package for integrated mems sensors
07/31/2014US20140210018 Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof
07/31/2014DE102014100722A1 MEMS-Vorrichtung und Verfahren zur Herstellung einer MEMS-Vorrichtung The MEMS device and method of manufacturing a MEMS device
07/30/2014EP2759512A2 Large area induced assembly of nanostructures
07/30/2014EP2758786A2 Systems and methods for providing microfluidic devices
07/30/2014EP2758760A2 Artificial skin and elastic strain sensor
07/30/2014EP2758335A1 Vented mems apparatus and method of manufacture
07/30/2014CN103959029A 人工皮肤及弹性应变传感器 Artificial skin and elastic strain sensor
07/30/2014CN103955056A Sma驱动的双稳态反射镜平动式光栅光调制器及其阵列 Sma-driven bistable mirrors translational grating light modulator and array
07/24/2014WO2014113320A1 Asymmetric overlap and suspended shutter structure
07/24/2014US20140203380 Chip package comprising a microphone structure and a method of manufacturing the same
07/24/2014US20140202260 Pressure sensor using mems resonator
07/24/2014DE102013200904A1 MEMS-Bauelement MEMS device
07/23/2014CN103946548A 具有可变形阀的微流体器件 The microfluidic device having a deformable valve
07/23/2014CN102633227B 一种mems惯性传感器结构压膜阻尼可调装置 One kind mems inertial sensor structure film damping adjustable devices
07/23/2014CN102025337B 谐振器 Resonator
07/22/2014US8786130 Method of forming an electromechanical power switch for controlling power to integrated circuit devices and related devices
07/17/2014US20140197904 Method for Fabricating Miniature Structures or Devices such as RF and Microwave Components
07/17/2014US20140197713 Out-of-Plane Spacer Defined Electrode
07/17/2014US20140197502 Comb MEMS Device and Method of Making a Comb MEMS Device
07/17/2014US20140197501 MEMS Device with Polymer Layer, System of a MEMS Device with a Polymer Layer, Method of Making a MEMS Device with a Polymer Layer
07/17/2014DE102014100238A1 MEMS-Vorrichtung mit Polymerschicht, System einer MEMS-Vorrichtung mit einer Polymerschicht, Verfahren zum Herstellen einer MEMS-Vorrichtung mit einer Polymerschicht MEMS device with polymer layer system of a MEMS device with a polymer layer, A method of manufacturing a MEMS device with a polymer layer
07/16/2014CN203720199U 多轴电容式加速度计 Capacitive multi-axis accelerometer
07/16/2014CN103922271A 梳状mems器件和制作梳状mems器件的方法 Comb comb mems mems devices and device production method
07/16/2014CN102342013B 高分子促动器装置 Polymer actuator means
07/15/2014US8779536 Hybrid integrated pressure sensor component
07/10/2014US20140191344 Mems process and device
07/10/2014US20140191343 Sound transducer and microphone using same
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