| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/14/2015 | CN102602877B Mems器件 Mems devices |
| 01/14/2015 | CN102602876B Mems器件及其制造方法 Mems device and manufacturing method thereof |
| 01/14/2015 | CN102538834B 同平面传感器与制作方法 Flat sensor and method of making same |
| 01/13/2015 | US8933769 Three-dimensional microstructures having a re-entrant shape aperture and methods of formation |
| 01/13/2015 | US8933596 Micro rotary machine and methods for using same |
| 01/13/2015 | US8932893 Method of fabricating MEMS device having release etch stop layer |
| 01/08/2015 | WO2015002883A1 Shutter assemblies incorporating out-of-plane motion restriction features |
| 01/08/2015 | WO2015002016A1 Display device |
| 01/08/2015 | WO2015001813A1 Compound sensor |
| 01/08/2015 | WO2015001325A1 Mems device and process |
| 01/08/2015 | US20150009778 Electromechanical transducer |
| 01/08/2015 | US20150008788 Low temperature ceramic microelectromechanical structures |
| 01/08/2015 | US20150008545 Technique for forming a mems device |
| 01/08/2015 | US20150008543 Mems capacitive pressure sensors and fabrication method thereof |
| 01/08/2015 | US20150008542 Micromechanical component and manufacturing method for a micromechanical component |
| 01/08/2015 | US20150008541 Mems pressure sensors and fabrication method thereof |
| 01/08/2015 | US20150008540 Mems-cmos integrated devices, and methods of integration at wafer level |
| 01/08/2015 | DE112012006138T5 Krümmungsvariabler Spiegel , krümmungsvariable Einheit und Herstellungsverfahren des krümmungsvariablen Spiegels Variable curvature mirror curvature variable unit and manufacturing method of the variable curvature mirror |
| 01/08/2015 | DE102013213065A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 01/08/2015 | DE102013212102A1 Mikromechanisches Bauteil, Mikrospiegelvorrichtung und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, micro-mirror device and manufacturing method for a micromechanical component |
| 01/08/2015 | DE102013212095A1 Mikro-elektromechanischer Reflektor und Verfahren zum Herstellen eines mikro-elektromechanischen Reflektors Micro-electro-mechanical reflector and method of manufacturing a micro-electro-mechanical reflector |
| 01/08/2015 | DE102012222426B4 Herstellungsverfahren für ein mikromechanisches Bauelement Manufacturing method for a micromechanical component |
| 01/08/2015 | DE102010029072B4 Mikroelektromechanisches Translationsschwingersystem Micro-electromechanical transducer translation system |
| 01/08/2015 | DE102005004878B4 Mikromechanischer kapazitiver Drucksensor und entsprechendes Herstellungsverfahren The micromechanical capacitive pressure sensor and method of manufacture |
| 01/07/2015 | CN104272167A 光学反射元件 Optical reflective element |
| 01/07/2015 | CN102874735B 双材料微悬臂梁、电磁辐射探测器以及探测方法 Bimaterial microcantilever, electromagnetic radiation detectors and detection methods |
| 01/06/2015 | US8928099 Micromechanical component and method for the manufacture of same |
| 01/06/2015 | US8928042 Structure having plural conductive regions and process for production thereof |
| 01/06/2015 | US8927311 MEMS device having variable gap width and method of manufacture |
| 01/06/2015 | US8926517 Flexible micro-electro-mechanical transducer |
| 01/01/2015 | US20150001987 Electromechanical transducer and method for fabricating the same |
| 01/01/2015 | US20150001653 MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it |
| 01/01/2015 | US20150001651 Mems device having a suspended diaphragm and manufacturing process thereof |
| 01/01/2015 | US20150001648 Mems microphone |
| 01/01/2015 | US20150001647 MEMS Microphone with Low Pressure Region Between Diaphragm and Counter Electrode |
| 01/01/2015 | US20150001646 Pre-mold for a microphone assembly and method of producing the same |
| 01/01/2015 | US20150001539 Flexible high-voltage thin film transistors |
| 12/31/2014 | CN102369153B 微可动元件阵列及通信设备 Micro movable element array and communications equipment |
| 12/30/2014 | US8922870 Electrical routing |
| 12/30/2014 | US8922862 Magnetic force drive device, optical scanning device, and image display device |
| 12/30/2014 | US8921974 Semiconductor manufacturing and semiconductor device with semiconductor structure |
| 12/30/2014 | US8921958 MEMS element |
| 12/30/2014 | US8921954 Method of providing a semiconductor structure with forming a sacrificial structure |
| 12/30/2014 | US8921953 Method for MEMS device fabrication and device formed |
| 12/30/2014 | US8921952 Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof |
| 12/30/2014 | US8921951 MEMS device and manufacturing method thereof |
| 12/30/2014 | US8921145 Hybrid MEMS bump design to prevent in-process and in-use stiction |
| 12/30/2014 | US8921144 Planar cavity MEMS and related structures, methods of manufacture and design structures |
| 12/30/2014 | CA2600081C Mems actuators and switches |
| 12/25/2014 | US20140375168 Capacitive micro-machined transducer and method of manufacturing the same |
| 12/25/2014 | US20140374857 Cantilever beam structure where stress is matched and method of manufacturing the same |
