Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2014
11/20/2014US20140341402 Mems process and device
11/20/2014US20140340814 Mems variable capacitor with enhanced rf performance
11/20/2014US20140339659 Method of Manufacturing A Semiconductor Integrated Circuit Device Having A MEMS Element
11/20/2014US20140339658 Device comprising a spring and an element suspended thereon, and method for manufacturing same
11/20/2014US20140339657 Piezoelectric mems microphone
11/20/2014US20140339656 Mems pressure transducer assembly
11/20/2014US20140339653 Sensor chip having a micro inductor structure
11/18/2014US8891149 Microelectromechanical system (MEMS) devices with dielectric microstructure motion stopper
11/18/2014US8891148 Optical scanning device
11/18/2014US8890631 MEMS oscillator and manufacturing method thereof
11/18/2014US8887571 Vibrating micromechanical system having beam-shaped element
11/18/2014US8887568 Micromechanical system and method for building a micromechanical system
11/13/2014US20140332913 Micro-electro-mechanical system (mems) structures and design structures
11/13/2014US20140332912 Chip package and a method of manufacturing the same
11/13/2014US20140332911 Capacitive micro-machined transducer and method of manufacturing the same
11/13/2014US20140332910 Microelectromechanical device and a method of manufacturing
11/13/2014US20140332909 Integrated chip with micro-electro-mechanical system and integrated circuit mounted therein and method for manufacturing the same
11/13/2014US20140331770 Mechanical connection forming a pivot for mems and nems mechanical structures
11/11/2014US8885348 Circuit board sensor and method for producing the same
11/11/2014US8884289 Integrated mechanical device for electrical switching
11/11/2014US8883634 Package interconnects
11/11/2014US8883535 Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
11/11/2014US8883092 Recirculating fluidic network and methods for using the same
11/04/2014US8879136 Light deflector
11/04/2014US8878316 Cap side bonding structure for backside absolute pressure sensors
10/2014
10/30/2014US20140322489 Microfabricated elastomeric valve and pump systems
10/28/2014US8872112 Hybrid THz imaging detector with vertical antenna and sub-pixel suspended MEMS thermal sensor and actuator
10/28/2014US8869625 MEMS actuator/sensor
10/23/2014US20140312733 Mems vibrator, electronic apparatus, and moving object
10/23/2014US20140312437 Electronic device, integrated circuit, electronic apparatus, and moving object
10/23/2014US20140312436 Method of fabricating mems device having release etch stop layer
10/23/2014US20140312435 Mems device with stress isolation and method of fabrication
10/23/2014US20140312342 Display device
10/23/2014US20140311247 Multi-axis mems rate sensor device
10/21/2014US8866363 Electrostatic actuator having urging members with varying rigidities
10/21/2014US8866238 Hybrid integrated component and method for the manufacture thereof
10/21/2014US8865497 Planar cavity MEMS and related structures, methods of manufacture and design structures
10/16/2014US20140306301 Silicon substrate mems device
10/16/2014US20140306299 Microphone
10/14/2014US8860283 Electrostatic actuator of a mobile structure with improved relaxation of trapped charges
10/14/2014US8860154 CMOS compatible silicon differential condenser microphone and method for manufacturing the same
10/14/2014US8859879 Energy harvesting using RF MEMS
10/09/2014WO2014165441A1 Temperature drift compensation of mems resonators
10/09/2014WO2014165373A1 Microfluidic products with controlled fluid flow
10/09/2014WO2014164225A1 Display apparatus with narrow gap electrostatic actuators
10/09/2014WO2014163729A2 Acoustic bandgap structures for integration of mems resonators
10/09/2014US20140300247 Reactive ionic liquid, and ion-immobilized metal oxide particle, ion-immobilized elastomer, and transducer using same
10/09/2014US20140299967 Electronic device structure and method of making electronic devices and integrated circuits using grayscale technology and multilayer thin-film composites