| 12/25/2014 | US20140374856 Apparatus and Method for Preventing Stiction of MEMS Devices Encapsulated by Active Circuitry |
| 12/25/2014 | US20140374855 Pressure sensor and method of packaging same |
| 12/25/2014 | US20140374853 Component including means for reducing assembly-related mechanical stresses and methods for manufacturing same |
| 12/25/2014 | US20140374851 Mems device and method for fabricating mems devices |
| 12/25/2014 | US20140374849 Angular rate sensor with quadrature error compensation |
| 12/25/2014 | US20140374847 Packaging method for mems devices |
| 12/24/2014 | CN104236766A 封装应力与温漂自补偿的双悬浮式力敏传感器芯片及制备方法 Since the compensation package stress and temperature drift dual suspension force sensor chip and preparation method |
| 12/24/2014 | CN104229728A 一种基于机械张紧方式的柔性衬底薄膜微加工方法及机械张紧装置和使用方法 A flexible substrate film microfabrication and mechanical tensioning device and method of use based on the mechanical tensioning mode |
| 12/24/2014 | CN104229726A 应力匹配的悬臂梁结构及其制造方法 Cantilever structure and manufacturing method stresses matches |
| 12/23/2014 | US8917099 Anti-capture method and apparatus for micromachined devices |
| 12/23/2014 | US8916944 Stress-sensitive micro-electromechanical device and use thereof |
| 12/23/2014 | US8916408 Leadframe-based premolded package having air channel for microelectromechanical system (MEMS) device |
| 12/23/2014 | US8915158 Methods and systems for micro transmissions |
| 12/23/2014 | US8915148 Motion conversion system |
| 12/18/2014 | US20140368760 Touch panel and electronic device |
| 12/18/2014 | US20140367811 Capacitance type sensor and method of manufacturing the same |
| 12/18/2014 | US20140367810 Open Cavity Substrate in a MEMS Microphone Assembly and Method of Manufacturing the Same |
| 12/18/2014 | US20140367807 Electric device and method of manufacturing the same |
| 12/18/2014 | US20140367806 Functional element, electronic apparatus, and moving object |
| 12/17/2014 | CN102507978B 基于e指数半导体器件的嵌入式高灵敏度微加速度计 Embedded high sensitivity micro-accelerometer-based e index of semiconductor devices |
| 12/17/2014 | CN102295265B 平面腔体微机电系统及相关结构、制造和设计结构的方法 Methods planar cavity micro-electromechanical systems and related structures, manufacturing and design structure |
| 12/16/2014 | US8913766 Acoustic transducers with perforated membranes |
| 12/11/2014 | US20140361388 Capacitive sensing structure with embedded acoustic channels |
| 12/10/2014 | CN204008696U 一种柔性电容式加速度传感器 A flexible capacitive accelerometer |
| 12/10/2014 | CN104204870A 曲率可变反射镜、曲率可变单元以及曲率可变反射镜的制造方法 Curvature variable mirror, the curvature and the curvature of the variable variable unit manufacturing method mirrors |
| 12/10/2014 | CN104203806A 用于微机电的测量变换器的膜片装置和用于制造膜片装置的方法 Diaphragm means for measuring micro-electromechanical transducer and a method for manufacturing a membrane device |
| 12/10/2014 | CN104203805A 用于补偿抖动的微机电系统装置和设备 For compensating for jitter MEMS devices and equipment |
| 12/10/2014 | CN102387983B 微机械结构以及用于调整微机械结构的工作间隙宽度的方法 Micro-mechanical structure and a method for adjusting the working gap width micromechanical structures |
| 12/10/2014 | CN101960718B 提供无边缘纳米管谐振器阵列的装置、方法、和计算机程序产品 Provided without edge nanotube resonator array apparatus, method, and computer program products |
| 12/09/2014 | US8907434 MEMS inertial sensor and method for manufacturing the same |
| 12/09/2014 | US8906730 Method of forming membranes with modified stress characteristics |
| 12/09/2014 | US8906627 Apparatuses and methods for manipulating droplets |
| 12/04/2014 | US20140355381 Computation devices and artificial neurons based on nanoelectromechanical systems |
| 12/04/2014 | US20140353780 Detection structure for a mems acoustic transducer with improved robustness to deformation |
| 12/04/2014 | US20140353779 Mems microphone and electronic equipment having the mems microphone |
| 12/04/2014 | US20140353776 MEMS Structure with Adaptable Inter-Substrate Bond |
| 12/04/2014 | US20140353775 Wafer-level packaging of integrated devices, and manufacturing method thereof |
| 12/04/2014 | US20140353773 Method for forming a suspended membrane |
| 12/04/2014 | US20140353772 Microelectronic packages including patterned die attach material and methods for the fabrication thereof |
| 12/02/2014 | US8901683 Micro electro mechanical system (MEMS) microphone and fabrication method thereof |
| 12/02/2014 | US8901682 Acoustic transducers with perforated membranes |
| 12/02/2014 | US8901681 Method and apparatus for attachment of MEMS devices |
| 12/02/2014 | US8901538 Nano resonator and manufacturing method thereof |
| 12/02/2014 | US8900695 Durable conformal wear-resistant carbon-doped metal oxide-comprising coating |
| 11/27/2014 | US20140347953 Microfluidic free interface diffusion techniques |
| 11/27/2014 | US20140346621 Mems backplate, mems microphone comprising a mems backplate and method for manufacturing a mems microphone |
| 11/27/2014 | US20140346620 Mems microphone with reduced parasitic capacitance |
| 11/27/2014 | US20140345380 Active lateral force stiction self-recovery for microelectromechanical systems devices |
| 11/25/2014 | US8895339 Reducing MEMS stiction by introduction of a carbon barrier |