10/09/2014US20140299947 Inertial angular sensor of balanced mems type and method for balancing such a sensor
10/09/2014DE112012005792T5 Kapazitiver Sensor Capacitive sensor
10/09/2014DE102013213071B3 Herstellungsverfahren für ein mikromechanisches Bauteil Manufacturing method for a micromechanical component
10/09/2014DE102013205158A1 Mikromechanische Sensorvorrichtung und entsprechendes Betriebsverfahren Micromechanical sensor device and corresponding operating method
10/08/2014EP2786193A2 Mems scanning micromirror
10/08/2014EP2786019A1 Microfluidic device with deformable valve
10/08/2014EP2785633A1 Device and method for generating a second temperature variation from a first temperature variation
10/07/2014US8853850 MEMS packaging scheme using dielectric fence
10/07/2014US8853804 Tilting actuator with close-gap electrodes
10/07/2014US8853803 Micro-electromechanical system devices
10/07/2014US8853797 MEMS devices and fabrication thereof
10/07/2014US8852529 Particle processing device using centrifugal force
10/07/2014US8850891 Micromechanical component and manufacturing method for a micromechanical component
10/07/2014US8850890 Inertial sensor and method for manufacturing an inertial sensor
10/02/2014WO2014159552A1 Mems acoustic transducer with silicon nitride backplate and silicon sacrificial layer
10/02/2014WO2014158180A1 Multigate resonant channel transistor
10/02/2014WO2014156119A1 Physical quantity sensor
10/02/2014WO2014156060A1 Mirror array
10/02/2014WO2014155448A1 Mirror device
10/02/2014WO2014155343A1 Peristaltic pump microfluidic separator
10/02/2014US20140292429 Multigate resonant channel transistor
10/02/2014US20140291787 Structure of mems electroacoustic transducer
10/02/2014US20140291785 Microphone
10/02/2014US20140291780 Mems device and method of manufacturing the same
10/02/2014US20140291779 Semiconductor Devices and Methods for Manufacturing Semiconductor Devices
10/02/2014US20140290375 Micromechanical structure having a deformable membrane and a protection against strong deformations
09/2014
09/30/2014US8846183 Microfabricated elastomeric valve and pump systems
09/25/2014WO2014150269A1 Electromechanical systems device with segmented electrodes
09/25/2014WO2014149619A1 Integrated elevated aperture layer and display apparatus
09/25/2014US20140285060 Electrical component and method of manufacturing the same
09/25/2014US20140284730 Mems device and method of manufacturing the same
09/25/2014US20140284603 Composite micro-electro-mechanical-system apparatus and manufacturing method thereof
09/25/2014US20140284188 Mems device and method of manufacturing the same
09/23/2014US8842353 Microstructure and method of manufacturing the same
09/23/2014US8841737 MEMS device and process
09/23/2014US8841736 Integrated circuit with MEMS element and manufacturing method thereof
09/23/2014US8841156 Method for the production of micro-electromechanical semiconductor component
09/23/2014US8840850 Flow channel structure and method of manufacturing same
09/23/2014US8839512 Oblique parts or surfaces
09/18/2014WO2014144925A1 Arcuate motion control in electrostatic actuators
09/18/2014WO2014141508A1 Capacitance type sensor, acoustic sensor, and microphone
09/18/2014WO2014141507A1 Capacitive sensor, acoustic sensor and microphone
09/18/2014WO2014141258A1 A microelectromechanical system and method
09/18/2014US20140270271 MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer
09/18/2014US20140268482 Actuator plate partitioning and control devices and methods
09/18/2014US20140266484 Microelectromechanical resonators
09/18/2014US20140266421 Nanoscale electromechanical parametric amplifier
09/18/2014US20140264662 MEMS Integrated Pressure Sensor and Microphone Devices and Methods of Forming Same
09/18/2014US20140264655 Surface roughening to reduce adhesion in an integrated mems device
09/18/2014US20140264653 MEMS Pressure Sensor and Microphone Devices Having Through-Vias and Methods of Forming Same
09/18/2014US20140264652 Acoustic sensor with integrated programmable electronic interface
09/18/2014US20140264651 Semiconductor Devices and Methods of Forming Thereof
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